CN105467548A - High-positioning-precision photoetching object lens frame with replaceable lens - Google Patents
High-positioning-precision photoetching object lens frame with replaceable lens Download PDFInfo
- Publication number
- CN105467548A CN105467548A CN201510881287.8A CN201510881287A CN105467548A CN 105467548 A CN105467548 A CN 105467548A CN 201510881287 A CN201510881287 A CN 201510881287A CN 105467548 A CN105467548 A CN 105467548A
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- CN
- China
- Prior art keywords
- picture frame
- eyeglass
- removable
- sidewall
- locking unit
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Eyeglasses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses a high-positioning-precision photoetching object lens frame with a replaceable lens, belongs to the technical field of deep ultraviolet projection photoetching object lens structure design, and aims at solving problems in the prior art that a conventional structure is complex, the operation space is large, the positioning and repeated positioning precision is low and the lens is liable to be polluted. An outer lens frame is in a cylindrical structure, and two inner side walls of the outer lens frame are respectively provided with a chute. An inner side wall is provided with a conical groove and a V-shaped groove, and one end, close to an opening, of the upper end face of the interior of the outer lens frame is provided with a ball head A. An inner lens frame is in a square structure, and any two opposite side walls are provided with sliding rails. One side wall, adjacent to the side wall where the sliding rail is located, is provided with two ball heads B. The positions of the two head balls B are respectively opposite to the conical groove and the V-shaped groove. A part, corresponding to the ball head A, of the upper end face of the square structure is provided with an upper platform. The sliding rails of the inner lens frame cooperate with the chutes in the outer lens frame. An outer side of the inner lens frame is provided with a protection cover, and the protection cover is fixedly connected with the outer lens frame through a screw.
Description
Technical field
The invention belongs to deep UV projection photoetching objective lens structural design and integration techno logy field, be specifically related to the lithographic objective picture frame of optical element refine in a kind of photoetching projection objective lens system, maintenance, replacing and resetting.
Background technology
Light projection photoetching objective lens is the key equipment manufacturing large scale integrated circuit.In recent years along with the continuous segmentation of integrated circuit feature live width, the resolution of light projection photoetching objective lens also improves gradually, and the ArF excimer laser projection lithography equipment of current wavelength 193.368nm has become the main flow equipment of 90nm, 65nm and 45nm node IC manufacturing.Light projection photoetching objective lens system to the surface precision of eyeglass and position accuracy demand high, debug the stage at object lens, only rely on assembling and compensator be difficult to meet the requirement of system wave aberration, need to carry out refine to certain particular optic; Meanwhile, after object lens work a period of time, in order to ensure the excellent optical performance of system, need to safeguard certain particular optic or change.Refine, maintenance and replacing eyeglass time, need easy accessibility, realize simultaneously submicron order location and repetitive positioning accuracy.
Publication number is the Chinese patent of CN103246040A, disclose a kind of high repetitive positioning accuracy structure for fast changeable in photoetching projection objective lens, it adopts 3 bulbs to coordinate with 3 conical recess and realizes high precision resetting, uses magnetic-adsorption to realize the fastening of window picture frame.3 bulbs coordinate with 3 conical recess and caused location to window picture frame, tolerance clearance must be increased while guaranteeing easy accessibility, reduce location and repetitive positioning accuracy, in addition, this version can only adopt axial dismounting, certainly will operating space be increased, first piece of eyeglass or last block eyeglass of object lens can only be applied to.Publication number is the object lens protecting window that the Chinese patent of CN104049473A discloses a kind of radial axle pulling structure, it adopts the uniform v-shaped structure of multiple circumference and V-arrangement grip block to coordinate and is fixed on quick-replaceable eyeglass on picture frame by eyeglass, adopts line slideway assembly to realize the pull motion of the relative lens barrel of window picture frame; This structure does not solve hi-Fix and the resetting of window picture frame, and due to the existence of line slideway assembly rubbing wear, eyeglass exist contaminated may.
Summary of the invention
The object of the invention is to propose a kind of removable lithographic objective picture frame of eyeglass of high position precision, solve that complex structure that prior art exists, operating space are large, location and repetitive positioning accuracy is low and the easy contaminated problem of eyeglass.
For achieving the above object, the eyeglass of high position precision of the present invention removable lithographic objective picture frame comprises outer picture frame, interior picture frame and protective cover;
Described outer picture frame is cylindrical structure, described outer picture frame inside is square space, described picture frame and any one sidewall relative position of square space have opening, two sidewalls that described square space is vertical with described opening are provided with chute, on the sidewall that described square space is relative with described opening, one end is provided with conical grooves, the other end is provided with V-type groove, and described V-type groove is parallel with described outer picture frame upper surface, and described square space upper surface is provided with bulb A near open at one end;
Described interior picture frame is square structure, two sidewalls of Arbitrary Relative are provided with slide rail, a sidewall adjacent with described slide rail place sidewall is provided with two bulb B, the position of two bulb B is corresponding with described conical grooves and V-type groove respectively, and described square structure upper surface and described bulb A corresponding position are provided with upper mounting plate;
The slide rail of described interior picture frame coordinates with the chute in described outer picture frame, and described interior picture frame arranged outside has protective cover, and described protective cover is fixedly connected with by screw with described outer picture frame.
Also be provided with between described protective cover and described interior picture frame and determine power locking unit, the described power of determining locking unit is the elongate configuration of the orthogonal one-tenth dihedral in both sides, a limit of the described power of determining locking unit is fixedly connected with described open lower end face by screw, another side contacts with described interior picture frame, one side that the described power of determining locking unit contacts with described interior picture frame is provided with lock-screw, and described lock-screw contacts with described interior picture frame through a limit of determining power locking unit.
Described interior picture frame with determine sidewall that power locking unit contacts is provided with axial locking block and radial latch segment, two described lock-screws contact with radial latch segment with described axial locking block respectively through a limit of the described power of determining locking unit.
Described radial latch segment is cylindrical-shaped structure, and described cylindrical-shaped structure one end is fixed on interior picture frame sidewall, and one end contacts with described lock-screw.
Described axial locking block is right angle trigonometry block, and a right-angle surface of described right angle trigonometry block is fixedly connected with described interior picture frame sidewall, and another right-angle surface is parallel with described interior picture frame upper surface, and the inclined-plane of described right angle trigonometry block contacts with described lock-screw.
Described axial locking block comprises fixed part, rake and L-type structure; Side, described fixed part upper surface is fixedly connected with described interior picture frame sidewall by rake, and opposite side is fixedly connected with by the upper surface of L-type structure with the described power of determining locking unit, and described fixed part contacts with described lock-screw.
Described slide rail is self-lubricating abrasion-resistant material.
The material of described slide rail is teflon, polyurethane or nylon.
Beneficial effect of the present invention is: the removable lithographic objective picture frame of eyeglass of high position precision of the present invention is a barrel unit of photoetching projection objective lens on the whole, outer picture frame respectively with the cascade of upper and lower mirror group, be fixed in objective system; Eyeglass is concentric with interior picture frame, and adhesive attachment is integrally formed; Outer picture frame opening coordinates with detachable protective cover, realizes sealing; Outer picture frame is concentric with interior picture frame, and outer picture frame inside is the operating space of interior picture frame dismounting, location and locking; The chute of outer picture frame and the slide rail of interior picture frame form chute type drawing structure.The V-type groove of outer picture frame, conical grooves and bulb A form the solid space distributed architecture of bulb-V-type groove, bulb-conical grooves and bulb-plane with two bulb B and upper mounting plates of interior picture frame respectively; The two one Special composition location structure, limits six spatial degrees of freedom of interior picture frame; Determine power locking unit and outer picture frame is connected firmly by screw, the lock-screw determining power locking unit holds out against the radial latch segment of interior picture frame, export the pressure of fixed size, the radial direction locking of picture frame in realizing, another lock-screw determining power locking unit holds out against the axial locking block of interior picture frame, export the pressure of fixed size, the axial locking of picture frame in realizing.
The present invention adopts radial axle pulling structure to realize the dismounting of eyeglass in objective system, the solid space distributed architecture of bulb-V-type groove, bulb-conical grooves and bulb-plane is relied on to realize the hi-Fix of eyeglass, positioning precision is high, use determine power locking unit realize in the power radial direction of determining of picture frame determine power locking and axially determine power to lock, location structure and determine the high precision resetting that power locking unit comprehensively realizes eyeglass.
Accompanying drawing explanation
Fig. 1 is the eyeglass removable lithographic objective frame structure cut-open view of high position precision of the present invention;
Fig. 2 is protective cover dismounting schematic diagram in the removable lithographic objective picture frame of eyeglass of high position precision of the present invention
Fig. 3 is the eyeglass removable lithographic objective picture frame China and foreign countries frame structure schematic diagram of high position precision of the present invention;
Fig. 4 is the eyeglass removable lithographic objective picture frame China and foreign countries frame structure cut-open view of high position precision of the present invention;
Fig. 5 is interior frame structure schematic diagram in the removable lithographic objective picture frame of eyeglass of high position precision of the present invention;
Fig. 6 determines power locking unit structural representation in the removable lithographic objective picture frame of eyeglass of high position precision of the present invention;
Fig. 7 is the schematic diagram of axial locking block structure in the eyeglass removable lithographic objective picture frame of high position precision of the present invention;
Fig. 8 is axial locking block structure installation site schematic diagram in the eyeglass removable lithographic objective picture frame of high position precision of the present invention;
Fig. 9 is the removable lithographic objective picture frame of eyeglass structural representation in space environment of high position precision of the present invention;
Wherein: 1, outer picture frame, 101, protective cover mounting hole, 102, chute, 103, V-type groove, 104, conical grooves, 105, bulb A, 106, determine power locking unit mounting hole, 2, interior picture frame, 201, bulb B, 202, slide rail, 203, upper mounting plate, 204, axial locking block, 205, radial latch segment, 206, L-type structure, 207, rake, 208, fixed part, 3, determine power locking unit, 301, lock-screw, 302, mounting hole site, 4, protective cover, 5, eyeglass.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
See accompanying drawing 1 and accompanying drawing 2, the eyeglass removable lithographic objective picture frame of high position precision of the present invention comprises outer picture frame 1, interior picture frame 2 and protective cover 4;
See accompanying drawing 3 and accompanying drawing 4, described outer picture frame 1 is cylindrical structure, described outer picture frame 1 inside is square space, described picture frame and any one sidewall relative position of square space have opening, two sidewalls that described square space is vertical with described opening are provided with chute 102, on the sidewall that described square space is relative with described opening, one end is provided with conical grooves 104, the other end is provided with V-type groove 103, described V-type groove 103 is parallel with described outer picture frame 1 upper surface, and described square space upper surface is provided with bulb A105 near open at one end; Described outer picture frame 1 opening part lower surface is provided with determines power locking unit mounting hole 106 and protective cover mounting hole 101;
See accompanying drawing 5, described interior picture frame 2 is square structure, centre has through hole, eyeglass 5 is fixed on described through hole, two sidewalls of square structure Arbitrary Relative are provided with slide rail 202, a sidewall adjacent with described slide rail 202 place sidewall is provided with two bulb B201, and the position of two bulb B201 is corresponding with described conical grooves 104 and V-type groove 103 respectively, and described square structure upper surface and described bulb A105 corresponding position are provided with upper mounting plate 203;
The slide rail 202 of described interior picture frame 2 coordinates with the chute 102 in described outer picture frame 1, and described interior picture frame 2 arranged outside has protective cover 4, and described protective cover 4 is fixedly connected with by screw with the protective cover mounting hole 101 of described outer picture frame 1.
See accompanying drawing 6, also be provided with between described protective cover 4 and described interior picture frame 2 and determine power locking unit 3, the described power of determining locking unit 3 is the elongate configuration of the orthogonal one-tenth dihedral in both sides, a limit of the described power of determining locking unit 3 is provided with mounting hole site 302, described mounting hole site 302 is fixedly connected with the power locking unit mounting hole 106 of determining in described open lower end face by screw, another side contacts with described interior picture frame 2, one side that the described power of determining locking unit 3 contacts with described interior picture frame 2 is provided with lock-screw 301, described lock-screw 301 contacts with described interior picture frame 2 through a limit of determining power locking unit 3.
Described interior picture frame 2 with determine sidewall that power locking unit 3 contacts is provided with axial locking block 204 and the described lock-screw 301 of radial latch segment 205, two limit through the described power of determining locking unit 3 and contact with radial latch segment 205 with described axial locking block 204 respectively; Use torque spanner to make lock-screw 301 export the pressure of fixed size, when repeatedly installing, lock-screw 301 holds out against interior picture frame 2 with identical pressure.
Described radial latch segment 205 is cylindrical-shaped structure, and described cylindrical-shaped structure one end is fixed on interior picture frame 2 sidewall, and one end contacts with described lock-screw 301.
Described axial locking block 204 is right angle trigonometry block, a right-angle surface of described right angle trigonometry block is fixedly connected with described interior picture frame 2 sidewall, another right-angle surface is parallel with described interior picture frame 2 upper surface, and the inclined-plane of described right angle trigonometry block contacts with described lock-screw 301.
See accompanying drawing 7 and accompanying drawing 8, described axial locking block 204 comprises fixed part 208, rake 207 and L-type structure 206; Side, described fixed part 208 upper surface is fixedly connected with described interior picture frame 2 sidewall by rake 207, and opposite side is fixedly connected with by the upper surface of L-type structure 206 with the described power of determining locking unit 3, and described fixed part 208 contacts with described lock-screw 301.
Described slide rail 202 is self-lubricating abrasion-resistant material.
The material of described slide rail 202 is teflon, polyurethane or nylon.
See accompanying drawing 9, the removable lithographic objective picture frame of eyeglass of high position precision of the present invention is a barrel unit of photoetching projection objective lens on the whole, epi mirror, 1 respectively with the cascade of upper and lower mirror group, be fixed in objective system.
The V-type groove 103 that described outer picture frame 1 comprises, conical grooves 104, chute 102 and bulb A105 structure can be integral mechanism, also can be assembled structures.
The bulb B201 that described interior picture frame 2 comprises, upper mounting plate 203, radial latch segment 205 and axial locking block 204 can be integral mechanism, also can be assembled structures.
Claims (8)
1. the removable lithographic objective picture frame of the eyeglass of high position precision, comprises outer picture frame (1) and interior picture frame (2), it is characterized in that, also comprise protective cover (4);
Described outer picture frame (1) is cylindrical structure, described outer picture frame (1) inside is square space, described picture frame and any one sidewall relative position of square space have opening, two sidewalls that described square space is vertical with described opening are provided with chute (102), on the sidewall that described square space is relative with described opening, one end is provided with conical grooves (104), the other end is provided with V-type groove (103), described V-type groove (103) is parallel with described outer picture frame (1) upper surface, described square space upper surface is provided with bulb A (105) near open at one end,
Described interior picture frame (2) is square structure, two sidewalls of Arbitrary Relative are provided with slide rail (202), a sidewall adjacent with described slide rail (202) place sidewall is provided with two bulb B (201), the position of two bulb B (201) is corresponding with described conical grooves (104) and V-type groove (103) respectively, and described square structure upper surface and described bulb A (105) corresponding position are provided with upper mounting plate (203);
The slide rail (202) of described interior picture frame (2) coordinates with the chute (102) in described outer picture frame (1), described interior picture frame (2) arranged outside has protective cover (4), and described protective cover (4) is fixedly connected with by screw with described outer picture frame (1).
2. the removable lithographic objective picture frame of the eyeglass of high position precision according to claim 1, it is characterized in that, also be provided with between described protective cover (4) and described interior picture frame (2) and determine power locking unit (3), the elongate configuration that the described power of determining locking unit (3) is the orthogonal one-tenth dihedral in both sides, a limit of the described power of determining locking unit (3) is fixedly connected with described open lower end face by screw, another side contacts with described interior picture frame (2), one side that the described power of determining locking unit (3) contacts with described interior picture frame (2) is provided with lock-screw (301), described lock-screw (301) contacts with described interior picture frame (2) through a limit of determining power locking unit (3).
3. the removable lithographic objective picture frame of the eyeglass of high position precision according to claim 2, it is characterized in that, described interior picture frame (2) with determine sidewall that power locking unit (3) contacts is provided with axial locking block (204) and radial latch segment (205), two described lock-screws (301) contact with radial latch segment (205) with described axial locking block (204) respectively through a limit of the described power of determining locking unit (3).
4. the removable lithographic objective picture frame of the eyeglass of high position precision according to claim 3, it is characterized in that, described radial latch segment (205) is cylindrical-shaped structure, described cylindrical-shaped structure one end is fixed on interior picture frame (2) sidewall, and one end contacts with described lock-screw (301).
5. the removable lithographic objective picture frame of the eyeglass of high position precision according to claim 3, it is characterized in that, described axial locking block (204) is right angle trigonometry block, a right-angle surface of described right angle trigonometry block is fixedly connected with described interior picture frame (2) sidewall, another right-angle surface is parallel with described interior picture frame (2) upper surface, and the inclined-plane of described right angle trigonometry block contacts with described lock-screw (301).
6. the removable lithographic objective picture frame of the eyeglass of high position precision according to claim 3, it is characterized in that, described axial locking block (204) comprises fixed part (208), rake (207) and L-type structure (206); Described fixed part (208) side, upper surface is fixedly connected with described interior picture frame (2) sidewall by rake (207), opposite side is fixedly connected with by the upper surface of L-type structure (206) with the described power of determining locking unit (3), and described fixed part (208) contacts with described lock-screw (301).
7. the removable lithographic objective picture frame of eyeglass of the high position precision according to claim 1-6 any one, is characterized in that, described slide rail (202) is self-lubricating abrasion-resistant material.
8. the removable lithographic objective picture frame of the eyeglass of high position precision according to claim 7, is characterized in that, the material of described slide rail (202) is teflon, polyurethane or nylon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510881287.8A CN105467548B (en) | 2015-12-04 | 2015-12-04 | The replaceable lithographic objective frame of the eyeglass of high position precision |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510881287.8A CN105467548B (en) | 2015-12-04 | 2015-12-04 | The replaceable lithographic objective frame of the eyeglass of high position precision |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105467548A true CN105467548A (en) | 2016-04-06 |
| CN105467548B CN105467548B (en) | 2018-05-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510881287.8A Active CN105467548B (en) | 2015-12-04 | 2015-12-04 | The replaceable lithographic objective frame of the eyeglass of high position precision |
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| CN (1) | CN105467548B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0779125A1 (en) * | 1995-12-14 | 1997-06-18 | SALVAGNINI ITALIA S.p.A. | A focusing head of a laser beam provided with a focusing lens for a machine for working metal and non-metal parts |
| US20020001142A1 (en) * | 2000-06-17 | 2002-01-03 | Carl-Zeiss-Stiftung | Lens system, in particular projection lens system in semiconductor lithography |
| US20020176094A1 (en) * | 2001-03-30 | 2002-11-28 | Thomas Petasch | Apparatus for mounting an optical element in an optical system |
| US20030128349A1 (en) * | 1997-07-29 | 2003-07-10 | Yasuyuki Unno | Projection optical system and projection exposure apparatus having the same |
| CN1898610A (en) * | 2003-12-23 | 2007-01-17 | 卡尔蔡司Smt股份公司 | Replacement apparatus for an optical element |
| CN103246040A (en) * | 2013-04-25 | 2013-08-14 | 中国科学院长春光学精密机械与物理研究所 | High-accuracy repeated positioning structure capable of achieving rapid changing and used in photoetching projection lens |
| CN104049473A (en) * | 2014-07-01 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Objective lens protection window of radial drawing type structure |
-
2015
- 2015-12-04 CN CN201510881287.8A patent/CN105467548B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0779125A1 (en) * | 1995-12-14 | 1997-06-18 | SALVAGNINI ITALIA S.p.A. | A focusing head of a laser beam provided with a focusing lens for a machine for working metal and non-metal parts |
| US20030128349A1 (en) * | 1997-07-29 | 2003-07-10 | Yasuyuki Unno | Projection optical system and projection exposure apparatus having the same |
| US20020001142A1 (en) * | 2000-06-17 | 2002-01-03 | Carl-Zeiss-Stiftung | Lens system, in particular projection lens system in semiconductor lithography |
| US20020176094A1 (en) * | 2001-03-30 | 2002-11-28 | Thomas Petasch | Apparatus for mounting an optical element in an optical system |
| CN1898610A (en) * | 2003-12-23 | 2007-01-17 | 卡尔蔡司Smt股份公司 | Replacement apparatus for an optical element |
| CN103246040A (en) * | 2013-04-25 | 2013-08-14 | 中国科学院长春光学精密机械与物理研究所 | High-accuracy repeated positioning structure capable of achieving rapid changing and used in photoetching projection lens |
| CN104049473A (en) * | 2014-07-01 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Objective lens protection window of radial drawing type structure |
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| Publication number | Publication date |
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| CN105467548B (en) | 2018-05-01 |
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Effective date of registration: 20190905 Address after: Room 601-10, 6th floor, No. 2, Jingyuan Beijie, Beijing Economic and Technological Development Zone, Daxing District, Beijing, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 130033 southeast Lake Road, Jilin, Changchun, No. 3888 Patentee before: Changchun Inst. of Optics and Fine Mechanics and Physics, Chinese Academy of Sci |
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