CN105039978A - Method for preparing Fe-Al-Cr alloy layer through combination of magnetron sputtering aluminizing, arc-added glow chromizing and recoil ion implantation - Google Patents
Method for preparing Fe-Al-Cr alloy layer through combination of magnetron sputtering aluminizing, arc-added glow chromizing and recoil ion implantation Download PDFInfo
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- CN105039978A CN105039978A CN201510475459.1A CN201510475459A CN105039978A CN 105039978 A CN105039978 A CN 105039978A CN 201510475459 A CN201510475459 A CN 201510475459A CN 105039978 A CN105039978 A CN 105039978A
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Abstract
The invention belongs to the field of metal surface modification, and particularly relates to a method for preparing a Fe-Al-Cr coating with alloy elements evenly distributed through combination of magnetron sputtering aluminizing, arc-added glow chromizing and recoil ion implantation. The method comprises the following specific steps of 1, carrying out surface pretreatment on the surface of stainless steel and drying after ultrasonic cleaning; 2, carrying out aluminizing through the magnetron sputtering technology; 3, carrying out chromizing through the arc-added glow technology; and 4, bombarding a film on the surface of materials through the recoil ion implantation technology. The method can avoid formation of pure Cr of a surface settled layer of the coating and precipitation of the high Al brittle phase near the sub-surface, guarantee even distribution of Fe, Al and Cr in the sectional direction, prolong the service life of the coating and improve high-temperature oxidation resistance and friction and abrasion resistance of the coating.
Description
Technical field
The invention belongs to metal surface modification field.Be specifically related to adopt magnetron sputtering Al, arc-added glow oozes Cr and recoil ion injection combines, and prepares the equally distributed Fe-Al-Cr coating of alloying element.
Background technology
Fe-Al intermetallic compound is one of intermetallic compound that at present research is more deep, and its specific tenacity is high, corrosion resistance excellent, has aboundresources, the advantage such as with low cost simultaneously.But because the character of himself associative key, crystalline structure, flaw sensitivity, the factor such as the degree of order and environment cause plasticity and toughness and the high-temperature comprehensive property of Fe-Al alloy coating, still can not meet the requirement of the harsh Service Environment that high temperature, thermal etching and wearing and tearing coexist, seriously constrain the application in the industrial production of Fe-Al alloy coating.
There are some researches show, Cr both can improve Fe-Al intermetallic compound brittleness at room temperature as one, improved unit elongation, improved the alloying element of intensity simultaneously, and preparation Fe-Al-Cr alloy layer becomes the important research direction of spread F e-Al intermetallic compound use range.Existing patent of invention ZL201310076784.1 adopts two brightness plasma surface metallurgical technology and patent of invention CN201410780471.9 to adopt two-lime piles and the ion implantation method combined to prepare Fe-Al-Cr coating at present, but all there is the problem of surface A l dilution in two kinds of methods, the alloying element distribution gradient such as Fe, Al, Cr in coating, and non-uniform Distribution, easily cause high Al brittlement phase integrated distribution in surface, the Asia of coating, and the work-ing life of coating is reduced.
Summary of the invention
The key technical problem that the present invention solves is the precipitation avoiding the formation of the pure Cr of coatingsurface settled layer and sub-near surface height Al brittlement phase, ensure that Fe, Al, Cr tri-kinds of alloying elements are uniformly distributed along cross-wise direction, improve the work-ing life of coating, especially improve its high temperature oxidation resistance and wear resistance.
For solving above technical problem, the invention provides magnetron sputtering to aluminize+arc-added glow chromising+recoil ion injects the method preparing Fe-Al-Cr alloy layer, and concrete steps are as follows:
Step 1: first carry out pre-surface treatment to steel surface, through ultrasonic cleaning post-drying;
Step 2: adopt magnetron sputtering technique plating Al;
Step 3: adopt arc-added glow technology to ooze Cr;
Step 4: the film adopting recoil ion implantttion technique bombardment material surface.
Surface preparation wherein described in step 1, for grind and polished finish steel, makes its surface roughness Ra reach 0.5 ~ 1.5 μm, and ultrasonic time is 25min.
Wherein adopt magnetron sputtering technique to plate Al at stainless steel surface in step 2, wherein target is 99.99%Al.The processing parameter specifically selected is: operating air pressure: 3.5 ~ 6.5Pa, interpole gap: 18 ~ 22mm, depositing time: 2.5 ~ 3.5h, operating power: 145 ~ 155W.
Wherein adopt the multi-arc ion coating Al layer outside surface of arc-added glow technology gained in step 2 to carry out oozing Cr process in step 3, wherein target is 99.99%Cr again.The processing parameter specifically selected is: Ar gas air pressure: 45 ~ 55Pa, flame current: 60 ~ 80A, interpole gap: 100 ~ 140mm, bias voltage: 500 ~ 700V, temperature: 700 ~ 850 DEG C, working hour 60 ~ 100min.
The plating Al wherein adopting recoil ion implantttion technique to prepare gained to above-mentioned in step 4 and ooze Cr alloy layer and carry out ion bombardment, the processing parameter specifically selected is: ion energy: 150 ~ 200keV, line: 1 ~ 5mA, injection length 20 ~ 40min.
Adopt above method to prepare the Fe-Al-Cr coating of gained, each alloying element is uniformly distributed along cross-wise direction, forms Fe
2alCr, Fe
3al, FeAl, Cr
23c
6etc. the Compound Phase with high rigidity, high strength.
Outstanding advantages of the present invention is to have given full play to the features that magnetron sputtering technique, Surface Alloying by Glow-discharge Plasma with Arc Source and recoil ion inject this three technology, utilize its synergetical principle, final realize preparing containing high Al phase, Elemental redistribution evenly, the Fe-Al-Cr coating of excellent performance.
First magnetron sputtering technique is adopted to form plating Al layer at stainless steel surface, its principle is that the positive ion produced by ionization of gas accelerates to sputter negative electrode Al target atom and secondary electron under cathode potential attracts, this secondary electron is at orthogonal elect magnetic field direction of motion and electric field, vertical magnetic field, in cycloid movement locus, enhance the collision of same gas molecule, improve the probability of ionization.The outstanding advantage of this technology is that ionization level is high, sedimentation rate fast, and working temperature is low, not easily causes the reverse sputtering phenomenon of Al, forms Fe-Al intermetallic compound at matrix surface.Therefore adopt this technology to plate Al at stainless steel surface, significantly can reduce and adopt two-lime piles to ooze Al and the surface A l dilution phenomenon that produces, and the deficiency of the injection depth as shallow (< 1 μm) adopting ion implantation technique note Al and produce.Adopt Surface Alloying by Glow-discharge Plasma with Arc Source at existing plating Al layer external sediment Cr again, make full use of glow discharge and arc discharge, the temperature of workpiece is between 700 ~ 850 DEG C, by the bombardment effect of ion pair Fe-Al coating, accelerate Al, Cr to spread to matrix, Fe spreads to coatingsurface, forms Fe-Al-Cr compound; Finally adopt recoil ion implantttion technique, namely recoil ion (inert ion) is utilized to bombard material surface, make alloy atom (Al and Cr) in coating under the bombardment effect of energetic ion, enter matrix surface, fully diffuse to form final required Fe-Al-Cr intermetallic compound, achieve being uniformly distributed of alloying element simultaneously.
Accompanying drawing explanation
Fig. 1: the schematic diagram of step 1 surface preparation of the present invention.
Fig. 2: the schematic diagram of step 2 magnetron sputtering Al of the present invention.
Fig. 3: step 3 arc-added glow of the present invention oozes the schematic diagram of Cr.
Fig. 4: the schematic diagram that step 4 recoil ion of the present invention injects.
Fig. 5: the schematic diagram of the alloy layer that the present invention finally obtains.
Fig. 6: the Fe-Al-Cr alloy layer surface topography preparing gained according to method of the present invention.
Specific embodiment
Below in conjunction with specific embodiment, the present invention is further detailed explanation.
Embodiment 1
The present embodiment 1 is implemented under following implementation condition and technical requirements:
First grind and polished finish 304 stainless steel surface, make its surface roughness Ra reach 0.5 μm, ultrasonic time is 25min.
Then adopt magnetron sputtering technique at 304 stainless steel surface plating Al, wherein target is 99.99%Al.The processing parameter specifically selected is: operating air pressure is 3.5Pa, and interpole gap is 18mm, and depositing time is 2.5h, and operating power is 145W.
Then adopt arc-added glow technology to carry out oozing Cr process at previous step gained plating Al layer outside surface, wherein target is 99.99%Cr again.The processing parameter specifically selected is Ar gas air pressure is 45Pa, and flame current is 60A, and interpole gap is 100mm, and bias voltage is 500V, and temperature is 800 DEG C, and the working hour is 60min.
The plating Al finally adopting ion implantation technique to prepare gained to above-mentioned and ooze Cr alloy layer and carry out ion bombardment, the processing parameter specifically selected is: ion energy is 150keV, and line is 1mA, injection length 20min.
Carrying out performance test to preparing gained compound coating, is the condition of 530g in load, and specific wear rate is 0.1438 × 10
-3mm
3n
-1m
-1, be 21.32% of matrix; In 600 DEG C of environment after 100h oxidation, the weightening finish of compound coating is 1.22mg/cm
2, be only 24.89% of matrix.
Embodiment 2
The present embodiment 2 is implemented under following implementation condition and technical requirements:
First grind and polished finish 316 stainless steel surface, make its surface roughness Ra reach 1.5 μm, ultrasonic time is 25min.
Then adopt magnetron sputtering technique at 316 stainless steel surface plating Al, wherein target is 99.99%Al.The processing parameter specifically selected is: operating air pressure is 6.5Pa, and interpole gap is 22mm, and depositing time is 3.5h, and operating power is 155W.
Adopt arc-added glow technology to carry out oozing Cr process at previous step gained multi-arc ion coating Al layer outside surface again, wherein target is 99.99%Cr again.The processing parameter specifically selected is Ar gas air pressure is 55Pa, and flame current is 80A, and interpole gap is 140mm, and bias voltage is 700V, and temperature is 850 DEG C, and the working hour is 100min.
The plating Al finally adopting ion implantation technique to prepare gained to above-mentioned and ooze Cr alloy layer and carry out ion bombardment, the processing parameter specifically selected is: ion energy is 200keV, and line is 5mA, injection length 40min.
Carrying out performance test to preparing gained compound coating, is the condition of 530g in load, and specific wear rate is 0.1149 × 10
-3mm
3n
-1m
-1, be 17.74% of matrix; In 600 DEG C of environment after 100h oxidation, the weightening finish of compound coating is 1.12mg/cm
2, be only 19.52% of matrix.
Embodiment 3
The present embodiment 3 is implemented under following implementation condition and technical requirements:
First grind and polished finish 430 stainless steel surface, make its surface roughness Ra reach 1 μm, ultrasonic time is 25min.
Then adopt magnetron sputtering technique at 430 stainless steel surface plating Al, wherein target is 99.99%Al.The processing parameter specifically selected is: operating air pressure is 4.5Pa, and interpole gap is 20mm, and depositing time is 3h, and operating power is 150W.
Adopt arc-added glow technology to carry out oozing Cr process at previous step gained multi-arc ion coating Al layer outside surface again, wherein target is 99.99%Cr again.The processing parameter specifically selected is Ar gas air pressure is 50Pa, and flame current is 70A, and interpole gap is 120mm, and bias voltage is 600V, and temperature is 800 DEG C, and the working hour is 80min.
The plating Al finally adopting ion implantation technique to prepare gained to above-mentioned and ooze Cr alloy layer and carry out ion bombardment, the processing parameter specifically selected is: ion energy is 180keV, and line is 2mA, injection length 30min.
Carrying out performance test to preparing gained compound coating, is the condition of 530g in load, and specific wear rate is 0.1074 × 10
-3mm
3n
-1m
-1, be 15.68% of matrix; In 600 DEG C of environment after 100h oxidation, the weightening finish of compound coating is 0.96mg/cm
2, be only 16.82% of matrix.
The above; it is only preferred embodiment of the present invention; not any pro forma restriction is done to the present invention; any those skilled in the art; do not departing within the scope of technical solution of the present invention; according to technical spirit of the present invention, any simple amendment that above embodiment is done, equivalently replace and improve, within the protection domain all still belonging to technical solution of the present invention.
Claims (6)
1. magnetron sputtering aluminize+arc-added glow chromising+recoil ion injects the method preparing Fe-Al-Cr alloy layer, it is characterized in that, concrete steps are as follows:
Step 1: first carry out surface preparation to stainless steel surface, through ultrasonic cleaning post-drying;
Step 2: adopt magnetron sputtering technique plating Al;
Step 3: adopt arc-added glow technology to ooze Cr;
Step 4: the film adopting recoil ion implantttion technique bombardment material surface.
2. the method preparing compound coating according to claim 1, the surface preparation described in step 1, for grind and polished finish steel, makes its surface roughness Ra reach 0.5 ~ 1.5 μm, and ultrasonic time is 25min.
3. the method preparing compound coating according to claim 1, magnetron sputtering technique is adopted to plate Al at stainless steel surface in step 2, wherein target is 99.99%Al, the processing parameter specifically selected is: operating air pressure: 3.5 ~ 6.5Pa, interpole gap: 18 ~ 22mm, depositing time: 2.5 ~ 3.5h, operating power: 145 ~ 155W.
4. the method preparing compound coating according to claim 1, the magnetron sputtering Al layer outside surface of arc-added glow technology gained is in step 2 adopted to carry out oozing Cr process in step 3 again, wherein target is 99.99%Cr, the processing parameter specifically selected is: Ar gas air pressure: 45 ~ 55Pa, flame current: 60 ~ 80A, interpole gap: 100 ~ 140mm, bias voltage: 500 ~ 700V, temperature: 800 ~ 900 DEG C, working hour 60 ~ 100min.
5. the method preparing compound coating according to claim 1, the plating Al adopting recoil ion implantttion technique to prepare gained to above-mentioned in step 4 and ooze Cr layer and bombard, the processing parameter specifically selected is: ion energy: 150 ~ 200keV, line: 1 ~ 5mA, injection length 20 ~ 40min.
6. adopt magnetron sputtering aluminize+arc-added glow chromising+recoil ion injects the Fe-Al-Cr alloy layer preparing gained, it is characterized in that, adopt any one of Claims 1 to 5 to prepare the method preparation of compound coating, in alloy layer, each alloying element is uniformly distributed along aspect, cross section, is formed and comprises Fe
2alCr, Fe
3al, FeAl, Cr
23c
6the Compound Phase with high rigidity, high strength.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3916484B2 (en) * | 2002-03-05 | 2007-05-16 | 独立行政法人科学技術振興機構 | Ni alloy heat resistant material excellent in high temperature oxidation resistance and method for producing the same |
| CN102345069A (en) * | 2011-06-16 | 2012-02-08 | 兰州理工大学 | Large block micrometer-grain/nanometer-grain double-phase Fe-Al-Cr material and preparation method thereof |
| CN103147044A (en) * | 2013-03-12 | 2013-06-12 | 南京航空航天大学 | High-toughness Fe-Al-Cr coating and preparation method thereof |
| CN104070725A (en) * | 2014-07-17 | 2014-10-01 | 南京航空航天大学 | Fe-Al-Nb alloy coating and preparation method thereof |
-
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3916484B2 (en) * | 2002-03-05 | 2007-05-16 | 独立行政法人科学技術振興機構 | Ni alloy heat resistant material excellent in high temperature oxidation resistance and method for producing the same |
| CN102345069A (en) * | 2011-06-16 | 2012-02-08 | 兰州理工大学 | Large block micrometer-grain/nanometer-grain double-phase Fe-Al-Cr material and preparation method thereof |
| CN103147044A (en) * | 2013-03-12 | 2013-06-12 | 南京航空航天大学 | High-toughness Fe-Al-Cr coating and preparation method thereof |
| CN104070725A (en) * | 2014-07-17 | 2014-10-01 | 南京航空航天大学 | Fe-Al-Nb alloy coating and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 罗西希: "《双辉等离子表面冶金技术制备Fe-Al-Cr合金层及其性能研究》", 《中国优秀硕士学位论文全文数据库 工程科技I辑》 * |
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