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CN105819705B - A kind of sunlight controlling coated glass and its preparation method and application - Google Patents

A kind of sunlight controlling coated glass and its preparation method and application Download PDF

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Publication number
CN105819705B
CN105819705B CN201610144882.8A CN201610144882A CN105819705B CN 105819705 B CN105819705 B CN 105819705B CN 201610144882 A CN201610144882 A CN 201610144882A CN 105819705 B CN105819705 B CN 105819705B
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layer
film layer
glass
film
dielectric
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CN105819705A (en
Inventor
董清世
周枫
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Xinyi Glass (Jiangsu) Co., Ltd
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Xinyi Energy Saving Glass (wuhu) Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3639Multilayers containing at least two functional metal layers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366Low-emissivity or solar control coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/154Deposition methods from the vapour phase by sputtering
    • C03C2218/156Deposition methods from the vapour phase by sputtering by magnetron sputtering

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The present invention provides a kind of sunlight controlling coated glass and its preparation method and application.The glass includes glass substrate and functional film layer, and the glass substrate has opposite two sides;The functional film layer includes from glass substrate successively the first dielectric layer, the second dielectric layer, the first reflecting layer, third dielectric layer, the second reflecting layer and the 4th dielectric layer made of layer by layer deposition outward.Appearance of the present invention shows green shape, not only has good aesthetic effect, but also enrich the color of sunlight controlling coated glass, therefore can satisfy demand of the people to glass colour.

Description

A kind of sunlight controlling coated glass and its preparation method and application
Technical field
The invention belongs to glass technology fields, and in particular to a kind of sunlight controlling coated glass and preparation method thereof and answer With.
Background technique
According to standard GB/T/T 18915.1-2013 definition, sunlight controlling coated glass is a kind of pair of wave-length coverage The sunlight of 350nm~1800nm has the coated glass of certain control action.Specifically, this glass have it is good every Hot property can effectively shield the solar radiant energy entered the room, avoid warming up under conditions of guaranteeing that indoor lighting is soft Room effect saves the energy consumption of room temperature lowering air-conditioning.Since the film plating layer of sunlight controlling coated glass has single plane fluoroscopy, Therefore also known as single-lens reflex camera glass.
The membrane system of existing sunlight controlling coated glass is substantially by SiNxThe single layer structure that film layer is constituted, or be SiNx+ NiCr+SiNxThe three-decker that film layer or SiNx+Cr+SiNx film layer are constituted.This conventional structure, design is simple, made Standby membrane system color is generally grey or pewter, and color is single and is difficult to realize other colors.In modern architectural design, Safety problem is considered in passageway for fire apparatus, often uses monolithic glass, and transition portion of the part of interlayer as upper and lower floor is right Performance requirement is not that very strictly, in order to save cost, can also select solar control film glass.Debugging green membrane system sunlight When controlling coated glass, green glass will use to realize, this has resulted in the cost increase of former piece, uses common float glass now Or ultra-clear glasses are debugged, although can be unable to satisfy with save the cost, the color diversity of solar control film.
Summary of the invention
The purpose of the embodiment of the present invention is to develop a kind of sunlight controlling coated glass and preparation method thereof, existing to solve There are the color diverse problems that cannot achieve sunlight controlling coated glass in technology.
A further object for the embodiment of the present invention is to provide the application of the sunlight controlling coated glass.
In order to achieve the above-mentioned object of the invention, the technical solution of the embodiment of the present invention is as follows:
A kind of sunlight controlling coated glass, including glass substrate and functional film layer, the glass substrate have opposite two Face;The functional film layer includes that successively the first dielectric layer made of layer by layer deposition, the second electricity are situated between outward from the glass substrate Matter layer, the first reflecting layer, third dielectric, the second reflecting layer and the 4th dielectric layer;
Wherein, first dielectric layer is SiNxFilm layer or SiNxOyFilm layer;Second dielectric layer is ZnAlOxFilm Layer or ZnSnOxFilm layer;First reflecting layer is NiCr film layer, NiCrOxFilm layer, CrNxAny layer in film layer;The third Dielectric layer is ZnAlO film layer, ZnSnOxFilm layer, SiNxAny layer in film layer;Second reflecting layer be NiCr film layer, NiCrOxFilm layer, CrNxAny layer in film layer;4th dielectric layer is SiNxFilm layer, ZnAlOxFilm layer or ZnSnOxFilm layer With SiNxAny layer in double film layers that film layer is constituted.
And a kind of manufacturing method of sunlight controlling coated glass as described above, include the following steps:
Step S01, glass substrate is surface-treated;
Step S02, the first dielectric layer, the second dielectric layer, first are sequentially depositing on the glass baseplate surface instead Penetrate layer, third dielectric, the second reflecting layer and the 4th dielectric layer.
And sunlight controlling coated glass as described above answering in building doors and windows, building curtain wall and interior decoration With.
Conventional solar control film is substituted using six layers of film plating layer in sunlight controlling coated glass in above-described embodiment System, film plating layer and glass substrate binding force are strong, and film plating layer is fine and close, uniform, and film layer scratch resistance capability is strong, and appearance shows green Shape not only has good aesthetic effect, but also enriches the color of sunlight controlling coated glass, meets people to glass colour Demand.
In above-described embodiment, in the manufacturing process of sunlight controlling coated glass, using online photometer real-time measurement film layer Color parameter, and the adjustment and optimization of thicknesses of layers are carried out, make the glass of production while ensureing excellent film quality, meets Demand of the people to sunlight controlling coated glass.Simultaneously as production technology is advanced, film plating layer and glass substrate binding force are strong, Film plating layer is fine and close, uniform, and film layer scratch resistance capability is strong, and product yield is high, ensure that the machinability of sunlight controlling coated glass Energy and service performance.
The sunlight controlling coated glass of above-described embodiment is applied to building doors and windows, building curtain wall and interior decoration etc., can Substantially reduce production cost and machinability.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples, in attached drawing:
Fig. 1 is the structural schematic diagram of sunlight controlling coated glass in the embodiment of the present invention;
Fig. 2 (a), 2 (b), 2 (c) are the curve of spectrum schematic diagrames of the sunlight controlling coated glass of the embodiment of the present invention 1;Its In, Fig. 2 (a) is the curve of spectrum of glass surface reflectivity, and Fig. 2 (b) is the curve of spectrum of coated surface reflectivity, and Fig. 2 (c) is visible Light transmission rate;
Fig. 3 (a), 3 (b), 3 (c) are the curve of spectrum schematic diagrames of the sunlight controlling coated glass of the embodiment of the present invention 2;Its In, Fig. 3 (a) is the curve of spectrum of glass surface reflectivity, and Fig. 3 (b) is the curve of spectrum of coated surface reflectivity, and Fig. 3 (c) is visible Light transmission rate;
Fig. 4 (a), 4 (b), 4 (c) are the curve of spectrum signals of the Green Sunshine control coated glass of the embodiment of the present invention 3 Figure;Wherein, Fig. 4 (a) is the curve of spectrum of glass surface reflectivity, and Fig. 4 (b) is the curve of spectrum of coated surface reflectivity, Fig. 4 (c) For visible light transmittance;
Fig. 5 (a), 5 (b), 5 (c) are the curve of spectrum signals of the Green Sunshine control coated glass of the embodiment of the present invention 4 Figure;Wherein, Fig. 5 (a) is the curve of spectrum of glass surface reflectivity, and Fig. 5 (b) is the curve of spectrum of coated surface reflectivity, Fig. 5 (c) For visible light transmittance;
Fig. 6 (a), 6 (b), 6 (c) are the curve of spectrum schematic diagrames of the sunlight controlling coated glass of the embodiment of the present invention 5;Its In, Fig. 6 (a) is the curve of spectrum of glass surface reflectivity, and Fig. 6 (b) is the curve of spectrum of coated surface reflectivity, and Fig. 6 (c) is visible Light transmission rate;
Fig. 7 is the flow diagram of the preparation method of sunlight controlling coated glass of the embodiment of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.
Present example provides a kind of sunlight controlling coated glass, which includes glass substrate 1 With functional film layer 2.
Wherein, in any embodiment, glass substrate 1 is made of float glass, and glass substrate 1 has mutually contradictory two Face.
Preferably, float glass with a thickness of 3~19mm.
It deposits to form functional film layer 2 from a surface of the glass substrate 1.
In any embodiment, the functional film layer 2 includes at least six film layer structures, and each film layer structure successively sinks Product specially includes from the surface of glass substrate 1 successively the first dielectric layer 21, the second dielectric made of layer by layer deposition outward The 22, first reflecting layer 23 of layer, third dielectric 24, the second reflecting layer 25 and the 4th dielectric layer 26.
Specifically, the film layer structure of the sunlight controlling coated glass of this implementation are as follows: 1/ first dielectric layer 21/ of glass substrate The 4th dielectric layer 26 of second 22/ first reflecting layer of dielectric layer, 23/ 24/ second reflecting layer 25/ of third dielectric.
Preferably, above-mentioned first dielectric layer 21 of the present embodiment is SiNxFilm layer or SiNxOyFilm layer;Second electricity is situated between Matter layer 22 is ZnAlOxFilm layer or ZnSnOxFilm layer;First reflecting layer 23 is NiCr film layer, NiCrOxFilm layer, CrNxIn film layer Any layer;Third dielectric layer 24 is ZnAlO film layer, ZnSnOxFilm layer, SiNxAny layer in film layer;Second reflecting layer 25 is NiCr film layer, NiCrOxFilm layer, CrNxAny layer in film layer;4th dielectric layer 26 is SiNxFilm layer, ZnAlOxFilm layer or ZnSnOxFilm layer and SiNxAny layer in double film layers that film layer is constituted.
Preferably, it is 38.0 that the thickness of above-mentioned each functional film layer of the present embodiment, which is respectively the first dielectric layer 21, ~45.5nm;Second dielectric layer 22 is 37.3~57.0nm;First reflecting layer 23 is 3.3~7.3nm;Third dielectric layer 24 For 29.8~48.4nm;Second reflecting layer 25 is 2.8~7.6nm;4th dielectric layer 26 is 41.7~58.5nm.
Preferably, the sunlight controlling coated glass that the embodiment of the present invention obtains is by heat treatment (namely tempering Processing) afterwards color be green.
The concrete operations of tempering processing are as follows: sunlight controlling coated glass is placed in annealing furnace, the heating temperature of coated surface Degree is 680~690 DEG C, and the heating temperature of Float Glass Surface is low compared with coated surface temperature, is 670~680 DEG C, when tempering is handled Between be 410~420s, can be obtained sunlight controlling coated glass.
It is handled by tempering, each film layer for the sunlight controlling coated glass that the embodiment of the present invention obtains organically is combined one It rises, the processability of glass is further improved.
The effect of each film layer is as follows:
First dielectric layer 21 is located between glass substrate 1 and the second dielectric layer 22, the SiN of this layerxOr SiNxOy, The Na in glass substrate 1 can be prevented in the embodiment of the present invention+It is permeated into film layer, increases the suction between film layer and glass substrate Attached power improves physical and chemical properties, controls the optical property and color of membrane system;
Second dielectric layer 22 is between the first reflecting layer 23 and the first dielectric layer 21, the ZnAlO of this layerxOr ZnSnOx, have the function of the optical property and color for improving physical and chemical properties, controlling membrane system.
First reflecting layer 23 is between the second dielectric layer 22 and third dielectric layer 24, and the NiCr of this layer is in the present invention Have the function of controlling the optical property and color of membrane system in embodiment.
Third dielectric layer 24 is between the first reflecting layer 23 and the second reflecting layer 25, ZnAlO, ZnSnO in the layerx、 SiNxAny layer, have the function of control membrane system optical property and color.
Second reflecting layer 25 is between third dielectric layer 24 and the 4th dielectric layer 26, NiCr, NiCrO in the layerx、 CrNxAny layer, have the function of control membrane system optical property and color.
4th dielectric layer 26 is located on the second reflecting layer 25, SiN in the layerx、ZnAlOxOr ZnSnOxWith SiNxIt constitutes Mixed structure any layer, have and protect entire membrane structure, improve physical and chemical properties, control membrane system optical property and The effect of color.
Above layers combine in order, to ensure the overall performance of sunlight controlling coated glass, can be realized membrane system The diversity of color.
Correspondingly, on the basis of sunlight controlling coated glass described above, the embodiment of the invention also provides this hairs A kind of preparation method of bright embodiment sunlight controlling coated glass.As the preferred embodiment of the present invention, the solar control coated glass glass The preparation method of glass includes the following steps:
Step S01: float glass is cleaned in pre-treatment, using cleaned float glass as glass substrate, and will be described clear Float glass after washing is sent into vacuum chamber, keeps vacuum degree in vacuum chamber 8 × 10-6Mbar or more;
Step S02, film deposition is handled, and control sputtering vacuum degree is 2 × 10-3Mbar~5 × 10-3Mbar, described floating It is sequentially depositing the film layer of following thickness on method glass substrate: the first dielectric layer of 38.0~45.5nm, 37.3~57.0nm Second dielectric layer, the first reflecting layer of 3.3~7.3nm, the third dielectric layer of 29.8~48.4nm, 2.8~7.6nm 4th dielectric layer in two reflecting layer and 41.7~58.5nm.
Specifically, in above-mentioned steps S01, float glass is cleaned using Benteler cleaning machine.
Specifically, step S02 is during sputter coating, using the magnetron sputtering of that company of German Feng Adeng production The vacuum degree of film device control sputtering, and should be noted that the adjustment of thicknesses of layers, it may be used at line photometer measurement Film color Parameter, and the adjustment of thicknesses of layers is carried out, keep color parameter and green close.
Specifically, film deposition treated glass in above-mentioned steps S02, Ying Caiyong concentration be 1mol/L HCl solution and Concentration is 1mol/L NaOH solution as maceration extract, according to " GB/T 18915.1-2013 coated glass part 1 sunlight controls Coated glass " detection film deposition treated glass acid resistance and alkaline resistance properties.
At the same time, also using the tests such as bench photometer, grinder, U4100 UV, visible light infrared spectrophotometer point Analyse instrument test obtain sunlight controlling coated glass wearability and glass surface reflectivity, film surface reflectivity and penetrate spectrum.
It should be noted that determining the core of product property after each layer structure determination of sputtering target material and plated film Center portion point is exactly that the thickness of each layer controls each thickness degree, be finally reached different effects that is, by adjusting coating process.This Shen In a kind of preferred embodiment please, the first dielectric layer with a thickness of 38.0~45.5nm, the second dielectric layer with a thickness of 37.3 ~57.0nm, the first reflecting layer with a thickness of 3.3~7.3nm, third dielectric layer it is anti-with a thickness of 29.8~48.4nm, second Penetrate layer with a thickness of 2.8~7.6nm, the 4th dielectric layer with a thickness of 41.7~58.5nm.
Correspondingly, the embodiment of the present invention preparation sunlight controlling coated glass, can be applied to building doors and windows, building curtain wall with And in interior decoration.Certainly, the sunlight controlling coated glass of preparation of the embodiment of the present invention can be applied in except above-mentioned application is led Other field except domain, cited application only play citing.
Sunlight controlling coated glass provided in an embodiment of the present invention be used for above-mentioned field when, can substantially reduce production cost with And machinability.This is mainly due to float glass used in the embodiment of the present invention (also referred to as white glass) can effectively avoid it is conventional The problems such as flatness and fragment are difficult to control after green glass tempering.
Illustrated the present invention below by way of multiple embodiments embodiment sunlight controlling coated glass principle, effect with And the effect of reaching.
Instrument and equipment involved in following each specific implementation demonstration examples are as follows: VAAT GC330H filming equipment, Benteler are clear Washing machine, on-line checking photometer, Datacolar CHECK II (portable colour photometer), ColorI5 transmittance tester, U 4100 (UV, visible light infrared spectrophotometers), BTA-5000 type abrasion wear test machine.
Embodiment 1
A kind of sunlight controlling coated glass and preparation method thereof.Wherein, sunlight controlling coated glass include glass substrate and It is deposited on the functional film layer of glass baseplate surface;The functional film layer include at least successively from the outside layer by layer deposition of glass substrate and At the first dielectric layer, the second dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and Four dielectric layers;Wherein, the zinc oxide that the first dielectric layer is 43.9nm silicon nitride film layer, the second dielectric layer are 42.4nm Zinc oxide film that nichrome film layer that aluminum membranous layer, the first reflecting layer are 4.9nm, third dielectric layer are 33.7nm, second The silicon nitride film layer that nichrome film layer that reflecting layer is 5.3nm, the 4th dielectric layer are 52.5nm;The glass substrate is The float glass of 6mm.
The preparation method of the sunlight controlling coated glass includes the following steps:
1) pre-treatment cleans float glass using Benteler cleaning machine, using cleaned float glass as glass base Plate, and the float glass after the cleaning is sent into vacuum chamber, keep vacuum degree in vacuum chamber 8 × 10-6Mbar or more.
2) film deposition is handled, and the first dielectric layer, the second electricity are sequentially depositing on surface treated glass substrate Dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and the 4th dielectric layer.It is specific as follows:
Use argon gas and nitrogen for working gas, AC power source sputtering rotates sial target, on the glass substrate magnetron sputtering Silicon nitride film layer, with a thickness of 43.9nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1:1.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, magnetic control splashes on silicon nitride film layer Zinc oxide aluminum film layer is penetrated, sputtering is Zn:Al=98:2, the flow of argon gas and oxygen with a thickness of 42.4nm, the mass ratio of zinc-aluminium target Than for 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 4.9nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, the magnetic control in nichrome film layer Sputtering zinc oxide aluminum membranous layer, sputtering are Zn:Al=98:2, the stream of argon gas and oxygen with a thickness of 33.7nm, the mass ratio of zinc-aluminium target Amount is than being 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 5.3nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and nitrogen for working gas, AC power source sputtering rotation sial target, the magnetic control in nichrome film layer Sputtered silicon nitride film layer, with a thickness of 52.5nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1: 1。
After above-mentioned steps, the present embodiment product is measured using on-line checking photometer, Datacolar CHECK II Appearance color, meanwhile, to this example use glass substrate carry out it is identical test compare, concrete outcome is as shown in table 1.It adopts The curve of spectrum is measured with online detection light degree meter, the obtained curve of spectrum such as attached drawing 2 (a), shown in 2 (b), 2 (c).
On the basis of the sunlight controlling coated glass that embodiment 1 obtains, it is heated, i.e., tempering is handled, Specially coated surface heating temperature is 680 DEG C, and Float Glass Surface heating temperature is 670 DEG C, heating time 410s.And it uses Identical method carries out color detection to the glass after heat treatment, and glass face color is shown in green as the result is shown.
Embodiment 2
A kind of sunlight controlling coated glass and preparation method thereof.Wherein, sunlight controlling coated glass include glass substrate and It is deposited on the functional film layer of glass baseplate surface;The functional film layer include at least successively from the outside layer by layer deposition of glass substrate and At the first dielectric layer, the second dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and Four dielectric layers;Wherein, the zinc oxide that the first dielectric layer is 38.0nm silicon nitride film layer, the second dielectric layer are 57.0nm Zinc oxide film that nichrome film layer that aluminum membranous layer, the first reflecting layer are 5.5nm, third dielectric layer are 34.7nm, second The silicon nitride film layer that nichrome film layer that reflecting layer is 4.7nm, the 4th dielectric layer are 41.7nm;The glass substrate is The float glass of 10mm.
The preparation method of the sunlight controlling coated glass includes the following steps:
1) pre-treatment cleans float glass using Benteler cleaning machine, using cleaned float glass as glass base Plate, and the float glass after the cleaning is sent into vacuum chamber, keep vacuum degree in vacuum chamber 8 × 10-6Mbar or more.
2) film deposition is handled, and the first dielectric layer, the second electricity are sequentially depositing on surface treated glass substrate Dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and the 4th dielectric layer.It is specific as follows:
Use argon gas and nitrogen for working gas, AC power source sputtering rotates sial target, on the glass substrate magnetron sputtering Silicon nitride film layer, with a thickness of 38.0nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1;1.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, magnetic control splashes on silicon nitride film layer Zinc oxide aluminum film layer is penetrated, sputtering is Zn:Al=98:2, the flow of argon gas and oxygen with a thickness of 57.0nm, the mass ratio of zinc-aluminium target Than for 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 5.5nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, the magnetic control in nichrome film layer Sputtering zinc oxide aluminum membranous layer, sputtering are Zn:Al=98:2, the stream of argon gas and oxygen with a thickness of 34.7nm, the mass ratio of zinc-aluminium target Amount is than being 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 4.7nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and nitrogen for working gas, AC power source sputtering rotation sial target, the magnetic control in nichrome film layer Sputtered silicon nitride film layer, with a thickness of 41.7nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1: 1。
After above-mentioned steps, the present embodiment product is measured using on-line checking photometer, Datacolar CHECK II Appearance color, meanwhile, to this example use glass substrate carry out it is identical test compare, concrete outcome is as shown in table 1.It adopts The curve of spectrum is measured with online detection light degree meter, the obtained curve of spectrum such as attached drawing 3 (a), shown in 3 (b), 3 (c).
On the basis of the sunlight controlling coated glass that embodiment 2 obtains, it is heated, i.e., tempering is handled, Specially coated surface heating temperature is 690 DEG C, and Float Glass Surface heating temperature is 680 DEG C, heating time 420s.And it uses Identical method carries out color detection to the glass after heat treatment, and glass face color is shown in green as the result is shown.
Embodiment 3
A kind of sunlight controlling coated glass and preparation method thereof.Wherein, sunlight controlling coated glass include glass substrate and It is deposited on the functional film layer of glass baseplate surface;The functional film layer include at least successively from the outside layer by layer deposition of glass substrate and At the first dielectric layer, the second dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and Four dielectric layers;Wherein, the zinc oxide that the first dielectric layer is 41.3nm silicon nitride film layer, the second dielectric layer are 37.3nm Zinc oxide film that nichrome film layer that aluminum membranous layer, the first reflecting layer are 7.3nm, third dielectric layer are 48.4nm, second The silicon nitride film layer that nichrome film layer that reflecting layer is 2.8nm, the 4th dielectric layer are 45.6nm;The glass substrate is The float glass of 4mm.
The preparation method of the sunlight controlling coated glass includes the following steps:
1) pre-treatment cleans float glass using Benteler cleaning machine, using cleaned float glass as glass base Plate, and the float glass after the cleaning is sent into vacuum chamber, keep vacuum degree in vacuum chamber 8 × 10-6Mbar or more.
2) film deposition is handled, and the first dielectric layer, the second electricity are sequentially depositing on surface treated glass substrate Dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and the 4th dielectric layer.It is specific as follows:
Use argon gas and nitrogen for working gas, AC power source sputtering rotates sial target, on the glass substrate magnetron sputtering Silicon nitride film layer, with a thickness of 41.3nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1:1.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, magnetic control splashes on silicon nitride film layer Zinc oxide aluminum film layer is penetrated, sputtering is Zn:Al=98:2, the flow of argon gas and oxygen with a thickness of 37.3nm, the mass ratio of zinc-aluminium target Than for 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 7.3nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, the magnetic control in nichrome film layer Sputtering zinc oxide aluminum membranous layer, sputtering are Zn:Al=98:2, the stream of argon gas and oxygen with a thickness of 48.4nm, the mass ratio of zinc-aluminium target Amount is than being 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 2.8nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and nitrogen for working gas, AC power source sputtering rotation sial target, the magnetic control in nichrome film layer Sputtered silicon nitride film layer, with a thickness of 45.6nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1: 1。
After above-mentioned steps, the present embodiment product is measured using on-line checking photometer, Datacolar CHECK II Appearance color, meanwhile, to this example use glass substrate carry out it is identical test compare, concrete outcome is as shown in table 1.It adopts The curve of spectrum is measured with online detection light degree meter, the obtained curve of spectrum such as attached drawing 4 (a), shown in 4 (b), 4 (c).
On the basis of the sunlight controlling coated glass that embodiment 3 obtains, it is heated, i.e., tempering is handled, Specially coated surface heating temperature is 685 DEG C, and Float Glass Surface heating temperature is 670 DEG C, heating time 415s.And it uses Identical method carries out color detection to the glass after heat treatment, and glass face color is shown in green as the result is shown.
Embodiment 4
A kind of sunlight controlling coated glass and preparation method thereof.Wherein, sunlight controlling coated glass include glass substrate and It is deposited on the functional film layer of glass baseplate surface;The functional film layer include at least successively from the outside layer by layer deposition of glass substrate and At the first dielectric layer, the second dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and Four dielectric layers;Wherein, the zinc oxide that the first dielectric layer is 43.2nm silicon nitride film layer, the second dielectric layer are 39.3nm Zinc oxide film that nichrome film layer that aluminum membranous layer, the first reflecting layer are 3.3nm, third dielectric layer are 29.8nm, second The silicon nitride film layer that nichrome film layer that reflecting layer is 7.6nm, the 4th dielectric layer are 58.5nm;The glass substrate is The float glass of 15mm.
The preparation method of the sunlight controlling coated glass includes the following steps:
1) pre-treatment cleans float glass using Benteler cleaning machine, using cleaned float glass as glass base Plate, and the float glass after the cleaning is sent into vacuum chamber, keep vacuum degree in vacuum chamber 8 × 10-6Mbar or more.
2) film deposition is handled, and the first dielectric layer, the second electricity are sequentially depositing on surface treated glass substrate Dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and the 4th dielectric layer.It is specific as follows:
Use argon gas and nitrogen for working gas, AC power source sputtering rotates sial target, on the glass substrate magnetron sputtering Silicon nitride film layer, with a thickness of 43.2nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1:1.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, magnetic control splashes on silicon nitride film layer Zinc oxide aluminum film layer is penetrated, sputtering is Zn:Al=98:2, the flow of argon gas and oxygen with a thickness of 39.3nm, the mass ratio of zinc-aluminium target Than for 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 3.3nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, the magnetic control in nichrome film layer Sputtering zinc oxide aluminum membranous layer, sputtering are Zn:Al=98:2, the stream of argon gas and oxygen with a thickness of 29.8nm, the mass ratio of zinc-aluminium target Amount is than being 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 7.6nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and nitrogen for working gas, AC power source sputtering rotation sial target, the magnetic control in nichrome film layer Sputtered silicon nitride film layer, with a thickness of 58.5nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1: 1。
After above-mentioned steps, the present embodiment product is measured using on-line checking photometer, Datacolar CHECK II Appearance color, meanwhile, to this example use glass substrate carry out it is identical test compare, concrete outcome is as shown in table 1.It adopts The curve of spectrum is measured with online detection light degree meter, the obtained curve of spectrum such as attached drawing 5 (a), shown in 5 (b), 5 (c).
On the basis of the sunlight controlling coated glass that embodiment 4 obtains, it is heated, i.e., tempering is handled, Specially coated surface heating temperature is 685 DEG C, and Float Glass Surface heating temperature is 675 DEG C, heating time 410s.And it uses Identical method carries out color detection to the glass after heat treatment, and glass face color is shown in green as the result is shown.
Embodiment 5
A kind of sunlight controlling coated glass and preparation method thereof.Wherein, sunlight controlling coated glass include glass substrate and It is deposited on the functional film layer of glass baseplate surface;The functional film layer include at least successively from the outside layer by layer deposition of glass substrate and At the first dielectric layer, the second dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and Four dielectric layers;Wherein, the zinc oxide that the first dielectric layer is 45.5nm silicon nitride film layer, the second dielectric layer are 39.3nm Zinc oxide film that nichrome film layer that aluminum membranous layer, the first reflecting layer are 7.1nm, third dielectric layer are 34.4nm, second The silicon nitride film layer that nichrome film layer that reflecting layer is 2.4nm, the 4th dielectric layer are 52.6nm;The glass substrate is The float glass of 19mm.
The preparation method of the sunlight controlling coated glass includes the following steps:
1) pre-treatment cleans float glass using Benteler cleaning machine, using cleaned float glass as glass base Plate, and the float glass after the cleaning is sent into vacuum chamber, keep vacuum degree in vacuum chamber 8 × 10-6Mbar or more.
2) film deposition is handled, and the first dielectric layer, the second electricity are sequentially depositing on surface treated glass substrate Dielectric layer, the first reflecting layer, third dielectric, the second dielectric, the second reflecting layer and the 4th dielectric layer.It is specific as follows:
Use argon gas and nitrogen for working gas, AC power source sputtering rotates sial target, on the glass substrate magnetron sputtering Silicon nitride film layer, with a thickness of 45.5nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1:1.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, magnetic control splashes on silicon nitride film layer Zinc oxide aluminum film layer is penetrated, sputtering is Zn:Al=98:2, the flow of argon gas and oxygen with a thickness of 39.3nm, the mass ratio of zinc-aluminium target Than for 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 7.1nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and oxygen for working gas, AC power source sputtering rotation zinc-aluminium target, the magnetic control in nichrome film layer Sputtering zinc oxide aluminum membranous layer, sputtering are Zn:Al=98:2, the stream of argon gas and oxygen with a thickness of 34.4nm, the mass ratio of zinc-aluminium target Amount is than being 3:4.
Use argon gas for working gas, DC power supply sputters plane nichrome target, and magnetic control splashes in zinc oxide aluminum film layer Nichrome film layer is penetrated, with a thickness of 2.4nm;The mass ratio Ni:Cr=8:2 of nichrome target.
Use argon gas and nitrogen for working gas, AC power source sputtering rotation sial target, the magnetic control in nichrome film layer Sputtered silicon nitride film layer, with a thickness of 52.6nm;The flow-rate ratio of the mass ratio Si:Al=92:8 of sial target, argon gas and nitrogen is 1: 1。
After above-mentioned steps, the present embodiment product is measured using on-line checking photometer, Datacolar CHECK II Appearance color, meanwhile, to this example use glass substrate carry out it is identical test compare, concrete outcome is as shown in table 1.It adopts The curve of spectrum is measured with online detection light degree meter, the obtained curve of spectrum such as attached drawing 6 (a), shown in 6 (b), 6 (c).
On the basis of the sunlight controlling coated glass that embodiment 5 obtains, it is heated, i.e., tempering is handled, Specially coated surface heating temperature is 680 DEG C, and Float Glass Surface heating temperature is 670 DEG C, heating time 410s.And it uses Identical method carries out color detection to the glass after heat treatment, and glass face color is shown in green as the result is shown.
Sunlight controlling coated glass appearance color in 1 Examples 1 to 5 of table
Wherein, meaning alphabetical in upper table 1 is as follows
G indicates that the glass surface of coated glass, R*g indicate the reflected value of coated glass glass surface;A*g and b*g indicates plated film The color value of the glass surface of glass, a*g is more positive, and expression color is redder, and a*g is more negative, and expression color is greener, the more positive expression color of b*g More yellow, b*g is more negative, and expression color is more blue;L*g indicates the brightness of the glass surface of coated glass.
The coated surface of F expression coated glass;The reflected value of R*f expression coated glass film surface;A*f and b*f indicates plated film glass The color value of glass film surface, a*f is more positive, and expression color is redder, and a*f is more negative, and expression color is greener;B*f is more positive, and expression color is more yellow, b* F is more negative, and expression color is more blue;The brightness of L*f expression coated glass film surface.
The transmission of T expression coated glass;The transmitance of Tr expression coated glass;A*T and b*T indicates what coated glass penetrated Color value, a*T is more positive, and expression color is redder, and a*T is more negative, and expression color is greener;B*T is more positive, and expression color is more yellow, the more negative table of b*T Show that color is more blue;L*T indicates the brightness that coated glass penetrates.
Table 1 the results show that the color a*g of the sunlight controlling coated glass of embodiment 1-5 between -9~-12 because People a*g is represented it is red green more sensitive, in order to keep colors green effect obvious, so needing to control the range of a*g.Embodiment The color b*g of the sunlight controlling coated glass of 1-5 is between 0~2, in order to make its color not interfere final color, so needing Control the range of b*g.
In addition, color detection is carried out to the sunlight controlling coated glass of the embodiment 1-5 tempering obtained, the results show that real The sunlight controlling coated glass a*g of the tempering of a 1-5 is applied between -9~-12, b*g is between -1~3.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention Made any modifications, equivalent replacements, and improvements etc. within mind and principle should all include within protection scope of the present invention.

Claims (9)

1. a kind of sunlight controlling coated glass, it is characterised in that: including glass substrate and functional film layer, the glass substrate has Opposite two sides;The functional film layer include from the glass substrate outward successively the first dielectric layer made of layer by layer deposition, Second dielectric layer, the first reflecting layer, third dielectric layer, the second reflecting layer and the 4th dielectric layer;
Wherein, first dielectric layer is SiNxFilm layer or SiNxOyFilm layer;Second dielectric layer is ZnAlOxFilm layer or ZnSnOxFilm layer;First reflecting layer is NiCr film layer, NiCrOxFilm layer, CrNxAny layer in film layer;The third electricity is situated between Matter layer is ZnAlO film layer, ZnSnOxFilm layer, SiNxAny layer in film layer;Second reflecting layer is NiCr film layer, NiCrOx Film layer, CrNxAny layer in film layer;4th dielectric layer is SiNxFilm layer, ZnAlOxFilm layer or ZnSnOxFilm layer and SiNx Any layer in double film layers that film layer is constituted;First dielectric layer, the second dielectric layer, the first reflecting layer, third electricity are situated between The thickness of matter layer, the second reflecting layer and the 4th dielectric layer be respectively 38.0~45.5nm, 37.3~57.0nm, 3.3~ 7.3nm, 29.8~48.4nm, 2.8~7.6nm and 41.7~58.5nm.
2. sunlight controlling coated glass as described in claim 1, it is characterised in that: the glass substrate is float glass base Plate.
3. sunlight controlling coated glass as claimed in claim 2, it is characterised in that: the float-glass substrate with a thickness of 3 ~19mm.
4. the manufacturing method of the sunlight controlling coated glass as described in claims 1 to 3 is any, it is characterised in that: including as follows Step:
Step S01, glass substrate is surface-treated;
Step S02, be sequentially depositing on the glass baseplate surface the first dielectric layer, the second dielectric layer, the first reflecting layer, Third dielectric layer, the second reflecting layer and the 4th dielectric layer.
5. the manufacturing method of sunlight controlling coated glass as claimed in claim 4, it is characterised in that: first electricity of deposition Dielectric layer is SiNxFilm layer or SiNxOyFilm layer;Second dielectric layer is ZnAlOxFilm layer or ZnSnOxFilm layer;Described first Reflecting layer is NiCr film layer, NiCrOxFilm layer, CrNxAny layer in film layer;The third dielectric layer be ZnAlO film layer, ZnSnOxFilm layer, SiNxAny layer in film layer;Second reflecting layer is NiCr film layer, NiCrOxFilm layer, CrNxIn film layer Any layer;4th dielectric layer is SiNxFilm layer, ZnAlOxFilm layer or ZnSnOxFilm layer and SiNxDouble film layers that film layer is constituted In any layer.
6. the manufacturing method of sunlight controlling coated glass as described in claim 4 or 5, it is characterised in that: first electricity is situated between Matter layer, the second dielectric layer, the first reflecting layer, third dielectric layer, the second reflecting layer and the 4th dielectric layer thickness difference For 38.0~45.5nm, 37.3~57.0nm, 3.3~7.3nm, 29.8~48.4nm, 2.8~7.6nm and 41.7~58.5nm.
7. the manufacturing method of sunlight controlling coated glass as claimed in claim 4, it is characterised in that: the magnetic control that is deposited as splashes Penetrate deposition.
8. the manufacturing method of sunlight controlling coated glass as claimed in claim 4, it is characterised in that: depositing the film layer In the process, control sputtering vacuum degree is 2 × 10-3Mbar~5 × 10-3mbar。
9. the sunlight controlling coated glass as described in claims 1 to 3 is any is in building doors and windows, building curtain wall and interior decoration Application in field.
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