CN105655870B - It is a kind of based on prism beam-expanded tunable grating external-cavity semiconductor laser - Google Patents
It is a kind of based on prism beam-expanded tunable grating external-cavity semiconductor laser Download PDFInfo
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Abstract
本发明提供一种基于棱镜扩束的可调谐光栅外腔半导体激光器。技术方案是:包括激光二极管、准直透镜、光栅,其特征在于,还包括一个或一个以上三棱镜组成的棱镜扩束系统,使得激光二极管发出的激光经过准直透镜后,在经过光栅之前,被棱镜扩束系统进行色散放大。每个三棱镜的入射光角度均为激光二极管波长对应的布儒斯特角。每个三棱镜的出射光匀垂直于该三棱镜的出射棱边。本发明加入了棱镜扩束系统后,使激光器线宽进一步压窄。
The invention provides a tunable grating external cavity semiconductor laser based on prism beam expansion. The technical solution is: including a laser diode, a collimating lens, and a grating. It is characterized in that it also includes a prism beam expander system composed of one or more triangular prisms, so that the laser light emitted by the laser diode passes through the collimating lens and before passing through the grating. Prism beam expander system for dispersion amplification. The incident light angle of each prism is the Brewster's angle corresponding to the wavelength of the laser diode. The outgoing light of each triangular prism is evenly perpendicular to the outgoing edge of the triangular prism. After adding the prism beam expander system in the present invention, the line width of the laser is further narrowed.
Description
技术领域technical field
本发明涉及半导体激光器技术,尤其是一种基于棱镜扩束的可调谐光栅外腔半导体激光器。The invention relates to semiconductor laser technology, in particular to a tunable grating external cavity semiconductor laser based on prism beam expansion.
背景技术Background technique
半导体激光器由于具有电光直接转换、体积小、寿命长等优点,已经广泛应用于许多领域,然而其线宽通常比较大。考虑到激光器的线宽与相位噪声成正比关系,为了保证其相关系统的性能,窄线宽可调谐激光器变得不可或缺。对于半导体激光器来说,受激辐射占据支配地位,但不可避免地存在自发辐射,这会造成频率噪声,使激光频谱发生展宽。窄线宽可调谐激光器是新一代密集波分复用系统以及全光网络中光子交换的关键光电子器件,目前已经实现了宽波长范围的连续或准连续调谐,并有相应的产品投放市场。Semiconductor lasers have been widely used in many fields due to their advantages such as direct electro-optic conversion, small size, and long life. However, their linewidth is usually relatively large. Considering that the linewidth of a laser is directly proportional to the phase noise, narrow linewidth tunable lasers become indispensable in order to guarantee the performance of their related systems. For semiconductor lasers, stimulated radiation is dominant, but spontaneous emission is inevitable, which will cause frequency noise and broaden the laser spectrum. Narrow linewidth tunable lasers are the key optoelectronic devices for the new generation of dense wavelength division multiplexing systems and photon exchange in all-optical networks. At present, continuous or quasi-continuous tuning in a wide wavelength range has been realized, and corresponding products have been put on the market.
可调谐外腔半导体激光器具有线宽窄,调谐范围大,输出功率高、较好的单纵模特性以及稳定性等优点。为了使半导体激光器输出稳定的频率,首先要保证半导体激光器输出的激光是单纵模的。为了使半导体激光器能输出单纵模,就要抑制增益带宽内的其他模式,而只让其中一个模式得到加强。所谓的外腔,是相对于内腔而言的,内腔指的是半导体激光二极管前后端面所构成的谐振腔,外腔是将谐振腔延伸至半导体激光二极管外面,用光学反馈原件实现外部反馈从而形成光振荡,光栅正是实现外部反馈的一种光反馈原件。由于外腔长度远大于内腔,在外腔中振荡的不同激光模式之间的频率间隔,要远小于内腔,一旦实现单一模式输出,半导体激光器线宽也就被大大的压窄了。通常使用外腔结构有Littrow和Littman两种,调节它们的反馈原件,从而改变外腔腔长,使外腔中的某一个振荡模式被选出来,实现单一模式输出。Tunable external cavity semiconductor lasers have the advantages of narrow linewidth, large tuning range, high output power, better single longitudinal mode characteristics and stability. In order to make the semiconductor laser output a stable frequency, it is first necessary to ensure that the laser output by the semiconductor laser is a single longitudinal mode. In order to enable a semiconductor laser to output a single longitudinal mode, it is necessary to suppress other modes within the gain bandwidth and only allow one of the modes to be strengthened. The so-called external cavity is relative to the internal cavity. The internal cavity refers to the resonant cavity formed by the front and rear end faces of the semiconductor laser diode. The external cavity extends the resonant cavity to the outside of the semiconductor laser diode and uses optical feedback components to achieve external feedback. Thus forming optical oscillation, the grating is just a kind of optical feedback element to realize external feedback. Since the length of the external cavity is much longer than that of the internal cavity, the frequency interval between different laser modes oscillating in the external cavity is much smaller than that of the internal cavity. Once a single mode output is realized, the linewidth of the semiconductor laser will be greatly narrowed. There are usually two types of external cavity structures, Littrow and Littman, and their feedback elements are adjusted to change the length of the external cavity, so that a certain oscillation mode in the external cavity is selected to achieve a single mode output.
Littrow结构外腔半导体激光器由激光二极管(输出光面镀有增透膜、另一面镀有高反膜)、准直透镜、光栅三个部分构成,如图1所示。激光二极管出射光经过准直透镜后以一定的角度入射到光栅,选择适当的入射角度,使光栅的输出光只有0级和+1级光,其中0级光作为激光器出射光,+1级光反馈回激光二极管,构成半导体激光器的外腔振荡。The Littrow structure external cavity semiconductor laser consists of three parts: a laser diode (the output surface is coated with an anti-reflection coating, and the other side is coated with a high-reflection coating), a collimator lens, and a grating, as shown in Figure 1. The output light of the laser diode is incident on the grating at a certain angle after passing through the collimating lens, and the appropriate incident angle is selected so that the output light of the grating is only 0-level and +1-level light, of which the 0-level light is used as the laser output light, and the +1-level light is It is fed back to the laser diode to form the external cavity oscillation of the semiconductor laser.
Littman结构外腔半导体激光器由激光二极管、准直透镜、光栅、反射镜四部分构成,如图2所示。在该结构中,激光二极管出射光经准直透镜以一个较好的角度入射到光栅,同样的,0级光作为激光器出射光,+1级光作为反馈光被反射镜反射后,再经过一次光栅沿原路返回,构成半导体激光器的外腔振荡。Littman structure external cavity semiconductor laser consists of four parts: laser diode, collimating lens, grating and reflector, as shown in Figure 2. In this structure, the output light of the laser diode enters the grating at a better angle through the collimator lens. Similarly, the 0-level light is used as the laser output light, and the +1-level light is used as the feedback light. The grating returns along the original path to form the external cavity oscillation of the semiconductor laser.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于公开一种基于棱镜扩束的可调谐光栅外腔半导体激光器,该激光器具有结构紧凑,装调简单,腔内损耗小增益高,可以同时获得窄线宽、较高的输出能量指标和实现宽波长范围的连续可调谐。The purpose of the present invention is to disclose a tunable grating external cavity semiconductor laser based on prism beam expander. The laser has compact structure, simple assembly and adjustment, small intracavity loss and high gain, and can simultaneously obtain narrow line width and high output energy. index and achieve continuous tunability over a wide wavelength range.
为了解决上述技术问题,实现上述技术效果,本发明采用的技术方案一是:In order to solve the above-mentioned technical problems and realize the above-mentioned technical effects, the technical solution one adopted in the present invention is:
一种基于棱镜扩束的可调谐光栅外腔半导体激光器,包括激光二极管11、准直透镜12、光栅14,其特征在于,还包括二个或两个以上三棱镜13组成的棱镜扩束系统,使得激光二极管11发出的激光经过准直透镜12后,在经过光栅14之前,被棱镜扩束系统进行色散放大。每个三棱镜13的入射光角度均为激光二极管11波长对应的布儒斯特角。每个三棱镜13的出射光匀垂直于该三棱镜13的出射棱边。A tunable grating external cavity semiconductor laser based on prism beam expansion, comprising a laser diode 11, a collimator lens 12, and a grating 14, is characterized in that it also includes a prism beam expansion system composed of two or more triangular prisms 13, so that The laser light emitted by the laser diode 11 passes through the collimating lens 12 and before passing through the grating 14, is dispersed and amplified by the prism beam expander system. The incident light angle of each triangular prism 13 is the Brewster's angle corresponding to the wavelength of the laser diode 11 . The outgoing light of each triangular prism 13 is evenly perpendicular to the outgoing edge of the triangular prism 13 .
本发明采用的技术方案二是:一种基于棱镜扩束的可调谐光栅外腔半导体激光器,包括激光二极管21、准直透镜22、光栅24、反射镜25,其特征在于,还包括若干个三棱镜23组成的棱镜扩束系统,使得激光二极管21发出的激光经过准直透镜22后,在经过光栅24之前,被棱镜扩束系统进行色散放大。每个三棱镜23的入射光角度均为激光二极管21波长对应的布儒斯特角。每个三棱镜23的出射光匀垂直于该三棱镜13的出射棱边。棱镜扩束系统出射光为光栅24的入射光,光栅24的1级衍射光经过反射镜25反射回光栅24后,沿原路返回激光二极管21,光栅24的0级光作为可调谐光栅外腔半导体激光器的输出。The second technical solution adopted by the present invention is: a tunable grating external cavity semiconductor laser based on prism beam expansion, including a laser diode 21, a collimator lens 22, a grating 24, and a reflector 25, and is characterized in that it also includes several triangular prisms The prism beam expander system composed of 23 makes the laser light emitted by the laser diode 21 pass through the collimating lens 22 and before passing through the grating 24, be dispersed and amplified by the prism beam expander system. The incident light angle of each triangular prism 23 is the Brewster's angle corresponding to the wavelength of the laser diode 21 . The outgoing light of each triangular prism 23 is evenly perpendicular to the outgoing edge of the triangular prism 13 . The outgoing light of the prism beam expander system is the incident light of the grating 24, and the 1st-order diffracted light of the grating 24 is reflected back to the grating 24 by the mirror 25, and then returns to the laser diode 21 along the original path, and the 0-order light of the grating 24 is used as the external cavity of the tunable grating output of a semiconductor laser.
本发明的有益效果是:基于棱镜扩束的可调谐光栅外腔半导体激光器,在普通外腔式半导体的基础上,在外腔反馈的光路中加入了棱镜扩束系统,激光经过棱镜扩束系统后,由于光束的扩大增加了光栅的分辨率,同时三棱镜本身的色散特性使激光器外腔中的振荡光进一步色散分开,从而使激光器线宽进一步压窄。The beneficial effect of the present invention is: the tunable grating external cavity semiconductor laser based on the prism beam expansion, on the basis of the ordinary external cavity semiconductor, a prism beam expansion system is added in the optical path of the external cavity feedback, and the laser beam passes through the prism beam expansion system. , because the expansion of the beam increases the resolution of the grating, and the dispersion characteristics of the prism itself make the oscillating light in the outer cavity of the laser further dispersed, thereby further narrowing the linewidth of the laser.
附图说明Description of drawings
图1是现有的Littrow型光栅外腔半导体激光器线的原理示意图;Fig. 1 is the schematic diagram of the principle of the existing Littrow type grating external cavity semiconductor laser line;
图2是现有的Littman型光栅外腔半导体激光器线的原理示意图;Fig. 2 is the schematic diagram of the principle of the existing Littman type grating external cavity semiconductor laser line;
图3是本发明提供的具体实施方式一;Fig. 3 is a specific embodiment 1 provided by the present invention;
图4是本发明提供的具体实施方式二;Fig. 4 is the second specific embodiment provided by the present invention;
图5是本发明提供的棱镜扩束系统的某一具体实施方式;Fig. 5 is a specific embodiment of the prism beam expander system provided by the present invention;
图6是本发明所述棱镜扩束系统的扩大光束原理示意图;Fig. 6 is a schematic diagram of the expanded beam principle of the prism beam expander system of the present invention;
图7是本发明具体实施方式一(即图3)线宽测量对比图;FIG. 7 is a comparison diagram of line width measurement in Embodiment 1 of the present invention (ie, FIG. 3 );
图8是本发明具体实施方式二线宽测量对比图。Fig. 8 is a comparison diagram of line width measurement of the second embodiment of the present invention.
具体实施方式Detailed ways
下面结合附图和实施例,对本发明进行详细描述。The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
图3是本发明提供的具体实施方式一。如图3所示,包括激光二极管11、准直透镜12、棱镜扩束系统、光栅14。其中,激光二极管11用于输出激光光束,其在电流的作用下导带中的电子和价带中的空穴复合产生受激辐射,在内腔(激光二极管两个端面之间形成的谐振腔)中谐振产生激光;准直透镜12,有着非常短焦距,用于对激光二极管11输出的光束整形,形成平行光束;棱镜扩束系统,由若干个三棱镜13组成,用于改变准直透镜12输出平行光束光斑大小,同时提高系统色散性能,本具体实施方式中包括两个三棱镜13;光栅14,用于对棱镜扩束系统输出的平行光束进一步色散,同时构成该激光器外腔(激光二极管出射端面与光栅之间形成的谐振腔)的一个谐振面,棱镜扩束系统输出的平行光束打到光栅14上,1级衍射光原路经过棱镜扩束系统与准直透镜12后,返回到激光二极管11,在光栅14和激光二极管11输出端面为腔镜的外部谐振腔内振荡放大;而光栅14的0级光作为实施方式一的输出。Fig. 3 is a specific embodiment 1 provided by the present invention. As shown in FIG. 3 , it includes a laser diode 11 , a collimator lens 12 , a prism beam expander system, and a grating 14 . Among them, the laser diode 11 is used to output the laser beam, and under the action of the current, electrons in the conduction band and holes in the valence band recombine to generate stimulated radiation, and the inner cavity (the resonant cavity formed between the two end faces of the laser diode ) to resonate to generate laser light; the collimator lens 12 has a very short focal length and is used to shape the beam output by the laser diode 11 to form a parallel beam; the prism beam expander system is composed of several triangular prisms 13 and is used to change the Output parallel light beam spot size, improve system dispersion performance simultaneously, comprise two triangular prisms 13 in this specific embodiment; A resonant surface of the resonant cavity formed between the end face and the grating), the parallel beam output by the prism beam expander system hits the grating 14, and the first-order diffracted light returns to the laser after passing through the prism beam expander system and the collimator lens 12 in the original path The diode 11 oscillates and amplifies in the external resonant cavity of the cavity mirror at the output end of the grating 14 and the laser diode 11; and the 0-order light of the grating 14 is used as the output of the first embodiment.
图4是本发明提供的具体实施方式二。如图4所示,包括激光二极管21、准直透镜22、棱镜扩束系统、光栅24与反射镜25。其中,激光二极管21、准直透镜22、棱镜扩束系统的作用与位置关系和具体实施方式一相同;不同之处在于,光栅24入射光的1级衍射光,入射到反射镜25上,经反射镜25反射后又回光栅24,经光栅24再次衍射的1级光原路经过棱镜扩束系统与准直透镜22后,回到激光二极管21,在反射镜25和激光二极管21输出端面为腔镜的谐振腔内振荡放大;光栅24的0级光作为实施方式二的输出。Fig. 4 is the second specific embodiment provided by the present invention. As shown in FIG. 4 , it includes a laser diode 21 , a collimator lens 22 , a prism beam expander system, a grating 24 and a mirror 25 . Wherein, the function and positional relationship of the laser diode 21, the collimator lens 22, and the prism beam expander system are the same as those in Embodiment 1; Reflected by the reflector 25, it returns to the grating 24. The first-order light diffracted by the grating 24 passes through the prism beam expander system and the collimator lens 22, and then returns to the laser diode 21. The output end faces of the reflector 25 and the laser diode 21 are Oscillation amplification in the resonant cavity of the cavity mirror; the 0th-order light of the grating 24 is the output of the second embodiment.
图5是本发明提供的棱镜扩束系统的某一具体实施方式。如图5所示,棱镜扩束系统由四个三棱镜组成,所述的棱镜扩束系统的棱镜材料为融石英或者氟化钙,各个棱镜的入射角度为所需波长激光的布儒斯特角,出射光垂直于棱镜另外一边。Fig. 5 is a specific embodiment of the prism beam expander system provided by the present invention. As shown in Figure 5, the prism beam expander system is composed of four triangular prisms. The prism material of the prism beam expander system is fused silica or calcium fluoride, and the incident angle of each prism is the Brewster angle of the required wavelength laser. , the outgoing light is perpendicular to the other side of the prism.
图6是本发明所述棱镜扩束系统的扩束大原理示意图。如图6所示,该棱镜扩束系统包括一个三棱镜13,i1,i2分别为光束对三棱镜13的入射角(即激光二极管11波长对应的布儒斯特角)和折射角,wa,wb分别为光束扩束前后横截面尺寸,则棱镜扩束系统的扩束系数M同时也是三棱镜13的扩束系数,为:Fig. 6 is a schematic diagram of the principle of beam expansion of the prism beam expander system of the present invention. As shown in Figure 6, the prism beam expander system includes a triangular prism 13, i 1 and i 2 are respectively the incident angle of the beam on the triangular prism 13 (that is, the Brewster angle corresponding to the wavelength of the laser diode 11) and the refraction angle, w a , w and b are respectively the cross-sectional dimensions before and after beam expansion, then the beam expansion coefficient M of the prism beam expander system is also the beam expansion coefficient of the triangular prism 13, which is:
进一步推广到由n个三棱镜13组成的棱镜扩束系统的扩束系数为:Further extension to the beam expansion coefficient of the prism beam expander system made up of n triangular prisms 13 is:
其中,M1,M2,···,Mn分别为棱镜1,2,..,n的扩束系数。Wherein, M 1 , M 2 ,···,M n are beam expansion coefficients of prisms 1, 2,...,n respectively.
参见US20020186741A1,可知由多个三棱镜与光栅组合的激光器系统中,输出激光的线宽的半高宽度ΔλFWHM可以由下式决定:Referring to US20020186741A1, it can be seen that in a laser system combined with multiple triangular prisms and gratings, the full width at half maximum Δλ FWHM of the line width of the output laser can be determined by the following formula:
其中:θdiv为激光二极管光束水平方向的发散角,M为棱镜扩束系统的扩束倍数,αB为激光入射到光栅的角度。NR为激光在谐振腔内的往返次数,λ为激光波长。通过上述公式可知,增加棱镜扩束系统的扩束系数M,即可以减小输出激光的线宽,实现激光器的线宽压窄。Among them: θ div is the divergence angle of the laser diode beam in the horizontal direction, M is the beam expansion multiple of the prism beam expander system, and α B is the angle at which the laser is incident on the grating. NR is the number of round trips of the laser in the resonator, and λ is the wavelength of the laser. It can be seen from the above formula that increasing the beam expansion coefficient M of the prism beam expander system can reduce the line width of the output laser and realize the narrowing of the line width of the laser.
图7为本发明具体实施方式一利用延时自外差法测量的线宽对比图。该具体实施方式中,准直透镜12输出直径为3.8mm的平行光束;棱镜扩束系统由两个三棱镜13组成,三棱镜13的入射角为56.5°,扩束倍数为1.59,棱镜扩束系统的扩束倍数为2.53;谐振腔腔长为83.2mm;延时自外差法测量中用的延时光纤长度为13.6Km。图7中,横坐标为频率间隔,纵坐标为信号强度,虚线表示本发明具体实施方式一的线宽数据,实线表示原有半导体激光器的线宽数据。数据的3dB衰减带宽反映了激光的真实线宽,本发明具体实施方式一的3dB衰减带宽为19.4KHz,原有半导体激光器3dB衰减带宽为44.3KHz。故本发明具体实施方式一线宽测量值为19.4KHz/2=9.7KHz,同时可以得到线宽被压窄了44.3KHz/19.4KHz=2.28倍。FIG. 7 is a comparison diagram of line widths measured by a time-delayed self-heterodyne method according to a specific embodiment of the present invention. In this specific embodiment, the collimating lens 12 output diameter is the parallel light beam of 3.8mm; The prism beam expander system is made up of two triangular prisms 13, and the incident angle of the triangular prisms 13 is 56.5 °, and the beam expansion factor is 1.59, and the prism beam expander system The beam expansion factor is 2.53; the cavity length of the resonant cavity is 83.2mm; the length of the delay fiber used in the delay self-heterodyne measurement is 13.6Km. In FIG. 7 , the abscissa is the frequency interval, the ordinate is the signal strength, the dotted line represents the line width data of Embodiment 1 of the present invention, and the solid line represents the line width data of the original semiconductor laser. The 3dB attenuation bandwidth of the data reflects the true linewidth of the laser. The 3dB attenuation bandwidth of the first embodiment of the present invention is 19.4KHz, while the original semiconductor laser 3dB attenuation bandwidth is 44.3KHz. Therefore, the measured value of the line width in the specific embodiment of the present invention is 19.4KHz/2=9.7KHz, and at the same time, it can be obtained that the line width is narrowed by 44.3KHz/19.4KHz=2.28 times.
图8为本发明具体实施方式二利用延时自外差法测量的线宽对比图。该具体实施方式二中,光栅的入射角为79°,其它参数与具体实施方式一基本一致。图7中,横坐标为频率间隔,纵坐标为信号强度,虚线为本发明具体实施方式二线宽数据,实线为原有半导体激光器的线宽数据。本发明具体实施方式二的3dB衰减带宽为1.9KHz,原有半导体激光器3dB衰减带宽为4.2KHz。故本发明具体实施方式二线宽测量值为1.9KHz/2=9.7KHz,同时可以得到线宽被压窄了4.2KHz/1.9KHz=2.21倍。可以看出本发明具体实施方式二比实施方式一的线宽又压窄了一个数量级,这是由于光栅的两次衍射造成的线宽压窄。FIG. 8 is a comparison diagram of line widths measured by the time-delayed self-heterodyne method in Embodiment 2 of the present invention. In the second embodiment, the incident angle of the grating is 79°, and other parameters are basically the same as those in the first embodiment. In Fig. 7, the abscissa is the frequency interval, the ordinate is the signal strength, the dotted line is the second line width data of the specific embodiment of the present invention, and the solid line is the line width data of the original semiconductor laser. The 3dB attenuation bandwidth of the second embodiment of the present invention is 1.9KHz, and the 3dB attenuation bandwidth of the original semiconductor laser is 4.2KHz. Therefore, the measured value of the second line width of the specific embodiment of the present invention is 1.9KHz/2=9.7KHz, and at the same time, it can be obtained that the line width is narrowed by 4.2KHz/1.9KHz=2.21 times. It can be seen that the line width of Embodiment 2 of the present invention is narrowed by an order of magnitude compared with Embodiment 1, which is due to the narrowing of line width caused by the two diffractions of the grating.
虽然参照上述具体实施方式详细地描述了本发明,但是应该理解本发明并不限于所公开的实施方式,对于本专业领域的技术人员来说,可对其形式和细节进行各种改变。以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。While the present invention has been described in detail with reference to specific embodiments above, it is to be understood that the invention is not limited to the disclosed embodiments and that various changes in form and details will occur to persons skilled in the art. The above descriptions are only specific embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of the present invention. within the scope of protection.
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