CN105324688B - Modularized optical device for scanning engine - Google Patents
Modularized optical device for scanning engine Download PDFInfo
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- CN105324688B CN105324688B CN201480034451.5A CN201480034451A CN105324688B CN 105324688 B CN105324688 B CN 105324688B CN 201480034451 A CN201480034451 A CN 201480034451A CN 105324688 B CN105324688 B CN 105324688B
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- axle
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0085—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with both a detector and a source
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses a kind of optical-electric module (130,148), the optical-electric module includes light-beam transmitter (104) and receiver (114), the light-beam transmitter sends at least one light beam along beam axis, receiver sensing is by the light collecting axle receive of the module along the receiver, and the collection axle is parallel to the beam axis in module.Beam combining optical device (142,150,170) guides light beam and the light received so that the beam axis is aligned with the collection axle of module-external.Beam combining optical device includes multiple faces, the plurality of face comprises at least the first face (144,160,172) for being arranged to internal reflection and the second face (146 including beam splitter (158), 151), the beam splitter intersects with both beam axis and collection axle.
Description
Technical field
It is used to project the method and apparatus with optical radiation capture, and more particularly to optics present invention relates generally to a kind of
Scanning device.
Background technology
Various methods are well known in the art, and are surveyed and drawn for optics 3D, that is, are passed through the optical imagery of process object
To generate the 3D profiles to the surface of elephant.This 3D profiles are also referred to as 3D figures, depth map or depth image, and 3D mappings are also referred to as
Surveyed and drawn for depth.As the term " optics " used in present patent application and claim and " light " refer to that any or all is visible
Electromagnetic radiation in wave-length coverage, infrared wavelength range and UV wavelength range.
U.S. Patent Application Publication 2011/0279648 describes a kind of method for being used to construct detected object 3D expressions, bag
Include using camera to capture the 2D images of detected object.This method is additionally included in the modulated illumination light of detected object scanning overhead
Beam to irradiate multiple target areas of detected object one at a time, and measurement comes since each target area in target area
In terms of the modulation of the light of the illuminating bundle of domain reflection.Illuminating bundle is scanned using moving lens optical beam scanner, and uses photoelectricity
Detector is come in terms of measuring modulation.In terms of this method also includes the modulation for each target area measurement being based upon in target area
In terms of calculating depth, and make depth aspect associated with the respective pixel of 2D images.
United States Patent (USP) 8,018,579 describes a kind of three-dimensional imaging and display system, wherein passing through measurement according to its phase shift
The path length of amplitude modulation scanning light beam inputs to detect the user in imaging volume optically.Present on being detected
The visual pattern user feedback of user's input.
United States Patent (USP) 7,952,781 (the disclosure of which is herein incorporated by reference) describes a kind of side of scanning light beam
Method and a kind of method of manufacture MEMS (MEMS) (may be incorporated into scanning device).
U.S. Patent Application Publication 2012/0236379 describes a kind of LADAR systems scanned using MEMS.Scanning mirror
Including the substrate for being patterned to include mirror region, the framework around mirror region and the base portion around framework.One group of actuator is used
In coming revolving mirror region relative to framework around first axle, and second group of actuator rotates around the second axle relative to substrate
Framework.Semiconductor processing techniques can be used to manufacture scanning mirror.The driver of scanning mirror can use be used for operate the mirror for
Carry out the backfeed loop of triangular motion.Some embodiments of scanning mirror can be used for the natural user interface of computing system
LADAR systems.
Automobile is once supported by SICK AG (Hamburg, Germany (Hamburg, Germany)) " MiniFaros " alliances coordinated
Work in terms of the new laser scanner of application program.There are more details can use on minifaros.eu websites.
The content of the invention
Invention described below embodiment provides a kind of for beam emissions and the improved device received and side
Method.
Therefore, according to an embodiment of the invention, there is provided a kind of optical-electric module, the optical-electric module include light-beam transmitter and
Receiver, the light-beam transmitter are configured as sending at least one light beam along beam axis, and the receiver is configured as sensing by mould
The light collecting axle receive of the block along receiver, the collection axle is parallel to the beam axis in module.Beam combining optical device by with
It is set to guiding light beam and the light received so that the collection axle of the beam axis and module-external is aligned, the beam combining optical device
Part includes multiple faces, and the plurality of face comprises at least the first face for being arranged to internal reflection and the second face including beam splitter, should
Beam splitter intersects with both beam axis and collection axle.
In certain embodiments, the beam combining optical device includes the prism with multiple faces, and wherein beam axis is with most
Entering angle near the small deviation angle and angle is left to enter and leave the face of prism.In the disclosed embodiment, the first face and
Second face is parallel to each other, and both beam axis and collection axle pass through the second face in different corresponding positions.
In the disclosed embodiment, the module includes micro-optical substrate, and light-beam transmitter includes laser pipe
Core, and receiver includes detector tube core, the module includes micro-optical substrate, and laser tube core and the detector tube core
It is installed on micro-optical substrate.
In certain embodiments, the module includes the filter being formed on a face in face, to exclude light beam hair
The light received outside the emission band of emitter.Alternatively or alternatively, beam splitter includes the polarization beam apparatus on the second face
Coating.The beam combining optical device may include at least one lens, and at least one lens are configured as making at least one swashing
Beam collimation, and the light received is focused on detector tube core.
In one embodiment, multiple faces include the 3rd face, the beam axis and the beam axis of the collection axle on the 3rd face
The opening position shared with both axles are collected leaves module by the 3rd face.
In the disclosed embodiment, optical scanning head includes scanning mirror and above-mentioned module, and the scanning mirror is configured as
Both scanning area scanning overhead beam axis and collection axle.
According to an embodiment of the invention, a kind of optical means is additionally provided, the optical means is included along beam axis from photoelectricity
Light-beam transmitter in module sends at least one light beam towards scanner.Light is received from scanner along axle is collected, the collection axle is put down
Row is in the beam axis in optical-electric module.Using beam combining optical device come to scanner guide light beam and the light that is received and
From scanner guiding light beam and the light received so that the beam axis is aligned with the collection axle at scanner, light beam combination light
Learning device includes multiple faces, and the plurality of face comprises at least the first face for being arranged to internal reflection and second including beam splitter
Face, the beam splitter intersect with both beam axis and collection axle.
In the disclosed embodiment, this method is come in scanning area scanning overhead beam axis and receipts including the use of scanner
Collect both axles, wherein sending at least one light beam includes sending light pulse, and wherein receive light and travelled to and fro between including measurement pulse
The corresponding flight time of object in scanning area.
With reference to accompanying drawing according to the present invention hereafter will be more fully understood to the detailed description of embodiments of the invention, attached
In figure：
Brief description of the drawings
Fig. 1 is the schematic illustration for showing optical scanning head according to an embodiment of the invention；
Fig. 2A and 2B is the schematic side elevation of optical-electric module according to another embodiment of the present invention；
Fig. 3 A are the schematic side elevations of optical-electric module according to an embodiment of the invention；
Fig. 3 B are the schematic isometric views of Fig. 3 A module；
Fig. 4 is the schematic side elevation of prism according to an embodiment of the invention；And
Fig. 5 is the schematic side elevation of prism according to another embodiment of the present invention.
Embodiment
U.S. Patent application 13/766,811 (such as US 2013/0206967, it is disclosed in August in 2013 15) describes
The depth engine of 3D surveying and mapping datas is generated by measuring the flight time of scanning light beam.Optical transmitting set such as laser is to scanning
Mirror guides the short pulse of light, and the scanning mirror is in scene scanning overhead light beam interested.Such as sensitive high speed optoelectronic two of receiver
Pole pipe (for example, avalanche photodide) receives the light returned via same scanning mirror from scene.Process circuit measurement is scanning
In each point at transmitting receive light pulse between time delay.The distance that this delay instruction light beam is advanced, so as to refer to
Show the depth of the object at the point.Process circuit uses the depth data so extracted when producing the 3D figures of scene.
The various possible configurations of depth engine are described in U.S. Patent application 13/766,811.Disclosed in several
Embodiment using single scanning mirror come transmit by transmitter export light beam, and towards receiver guiding (generally passing through reflection) return
The light returned.Therefore, depth engine optics includes beam combining optical device, beam combining optical device guiding output light
Beam and the light received so that the beam axis of output beam is aligned with the collection axle of the light beam received.Beam combining optical device
Part generally includes multiple surfaces, and the plurality of surface is for example turned to beam splitting, light beam and the function of wavelength filtering.It is often necessary to
With together with transmitter, receiver and scanning mirror itself carefully to Semi-optical surface, to ensure depth engine normal work；And
The skew being aligned during operational depth engine may cause serious performance loss.
The embodiment of the present invention described below be implemented in optical-electric module described in U.S. Patent application 13/766,811 and
On beam combining optical device, and add for strengthening the alignment easiness of this generic module and the feature of stability.At these
In embodiment, optical-electric module includes light-beam transmitter and receiver, and the light-beam transmitter sends at least one laser along beam axis
Beam, the light that receiver sensing is received by the module along axle is collected.Beam axis and collection axle are independent and put down in module
OK.Beam combining optical device guides light beam and the light received so that in module-external, the receipts of the beam axis and module-external
Collect axle alignment (so as to using same scanning mirror come in given scanning area scanning overhead beam axis and collection both axle).
In the disclosed embodiment, beam combining optical device includes prism element such as with multiple faces.Such as figure
Shown, a face is arranged to internal reflection, enables to be aligned by the reflection of an axle in the axle in element
Beam axis and collection axle.Second face of element includes the beam splitter intersected with both beam axis and collection axle.As described below, can set
Count and position beam recombination prism so that beam axis is with the entering angle near minimum deviation and leaves angle to enter and leave rib
The face of mirror.This feature of prism promotes to collimated light beam and strengthens what module deviateed relative to possible alignment during use
Stability.
Fig. 1 schematically shows the optics used in the system described in above-mentioned U.S. Patent application 13/766,811
The element of probe 40.Optical scanning head 40 is shown here as and is described as pair that the specific of embodiments of the invention can be applied
The explanation of the principle of scanner.The optical scanning head includes a large amount of optical components, it is often necessary to which to be carefully directed at them could just
Often work；And using shown in Fig. 3-Fig. 5 and component type as described below is come to replace these parts be probably to have
Profit.
However, the principle of the present invention is not limited to such scanner.On the contrary, can be with transmitting and the aiming received
Optical-electric module and light beam based on these principles are applied in other species optical launcher/receivers of line (or other are parallel) axle
Combined optical device.
Transmitter 44 in first 40 sends light pulse towards polarization beam apparatus 60.Generally, only in transmitter 44 in beam splitter
Light path immediately below zonule be applied for reflection, and the remainder of beam splitter is complete in the wave-length coverage launched
All-transparent (or there is ARC even for the scope), to allow returned light by reach receiver 48.Come
The light of spontaneous emitter 44 reflects from beam splitter 60, is then reflected from folding mirror 62 towards scanning micro-mirror 46.MEMS is swept
Device 64 is retouched with desired scan frequency and amplitude scanning micro-mirror in the x-direction and the z-direction.In U.S. Patent application 13/766,811
In describe the details of micro mirror and scanner, and beyond the scope of present patent application.
The optical pulse strikes returned from scene to micro mirror 46, the micro mirror via folding mirror 62 by beam splitter 60 come
Reflected light.Receiver 48 senses electric pulse corresponding to returned light pulse and generation.In order to improve the sensitivity of detection, receive
The hole of device 48 and the gross area of beam splitter 60 are noticeably greater than the area of the transmitting beam exported by transmitter 44.Connect to be restricted to reach
The amount of the unwanted ambient light of device 48 is received, can may be with being incorporated to band on the identical substrate of beam splitter 60 in receiver path
Logical filter (not shown in this figure).
Fig. 2A and 2B is the optical-electric module according to another embodiment described in above-mentioned U.S. Patent application 13/766,811
130 schematic side elevation.Module 130 may replace transmitter 44, receiver 48, beam splitter in optical scanning head 40 (Fig. 1)
60 and mirror 62.Figure shown in Fig. 2 B have rotated 90 ° relative to Fig. 2A so that the project that place is seen in front of Fig. 2A view exists
Fig. 2 B left side.
In module 130, the light beam launched is generated by laser tube core 104, and the light beam received is by avalanche optoelectronic
Diode (APD) 114 senses, and the laser tube core and the avalanche photodide are installed in usually silicon optical substrate
(SiOB) on 102 public micro-optical substrate.Alternatively, laser tube core, which can be integrated on SiOB, is used as transmitter module,
And APD is installed along with printed circuit board (PCB) with transmitter module.Although laser tube core 104 is shown as edge-emission in figure
Equipment, but (not shown in FIG.) in alternative embodiments, transmitter may include that one or more surface launching equipment are such as vertical
Cavity surface emitting lasers (VCSEL).However, here only by these sides of configuration that is exemplified and describing module 130
Face, as described below, principle of the invention are equally applicable to different emitter/receiver designs in extensive range.
The light beam launched and received is independent in module 130, and when slave module is left by installed in module
Beam combiner 142 above substrate is aligned.Transmitter and reception of the embodiment using similar kind shown in Fig. 3-Fig. 5
Device, but improved beam combiner is provided.Alternatively, the beam combiner shown in Fig. 3-Fig. 5 can be used for other kinds of light
Learn transmitter and receiver.
Collimated by the illumination that laser tube core 104 is launched by sphere lenses 134, the sphere lenses are positioned in SiOB 102
In the groove 135 of formation.Can by technology well known in the prior art such as wet etching come with lithographic accuracy silicon (and other
Semi-conducting material) in formed groove 135.Alternatively or in addition, sphere lenses can be by even without the accurate of groove 135
Pick and place machine device be directly attached to SiOB.Collimated light beam is reflect off SiOB 102 by deviation mirror 136, and passes through covering
Glass 137, the optoelectronic components in the cover glass protection module 130.The associated electronic unit such as He of laser driver 106
The amplifier 116 for being couple to APD 114 also may be mounted to that on SiOB 102.
Because sphere lenses 134 generally only realize that part collimates, so optical beam expander 138 can be used to carry out expanded laser light
Beam, generally three to ten times of extension, so as to strengthen its collimation.Although optical beam expander 138 is shown as unit piece optics here
Part, but also alternative use multicomponent optical beam expander.
Turned to by the collimated light beam that optical beam expander 138 exports by the reflector 144 in beam combiner 142, Ran Houyou
Beam splitter 146 is deflected outward returning towards scanning mirror.Assuming that laser tube core 104 exports light beam, beam splitter 146 can be advantageously
To be unrelated with polarization, wherein the polarization for the light beam launched and received is opposite.The collection light beam returned from scanning mirror
Through beam splitter 146, then focused on by collecting lens 140 on APD 114.Collecting lens optionally has asymmetric thin
Long shape, as shown in Figure 2 A and 2B, to maximize light collection efficiency in the geometrical constraint of module 130.(in this feelings
Under condition, the aperture of selection lens 140 is to receive all light reflected by micro mirror 46 from scene, wherein in specific public affairs
Under difference, the elongated shape of the elongated shape matching mirror of lens.)
Fig. 3 A and 3B diagrammatically illustrate optical-electric module 148 according to an embodiment of the invention.Fig. 3 A show side view,
And Fig. 3 B show the isometric view of similar elements.Module 148 can be used to substitute in optical scanning head 40 and other classes
Module 130 in the Optical devices of type.As described above, it is functionally similar to the module of optical scanning head 40 and the element of module 130
Element in 148 can be subject to necessary modification to be identified with above identical numeral, so as to realize in a similar manner.
However, with module 130 on the contrary, the beam combining optical device in module 148 includes the prism 150 of new category, the new category
Prism includes 151 (towards transmitter and receiver) and above 153 (towards micro mirror 46) below.The light beam launched passes through face
151 enter prism and are left towards micro mirror 46 by face 153, and the light beam received from micro mirror reflection enters rib by face 153
Mirror is simultaneously left (as shown in Figure 4) by face 151.The micro mirror 46 is installed to be rotated around hinge 47 relative to substrate 49, from
And both the light beam launched in scanning area scanning overhead and light beam for being received.
Configure simultaneously directed prism 150 so that outside module 148, the beam axis for the light beam launched and the light received
The collection axle alignment of beam, and beam axis and collection axle enter and leave prism with the substantially half of the minimum deviation of prism
Face.As be known in the art, minimum deviation is to meet the angle D of following relation：Sin ((A+D)/2)=nsin (A/2)
Wherein, A be prism angle (in this case, be Fig. 3 A in prism upper summit angle), n is the refraction of prism
Rate, and D is the deviation angle by the light beam that prism is launched relative to incident beam.
However, due to various designs, such as compactedness and manufacturability, it may make prism 150 artificially from essence
True minimum deviation deviates.Even for the deviation from most about ± 15 ° of minimum deviation, this minimum off-design has
Beneficial effect is still valuable.The beam angle in this ± 15 ° of angular regions is defined as near minimum deviation herein,
And the refraction and internal reflection in prism can be utilized according to the emitter/receiver module of some embodiments of the present invention, as long as
Beam axis is with the entering angle near such minimum deviation standard and leaves angle to enter and leave the face of prism.
Fig. 4 is the schematic side elevation of prism 150 according to an embodiment of the invention.The light beam 152 launched is with relative
Angle [alpha] in each face into below 151 and leaves above 153, wherein deviation angle D=180-2 α-A.The light beam 154 received
Similarly with identical angle [alpha] entering surface 153 and leave next 151.The beam axis for the light beam 152 launched and the light received
Beam 154 collects axle at the same position that two light beams share through front 153；And collect axle and pass through below 151 position
The beam axis of light beam 152 from being launched is different by the position of inlet point below.(the beam axis and collection axle difference of module
Parallel to light beam 152 and light beam 154.) light beam that is received is internally reflected relative to light beam steering surface 160, the light beam turns to
Face is parallel to face 151.
In order that the normal work of prism 150, generally to being coated with appropriate coating on the face of prism.Face 151 is entered in light beam 152
Enter to have in the region of prism 150 beam splitter coating 158 of usually polarization beam apparatus coating, and face 153 is generally in light beam 152
Leaving has ARC 162 in the region that prism and light beam 154 are entered.Light beam steering surface 160, which has, to be used in rib
The reflectance coating for the light beam 154 that the internal reflection of mirror 150 is received (it can be metal or dielectric).Face 151 can received
Light beam leaves towards receiver has narrowband light filter coating 156 in 150 region, wherein the transmitting band of passband matching transmitter,
As described in U.S. Patent application 13/766,811.The remaining area of prism 150 can be coated with light-absorbing coating, to reduce
Reach the amount of the veiling glare of receiver.
The design of prism 150 make it that the alignment of module 148 is simple, and tolerates the deviation of alignment.If even if prism rotates
Mass dryness fraction, but light beam 152 and 154 still will keep being aligned and keep being aligned with micro mirror 46 each other above 153.Specifically
Ground, because minimum deviation standard, if prism surrounds rotates low-angle Δ, light beam 152 by the axle of Fig. 4 page
Angle between 154 and face 151 will be increased to α+Δ, and the angle between light beam and face 153 will be reduced to α-Δ, or instead
It is as the same so that total deviation angle keeps identical.Because face 160 is parallel to face 151, even if rotation, remains in that two light
Alignment between beam.Thus it is possible to low cost assembles the scanner for including module 148, and to vibrations and live heat condition
Change will be stable.
It can easily be given birth in batches by the optical flat of appropriate thickness (for example, thick according to application requirement, 2mm-10mm)
Produce prism 150.Before cutting plate, coating 156 and 158 is applied into the appropriate position being changed on the side in face 151 in plate,
And apply reflectance coating to by the opposite side for being changed into face 160.Then plate is cut and polished with appropriate angle to limit
Face 153, then apply coating 162 to it.Cut another non-functional face so as to only after coating process is completed by prism 150
Separation.
Fig. 5 is the schematic side elevation according to the prism 170 of the alternate embodiment of the present invention.In the present embodiment, use
The coating of prism facets is identified with identical numeral in Fig. 4.As in prism 150, the light beam launched is in minimum deviation
Nearby (although in this case and non-precisely in this angle) passes through prism 170.However, passing through the light beam with being launched
The surfaces different into surface leave prism before, the light beam received at prism 170 is turned to by beam splitter coating 158,
Then total internal reflection is carried out at the steering surface 172 of prism 170.Because partly relaxed in the design of prism 170 minimum inclined
From standard, so this design is smaller to the tolerance of misalignment than prism 150, but it is this relax pay the utmost attention to physical compactness or
It is probably favourable to implement in the application that other designs consider.
Upon reading this disclosure, the replacement of principles set forth above is embodied for a person skilled in the art
It will be apparent, and be deemed within the scope of the present invention.It will thus be appreciated that above-described embodiment is the side with citing
What formula was quoted, and the invention is not restricted to the content having been particularly shown and described above.On the contrary, the scope of the present invention includes institute above
It is that the various features and those skilled in the art stated will recognize that after reading the above description and do not have in the prior art
There are both combination and sub-portfolio of its disclosed variants and modifications.
Claims (18)
1. a kind of optical-electric module, including：
Light-beam transmitter, the light-beam transmitter are configured as sending at least one light beam along beam axis；
Receiver, the receiver are configured as the light that sensing is received by collection axle of the optical-electric module along the receiver,
The collection axle is parallel to the beam axis in the optical-electric module；With
Beam combining optical device, the beam combining optical device are configured as the light for guiding the light beam He being received, made
Obtain the beam axis to be aligned with the collection axle outside the optical-electric module, and the beam combining optical device includes tool
There is the prism in multiple faces, the multiple face comprises at least the first face for being arranged to internal reflection and second including beam splitter
Face, the beam splitter intersect with both the beam axis and the collection axle,
Wherein described beam axis is with the entering angle near minimum deviation and leaves angle to enter and leave described in the prism
Face.
2. optical-electric module according to claim 1, wherein first face and second face are parallel to each other.
3. optical-electric module according to claim 1, wherein the beam axis and described both axles of collecting are different corresponding
Opening position passes through second face.
4. optical-electric module according to claim 1, and including micro-optical substrate, wherein the light-beam transmitter includes
Laser tube core, and the receiver includes detector tube core, and the laser tube core and the detector tube core are respectively mounted
On the micro-optical substrate.
5. according to the optical-electric module any one of claim 1-4, and on including being formed in the face face
Filter, to exclude the light received outside the emission band of the light-beam transmitter.
6. according to the optical-electric module any one of claim 1-4, wherein the beam splitter includes being located at second face
On polarization beam apparatus coating.
7. according to the optical-electric module any one of claim 1-4, wherein the multiple face includes the 3rd face, the light beam
The shared opening position of both axle and the beam axis for collecting axle on the 3rd face and described collection axle passes through described
Leave the optical-electric module in 3rd face.
8. optical-electric module according to claim 4, wherein the beam combining optical device includes at least one lens, institute
State at least one lens to be configured as making at least one laser beam datum, and the light received is focused on into the detector tube core
On.
9. a kind of optical scanning head, the optical scanning head includes scanning mirror and according to any one of claim 1-4
Optical-electric module, the scanning mirror are configured as in both beam axis described in scanning area scanning overhead and the collection axle.
10. a kind of optical means, including：
At least one light beam is sent along beam axis from the light-beam transmitter in optical-electric module towards scanner；
Light is received along the collection axle parallel with the beam axis in the optical-electric module from the scanner；And
Using beam combining optical device the light beam and the light received are guided to the scanner and from the scanning
Instrument guides the light beam and the light received so that the beam axis is aligned with the collection axle at the scanner, described
Beam combining optical device includes the prism with multiple faces, and the multiple face comprises at least and is arranged to the first of internal reflection
Face and the second face including beam splitter, the beam splitter intersect with both the beam axis and the collection axle,
Wherein described beam axis is with the entering angle near minimum deviation and leaves angle to enter and leave described in the prism
Face.
11. according to the method for claim 10, wherein first face and second face are parallel to each other.
12. according to the method for claim 10, wherein both the beam axis and the collection axle are in different corresponding positions
Place is put through second face.
13. according to the method any one of claim 10-12, and filter is formed on a face being included in the face
Light device, to exclude the light received outside the emission band of the light-beam transmitter.
14. according to the method any one of claim 10-12, wherein the beam splitter is included on second face
Polarization beam apparatus coating.
15. according to the method any one of claim 10-12, wherein the multiple face includes the 3rd face, the light beam
The shared opening position of both axle and the beam axis for collecting axle on the 3rd face and described collection axle passes through described
Leave the optical-electric module in 3rd face.
16. according to the method any one of claim 10-12, wherein the light for guiding the light beam and being received includes answering
Make at least one laser beam datum with least one lens, and focus on the light received from the scanner.
17. come according to the method any one of claim 10-12, and including the use of the scanner in scanning area
Both beam axis described in scanning overhead and the collection axle.
18. according to the method for claim 17, wherein sending at least one light beam includes sending light pulse, and its
The middle corresponding flight time for receiving the light and the object in the scanning area being travelled to and fro between including measuring the pulse.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361835657P | 2013-06-17 | 2013-06-17 | |
| US61/835,657 | 2013-06-17 | ||
| PCT/IB2014/062245 WO2014203139A1 (en) | 2013-06-17 | 2014-06-15 | Modular optics for scanning engine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105324688A CN105324688A (en) | 2016-02-10 |
| CN105324688B true CN105324688B (en) | 2018-03-06 |
Family
ID=52104035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480034451.5A Active CN105324688B (en) | 2013-06-17 | 2014-06-15 | Modularized optical device for scanning engine |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101806753B1 (en) |
| CN (1) | CN105324688B (en) |
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| US11057608B2 (en) | 2016-01-04 | 2021-07-06 | Qualcomm Incorporated | Depth map generation in structured light system |
| US10473923B2 (en) * | 2017-09-27 | 2019-11-12 | Apple Inc. | Focal region optical elements for high-performance optical scanners |
| US11662435B2 (en) * | 2019-04-04 | 2023-05-30 | Liturex (Guangzhou) Co. Ltd | Chip scale integrated scanning LiDAR sensor |
| KR102182410B1 (en) * | 2019-04-12 | 2020-11-25 | 한국전자기술연구원 | Transmitting and receiving module of bi-axial structure and scanning LiDAR comprising the same |
| CN112346239B (en) * | 2019-08-07 | 2022-10-18 | 华为技术有限公司 | Laser scanning device |
| US11681019B2 (en) * | 2019-09-18 | 2023-06-20 | Apple Inc. | Optical module with stray light baffle |
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| CN1372188A (en) * | 2002-03-28 | 2002-10-02 | 冯志刚 | Touch screen optical system adopting step type parallel light beam extending lens group |
| CN1727837A (en) * | 2004-07-28 | 2006-02-01 | 安捷伦科技有限公司 | Differential interferometers creating desired beam patterns |
| CN101446775A (en) * | 2008-12-30 | 2009-06-03 | 上海微电子装备有限公司 | Alignment light source apparatus |
| CN103033806A (en) * | 2012-12-27 | 2013-04-10 | 山东理工大学 | Method and device for airborne laser scanning flying height change real-time compensation |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014203139A1 (en) | 2014-12-24 |
| KR101806753B1 (en) | 2017-12-07 |
| CN105324688A (en) | 2016-02-10 |
| WO2014203139A4 (en) | 2015-03-05 |
| KR20160019112A (en) | 2016-02-18 |
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