CN105161956A - Constructing method of two-mirror-cavity and high-power array gas laser, and apparatus of two-mirror-cavity and high-power array gas laser - Google Patents
Constructing method of two-mirror-cavity and high-power array gas laser, and apparatus of two-mirror-cavity and high-power array gas laser Download PDFInfo
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Abstract
The invention provides a constructing method of a two-mirror-cavity and high-power array gas laser, and an apparatus of a two-mirror-cavity and high-power array gas laser, and belongs to the optical engineering and laser application field. The invention mainly relates to a method and apparatus for obtaining a high-power carbon dioxide laser or a carbon monoxide laser through configuration and excitation of discharge tubes under the effect of two mirror cavities. Oscillation light beams of the two-mirror-cavity and high-power array gas laser gather at one point in a laser resonant cavity and are symmetrically distributed on a minute surface of an outgoing mirror, so a non-linear effect caused by the excessively high local power density of the outgoing mirror and a thermal lens effect caused by over high temperature are effectively avoided. The characteristics of the constructing method and the apparatus are that multiple discharge tubes are disposed on the laser in a symmetrical manner, and high-power laser beams are output by means of DC power excitation under the effect of two mirror cavities. The laser has the advantages of high power, high-quality light beam, compact structure and small size, and is one of main devices applied to the optical engineering and laser application field.
Description
Technical field
The present invention relates to optical engineering and laser application, particularly relate to a kind of two mirror cavity high power array gas lasers, mainly utilize direct current power discharge excitation two-dimensional or cubical array discharge tube and under two mirror chambeies effects, obtain device and the construction method of high power array carbon dioxide laser beam or carbon monoxide laser bundle.
Background technology
Carbon dioxide laser is molecular laser the earliest in the world, and electric discharge adopts direct-current discharge, and discharge tube needs to take cooling provision, and 1.2m long discharge pipe power output is about 50 watts; CO (carbon monoxide converter) laser is another important molecular laser, and its conversion quantum efficiency is that the twice of the conversion quantum efficiency of carbon dioxide laser is many, is one of infrared laser of Study of Laser chemistry and molecular spectrum most worthy.Nearly ten years, laser-processing system mainly adopts carbon dioxide laser and Nd:YAG laser in the world, and its output value has reached 5,000,000,000 dollars, and wherein the carbon dioxide laser system output value is more than 3,000,000,000 dollars.Waveguide type, cross-flow type, axle fast flow pattern carbon dioxide laser is topmost laser in laser-processing system, waveguide type carbon dioxide laser is due to lightweight, volume little and directly by frame in machine tooling, cross-flow type carbon dioxide laser gain volume is large, the laser of exportable upper myriawatt, but zlasing mode is relatively poor, therefore, be mainly used in the welding of metal material, heat treatment and surface treatment, the fast flow pattern carbon dioxide laser of axle utilizes gaseous exchange mode to discharge the used heat of working gas, thus improve electro-optical efficiency and power output, the laser beam exported is generally fundamental-mode gaussian beam, be mainly used in metal, the welding of nonmetallic materials, punching, cutting etc.Although above laser has respective advantage, but also Shortcomings part, although flow model carbon dioxide laser power output is high, but laser is bulky, therefore processing machine head can only be separated with laser, and therefore the linear transmission of laser and light path control are all rely on optical element and corresponding control measure to realize; By contrast, the direct frame of planar waveguide type carbon dioxide laser volume I is in processing machine lathe, but the power output of this laser is due to structural limitations, thus is difficult to improve.In existing patent, although proposed high-power carbon dioxide laser device (patent of invention title: the construction method of high power gas laser and device, application number: CN200310104017; Patent of invention title: phase-locked axisymmetric folding combined carbon dioxide laser, application number: CN200810044294; Patent of invention title: a kind of construction method of travelling-wave cavity high-power carbon dioxide laser and device, application number: CN201410470437), each discharge tube of above-mentioned three class inventions intersects at outgoing mirror minute surface center, and the oscillation light harness namely from each resonant cavity has public output point.For the superpower laser that discharge tube is more, symmetrical array laser bundle intersects at a bit on outgoing mirror minute surface, outgoing mirror local power density must be caused excessive, thus cause nonlinear effect, cause outgoing mirror temperature too high, thus cause thermal lensing effect, and then cause output beam quality to be deteriorated, affect laser processing effect.
The present invention puts forward to overcome problems, two described mirror cavity high power array gas lasers, each vibration light beam to intersect in resonant cavity a bit, therefore, on outgoing mirror minute surface, array beams is symmetric, efficiently reduce the outgoing mirror local power density of bearing and reduce outgoing mirror temperature, improve laser beam quality and laser processing efficiency, therefore, prior art existing defects, needs to improve.
Summary of the invention
Technical problem to be solved by this invention is exactly the deficiency existed for prior art, provides a kind of two mirror cavity high power array gas lasers.Technical scheme of the present invention is as follows:
A kind of device of two-dimentional two mirror cavity high power array gas lasers comprises quartz discharge tube or glass discharge vessel (1), (2), (3), (4), (5), (6), (7), discharge anode (8), (9), (10), (11), (12), (13), (14), concave surface completely reflecting mirror (15), (16), (17), (18), (19), (20), (21), combined lens (22), discharge tube first support (23), discharge tube second support (24), outgoing mirror (25), first convergent mirror (26), second convergent mirror (27), discharge total negative electrode (28), air storage chamber (29), common intersection (30), its technical scheme is:
1), concave surface completely reflecting mirror (15), (16), (17), (18), (19), (20), (21) be centrally located on same sphere, form combined lens (22), each concave surface completely reflecting mirror is 5cm with the distance of discharge tube (1), (2), (3), (4), (5), (6), (7) left side respectively, the lateral dimension of concave surface completely reflecting mirror is 20mm, and radius of curvature is 2m.
2), discharge tube (1), (2), (3), (4), (5), (6), (7) long 1.2m, diameter 12mm, be discharged pipe first support (23) and discharge tube second support (24) is fixed on symmetry system having symmetry axle, each discharge tube left end seals, and right-hand member and discharge tube second support (24) are tightly connected.
3), discharge anode (8), (9), (10), (11), (12), (13), (14) are separately fixed on discharge tube (1), (2), (3), (4), (5), (6), (7), and are 5cm to discharge tube left end distance.
4), first reflecting surface of outgoing mirror (25) is sphere, its center of curvature and discharge tube (1), (2), (3), (4), (5), (6), (7) intersection point of axis or concave surface completely reflecting mirror (15), (16), (17), (18), (19), (20), (21) intersection point of axis overlaps, be common intersection (30), common intersection (30) is 40cm to the horizontal range of discharge tube second support (24), the radius of curvature of the first reflecting surface of outgoing mirror (25) is 0.6m.
5), discharge tube second support (24) and outgoing mirror (25) be tightly connected by air storage chamber (29), and the total negative electrode (28) that discharges is sealedly connected on air storage chamber (29).
6), the first convergent mirror (26) is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 80cm, described the second convergent mirror (27) is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 140cm.
7), described two dimension two mirror cavity high power array gas laser, it is characterized in that concave surface completely reflecting mirror (15), (16), (17), (18), (19), (20), (21) and outgoing mirror (25) form first liang of mirror chamber, second liang of mirror chamber, the 3rd liang of mirror chamber, the 4th liang of mirror chamber, the 5th liang of mirror chamber, the 6th liang of mirror chamber, the 7th liang of mirror chamber respectively, the axis of discharge tube (1), (2), (3), (4), (5), (6), (7) respectively with the dead in line in above-mentioned seven two mirror chambeies; Power supply is utilized to encourage the mist be made up of carbon dioxide, nitrogen, helium in discharge tube, or the mist be made up of carbon monoxide, nitrogen, helium in discharge tube, then export carbon dioxide laser or carbon monoxide laser from outgoing mirror; It is characterized in that the laser beam exported from each resonant cavity intersects at common intersection (30), output minute surface distributes on the same line symmetrically, efficiently reduces the excessive nonlinear effect that causes of local power density on outgoing mirror minute surface and the too high thermal lensing effect caused of temperature; The array laser bundle exported from outgoing mirror (25) becomes parallel array laser beam after the first convergent mirror (26), then becomes the array laser bundle of convergence after the second convergent mirror (27).
A kind of device of three-dimensional two mirror cavity high power array gas lasers comprises quartz discharge tube or glass discharge vessel (1), (2), (3), (4), (5), (6), (7), (8), discharge anode (9), (10), (11), (12), (13), (14), (15), (16), concave surface completely reflecting mirror (17), (18), (19), (20), (21), (22), (23), (24), combined lens (25), discharge tube first support (26), discharge tube second support (27), discharge total negative electrode (28), air storage chamber (29), outgoing mirror (30), convergent mirror (31), laser first support (32), laser second support (33), laser the 3rd support (34), laser the 4th support (35), laser the 5th support (36), laser the 6th support (37).
1), concave surface completely reflecting mirror (17), (18), (19), (20), (21), (22), (23), (24) be centrally located on same sphere, form combined lens (25), each concave surface completely reflecting mirror is 5cm with the distance of discharge tube (1), (2), (3), (4), (5), (6), (7), (8) left side respectively, the lateral dimension of concave surface completely reflecting mirror is 20mm, and radius of curvature is 2m.
2), discharge tube (1), (2), (3), (4), (5), (6), (7), (8) long 1.2m, diameter 12mm, be discharged pipe first support (26) and discharge tube second support (27) is fixed on symmetry system having symmetry axle, each discharge tube left end seals, and right-hand member and discharge tube second support (27) are tightly connected.
3), discharge anode (9), (10), (11), (12), (13), (14), (15), (16) are separately fixed on discharge tube (1), (2), (3), (4), (5), (6), (7), (8), and are 5cm to discharge tube left end distance.
4), first reflecting surface of outgoing mirror (30) is sphere, its center of curvature and discharge tube (1), (2), (3), (4), (5), (6), (7), (8) intersection point of axis or concave surface completely reflecting mirror (17), (18), (19), (20), (21), (22), (23), (24) intersection point of axis overlaps, be common intersection, common intersection is 40cm to the horizontal range of discharge tube second support (27), the radius of curvature of the first reflecting surface of outgoing mirror (30) is 0.6m.
5), discharge tube second support (27) and outgoing mirror (30) be tightly connected by air storage chamber (29), and the total negative electrode (28) that discharges is sealedly connected on air storage chamber (29), convergent mirror (31) is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 80cm, combined lens (25) is placed on laser first support (32), discharge tube first support (26) is placed on laser second support (33), discharge tube second support (27) is placed on laser the 3rd support (34), outgoing mirror (30) is placed on laser the 4th support (35), convergent mirror (31) is placed on laser the 5th support (36), laser stent (32)-(36) are placed on laser the 6th support (37).
6), described three-dimensional two mirror cavity high power array gas laser, it is characterized in that concave surface completely reflecting mirror (17), (18), (19), (20), (21), (22), (23), (24) first liang of mirror chamber is formed respectively with outgoing mirror (30), second liang of mirror chamber, 3rd liang of mirror chamber, 4th liang of mirror chamber, 5th liang of mirror chamber, 6th liang of mirror chamber, 7th liang of mirror chamber, 8th liang of mirror chamber, discharge tube (1), (2), (3), (4), (5), (6), (7), (8) axis respectively with the dead in line in above-mentioned eight two mirror chambeies, power supply is utilized to encourage the mist be made up of carbon dioxide, nitrogen, helium in discharge tube, or the mist be made up of carbon monoxide, nitrogen, helium in discharge tube, then export carbon dioxide laser or carbon monoxide laser from outgoing mirror, it is characterized in that the laser beam exported from each resonant cavity intersects at common intersection, output minute surface is distributed in symmetrically circumferentially same, efficiently reduces the excessive nonlinear effect that causes of local power density on outgoing mirror minute surface and the too high thermal lensing effect caused of temperature, the array laser bundle exported from outgoing mirror (30) becomes parallel array laser beam after convergent mirror (31).
Accompanying drawing explanation
Fig. 1 is the installation drawing of two-dimentional two mirror cavity high power array gas lasers.
Fig. 2 is the installation drawing of three-dimensional two mirror cavity high power array gas lasers.
Fig. 3 is three-dimensional two mirror cavity high power array gas laser first taper seats bottom surface (1), and the left side of the discharge tube on the first taper seat is symmetrically distributed on the first circular cone bottom surface.
Fig. 4 is three-dimensional two mirror cavity high power array gas laser first taper seats bottom surface (1), the second taper seat bottom surface (2), and the left side that the left side of the discharge tube on the first taper seat is symmetrically distributed in the discharge tube on the first circular cone bottom surface, on the second taper seat is symmetrically distributed on the second taper seat bottom surface.
Fig. 5 is three-dimensional two mirror cavity high power array gas laser first taper seats bottom surface (1), the second taper seat bottom surface (2), the 3rd taper seat bottom surface (3), and the left side of the discharge tube that the left side that the left side of the discharge tube on the first taper seat is symmetrically distributed in the discharge tube on the first circular cone bottom surface, on the second taper seat is symmetrically distributed on the second taper seat bottom surface, on the 3rd taper seat is symmetrically distributed on the 3rd taper seat bottom surface.
In Fig. 1,1,2,3,4,5,6,7 quartz discharge tubes or glass discharge vessel, 8,9,10,11,12,13,14 discharge anodes, 15,16,17,18,19,20,21 concave surface completely reflecting mirrors, 22 combined lens, 23 discharge tube first supports, 24 discharge tube second supports, 25 outgoing mirrors, 26 first convergent mirrors, 27 second convergent mirrors, 28 electric discharge total negative electrode, 29 air storage chambers, 30 common intersection.
In Fig. 2,1,2,3,4,5,6,7,8 quartz discharge tubes or glass discharge vessel, 9,10,11,12,13,14,15,16 discharge anodes, 17,18,19,20,21,22,23,24 concave surface completely reflecting mirrors, 25 combined lens, 26 discharge tube first supports, 27 discharge tube second supports, 28 electric discharge total negative electrode, 29 air storage chambers, 30 outgoing mirrors, 31 convergent mirrors, 32 laser first supports, 33 laser second supports, 34 lasers the 3rd support, 35 lasers the 4th support, 36 lasers the 5th support, 37 lasers the 6th supports.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.
A kind of device of two-dimentional two mirror cavity high power array gas lasers comprise quartz discharge tube or glass discharge vessel 1,2,3,4,5,6,7, discharge anode 8,9,10,11,12,13,14, concave surface completely reflecting mirror 15,16,17,18,19,20,21, combined lens 22, discharge tube first support 23, discharge tube second support 24, outgoing mirror 25, first convergent mirror 26, second convergent mirror 27, discharge total negative electrode 28, air storage chamber 29, common intersection 30, its technical scheme is:
As shown in Figure 1: 1), concave surface completely reflecting mirror 15,16,17,18,19,20,21 be centrally located on same sphere, form combined lens 22, each concave surface completely reflecting mirror is 5cm with the distance of discharge tube 1,2,3,4,5,6,7 left side respectively, the lateral dimension of concave surface completely reflecting mirror is 20mm, and radius of curvature is 2m; 2), the long 1.2m of discharge tube 1,2,3,4,5,6,7, diameter 12mm, is discharged pipe first support 23 and discharge tube second support 24 is fixed on symmetry system having symmetry axle, each discharge tube left end seal, right-hand member and discharge tube second support 24 are tightly connected; 3), discharge anode 8,9,10,11,12,13,14, be separately fixed on discharge tube 1,2,3,4,5,6,7, and be 5cm to discharge tube left end distance; 4), the first reflecting surface of outgoing mirror 25 is sphere, its center of curvature overlaps with the intersection point of the intersection point of the axis of discharge tube 1,2,3,4,5,6,7 or the axis of concave surface completely reflecting mirror 15,16,17,18,19,20,21, be common intersection 30, common intersection 30 is 40cm to the horizontal range of discharge tube second support 24, and the radius of curvature of the first reflecting surface of outgoing mirror 25 is 0.6m; 5), discharge tube second support 24 and outgoing mirror 25 be tightly connected by air storage chamber 29, and total negative electrode 28 that discharges is sealedly connected on air storage chamber 29; 6), the first convergent mirror 26 is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 80cm, the second described convergent mirror 27 is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 140cm; Described two dimension two mirror cavity high power array gas laser, it is characterized in that concave surface completely reflecting mirror 15,16,17,18,19,20,21 and outgoing mirror 25 form first liang of mirror chamber, second liang of mirror chamber, the 3rd liang of mirror chamber, the 4th liang of mirror chamber, the 5th liang of mirror chamber, the 6th liang of mirror chamber, the 7th liang of mirror chamber respectively, the axis of discharge tube 1,2,3,4,5,6,7 respectively with the dead in line in above-mentioned seven two mirror chambeies; Power supply is utilized to encourage the mist be made up of carbon dioxide, nitrogen, helium in discharge tube, or the mist be made up of carbon monoxide, nitrogen, helium in discharge tube, then export carbon dioxide laser or carbon monoxide laser from outgoing mirror; It is characterized in that the laser beam exported from each resonant cavity intersects at common intersection 30, output minute surface distributes on the same line symmetrically, efficiently reduces the excessive nonlinear effect that causes of local power density on outgoing mirror minute surface and the too high thermal lensing effect caused of temperature; The array laser bundle exported from outgoing mirror 25 becomes parallel array laser beam after the first convergent mirror 26, then becomes the array laser bundle of convergence after the second convergent mirror 27; High power two-dimensional array laser beam can be used for Laser industry processing, as plane cutting, surface treatment etc.
A kind of device of three-dimensional two mirror cavity high power array gas lasers comprises quartz discharge tube or glass discharge vessel 1, 2, 3, 4, 5, 6, 7, 8, discharge anode 9, 10, 11, 12, 13, 14, 15, 16, concave surface completely reflecting mirror 17, 18, 19, 20, 21, 22, 23, 24, combined lens 25, discharge tube first support 26, discharge tube second support 27, discharge total negative electrode 28, air storage chamber 29, outgoing mirror 30, convergent mirror 31, laser first support 32, laser second support 33, laser the 3rd support 34, laser the 4th support 35, laser the 5th support 36, laser the 6th support 37, its technical scheme is:
As shown in Figure 2: 1), concave surface completely reflecting mirror 17,18,19,20,21,22,23,24 be centrally located on same sphere, form combined lens 25, each concave surface completely reflecting mirror is 5cm with the distance of discharge tube 1,2,3,4,5,6,7,8 left side respectively, the lateral dimension of concave surface completely reflecting mirror is 20mm, and radius of curvature is 2m; 2), the long 1.2m of discharge tube 1,2,3,4,5,6,7,8, diameter 12mm, is discharged pipe first support 26 and discharge tube second support 27 is fixed on symmetry system having symmetry axle, each discharge tube left end seal, right-hand member and discharge tube second support 27 are tightly connected.3), discharge anode 9,10,11,12,13,14,15,16 is separately fixed on discharge tube 1,2,3,4,5,6,7,8, and is 5cm to discharge tube left end distance; 4), the first reflecting surface of outgoing mirror 30 is sphere, its center of curvature overlaps with the intersection point of the intersection point of the axis of discharge tube 1,2,3,4,5,6,7,8 or the axis of concave surface completely reflecting mirror 17,18,19,20,21,22,23,24, be common intersection, common intersection is 40cm to the horizontal range of discharge tube second support 27, and the radius of curvature of the first reflecting surface of outgoing mirror 30 is 0.6m; 5), discharge tube second support 27 and outgoing mirror 30 be tightly connected by air storage chamber 29, and total negative electrode 28 that discharges is sealedly connected on air storage chamber 29; Convergent mirror 31 is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 80cm; Combined lens 25 is placed on laser first support 32, discharge tube first support 26 is placed on laser second support 33, discharge tube second support 27 is placed on laser the 3rd support 34, outgoing mirror 30 is placed on laser the 4th support 35, convergent mirror 31 is placed on laser the 5th support 36, laser stent 32-36 is placed on laser the 6th support 37; Described three-dimensional two mirror cavity high power array gas laser, it is characterized in that concave surface completely reflecting mirror 17,18,19,20,21,22,23,24 and outgoing mirror 30 form first liang of mirror chamber, second liang of mirror chamber, the 3rd liang of mirror chamber, the 4th liang of mirror chamber, the 5th liang of mirror chamber, the 6th liang of mirror chamber, the 7th liang of mirror chamber, the 8th liang of mirror chamber respectively, the axis of discharge tube 1,2,3,4,5,6,7,8 respectively with the dead in line in above-mentioned eight two mirror chambeies; Power supply is utilized to encourage the mist be made up of carbon dioxide, nitrogen, helium in discharge tube, or the mist be made up of carbon monoxide, nitrogen, helium in discharge tube, then export carbon dioxide laser or carbon monoxide laser from outgoing mirror, it is characterized in that the laser beam exported from each resonant cavity intersects at common intersection, output minute surface is distributed in symmetrically circumferentially same, efficiently reduces the excessive nonlinear effect that causes of local power density on outgoing mirror minute surface and the too high thermal lensing effect caused of temperature; The array laser bundle exported from outgoing mirror 30 becomes parallel array laser beam after convergent mirror 31; High power cubical array laser beam can be used for Laser industry processing, as laser cutting, laser welding, laser drilling, Laser Surface Treatment etc.
Embodiment 1
With reference to accompanying drawing 1, get 7 discharge tubes 1,2,3,4,5,6,7, be placed in same plane, the axis of discharge tube and end line form the isosceles triangle that three have public vertex, be described two-dimentional high power array gas laser, every root discharge tube length is 1.2m, internal diameter 10mm, external diameter 12mm, concave surface completely reflecting mirror 15,16,17,18,19,20,21 is 5cm with the distance of discharge tube 1,2,3,4,5,6,7 left side respectively, the lateral dimension of concave surface completely reflecting mirror is 20mm, and radius of curvature is 2m; Discharge tube 1,2,3,4,5,6,7 is discharged pipe first support 23 and discharge tube second support 24 is fixed on symmetry system having symmetry axle, and each discharge tube left end seals, and right-hand member and discharge tube second support 24 are tightly connected; Discharge anode 8,9,10,11,12,13,14 is 5cm to discharge tube discharge tube 1,2,3,4,5,6,7 left end distance; The center of curvature of the first reflecting surface of outgoing mirror 25 overlaps with the intersection point of the axis of discharge tube 1,2,3,4,5,6,7, be common intersection 30, common intersection 30 is 40cm to the horizontal range of discharge tube second support 24, and the radius of curvature of the first reflecting surface of outgoing mirror 25 is 0.6m; First convergent mirror 26 is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 80cm, the second described convergent mirror 27 is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 140cm; Vacuum 133.3 is reached in discharge tube
10
-3according to CO after Pa
2: N
2: He=2:3:5 or approximate ratio fill uniform mixing gas mixture 10-20
133.3Pa.To wavelength 10.6
completely reflecting mirror reflectivity is more than 98%, and outgoing mirror reflectivity is 80%, and transmissivity is 20%.Two-dimentional high power array carbon dioxide laser can be obtained from outgoing mirror to export under DC power supply excitation.
Embodiment 2
With reference to accompanying drawing 1, laser except the transmittance and reflectance of completely reflecting mirror, outgoing mirror, vacuum degree, mist, other parameter and example 1 completely the same, reach vacuum 133.3 in discharge tube
10
-5according to CO:N after Pa
2: He=1:2:17 or approximate ratio fill uniform mixing gas mixture 10-20
133.3Pa.To wavelength 5.3
completely reflecting mirror reflectivity is more than 99%, and outgoing mirror reflectivity is 90%, and transmissivity is 10%.Two-dimentional high power array carbon monoxide laser can be obtained from outgoing mirror to export under DC power supply excitation.
Embodiment 3
With reference to accompanying drawing 2, get 8 discharge tubes 1,2,3,4,5,6,7,8, the axis of every root discharge tube is positioned on same taper seat, be described three-dimensional high power array gas laser, laser is except the position that discharge tube is placed, other parameter and example 1 completely the same, reach vacuum 133.3 in discharge tube
10
-3according to CO after Pa
2: N
2: He=2:3:5 or approximate ratio fill uniform mixing gas mixture 10-20
133.3Pa.To wavelength 10.6
completely reflecting mirror reflectivity is more than 98%, and outgoing mirror reflectivity is 80%, and transmissivity is 20%.Three-dimensional high power array carbon dioxide laser can be obtained from outgoing mirror to export under DC power supply excitation.
Embodiment 4
With reference to accompanying drawing 2, laser except the transmittance and reflectance of completely reflecting mirror, outgoing mirror, vacuum degree, mist, other parameter and example 3 completely the same, reach vacuum 133.3 in discharge tube
10
-5according to CO:N after Pa
2: He=1:2:17 or approximate ratio fill uniform mixing gas mixture 10-20
133.3Pa.To wavelength 5.3
completely reflecting mirror reflectivity is more than 99%, and outgoing mirror reflectivity is 90%, and transmissivity is 10%.Three-dimensional high power array carbon monoxide laser can be obtained from outgoing mirror to export under DC power supply excitation.
Should be understood that, for those of ordinary skills, can be improved according to the above description or convert, and all improvement and conversion all should belong to the protection range of claims of the present invention.
Claims (4)
1. the construction method of a mirror cavity high power array gas laser, use quartz ampoule or glass tube as discharge tube, many discharge tubes are symmetric, discharge tube axes intersect in resonant cavity a bit, use the two mirror chambeies be made up of concave surface completely reflecting mirror and outgoing mirror, in discharge tube, gas medium is after discharge excitation and under two mirror chamber effects, from outgoing mirror Output of laser; When the mist in discharge tube be carbon dioxide, nitrogen, helium and the reflection of each resonator mirror and transmission be 10.6 for wavelength
, then export carbon dioxide laser, when the mist in discharge tube be carbon monoxide, nitrogen, helium and the reflection of each resonator mirror and transmission be 5.3 for wavelength
, then export carbon monoxide laser; Two dimension two mirror cavity high power array gas lasers are placed in same plane by many discharge tube symmetries, the axis of each discharge tube is symmetrical about laser symmetry axis, and intersect at same common intersection, the axis of each discharge tube and end line form isosceles triangle, common intersection is the summit of isosceles triangle, discharge tube axis is the waist of isosceles triangle, and discharge tube end line is the end of isosceles triangle; Three-dimensional two mirror cavity high power array gas lasers are placed on same taper seat by many discharge tube symmetries, the axis of each discharge tube meets at same common intersection, be conical tip, the end of each discharge tube is in same plane, be circular cone bottom surface, the axis of each discharge tube is element of cone and is positioned on same taper seat; It is characterized in that the dead in line of the axis of each concave surface completely reflecting mirror and the discharge tube corresponding to concave surface completely reflecting mirror and meet at common intersection; First reflecting surface of outgoing mirror is sphere, it is characterized in that the dead in line of the center of curvature of this sphere and the axis of each discharge tube or each concave surface completely reflecting mirror is in same common intersection, vibration light beam vibrates between concave surface completely reflecting mirror and the first reflecting surface of outgoing mirror, the laser beam exported from outgoing mirror is the array laser bundle assembled, and utilizes convergent lens can obtain array high power carbon dioxide that is parallel or that assemble or carbon monoxide laser bundle.
2. according to the method for claim 1, the discharge tube of described two dimension two mirror cavity high power array gas laser is symmetrical about laser symmetry axis, be divided into the first isosceles triangle, the second isosceles triangle, the 3rd isosceles triangle etc. according to the angle of discharge tube and laser symmetry axis is ascending, laser symmetry axis is the height of each isosceles triangle; The discharge tube of described three-dimensional two mirror cavity high power array gas laser to be positioned on taper seat and symmetrical about laser symmetry axis, the first taper seat, the second taper seat, the 3rd taper seat etc. is divided into according to circular cone drift angle is ascending, laser symmetry axis is the height of each taper seat, and these taper seats can place more discharge tube symmetrically.
3. according to right 1, the requirement of 2, the device of described two dimension two mirror cavity high power array gas laser comprises quartz discharge tube or glass discharge vessel (1), (2), (3), (4), (5), (6), (7), discharge anode (8), (9), (10), (11), (12), (13), (14), concave surface completely reflecting mirror (15), (16), (17), (18), (19), (20), (21), combined lens (22), discharge tube first support (23), discharge tube second support (24), outgoing mirror (25), first convergent mirror (26), second convergent mirror (27), discharge total negative electrode (28), air storage chamber (29), common intersection (30),
1) the concave surface completely reflecting mirror (15) described in, (16), (17), (18), (19), (20), (21) be centrally located on same sphere, form combined lens (22), each concave surface completely reflecting mirror is 5cm with the distance of discharge tube (1), (2), (3), (4), (5), (6), (7) left side respectively, the lateral dimension of concave surface completely reflecting mirror is 20mm, and radius of curvature is 2m;
2) discharge tube (1) described in, (2), (3), (4), (5), (6), (7) long 1.2m, diameter 12mm, be discharged pipe first support (23) and discharge tube second support (24) is fixed on symmetry system having symmetry axle, each discharge tube left end seals, and right-hand member and discharge tube second support (24) are tightly connected;
3) discharge anode (8) described in, (9), (10), (11), (12), (13), (14) are separately fixed on discharge tube (1), (2), (3), (4), (5), (6), (7), and are 5cm to discharge tube left end distance;
4) the first reflecting surface of the outgoing mirror (25) described in is sphere, its center of curvature and discharge tube (1), (2), (3), (4), (5), (6), (7) intersection point of axis or concave surface completely reflecting mirror (15), (16), (17), (18), (19), (20), (21) intersection point of axis overlaps, be described common intersection (30), common intersection (30) is 40cm to the horizontal range of discharge tube second support (24), the radius of curvature of the first reflecting surface of outgoing mirror (25) is 0.6m,
5) discharge tube second support (24) and outgoing mirror (25) are tightly connected by the air storage chamber (29) described in, and the total negative electrode (28) that discharges is sealedly connected on air storage chamber (29);
6) the first convergent mirror (26) described in is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 80cm, described the second convergent mirror (27) is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 140cm;
7) according to right 1, the requirement of 2, described two dimension two mirror cavity high power array gas laser, it is characterized in that concave surface completely reflecting mirror (15), (16), (17), (18), (19), (20), (21) first liang of mirror chamber is formed respectively with outgoing mirror (25), second liang of mirror chamber, 3rd liang of mirror chamber, 4th liang of mirror chamber, 5th liang of mirror chamber, 6th liang of mirror chamber, 7th liang of mirror chamber, discharge tube (1), (2), (3), (4), (5), (6), (7) axis respectively with the dead in line in above-mentioned seven two mirror chambeies, power supply is utilized to encourage the mist be made up of carbon dioxide, nitrogen, helium in discharge tube, or the mist be made up of carbon monoxide, nitrogen, helium in discharge tube, then export carbon dioxide laser or carbon monoxide laser from outgoing mirror, it is characterized in that the laser beam exported from each resonant cavity intersects at common intersection (30), output minute surface distributes on the same line symmetrically, efficiently reduces the excessive nonlinear effect that causes of local power density on outgoing mirror minute surface and the too high thermal lensing effect caused of temperature, the array laser bundle exported from outgoing mirror (25) becomes parallel array laser beam after the first convergent mirror (26), then becomes the array laser bundle of convergence after the second convergent mirror (27), high power two-dimensional array laser beam can be used for Laser industry processing, as plane cutting, surface treatment etc.
4. according to right 1, the requirement of 2, the device of described three-dimensional two mirror cavity high power array gas laser comprises quartz discharge tube or glass discharge vessel (1), (2), (3), (4), (5), (6), (7), (8), discharge anode (9), (10), (11), (12), (13), (14), (15), (16), concave surface completely reflecting mirror (17), (18), (19), (20), (21), (22), (23), (24), combined lens (25), discharge tube first support (26), discharge tube second support (27), discharge total negative electrode (28), air storage chamber (29), outgoing mirror (30), convergent mirror (31), laser first support (32), laser second support (33), laser the 3rd support (34), laser the 4th support (35), laser the 5th support (36), laser the 6th support (37),
1) the concave surface completely reflecting mirror (17) described in, (18), (19), (20), (21), (22), (23), (24) be centrally located on same sphere, form combined lens (25), each concave surface completely reflecting mirror is 5cm with the distance of discharge tube (1), (2), (3), (4), (5), (6), (7), (8) left side respectively, the lateral dimension of concave surface completely reflecting mirror is 20mm, and radius of curvature is 2m;
2) discharge tube (1) described in, (2), (3), (4), (5), (6), (7), (8) long 1.2m, diameter 12mm, be discharged pipe first support (26) and discharge tube second support (27) is fixed on symmetry system having symmetry axle, each discharge tube left end seals, and right-hand member and discharge tube second support (27) are tightly connected;
3) discharge anode (9) described in, (10), (11), (12), (13), (14), (15), (16) are separately fixed on discharge tube (1), (2), (3), (4), (5), (6), (7), (8), and are 5cm to discharge tube left end distance;
4) the first reflecting surface of the outgoing mirror (30) described in is sphere, its center of curvature and discharge tube (1), (2), (3), (4), (5), (6), (7), (8) intersection point of axis or concave surface completely reflecting mirror (17), (18), (19), (20), (21), (22), (23), (24) intersection point of axis overlaps, be described common intersection, common intersection is 40cm to the horizontal range of discharge tube second support (27), the radius of curvature of the first reflecting surface of outgoing mirror (30) is 0.6m,
5) discharge tube second support (27) and outgoing mirror (30) are tightly connected by the air storage chamber (29) described in, and the total negative electrode (28) that discharges is sealedly connected on air storage chamber (29), described convergent mirror (31) is positioned on symmetry system having symmetry axle, and the distance to outgoing mirror is 80cm, described combined lens (25) is placed on described laser first support (32), described discharge tube first support (26) is placed on described laser second support (33), described discharge tube second support (27) is placed on described laser the 3rd support (34), described outgoing mirror (30) is placed on described laser the 4th support (35), described convergent mirror (31) is placed on described laser the 5th support (36), laser stent (32)-(36) are placed on described laser the 6th support (37),
6) according to right 1, the requirement of 2, described three-dimensional two mirror cavity high power array gas laser, it is characterized in that concave surface completely reflecting mirror (17), (18), (19), (20), (21), (22), (23), (24) first liang of mirror chamber is formed respectively with outgoing mirror (30), second liang of mirror chamber, 3rd liang of mirror chamber, 4th liang of mirror chamber, 5th liang of mirror chamber, 6th liang of mirror chamber, 7th liang of mirror chamber, 8th liang of mirror chamber, discharge tube (1), (2), (3), (4), (5), (6), (7), (8) axis respectively with the dead in line in above-mentioned eight two mirror chambeies, power supply is utilized to encourage the mist be made up of carbon dioxide, nitrogen, helium in discharge tube, or the mist be made up of carbon monoxide, nitrogen, helium in discharge tube, then export carbon dioxide laser or carbon monoxide laser from outgoing mirror, it is characterized in that the laser beam exported from each resonant cavity intersects at common intersection, output minute surface is distributed in symmetrically circumferentially same, efficiently reduces the excessive nonlinear effect that causes of local power density on outgoing mirror minute surface and the too high thermal lensing effect caused of temperature, the array laser bundle exported from outgoing mirror (30) becomes parallel array laser beam after convergent mirror (31), high power cubical array laser beam can be used for Laser industry processing, as laser cutting, laser welding, laser drilling, Laser Surface Treatment etc.
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Application publication date: 20151216 |