CN105159239A - Method for automatically updating SPC strategy and SPC automatic strategy system - Google Patents
Method for automatically updating SPC strategy and SPC automatic strategy system Download PDFInfo
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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Abstract
The invention provides a method for automatically updating a SPC strategy and a SPC automatic strategy system. The method may directly acquire data acquisition specification information from a MES system, automatically adds, deletes, and modifies the SPC strategy on the basis of an original SPC strategy and according to the modification type of the data acquisition specification information so as to fast update the SPC strategy. The method greatly reduces computing, querying and inputting workload and time when an engineer manually updates the SPC strategy, decreases maloperation generated by manual updating, and prevents an error rate caused by manual updating. A subsequent process for detecting the correctness of the modification of the SPC strategy may further reduce the strategy updating error rate and improve strategy reliability and stability.
Description
Technical field
The present invention relates to field of semiconductor manufacture, particularly relate to a kind of SPC strategy automatic update method and SPC Strategy Auto system.
Background technology
During semiconductor devices is produced, be an extremely complicated process from semiconductor monocrystal sheet to the process making final finished, from oxide-diffused, photoetching, etching, washing, deposits etc. are nearly is no less than three or four hundred operations; Particularly the demand of present all kinds of special IC is surged, most of Semiconductor enterprises has turned to the mode of production towards order from the mode of production towards stock again, make the production model of Wafer Fab also be transferred to the production model of the multi items of batch by the production of former large batch of single variety, significantly increase the complicacy of production run.Manufacturing execution system (manufacturingexecutionsystem, be called for short MES) become thus semiconductor production do not connect or lack management tool, can be optimized production run, guarantee that properties of product are qualified, reliable and stable, and have high yield rate, comprise following function: work (workinprocess in carrying out, be called for short WIP) follow the trail of, resource distribution and state, action scheduling, QC data (qualitydata) are collected and processing controls, MES also can be used for collecting data and the central storeroom (centraldepository) distributing data by as one simultaneously, such as, MES can collect in real time and dynamically, combination and expression (express) raw material (rawmaterials), finished product (finishedproducts), semi-manufacture (semifinishedproducts), machine, the data of time and cost, and follow the trail of and control each production stage.
Meanwhile, in semiconductor fabrication process, any one technique, all may comprise many steps, each step comprises again numerous parameter, controls each parameter in a technique, is to ensure that the key factor of the semiconductor devices meeting standard and requirement is normally carried out, produced to technique.The parameter of existing semiconductor fabrication process is generally controlled by SPC system (StatisticalProcessControl, statistical Process Control).SPC is the techniques and methods of Corpus--based Method theory, by carrying out statistical study and tracing to the technological parameter qualitative data in production run, realize real-time monitor and predict to stable technical process, thus reach and note abnormalities, improve in time, reduce the reliable object of fluctuation, guarantee stable technical process, overall product steady quality.And the foundation of SPC strategy (strategy) and renewal are the key point places of SPC system, perfect SPC strategy can carry out in time technological process, effective analysis and inspection.
Multiple control can be set under an existing SPC strategy or monitor chart (chart): average-differential figure (X-R figure), mean-standard deviation figure (X-S figure), monodrome-moving range figure (X-MR figure), service chart, exponential weighting move the metering type charts such as average figure (EWMA figure); And, percent defective figure (P figure), defective number chart (Pn figure), unit defect map (u figure) and population mean, population standard deviation, sample average, sample standard deviation, Cp, Cpk, Cpl, Cpu, histogram index of skewness (Skewness), Pareto diagram, the histogram of steepness index (Kurtosis) etc.Data query, overall monitoring, on-site supervision, exception reporting are all expressed by control diagram and each statistical parameter, and user can be helped to go monitor procedure state from different visual angles by these, Timeliness coverage problem, deals with problems.Each chart has counting and data type of the specification of oneself image data and collection, the some of these data wherein needed derives from the DCSpec (data acquisition specification) of MES system collection, and under normal circumstances, MES and SPC realizes being completed by different specialized companies, such as, MES adopts the finished product of AIM company, SPC adopts PDF Products, automatically the interface set up is not provided between MES and SPC in system, can not data sharing, when the DCSPEC information of MES has an amendment, the data that SPC system cannot integrate MES system are automatically set up or upgrade data collecting rule, thus numerical value referenced in the real-time monitor and predict process of stable technical process can be caused not to be up-to-date, make give the alarm when actual production, more likely because the data of this collection are not collected and cause product rejection.In order to avoid this problem in prior art, need manually to safeguard SPC system and design.Refer to Fig. 1, Figure 1 shows that Fig. 1 is the schematic flow sheet with artificial automatic updating strategy configuration file in prior art.As can be seen from Fig. 1 we, there iing DCSpec (data acquisition specification) after MES (manufacturing executive system) revises numerical value, SPC system cannot upgrade automatically, need the DCSPEC information that artificial enquiry MES system gathers, then numerical value needed for each technological parameter of DCSpec manual calculations of MES system, and manually by these numerical value input PCB system, set up and amendment policy configuration file, such as artificial set amount surveys address port (SITECOUNT), the bound (limit) corresponding with SITECOUNT, comprise: the upper control limit (SPCUCL) of default and the lower control limit (SPCLCL) of default, and numbering (Alarm) etc. of reporting to the police.There is following drawback in the technology of this manual renewal:
1, the parameter in a manufacturing process generally has 200 ~ 300, if revise up to a hundred DCSpec, then needs the cost time of about 7 days just can complete the renewal of all SPC strategies
2, manually upgrade and can occur mistake when inputting unavoidably, or computationally under there is miscount etc. in limited time, and then cause the mistake of SPC policy update, bring hidden danger to technique;
3, if desired whether hand inspection upgrades wrong, then more add manpower and time.
To sum up, how providing a kind of SPC strategy automatically update scheme, change the pattern that prior art manually upgrades, improve amendment efficiency and accuracy rate, is one of those skilled in the art's technical matters urgently to be resolved hurrily.
Summary of the invention
The object of the present invention is to provide a kind of SPC strategy automatic update method and SPC Strategy Auto system, change the pattern that prior art manually upgrades, improve and upgrade efficiency and data accuracy.
For solving the problem, the present invention proposes a kind of SPC strategy automatic update method, comprising:
Data acquisition specification information is captured from manufacturing executive system;
Revise according to the SPC strategy that the amendment type of described data acquisition specification information is carried out in various degree:
If the amendment type of data acquisition specification information is add new technological parameter, then keep the configuration data of original technological parameter in SPC strategy constant, and in SPC strategy, automatically add the configuration data of described new technological parameter according to presetting more new formula;
If the amendment type of data acquisition specification information for deleting technological parameter, is then automatically deleted the configuration data of corresponding technological parameter, and is kept the profile data of all the other technological parameters in SPC strategy;
If the amendment type of data acquisition specification information is the numerical value of amendment technological parameter, then in SPC strategy, revise the middle limit value in this technological parameter configuration data.
Further, described method also comprises: after carrying out the strategy of SPC in various degree according to the amendment type of described data acquisition specification information and revising, and whether inspection SPC strategy is revised correct, if correct revised SPC strategy comes into force, if mistake, prompting error message.
Further, in described data acquisition specification information, the numerical value of a technological parameter comprises desired value, lower numerical limit and limit value.
Further, in described SPC strategy, the configuration data of a technological parameter comprises: upper control limit value, lower control limit value and middle limit value.
Further, in described SPC strategy, the configuration data of a technological parameter also comprises numbering of reporting to the police.
Further, described default more new formula is used for desired value, lower numerical limit and limit value according to any newly technological parameter of interpolation, calculates upper control limit value and the lower control limit value of the technological parameter of newly interpolation arbitrarily.
Further, comprise according to presetting more new formula automatic configuration data adding described new technological parameter in SPC strategy: SPC upper control limit=desired value+(limit value-desired value) * the first number percent, SPC lower control limit=desired value-(desired value-lower numerical limit) * the second number percent.
Further, the first number percent is equal with the second number percent, is 75%.
The present invention also provides a kind of SPC Strategy Auto system, comprising:
Data capture module, for capturing data acquisition specification information from manufacturing executive system;
Strategy Auto module, sets up SPC strategy for the data acquisition specification information captured for data capture module, and the amendment type of the data acquisition specification information newly captured according to data capture module carries out correction in various degree to original SPC strategy:
If the amendment type of data acquisition specification information is add new technological parameter, then keep the configuration data of original technological parameter in SPC strategy constant, and in SPC strategy, automatically add the configuration data of described new technological parameter according to presetting more new formula;
If the amendment type of data acquisition specification information for deleting technological parameter, is then automatically deleted the configuration data of corresponding technological parameter, and is kept the profile data of all the other technological parameters in SPC strategy;
If the amendment type of data acquisition specification information is the numerical value of amendment technological parameter, then in SPC strategy, revise the middle limit value in this technological parameter configuration data.
Further, described SPC Strategy Auto system also comprises inspection and to come into force module, after carrying out correction in various degree in Strategy Auto module to original SPC strategy, whether check described correction correct, if correctly, revised SPC strategy comes into force, if mistake, prompting error message.
Compared with prior art, SPC strategy automatic update method provided by the invention and SPC Strategy Auto system, according to the amendment type of data acquisition specification information, automatically carry out SPC strategy to add, delete and amendment, to complete the renewal of SPC strategy fast, not only can greatly reduce workload and the working time such as calculating, inquiry, input when slip-stick artist manually upgrades SPC strategy, but also the maloperation produced when manually upgrading can be reduced, stop the error rate of artificial regeneration.The process of the correctness that subsequent survey SPC strategy is revised can reduce the error rate of update strategy further, improves the reliability and stability of strategy, and the error message of simultaneously pointing out provides a kind of feedback can to the data modification of MES system.
Accompanying drawing explanation
Fig. 1 is the method flow diagram of a kind of artificial regeneration SPC strategy of the prior art;
Fig. 2 is the structural representation of the SPC Strategy Auto system of the specific embodiment of the invention;
Fig. 3 is the SPC strategy automatic update method process flow diagram of the specific embodiment of the invention;
SPC strategy automatic update method process flow diagram when Fig. 4 is the DCspec interpolation new projects of the specific embodiment of the invention.
Embodiment
For making object of the present invention, feature becomes apparent, and be further described, but the present invention can realize by different forms, should just not be confined to described embodiment below in conjunction with accompanying drawing to the specific embodiment of the present invention.
Please refer to Fig. 2, Fig. 2 is the configuration diagram of SPC Strategy Auto system one of the present invention preferred embodiment.It should be noted that, SPC Strategy Auto system of the present invention can be applied in MES/SFC combined system framework, each module in SPC Strategy Auto system, and the form of software can be adopted to realize, also the form of hardware can be adopted to realize, and the form that also can combine with software and hardware occurs.Even some of them functional module, can adopt the existing capability module of MES/SFC system.
Please refer to Fig. 2, the SPC Strategy Auto system that the present embodiment provides, comprising:
Data capture module 20, for capturing data acquisition specification information from manufacturing executive system;
Strategy Auto module 21, sets up SPC strategy for the data acquisition specification information captured for data capture module, and the amendment type of the data acquisition specification information newly captured according to data capture module carries out correction in various degree to original SPC strategy:
If the amendment type of data acquisition specification information is add new technological parameter, then keep the configuration data of original technological parameter in SPC strategy constant, and in SPC strategy, automatically add the configuration data of described new technological parameter according to presetting more new formula;
If the amendment type of data acquisition specification information for deleting technological parameter, is then automatically deleted the configuration data of corresponding technological parameter, and is kept the profile data of all the other technological parameters in SPC strategy;
If the amendment type of data acquisition specification information is the numerical value of amendment technological parameter, then in SPC strategy, revise the middle limit value in this technological parameter configuration data;
Check the module 22 that comes into force, whether after carrying out correction in various degree in Strategy Auto module 21 to original SPC strategy, check described correction correct, if correctly, revised SPC strategy comes into force, if mistake, and prompting error message.
Please refer to Fig. 2, DCspec information (data acquisition specification information) batch synchronization that MES system gathers by data capture module 20 enters the database of SPC system, and synchrodata is carried out format conversion processing, to meet the data acquisition call format of SPC system database, and stored in SPC system database.Information comparison can be carried out thus in SPC system database, determine the data modification type of DCspec information: amendment numerical value or delete, add item (project, established technology parameter), and then Strategy Auto module 21 can be made to revise accordingly original SPC strategy according to the data modification type of the new DCspec information captured.In other embodiments of the invention, data capture module 20, when capturing the DCspec information of MES system, only captures vicissitudinous DCspec information in MES system, to reduce the calculated amount of SPC internal system.Data capture module 20 relates to data grabber frequency, and the stability that general data captures the process equipment of frequency and MES system and control thereof has substantial connection, if the stability of MES system is higher usually, then data grabber frequency can reduce relatively.Wherein, in described data acquisition specification information, DCspec information spinner will comprise the desired value of technological parameter, lower numerical limit and limit value.
Please continue to refer to Fig. 2, Strategy Auto module 21 is that all DCspec information of data capture module 20 crawl are according to setting rule accordingly, establishment image data rule, generate the configuration file corresponding with each image data rule, can comprise: the enactment document of data acquisition related data, data analysis and regular related setting file, control bound and warning arrange related setting file, module message file, data collecting rule essential information etc.Strategy Auto module 21 has basic function of the prior art: control diagram chart is arranged, sampling plan is arranged, sentence different rule is arranged.Create original SPC strategy thus.When the DCspec information of the collection in MES system changes, Strategy Auto module 21 needs update strategy adaptively, as follows particularly:
If the amendment type of data acquisition specification information is add new technological parameter, then keep the configuration data of original technological parameter in SPC strategy constant, and in SPC strategy, automatically add the configuration data of described new technological parameter according to presetting more new formula, comprise upper control limit value, lower control limit value and middle limit value, numbering of reporting to the police can also be comprised, wherein more new formula comprises: SPC upper control limit=desired value+(limit value-desired value) * the first number percent, SPC lower control limit=desired value-(desired value-lower numerical limit) * the second number percent, limit=desired value in the middle of controlling, preferably, the first number percent is equal with the second number percent, is 75%, and the first number percent and the second number percent can be unequal in other embodiments certainly, also can be any numerical value of more than 50%,
If the amendment type of data acquisition specification information for deleting technological parameter, is then automatically deleted the configuration data of corresponding technological parameter, and is kept the profile data of all the other technological parameters in SPC strategy;
If the amendment type of data acquisition specification information is the numerical value of amendment technological parameter, then in SPC strategy, revise the middle limit value in this technological parameter configuration data.
Further, described default more new formula is used for desired value, lower numerical limit and limit value according to any newly technological parameter of interpolation, calculates upper control limit value and the lower control limit value of the technological parameter of newly interpolation arbitrarily.
Whether inspection module 22 is for detecting the technological parameter data of data capture module crawl and revising correct according to the SPC strategy that these technological parameter data are carried out, if correct, then new SPC strategy comes into force, if mistake, then new SPC strategies ineffective, concurrent error information of sending is to operating personnel.The new upper control limit such as calculated according to new technological parameter data and lower control limit whether correct, if correctly, then new SPC strategy creates successfully, if mistake, then points out the reason that cannot create new SPC strategy.
SPC Strategy Auto system is in renewal SPC strategy (strategy) process, and do not limit SPC policy update quantity, different strategy can create simultaneously, and the time saves more than 70%, and ensures the correctness of data.The workload of the operation slip-stick artist simultaneously also reduced and working time.
Refer to Fig. 3 below, the automatic more new technological process of SPC strategy of the SPC Strategy Auto system of the invention described above is described in detail.
Please refer to Fig. 3, SPC strategy in the SPC strategy automatic update method that the present embodiment provides is for controlling each technological parameter of a semiconductor product manufacture, it comprises SPCrule (SPC rule) and SPCcontrollimit (SPC controls limit), for collection, calculating, analysis and modification data, on the basis determining technological process zone of reasonableness, determine that range of control and the parameter of technological parameter are normal, anomaly regularity, and preset innovative approach, during to exceed upper control limit, lower control limit at parameters of technique process, implemented the measure improved.Therefore, the present embodiment refers to each technological parameter of SPC system monitoring from MES (manufacturing executive system) each item (project) captured DCSpec (data acquisition specification) information, its data modification type mainly increases item (project) newly, deletes item (project) and modify to the setting value of item (project), and setting value comprises desired value, lower numerical limit and limit value.This SPC of SPC strategy automatic update method strategy method for building up of the present embodiment comprises the following steps:
S1, captures data acquisition specification information from manufacturing executive system;
S2, revises according to the SPC strategy that the amendment type of described data acquisition specification information is carried out in various degree:
S21, if the amendment type of data acquisition specification information is add new technological parameter, then keeps the configuration data of original technological parameter in SPC strategy constant, and in SPC strategy, automatically adds the configuration data of described new technological parameter according to presetting more new formula;
S22, if the amendment type of data acquisition specification information is for deleting technological parameter, then automatically deletes the configuration data of corresponding technological parameter, and keeps the profile data of all the other technological parameters in SPC strategy;
S23, if the amendment type of data acquisition specification information is the numerical value of amendment technological parameter, then revises the middle limit value in this technological parameter configuration data in SPC strategy.
S3, after carrying out the strategy of SPC in various degree according to the amendment type of described data acquisition specification information and revising, whether inspection SPC strategy is revised correct, if correct revised SPC strategy comes into force, if mistake, prompting error message.
In step S1, capture up-to-date DCSpec data and be stored in SPC database by these data from MES system, these data comprise desired value, the reference data such as lower numerical limit and limit value of at least one technological parameter.
In step S2, during according to up-to-date DCspec Data Update SPC strategy configuration data, need to carry out different SPC strategy configuration datas according to the amendment type of up-to-date DCspec data and upgrade, specific as follows:
First, the data that up-to-date DCspec data and SPC database store originally are contrasted, determines the amendment type of DCspec data;
If newly-increased item (project), please refer to Fig. 4, in the step s 21, the mode upgrading SPC strategy configuration data is keep the SPC configuration data of other item constant, automatic interpolation new projects configuration data file, comprise and automatically newly-increased item being sorted out, and sort out setting data subtype (charttype) according to its place and measure the SITECount that counts of (sampling); Automatic calculating controls bound and draws control chart and add numbering of reporting to the police on the basis of original warning coding rule with numbering quantity, wherein more new formula is: SPC upper control limit=desired value+(limit value-desired value) * the first number percent, SPC lower control limit=desired value-(desired value-lower numerical limit) * the second number percent, middle limit=desired value; Further, the first number percent is equal with the second number percent, is 75%;
If delete item, then in step S22, the mode upgrading SPC strategy configuration data is keep the SPC configuration data of other item constant, automatically deletes the configuration data file that this project is all;
If only revise the numerical value of certain project item, then in step S23, in SPC strategy, revise the middle limit value in these work project configuration data, the control upper and lower limit of this project and the configuration data of all the other projects all constant.
Step S3, whether after Strategy Auto module carries out correction in various degree to original SPC strategy, check described correction correct, if correctly, revised SPC strategy comes into force, if mistake, prompting error message.If after artificial check errors situation again, determine that this error source is in MES system, then provide a kind of feedback to the data modification of MES system.
Through verification experimental verification, the SPC strategy automatic update method of application the present embodiment upgrades in SPC strategy (strategy) process, SPC policy update quantity can not be limited, multiple different strategy newly can create simultaneously, time saves more than 70%, and the correctness of data can be ensured, the workload of the operation slip-stick artist simultaneously also reduced and working time.
In sum, SPC strategy automatic update method provided by the invention and SPC Strategy Auto system, according to the amendment type of data acquisition specification information, automatically carry out SPC strategy to add, delete and amendment, to complete the renewal of SPC strategy fast, not only can greatly reduce workload and the working time such as calculating, inquiry, input when slip-stick artist manually upgrades SPC strategy, but also the maloperation produced when manually upgrading can be reduced, stop the error rate of artificial regeneration.The process of the correctness that subsequent survey SPC strategy is revised can reduce the error rate of update strategy further, improves the reliability and stability of strategy, and the error message of simultaneously pointing out provides a kind of feedback can to the data modification of MES system.
Obviously, those skilled in the art can carry out various change and modification to invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (10)
1. a SPC strategy automatic update method, is characterized in that, comprising:
Data acquisition specification information is captured from manufacturing executive system;
Revise according to the SPC strategy that the amendment type of described data acquisition specification information is carried out in various degree:
If the amendment type of data acquisition specification information is add new technological parameter, then keep the configuration data of original technological parameter in SPC strategy constant, and in SPC strategy, automatically add the configuration data of described new technological parameter according to presetting more new formula;
If the amendment type of data acquisition specification information for deleting technological parameter, is then automatically deleted the configuration data of corresponding technological parameter, and is kept the profile data of all the other technological parameters in SPC strategy;
If the amendment type of data acquisition specification information is the numerical value of amendment technological parameter, then in SPC strategy, revise the middle limit value in this technological parameter configuration data.
2. SPC strategy automatic update method as claimed in claim 1, it is characterized in that, after carrying out the strategy of SPC in various degree according to the amendment type of described data acquisition specification information and revising, whether inspection SPC strategy is revised correct, if correct revised SPC strategy comes into force, if mistake, prompting error message.
3. SPC strategy automatic update method as claimed in claim 1, it is characterized in that, in described data acquisition specification information, the numerical value of a technological parameter comprises desired value, lower numerical limit and limit value.
4. SPC strategy automatic update method as claimed in claim 3, it is characterized in that, in described SPC strategy, the configuration data of a technological parameter comprises: upper control limit value, lower control limit value and middle limit value.
5. SPC strategy automatic update method as claimed in claim 4, it is characterized in that, in described SPC strategy, the configuration data of a technological parameter also comprises numbering of reporting to the police.
6. SPC strategy automatic update method as claimed in claim 4, it is characterized in that, described default more new formula is used for desired value, lower numerical limit and limit value according to any newly technological parameter of interpolation, calculates upper control limit value and the lower control limit value of the technological parameter of newly interpolation arbitrarily.
7. SPC strategy automatic update method as claimed in claim 6, it is characterized in that, comprise according to presetting more new formula automatic configuration data adding described new technological parameter in SPC strategy: SPC upper control limit=desired value+(limit value-desired value) * the first number percent, SPC lower control limit=desired value-(desired value-lower numerical limit) * the second number percent.
8. SPC strategy automatic update method as claimed in claim 7, it is characterized in that, the first number percent is equal with the second number percent, is 75%.
9. application rights requires a SPC Strategy Auto system for the SPC strategy automatic update method according to any one of 1 to 8, it is characterized in that, comprising:
Data capture module, for capturing data acquisition specification information from manufacturing executive system;
Strategy Auto module, sets up SPC strategy for the data acquisition specification information captured for data capture module, and the amendment type of the data acquisition specification information newly captured according to data capture module carries out correction in various degree to original SPC strategy:
If the amendment type of data acquisition specification information is add new technological parameter, then keep the configuration data of original technological parameter in SPC strategy constant, and in SPC strategy, automatically add the configuration data of described new technological parameter according to presetting more new formula;
If the amendment type of data acquisition specification information for deleting technological parameter, is then automatically deleted the configuration data of corresponding technological parameter, and is kept the profile data of all the other technological parameters in SPC strategy;
If the amendment type of data acquisition specification information is the numerical value of amendment technological parameter, then in SPC strategy, revise the middle limit value in this technological parameter configuration data.
10. SPC Strategy Auto system as claimed in claim 9, it is characterized in that, also comprise inspection to come into force module, after correction in various degree being carried out to original SPC strategy in Strategy Auto module, whether check described correction correct, if correctly, revised SPC strategy comes into force, if mistake, prompting error message.
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| CN108914208A (en) * | 2018-07-23 | 2018-11-30 | 中国电子科技集团公司第四十八研究所 | A kind of diffusion furnace technology self diagnosis optimization method and device |
| CN109375604A (en) * | 2018-12-11 | 2019-02-22 | 华经信息技术(上海)有限公司 | A kind of real-time quality early warning and control system and method |
| CN109492904A (en) * | 2018-11-07 | 2019-03-19 | 惠科股份有限公司 | Control method and device for controlling control line adjustment and readable storage medium |
| CN110457660A (en) * | 2019-07-31 | 2019-11-15 | 安徽赛迪信息技术有限公司 | A kind of automatic comparison system of policies and regulations |
| CN111516233A (en) * | 2020-04-17 | 2020-08-11 | 汕头大学 | Injection molding machine data preprocessing method and system |
| CN112612255A (en) * | 2020-12-24 | 2021-04-06 | 特劢丝软件科技(上海)有限公司 | Data acquisition method and device, electronic equipment and storage medium |
| US20220019203A1 (en) * | 2020-07-16 | 2022-01-20 | Changxin Memory Technologies, Inc. | Method and device for processing semiconductor manufacturing information |
| WO2022012133A1 (en) * | 2020-07-16 | 2022-01-20 | 长鑫存储技术有限公司 | Method and apparatus for processing semiconductor manufacturing information |
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| CN106997498A (en) * | 2016-01-22 | 2017-08-01 | 中芯国际集成电路制造(上海)有限公司 | New product operates coalignment and method |
| CN106997498B (en) * | 2016-01-22 | 2020-07-28 | 中芯国际集成电路制造(上海)有限公司 | New product operation matching device and method |
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| CN112612255A (en) * | 2020-12-24 | 2021-04-06 | 特劢丝软件科技(上海)有限公司 | Data acquisition method and device, electronic equipment and storage medium |
| CN112612255B (en) * | 2020-12-24 | 2021-10-12 | 上海赛美特软件科技有限公司 | Data acquisition method and device, electronic equipment and storage medium |
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