CN105444659B - The absolute transducer of linear measure longimetry is carried out using electromagnetic induction principle - Google Patents
The absolute transducer of linear measure longimetry is carried out using electromagnetic induction principle Download PDFInfo
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Abstract
A kind of new absolute transducer that linear measure longimetry is carried out using electromagnetic induction principle is claimed in the present invention；Belong to the technical field of the spatial position measuring sensor using electromagnetic principle manufacture；Functionally divide, sensor of the invention has two sets of position sensing parts, and a set of is the fine measuring part of a small range, referred to as smart addressable part；Another set of is the measuring part that resolving power is relatively low in a wide range of, referred to as thick addressable part, absolute-type position coding is completed using coarse-fine combination technique.Divide from part, including scale and slide rule, fine works code line coil component and thick coding coil component are included on slide rule；The fine works code line coil component includes the smart coil group being made up of smart magnetizing coil and smart induction coil；Thick coding coil component includes the thick line circle group being made up of thick magnetizing coil and thick induction coil；There is the rectangular slab of one layer of diamagnetic material on scale, be embedded with the two row cuboid magnetic inductive blocks with soft magnetic materials making thereon.Absolute type length measuring system can be formed after the absolute encoding sensor configuration electronic section of the present invention.Figure of abstract is the slide rule and scale schematic diagram of this sensor.
Description
Technical field
The invention belongs to sensor technical field, is the relative space position measurement being designed based on electromagnetic induction principle
Sensor.
Background technology
At present, the sensor manufactured using electromagnetic principle has widely should for decades on various instrument and equipments
With the main Types of the length measuring sensor of electromagnetic principle have：Magnetic grid, ball bar, inductosyn, their mechanical structure and
Manufacture craft is different, and excitatory different with induction mode, the highest resolving power that can reach is also different.
Excitatory part and sensing part are included with the length measuring sensor of electromagnetic induction principle design, pass through exciting circuit
Variable-current is inputted to magnetizing coil, produces the magnetic field of change so that the induction coil in this magnetic field produces induced voltage,
Induced voltage size depends on change, component shape and the material character, coil shape and magnetizing coil and sensing of exciting curent
The relative position of coil.Induced voltage is sampled and calculated, you can obtains the measurement data of relative space position.
Early stage, the degree of accuracy of measurement sensor was mainly by being machined essence due to electronics technologies horizontal limitation
Degree ensures.The development advanced by leaps and bounds with electronic device, it is accurate that measurement is improved using the systematic error compensation technology of real-time online
The method of exactness is widely used.Then, the required precision of machining is relaxed, the measurement that can also reach higher is accurate
Exactness so that the structure and processing technology of sensor can take more methods.
If expecting the effect of larger systematic error compensation, the metering system using absolute encoding is very necessary
's.So-called absolute encoding is meant that：Original state when measured value is started shooting with measuring system is unrelated, only relative with slide rule
It is relevant in the position of scale, and the measured value that different relative positions in whole measurement range obtains is also different.Due to
Measurement data and the fixed relationship of locus, so, it can be obtained exactly from compensation database according to initial measurement
The systematic error compensation value of this point, through overcompensation, can obtain the higher final measured value of the degree of accuracy.Complete sensor manufacture
Afterwards, demarcated using high-precision measuring apparatus, draw the systematic error of sensor, offset data is stored in electronic device
In, you can the systematic error compensation of real-time online is realized, ensures the degree of accuracy of measurement.
Based on above-mentioned thought, the present invention is a kind of new length measuring sensor, including two parts, a part be compared with
Long cuboid, commonly referred to as scale.Another part is shorter, commonly referred to as slide rule.In use, they are separately mounted to two
On the individual mechanical part along straight line relative translational movement, to obtain the information of two mechanical part relative positions, pass through electronic section
Processing obtains length coding numerical value.So-called coding is to provide one to each locus residing for moving parts by a kind of system
Individual corresponding numerical value, the difference of the encoded radio of two positions are exactly the measured value of distance between two positions.
In order to realize the absolute type length coding numerical value of high resolution interior in a big way, typically using the volume of coarse-fine combination
Code technology.There are two sets of longimetry parts, a set of coding for obtaining the high resolution in minizone, referred to as fine works code, claim
Exciting curent is smart exciting curent, and induction coil is smart induction coil, other to analogize.It is another set of to obtain whole length measurement range
The coding of interior relatively low resolution, it is referred to as thick coding, exciting curent is referred to as thick exciting curent, and induction coil is thick induction coil,
It is other to analogize.Due to the periodicity of fine works code, a smart encoding value possibly be present in N number of subinterval, and it is relative to obtain space
After the fine works code of position and thick coding, judged using thick coding, it may be determined which out of N number of subinterval fine works code be
Occur in individual subinterval, plus the different radixes in different sections, that is, obtain high resolution in whole length measurement range
Initial code data of absolute coding form, then by systematic error compensation, finally obtain high resolution, high accuracy it is absolute
Encoding value (measured value).
The content of the invention
The present invention is a kind of sensor that linear measure longimetry is carried out using electromagnetic induction principle, and the content of the invention is as follows：
The absolute transducer of linear measure longimetry is carried out using electromagnetic induction principle, it includes slide rule and scale；It is characterized in that：
Include fine works code line coil component and thick coding coil component on slide rule；The fine works code line coil component includes 4 by smart excitatory
The smart coil group of coil and smart induction coil composition, two row, each column two are lined up along slide rule and scale relative movement direction；Every group
Interior smart magnetizing coil and smart induction coil are spaced along relative movement direction, the fine works code line coil component, slightly encode coil
The end face of component mid-line circle magnetic core is in plane relative with scale on slide rule, and this plane is referred to as slide rule working face, another
End is fixed on the matrix of soft magnetic materials, and the matrix of soft magnetic materials is fixed on the pad of diamagnetic material, and pad is fixed on slide rule
On housing；Thick coding coil component includes 2 thick line circle groups being made up of thick magnetizing coil and thick induction coil, in slide rule with determining
On chi direction of relative movement, be separately mounted on the outside of the both sides of smart coil group, have 6 thick line circles in every group, be symmetrical with relatively
Face in parallel and vertical with the slide rule working face slide rule of moving direction, arranged along the normal direction in middle face；Face both sides respectively have 3 in slide rule
Coil, putting in order is：Thick induction coil, thick magnetizing coil, thick induction coil；The fine works code line coil component, thick line of codes
The end face of coil component coil magnetic core is on slide rule working face, and the other end is fixed on the matrix of soft magnetic materials, soft magnetism material
The matrix of material is fixed on the pad of diamagnetic material, and pad is fixed on slide rule housing；Diamagnetic material is fixed with scale matrix
Expect the rectangular flat plate made, the elongated fritter of cuboid of two row soft magnetic materials making is inlaid with rectangular flat plate, referred to as
Magnetic inductive block, magnetic conduction is block-shaped consistent in two row, and adjacent magnetic inductive block center line distance is adjacent windings center line in smart coil group in each column
Twice of distance, the number of magnetic inductive block is equal to cut lengths divided by adjacent magnetic inductive block center line distance in each column；One of magnetic inductive block
Face is in plane relative with slide rule on scale, and this plane is referred to as scale working face；Two center lines of two row magnetic inductive blocks are relative
There is a small angle in the center line on the scale working face in parallel relative movement direction, its effect is：When slide rule is relative to fixed
When chi moves, two row magnetic inductive blocks are produced relative to the thick line circle effect that face normal direction moves along slide rule respectively；Smart magnetizing coil, essence
Induction coil, the matrix of soft magnetic materials and magnetic inductive block composition can produce the part of smart induced signal；Thick magnetizing coil, thick sensing
Coil, the matrix of soft magnetic materials and magnetic inductive block composition can produce the part of thick induced signal；Slide rule and scale space position
When putting change, the amplitude of the two-way essence induced voltage signal of output is also different, and the voltage of this two-way essence induced voltage signal is entered
Row is sampled and changed, and obtains the periodicity numerical function that two independents variable are locus, Cycle Length is in adjacent magnetic inductive block
Linear distance, number of cycles N are equal to measurement range divided by Cycle Length, and the two periodic function phase differences are a quarter weeks
Phase, measurement range is divided into N subintervals, each cycle corresponds to a subinterval in measurement range；Smart magnetizing coil input is same
One smart excited signal, exported after induced voltage synthesis caused by smart induction coil, respectively as the first via, the essence sensing of the second tunnel
Signal, by the setting of the locus of the coil to producing two-way essence induced signal, the smart induced voltage of two-way output is adopted
Sample and A/D conversions, you can obtain two periodic functions；Cataloged procedure is exactly that the functional value obtained by two periodic functions calculates
Go out a numerical value relative to current location, in each subinterval, this numerical value with locus be it is one-to-one, this
Individual numerical value is exactly smart encoding value；Magnitude of voltage after thick induction coil output synthesis is the functional image of functional value, will slightly be sensed
The magnitude of voltage of coil output is as the first via, the thick induced signal output in the second road, when the first via, the thick induced signal in the second road are relative
During the consecutive variations of position, the voltage sample and A/ of ti moment in exciting curent intensity level linear change section to output signal
D is changed, and obtains two functions, because two groups of thick line circle installation sites are different, so the two has a phase difference, for each
Locus can obtain a pair of A/D transforming numericals, establish a function, and independent variable is a pair of A/D transforming numericals, functional value
It is a numerical value, this functional value forms man-to-man linear corresponding relation, the number of functional value with the position in measurement range
Should be able to meet the needs of distinguishing multiple subintervals, the usually number more than 6 times of subintervals, so far complete thick coding；Whole
In individual measurement range, thick encoding value is one-to-one with locus, by the calculating of coarse-fine combination, determines fine works yardage
It is worth subinterval corresponding to reality, plus the radix in the subinterval, you can obtain the initial absolute type position in whole measurement range
Encoded radio is put, after carrying out systematic error compensation, you can obtain absolute encoding value.
Preferably：The phase of the winding direction of the smart magnetizing coil of odd indexed and the smart magnetizing coil of even number sequence number in every group
Instead, the winding direction of the smart induction coil of odd indexed is opposite with the smart induction coil of even number sequence number in every group.
Preferably：The winding direction of two thick magnetizing coils is consistent, close to the winding of 4 thick induction coils in face in slide rule
Direction is consistent, and the winding direction of 4 thick induction coils is opposite with foregoing 4 in addition.
Preferably：Same smart excited signal is inputted after all smart magnetizing coil series windings.
Preferably：Induction coil in first row in first smart coil group and secondary series in second smart coil group produces
Induced voltage synthesis after export, as first via essence induced signal, first in the smart coil group of first row second and secondary series
Exported after induced voltage synthesis caused by induction coil in individual smart coil group, as the second tunnel essence induced signal.
Preferably：Same thick excited signal is inputted after two thick magnetizing coil series windings.
Preferably：Export after 4 thick synthesis of induced voltage caused by induction coil in first group, slightly sense as the first via
Signal, exported after 4 thick synthesis of induced voltages caused by induction coil in second group, as the thick induced signal in the second road.
Preferably：Isolated between smart coil component and thick line coil component and slide rule matrix with diamagnetic material, reduce electromagnetism and do
Disturb.
Beneficial effect：The length measuring sensor developed is absolute encoding, and this is an important advantage.Relative to
Grating measuring sensor, there is resolving power and the degree of accuracy of phase same level, but the requirement to application environment is relatively low, manufacturing process compared with
Commonly.Because scale of the present invention is simple in construction, can easily spreading, if adding the thicker linear measure longimetry of a set of resolving power
Part, measurement range can be formed up to more than ten meters of the length measuring system having compared with high resolution.In some application scenarios
Relatively other types of sensor has certain advantage.
Brief description of the drawings
Fig. 1 is slide rule (a) and scale (b) working face split schematic diagram, and A1, A2, A3, A4 are 4 groups of essence coils, and B is thick line
Circle, C is slide rule housing, and D is the cuboid block (abbreviation magnetic inductive block) for inlaying two row soft magnetic materials on scale, and E is diamagnetic material
Layer, F is scale matrix.
Fig. 2 is that slide rule and scale install rear relative position schematic diagram.
Fig. 3 is that slide rule and scale install rear coil and magnetic inductive block relative position schematic diagram.
Fig. 4 is that magnetic inductive block arranges schematic diagram.
Fig. 5 is smart coil (a) and thick line circle (b) schematic diagram.
Fig. 6 is smart coil connection diagram.
Fig. 7 is coil winding methods (a), (b) schematic diagram.
Fig. 8 is smart coil flux change schematic diagram.
Fig. 9 is smart coil electromotive force schematic diagram.
Figure 10 (a), (b) are excited signal and the induced signal schematic shapes of some position.
Figure 11 is that locus is independent variable, and the numerical value that the smart induced voltage at ti moment is changed out is the functional arrangement of functional value
Picture, Ds and Dc points refer to the two functions.
Figure 12 is thick line circle flux change schematic diagram.
Figure 13 (a), (b) are that locus is independent variable, and the magnitude of voltage of the thick induction coil output at ti moment is functional value
Functional image.
Embodiment
Referring to Fig. 1, the sensor of linear measure longimetry is carried out using electromagnetic induction principle includes scale and slide rule, is wrapped on slide rule
Include fine works code line coil component and thick coding coil component；The fine works code line coil component includes 4 and felt by smart magnetizing coil and essence
The smart coil group for answering coil to form, two row, each column two are lined up along slide rule and scale relative movement direction；The excitatory line of essence in every group
Circle and smart induction coil are spaced along relative movement direction, and the end face of wound core is in relative with scale on slide rule and put down
On face, this plane is referred to as slide rule working face, and the other end is fixed on the matrix of soft magnetic materials, and the matrix of soft magnetic materials is fixed on anti-
On the pad of magnetic material, pad is fixed on slide rule housing；The winding direction and idol of the smart magnetizing coil of odd indexed in every group
Number sequence number smart magnetizing coil is on the contrary, the winding direction of the smart induction coil of odd indexed and the essence sense of even number sequence number in every group
Answer the opposite of coil.
Thick coding coil component includes 2 thick line circle groups being made up of thick magnetizing coil and thick induction coil, slide rule with
On scale direction of relative movement, it is separately mounted on the outside of the both sides of smart coil group, there are 6 thick line circles in every group, be symmetrical with and phase
Face in slide rule parallel to moving direction and vertical with slide rule working face, arranged along the normal direction in middle face；Face both sides respectively have 3 in slide rule
Individual coil, putting in order is：Thick induction coil, thick magnetizing coil, thick induction coil；The end face of wound core is in slide rule work
Make on face, the other end is fixed on the matrix of soft magnetic materials, and the matrix of soft magnetic materials is fixed on the pad of diamagnetic material, pad
It is fixed on slide rule housing；The winding direction of two thick magnetizing coils is consistent, and 4 thick induction coils in face twines in close slide rule
Consistent around direction, the winding direction of 4 thick induction coils is opposite with foregoing 4 in addition.
The rectangular flat plate of diamagnetic material making is fixed with scale matrix, two row are inlaid with rectangular flat plate with soft
The elongated fritter of cuboid that magnetic material makes, abbreviation magnetic inductive block, magnetic conduction is block-shaped consistent in two row, in each column in adjacent magnetic inductive block
Linear distance is twice of adjacent windings center line distance in smart coil group, and the number of magnetic inductive block is equal to cut lengths divided by phase in each column
Adjacent magnetic inductive block center line distance；One face of magnetic inductive block is in plane relative with slide rule on scale, and this plane is referred to as scale work
Make face；Two center lines of two row magnetic inductive blocks have one small relative to the center line on the scale working face in parallel relative movement direction
Angle, its effect are：When slide rule moves relative to scale, two row magnetic inductive blocks are produced relative to the thick line circle face along slide rule respectively
The effect of normal direction movement.
Smart magnetizing coil, smart induction coil, the matrix of soft magnetic materials and magnetic inductive block composition can produce smart induced signal
Part；Thick magnetizing coil, thick induction coil, the matrix of soft magnetic materials and magnetic inductive block composition can produce the portion of thick induced signal
Part.
Same smart excited signal is inputted after all smart magnetizing coil series windings；First smart coil group and second in first row
Exported after induced voltage synthesis caused by induction coil in row in second smart coil group, as first via essence induced signal,
After induced voltage synthesis caused by induction coil in the smart coil group of first row second and secondary series in first smart coil group
Output, as the second tunnel essence induced signal, it is so designed that it is to reduce slide rule and two work during scale relative translational movement
Influence of the Parallel errors of plane to the fine works code degree of accuracy.
Same thick excited signal is inputted after two thick magnetizing coil series windings；In first group caused by 4 thick induction coils
Exported after induced voltage synthesis, as the thick induced signal of the first via, 4 thick pressings of induced electricity caused by induction coil in second group
Into rear output, as the thick induced signal in the second road；The symmetrical of thick line circle is to reduce slide rule and scale relative translational movement
Influence of the straightness error to the thick coding degree of accuracy.
When slide rule changes with scale relative tertiary location, the amplitude of the two-way essence induced voltage signal of output is also different, right
The voltage of this two-way essence induced voltage signal is sampled and changed, and obtains the periodicity numerical value that two independents variable are locus
Function, Cycle Length are adjacent magnetic inductive block center line distances, and number of cycles N is equal to measurement range divided by Cycle Length, the two weeks
Phase function phase difference is a quarter cycle.Measurement range is divided into N subintervals.Utilize a pair of letters of two obtained functions
The ratio of numerical value, by calculating, a numerical value can be obtained, as fine works code；In whole measurement range, smart encoding value becomes
Change is periodic, obtains this numerical value and is likely to occur in N number of subinterval；Two are obtained after being sampled to thick signal
Function, using a pair of functional values of the two functions, by calculating, a numerical value is obtained, as thick coding；In entirely measurement model
In enclosing, thick encoding value is one-to-one with locus, by the calculating of coarse-fine group of sum, it is determined that smart encoding value is actually right
The subinterval answered, plus the radix in the subinterval, you can the initial absolute-type position encoded radio in whole measurement range is obtained,
After carrying out systematic error compensation, you can obtain the absolute encoding value of final high accuracy.
Embodiment 1
The present invention illustrates embodiment by the concrete instance that a measurement length range is 500 millimeters.Ginseng
See that A is signified in Fig. 1,4 smart coil groups have been made on slide rule, smart magnetizing coil and smart induction coil are included in every group, essence swashs
Magnetic coil and smart induction coil are spaced, and the adjacent windings centre distance in every group is 2 millimeters, wound core transverse shape
It is elongated shape, the end face of wound core is on the working face of slide rule, and the other end is fixed on the rectangular flat of soft magnetic materials
Upper (signified referring to Fig. 5 W), the rectangular flat of soft magnetic materials is fixed on the pad of diamagnetic material, and pad is fixed on slide rule shell
On body.
Referring to Fig. 7, the winding direction phase of J1, J3, J5, J7 essence magnetizing coil and J2, J4, J6 essence magnetizing coil in every group
Instead, G1, G3, G5 essence induction coil are opposite with the winding direction of G2, G4, G6 essence induction coil in every group.Referring to Fig. 6, Suo Youjing
Magnetizing coil inputs same smart excited signal.It is defeated after induced voltage synthesis caused by smart induction coil in A1 and A4 groups
Go out, as first via essence induced signal, exported after induced voltage synthesis caused by the smart induction coil in A2 and A3 groups, as
Second tunnel essence induced signal.
It is signified referring to B in Fig. 1, two thick line circle groups are made on slide rule, every group has 6 thick line circles, 6 thick line circles pair
Claim in the middle face of slide rule, outwards being put in order along the normal direction in the middle face of slide rule is：Thick induction coil, thick magnetizing coil, thick sensing
Coil.The centre distance of thick magnetizing coil and thick induction coil in every group is 4 millimeters, and wound core transverse shape is elongated
Bar shaped, the end face of wound core are on the working face of slide rule, and the other end is fixed on the rectangular flat of soft magnetic materials (ginseng
See that Fig. 5 Q is signified), the rectangular flat of soft magnetic materials is fixed on the pad of diamagnetic material, and pad is fixed on slide rule housing.
Referring to Fig. 7, the winding direction of two thick magnetizing coils in every group is consistent, 2 thick sensings close to face in slide rule
The winding direction of coil is consistent, and the winding direction of 2 thick induction coils in outside is opposite with 2 of inner side.2 thick magnetizing coils
Series winding, 4 thick induction coils are contacted, and induced voltage caused by first group is as the thick induced signal of the first via, caused by second group
Induced voltage is as the thick induced signal in the second road.
It is signified referring to E in Fig. 1, the plane layer made of diamagnetic material is housed on scale matrix, in this plane
The two elongated magnetic inductive blocks of row cuboid (signified referring to D in Fig. 1) made of soft magnetic materials are embedded with layer.It is two neighboring in every group to lead
Magnetic patch centre distance is 4 millimeters, and then fine works code Cycle Length is 4 millimeters, and 500 millimeters of measurement range is divided into 125 sons
Section, periodicity N are equal to 125.Referring to Fig. 4, two center lines of two row magnetic inductive blocks have one relative to the center line of scale working face
Individual small angle theta1, θ1It is the functional value of 2/500 arc tangent.
Referring to Fig. 2, Fig. 3, after slide rule installs with scale, working face and magnetic inductive block place where wound core termination
Working face to right, gap very little, general value is between 0.1 to 0.5 millimeter.
Operation principle is set forth below, when smart exciting curent is by smart magnetizing coil, slide rule is different from the relative position of scale
It is exactly that magnetic inductive block is different from the relative position of smart coil, causes the distribution of the change rate of strength of variation magnetic field caused by magnetizing coil
Difference, cause the variation rate of magnetic flux in induction coil also different, the maximum of the final two-way induced voltage signal for export
The difference of amplitude.
Referring to Figure 10, smart exciting curent from negative maximum into positive maximum linear course, in smart magnetizing coil
Magnetic flux change.Referring to Fig. 8, Fig. 9, said under the relative position situation different from 4 of magnetic inductive block from one group of essence coil
The distribution in bright magnetic field and the situation of induced voltage.Due to smart magnetizing coil J1, J3, J5, J7 and J2, J4, J6 winding the number of turns it is identical,
In the opposite direction, so, caused magnetic field intensity is identical, in opposite direction.It is that magnetic inductive block is in the excitatory circle of essence and essence shown in Fig. 8 (1)
The underface in induction coil centre position, now variation rate of magnetic flux reaches maximum in smart induction coil, so as to the smart line of induction
Electromotive force on circle is maximum, referring to Fig. 9 (1), the essence sensing that can be not zero from the exit of this smart induction coil of group
Voltage；It is the underface that magnetic inductive block be in smart induction coil shown in Fig. 8 (2), magnetic flux does not change in induction coil, so as to smart
Electromotive force on induction coil is zero, and the voltage of output is also zero；It is that magnetic inductive block is in smart induction coil and essence shown in Fig. 8 (3)
The underface in magnetizing coil centre position, now variation rate of magnetic flux reaches maximum in smart induction coil, so as to the smart line of induction
Electromotive force on circle is maximum, referring to Fig. 9 (2), can be obtained and situation shown in Fig. 8 (1) from the exit of this group of induction coil
Induced voltage in opposite direction down；It is the underface that magnetic inductive block is in smart magnetizing coil shown in Fig. 8 (4), magnetic in smart induction coil
Logical total amount does not change, and so as to which the electromotive force on induction coil is 0, the voltage of output is also zero.Referring to Figure 10, in exciting curent
The ti moment in intensity level linear change section is sampled to output voltage and A/D is changed, and a numerical value is obtained, when slide rule and scale
Relative position consecutive variations when, just obtain the periodic function that an independent variable is locus.
By the setting of the locus of the coil to producing two-way essence induced signal, to the smart induced voltage of two-way output
Sampling and A/D conversions, you can two periodic functions are obtained, the cycle is 4 millimeters, and phase difference is a quarter cycle (1 millimeter),
The function curve of a cycle shown in Figure 11.Cataloged procedure is exactly to be calculated by obtained functional value relative to current location
One numerical value, in each subinterval, this numerical value is one-to-one with locus, and this numerical value is exactly fine works yardage
Value.In the present state-of-the technology, the resolving power being readily obtained in 4 millimeters is higher than 0.001 millimeter of fine works code.Due to the cycle
Property, so this obtained numerical value correspond to be respectively at N number of position in N number of subinterval.Also need to complete slightly to encode, ability
It is current real space position to determine which of N number of locus.
Referring to Fig. 4, because two center lines of two row magnetic inductive blocks have a small angle relative to the center line of scale working face
θ1, when the relative position of slide rule and scale changes along the X direction, two row magnetic inductive blocks are produced relative to thick line circle respectively along+Y
With the effect of two opposite direction motions of-Y, relative to 500 millimeters of the range of movement of X-direction, the scope of Y-direction is 2 millimeters.
The relative position of magnetic inductive block and thick line circle is by the change of the magnetic flux influenceed in thick induction coil.
Referring to Figure 12, the change in magnetic field is illustrated by one group of thick line circle relative position situation different from 3 of magnetic inductive block
Change.In thick exciting curent from bearing maximum into positive maximum linear course, thick magnetizing coil I2-1 and I2-2 produce magnetic
.In the case of shown in Figure 12 (1), the rate of change of magnetic flux is big in U2-2 and the thick induction coils of U2-3, the induced voltage of output
The rate of change of magnetic flux is small in height, U2-1 and the thick induction coils of U2-4, and the induced electricity of output forces down；Because U2-2, U2-3 slightly feel
Answer the winding direction of coil and the thick induction coil of U2-1, U2-4 on the contrary, the output of 4 thick induction coils synthesize after output voltage not
It is zero；In the case of shown in Figure 12 (2), the rate of change of magnetic flux is identical in the thick induction coil of U2-1, U2-2, U2-3, U2-4, and 4
Output voltage is zero after the output synthesis of individual thick induction coil；In the case of shown in Figure 12 (3), U2-2 and the thick induction coils of U2-3
The rate of change of interior magnetic flux is small, and the induced electricity of output forces down, and the rate of change of magnetic flux is big in U2-1 and the thick induction coils of U2-4, defeated
The induced voltage gone out is high, and output voltage is not zero after the output synthesis of 4 thick induction coils, direction and situation shown in Figure 12 (1)
When it is opposite.It is functional arrangement of the output voltage values after 4 thick induction coil outputs at ti moment synthesize for functional value shown in Figure 13
Picture.The output combination of first group of thick induction coil is exported as the thick induced signal of the first via, second group of thick induction coil it is defeated
Go out combination as the thick induced signal output in the second road.When relative position consecutive variations, in exciting curent intensity level linear change
The ti moment in section changes to the voltage sample and A/D of output signal, obtains two functions, independent variable is slide rule with respect to scale
Locus, functional value is data, because two groups of thick line circle installation sites are different, so they have a phase difference, referring to
Figure 13 right figure, a pair of A/D transforming numericals can be obtained for each locus.A function is established, independent variable is
A pair of A/D transforming numericals, functional value are a numerical value, and this functional value forms man-to-man linear with the position in measurement range
Corresponding relation, the number of functional value should be able to meet the needs of distinguishing 125 subintervals, the usually number more than 6 times of subintervals,
So far thick coding is completed.This resolving power slightly encoded is very low, in general, 5000 volumes is obtained in a cycle
Code value easily realizes, so, it is added without in the case of the 3rd group of thicker coded system, reduces θ1Point slightly encoded with increase
Power is distinguished, 3 meters of absolute coding scope can be reached.
Only one locus in one thick corresponding measurement range of coding, can determine that fine works code is right according to this position
Which is current real space position in the N number of locus answered.Fine works code is plus corresponding to subinterval where the position
After radix, this obtained numerical value is exactly the initial code value of the absolute coding form of the locus in measurement range.
In simple terms, in measurement space, when slide rule is located relative to each locus of scale, by sensing
Voltage sample, handle and carry out calculating and can obtain a numerical value, this numerical value and locus be it is one-to-one and
It is dull.The distance of two positions is exactly the difference of absolute coding value corresponding to them.
Due to the error of mechanical Form and position error and electronic system signal transacting caused by manufacturing process, initial code value is utilized
During computational length measured value, systematic error be present.Using other types of high-precision length measurement device (such as laser length
Measuring system) initial code is demarcated, systematic error data are obtained, by the deposit of this data and the supporting ministry of electronics industry of sensor
In part, real-time online compensation is carried out, you can obtain the absolute encoding of high accuracy.So as to obtain the linear measure longimetry of high accuracy
Data.
The effect of longer scale can be obtained after more scales are spliced into, adds coded system thicker all the way, so that it may
To meet the needs of wide-measuring range.Scale two row magnetic inductive block is connected close to end during spreading, is more distally connected, so may be used
To keep the continuity of the sampling curve of thick signal.Other correlation techniques are fairly simple, no longer illustrate.
The structure design carried out to improve the stability of coded data is simply introduced below.Referring to Fig. 2, slide rule is with determining
During chi relative translational movement, it is not preferable translation when causing slide rule to be relatively moved with scale due to machining error, can produces
The raw micro-displacement error being perpendicularly to the direction of movement and the minor rotation error around three reference axis, it is specifically：The error delta of Y-direction
Y, the error delta Z of Z-direction, the rotation error Δ β around X-axis, the rotation error Δ α around Y-axis, rotation error Δ θ about the z axis.
Due to utilizing the ratio of functional value in calculating process, so, error delta Z causes zooming in or out for numerical value, for
Ratios affect very little, Δ Z can be controlled in less scope, its influence to measurement accuracy can be ignored.Due to essence
The end face of wound core elongate in shape is parallel to Y-direction, and influences of the Δ Y to smart induced signal can be ignored, due to smart coil
Orientation is parallel with moving direction, and error is higher-order shear deformation relative to Δ θ caused by influences of the Δ θ to smart induced signal,
It can be ignored.Referring to Figure 13, error delta Y causes the change of 4 induction coil magnetic flux, because thick line circle is relative to cunning
Face symmetrical placement in chi, the variation delta U1 and U2- that U2-1 caused by error delta Y is exported after being synthesized with the coil-induced voltages of U2-2
1 synthesized with the coil-induced voltages of U2-2 after the variation delta U2 absolute value that exports it is close, symbol is on the contrary, after signal combination, base
This counteracting.Due to produce two smart induced signals the smart coil group of two couples diagonal distribution, after signal combines, Δ α and
The change of each smart induced voltage can be with basic neutralisation caused by Δ β.Because the coil in two groups of thick line circles is relative to slide
Face symmetrical placement in chi, after signal combines, the change of the thick induced voltage of each group caused by Δ β can be with basic neutralisation.To sum up
Described, for the sensor of the design, kinematic error influences little on accuracy of measurement.
Claims (5)
1. carrying out the absolute transducer of linear measure longimetry using electromagnetic induction principle, it includes slide rule and scale；It is characterized in that：
Include fine works code line coil component and thick coding coil component on slide rule；The fine works code line coil component includes 4 by the excitatory line of essence
The smart coil group of circle and smart induction coil composition, two row, each column two are lined up along slide rule and scale relative movement direction；In every group
Smart magnetizing coil and smart induction coil are spaced along relative movement direction, the fine works code line coil component, slightly encode coil portion
The end face of part coil magnetic core is in plane relative with scale on slide rule, and this plane is referred to as slide rule working face, the other end
It is fixed on the matrix of soft magnetic materials, the matrix of soft magnetic materials is fixed on the pad of diamagnetic material, and pad is fixed on slide rule shell
On body；Thick coding coil component includes 2 thick line circle groups being made up of thick magnetizing coil and thick induction coil, in slide rule and scale
On direction of relative movement, it is separately mounted on the outside of the both sides of smart coil group, there are 6 thick line circles in every group, is symmetrical with and is moved with relative
Face in parallel and vertical with the slide rule working face slide rule in dynamic direction, the normal direction arrangement in face along slide rule；Face both sides respectively have 3 in slide rule
Individual coil, putting in order is：Thick induction coil, thick magnetizing coil, thick induction coil；Diamagnetic material is fixed with scale matrix
The rectangular flat plate of making, the elongated fritter of cuboid of two row soft magnetic materials making is inlaid with rectangular flat plate, is referred to as led
Magnetic patch, magnetic conduction is block-shaped consistent in two row, and adjacent magnetic inductive block center line distance is adjacent windings center line distance in smart coil group in each column
From twice, the number of magnetic inductive block is equal to cut lengths divided by adjacent magnetic inductive block center line distance in each column；One face of magnetic inductive block
On scale in the plane relative with slide rule, this plane is referred to as scale working face；Two center lines of two row magnetic inductive blocks relative to
Center line on the scale working face in parallel relative movement direction has a small angle, and its effect is：When slide rule is relative to scale
When mobile, two row magnetic inductive blocks are produced relative to the thick line circle effect that face normal direction moves along slide rule respectively；Smart magnetizing coil, essence sense
Coil, the matrix of soft magnetic materials and magnetic inductive block composition is answered to produce the part of smart induced signal；Thick magnetizing coil, the thick line of induction
Circle, the matrix of soft magnetic materials and magnetic inductive block composition can produce the part of thick induced signal；Slide rule and scale relative tertiary location
During change, the amplitude of the two-way essence induced voltage signal of output is also different, and the voltage of this two-way essence induced voltage signal is carried out
Sample and A/D is changed, obtain the periodicity numerical function that two independents variable are locus, Cycle Length is in adjacent magnetic inductive block
Linear distance, number of cycles N are equal to measurement range divided by Cycle Length, and the two periodic function phase differences are a quarter weeks
Phase, measurement range is divided into N subintervals, each cycle corresponds to a subinterval in measurement range；
Four smart magnetizing coils input same smart excited signal, are exported after induced voltage synthesis caused by smart induction coil, the
Smart induction coil in smart induction coil and secondary series in one row in first smart coil group in second smart coil group produces
Induced voltage synthesis after export, as first via essence induced signal, the smart induction coil in the smart coil group of first row second
With the smart induction coil in first in secondary series smart coil group caused by induced voltage synthesis after export, as the second tunnel essence feel
Induction signal, by the setting of the locus of the coil to producing two-way essence induced signal, to the smart induced voltage of two-way output
Sampling and A/D conversions, you can obtain two periodic functions；Cataloged procedure is exactly the functional value meter obtained by two periodic functions
Calculate a numerical value relative to current location, in each subinterval, this numerical value with locus be it is one-to-one,
This numerical value is exactly smart encoding value；
Magnitude of voltage after thick induction coil output synthesis is the functional image of functional value, the thick line of induction in first thick line circle group
Exported after induced voltage synthesis caused by circle, as the thick induced signal of the first via, thick induction coil production in second thick line circle group
Exported after raw induced voltage synthesis, as the thick induced signal in the second road, when the first via, the thick induced signal relative position in the second road
During consecutive variations, the voltage sample and A/D of corresponding moment in exciting curent intensity level linear change section to output signal
Conversion, obtains two functions, because two thick line circle group installation sites are different, so the two has a phase difference, for each
Individual locus can obtain a pair of A/D transforming numericals, establish a function, and independent variable is a pair of A/D transforming numericals, function
Value is a numerical value, and this functional value forms man-to-man linear corresponding relation, of functional value with the position in measurement range
Number should be able to meet the needs of distinguishing multiple subintervals, so far complete thick coding；In whole measurement range, thick encoding value with
Locus is one-to-one, by the calculating of coarse-fine combination, it is determined that subinterval corresponding to smart encoding value reality, plus this
The radix in subinterval, you can obtain the initial absolute-type position encoded radio in whole measurement range, carry out systematic error compensation
Afterwards, you can obtain final absolute encoding value.
2. the absolute transducer according to claim 1 that linear measure longimetry is carried out using electromagnetic induction principle, it is characterized in that：
The winding direction of the smart magnetizing coil of odd indexed and the smart magnetizing coil of even number sequence number in every group are on the contrary, odd number sequence in every group
Number smart induction coil winding direction it is opposite with the smart induction coil of even number sequence number.
3. the absolute transducer according to claim 1 that linear measure longimetry is carried out using electromagnetic induction principle, it is characterized in that：
The winding direction of two thick magnetizing coils is consistent, and the winding direction of 4 thick induction coils in face is consistent in the slide rule, and in addition 4
The winding direction of individual thick induction coil is opposite with foregoing 4.
4. the absolute transducer according to claim 1 that linear measure longimetry is carried out using electromagnetic induction principle, it is characterized in that：
Same thick excited signal is inputted after two thick magnetizing coil series windings.
5. the absolute transducer according to claim 1 that linear measure longimetry is carried out using electromagnetic induction principle, it is characterized in that：
Isolated between smart coil component and thick line coil component and slide rule matrix with diamagnetic material, reduce electromagnetic interference.
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| CN209605843U (en) | 2019-04-11 | 2019-11-08 | 郝佳 | Inductive position measurement sensor |
| CN111193357B (en) * | 2020-01-14 | 2022-06-28 | 连云港杰瑞电子有限公司 | Induction type absolute angle sensor |
| CN112919321A (en) * | 2021-02-04 | 2021-06-08 | 上海海事大学 | Detection apparatus for non-contact measurement synchronous error |
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