CN104990908B - The confocal induced breakdown Raman spectrum imaging detection method of laser twin shaft and device - Google Patents
The confocal induced breakdown Raman spectrum imaging detection method of laser twin shaft and device Download PDFInfo
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Abstract
The invention belongs to spectral measurement and technical field of imaging, is related to a kind of confocal induced breakdown spectroscopy Raman spectrum imaging detection method of laser twin shaft and device, high-space resolution imaging and detection available for the microcell component and morphological parameters of sample.Element composition information of this method with device using LIBS detection sample component；Utilize the chemical bond and molecular structure information of Raman spectroscopic detection sample；Sample surface morphology information is detected using twin shaft confocal technology, cross-compound arrangement has big visual field, the advantage of big working distance, and can effectively suppress backscattering influence, improves spectrographic detection signal to noise ratio；Three's combination can be achieved structure and share and have complementary functions, and realize the pattern of sample and the composite measurement of component information.The present invention has the advantages that high-space resolution, material composition abundant information and controllable measurement focused spot size, has wide practical use in fields such as mineral products, metallurgy, space exploration, environmental monitoring, biologic medicals.
Description
Technical field
The invention belongs to spectral measurement and technical field of imaging, is related to a kind of confocal induced breakdown-Raman light of laser twin shaft
Imaging detection method and device is composed, confocal laser imaging technique is combined with spectrographic detection technology, forms a kind of " collection of illustrative plates conjunction
One " high-resolution spectra imaging with detection method and device, available for sample microcell form component multi-spectrum synthesis test with
High-resolution imaging.
Technical background
LIBS (Laser Induced Breakdown Spectroscopy, abbreviation LIBS),
It is a kind of material composition in-situ investigation technology, it utilizes the laser excitation sample surfaces of high power density, produces induced with laser etc.
Gas ions, by the atom and ion line in exploring laser light induced plasma, to determine that the component of sample forms, it is protruded
Advantage is that detectable atom forms with small molecule element.
Since 1962 are born, LIBS is widely used in minute manufacturing, mineral products analysis, environment
The multiple fields such as monitoring, biologic medical, and " chemistry and shooting of " curious number " Marsokhod carrying in U.S.'s transmitting in 2011
Machine instrument system (ChemCam) " be used to carry out remote probe to Mars surface rock sample, show it in space material group
Divide the great ability in terms of detection, therefore Venus probe is chosen as again after " curious number " Marsokhod ChemCam systems
With instrument, by the multiple widely studied uses of National Airspace structure in the world.
But there is problem following prominent in existing LIBS：
1) due to exciting sample to produce plasma to irradiate using collimated laser beam, thus it still suffers from laser excitation light
The problems such as spot is big, spectrographic detection spatial resolution is not high；
2) parameters such as the chemical bond in molecule, molecular structure can not be detected, its result constrains sample material group
Divide the accurate complete acquisition of information；
3) it can not effectively suppress back-scattering light interference, constrain the lifting of system signal noise ratio, and and then limit spectrum
Detect the improvement of resolving power；
3) the sample component information obtained can not be combined with the shape information of sample, can not realize sample morphology-group
The high-resolution in situ of integrated information is divided to obtain.
And the accurate acquisition of " microcell " complete component information of mineral products, space material and biological sample is for scientific research
All it is extremely important with production detection.In fact, how to detect micro-area composition information with sensitivity is current mineral products
The common technology problem that the fields such as analysis, space exploration and environment measuring are urgently studied.
The intense pulse laser of LIBS, which focuses on sample surfaces, can make sample ionization, sample can be excited to produce
Raw plasma, the spectrum given off by detecting energy of plasma decline can obtain the atom and small molecule element group of sample
Into information, but the chemical bond and molecular structure information of sample molecule can not be obtained, how completely obtain the member of sample molecule
Element composition and molecular structure information, it is significant for the component of high accuracy analysis sample.
Using the molecule excitation spectrum of the measurable sample of laser Raman spectroscopy technology, the chemical bond and molecule in sample are obtained
Structural information.Laser Raman spectroscopy technology is combined with LIBS (LIBS) technology, laser can be made up
The deficiency of molecular structure and chemical key information can not be obtained in induced breakdown spectroscopy.
Laser twin shaft confocal technology is detected using illumination and the non-line structure altogether of detection light path, not only significantly improves light
The azimuthal resolution and Focus accuracy on road, realize the high-resolution imaging detection of sample topography, and can effectively suppress backwards to scattered
Blackberry lily is disturbed, and improves spectrographic detection signal to noise ratio.
Based on this, the present invention propose a kind of confocal induced breakdown spectroscopy of laser twin shaft-Raman spectrum micro imaging method with
Device, its innovation are：To have first laser twin shaft confocal detection light path and LIBS (LIBS) technology and
Laser Raman spectroscopy Detection Techniques blend, can be achieved the imaging of sample microcell high-resolution and highly sensitive pattern and component with
Detection.
The confocal induced breakdown spectroscopy of a kind of laser twin shaft-Raman spectrum micro imaging method proposed by the present invention can with device
A brand-new effective technical way is provided for the detection of material composition high-resolution imaging.
The content of the invention
The invention aims to the high-resolution spectra for " collection of illustrative plates " for realizing material composition and shape information to be imaged,
A kind of confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection method and device are proposed, to obtain sample simultaneously
Microcell form component multi-spectrum synthesis test and high-resolution imaging.
The purpose of the present invention is achieved through the following technical solutions.
Twin shaft confocal laser induced breakdown-Raman spectrum imaging detection method of the present invention, light path lighting optical axis and detection
Optical axis is distributed into angle, excites light irradiation to be irradiated to sample surfaces along illumination path and inspire Reyleith scanttering light and be loaded with sample component and believes
The LIBS and Raman spectrum of breath, Reyleith scanttering light, LIBS and Raman spectrum quilt and illumination path
Detection light path into angle is received, and the element of LIBS detection system acquisition sample is partly into by light splitting
Information is formed, the Raman diffused light in another part enters Raman spectroscopic detection system through dichroic optical system and obtains sample
Chemical bond and molecular structure information, Reyleith scanttering light and LIBS are reflected into confocal by dichroic optical system
Detection system carries out light intensity detection and obtains sample surfaces height and topographical information；LIBS detection, Raman spectrum
Detection and the confocal topographical information detection triplicity of laser twin shaft can realize that structure shares and had complementary functions, and realize high-space resolution
Light spectrum image-forming and detection, the specific implementation step of this method it is as follows：
1) illumination objective lens are symmetrically distributed in measuring surface normal both sides, and lighting optical axis and measuring surface normal with collection object lens
Angle be θ1, the angle of collection optical axis and measuring surface normal is θ2, using measuring surface normal direction as measurement axis, establish system
Coordinate system (x, y, z), wherein θ1=θ2；
2) exciting light is focused on sample via illumination objective lens, is inspired Reyleith scanttering light and is loaded with sample Spectral Properties
The Raman spectrum and LIBS of property, the Reyleith scanttering light being inspired and the drawing for being loaded with sample material composition information
Graceful spectrum and LIBS are reflected into collection object lens, and collected object lens converge to beam splitting system, light beam warp
It is divided into two beams of transmission and reflection after beam splitting system light splitting, transmitted light path enters LIBS detection system and obtains laser
Induced breakdown spectroscopy signal I (λL)；The reflected beams are divided by dichroic optical system, and the Raman spectrum in reflected light passes through two
Enter Raman spectroscopic detection system to color beam splitting system and obtain raman spectral signal I (λR), Reyleith scanttering light in the reflected beams and swash
Photoinduction breakdown spectral is reflected into confocal detection system by dichroic optical system；
3) light intensity detection is carried out to the optical signal for entering confocal detection system, the measured lens of measuring beam converge to a little
On detector, point probe detection focused light spot near central regions light intensity signal, with reference to the axial movement distance of sample 3
Confocal curves are obtained, obtain confocal signal I (x, y, z), using confocal curves peak point characteristic corresponding with focal position, are passed through
Localized excitation beam focus O positions are come in peak point position, realize the focus positioning of sample；
4) control laser beam accurately to focus on sample according to confocal signal I (x, y, z), reacquire detected sample
Spectral signal I (the λ of productL) and I (λR)；
5) data handling system is utilized by the confocal signal I (x, y, z) of acquisition, spectral signal I (λL) and I (λR) enter line number
According to fusion treatment, to obtain four-dimensional metrical information I (x, y, z, the λ of the topographical information of sample and material composition informationL,λR)；
6) after completing above-mentioned steps, control light beam is scanned detection to sample, next to sample surface
Point repeat step 2), 3), 4), 5) until scanning complete；
7) when individually handling confocal signal I (x, y, z), the three-dimensional appearance information of the high-space resolution of sample is obtained；
Individually processing raman spectral signal I (λR) when, obtain the chemical bond and molecular structure information of sample；Individually processing laser lures
Lead breakdown spectral signal I (λL) when, the element for obtaining sample forms information；Handle confocal signal I (x, y, z), light simultaneously
Spectrum signal I (λL) and I (λR) when, obtain sample high-space resolution pattern and microcell material composition " collection of illustrative plates " into
As detection.
Point probe in the present invention in confocal detection system can also be image capturing system, and data handling system is from figure
After obtaining focal spot pattern in acquisition system, the center of now focal spot pattern is calculated, and take near focal spot pattern center
Region carries out light intensity detection, forms confocal dummy pinhole, when sample carries out axial scan movement, data handling system meter
Pixel grey scale summation in the range of confocal dummy pinhole is calculated, obtains confocal axial strength response.
Focused spot size being measured for compression in the present invention and improving system transverse resolution, the excitation beam is polarization
Light beam；Or the structure light beam generated by pupil filtering technology.
Method can also detect the scattering spectrums such as fluorescence, Compton scattering light in the present invention.
The present invention provides a kind of twin shaft confocal laser induced breakdown-Raman spectrum imaging detection device, including light source, illumination
Object lens and collection object lens, it is characterised in that：Also include collimator and extender mirror, optical beam scanning system, beam splitting system, dichroic light splitting system
System, confocal detection system, Raman spectroscopic detection system and LIBS detection system；Wherein, illumination objective lens and adopt
Collection object lens are symmetrically laid out in measuring surface normal both sides, and the angle of lighting optical axis and measuring surface normal is θ1, collection optical axis is with surveying
The angle of amount face normal is θ2, wherein θ1=θ2, collimator and extender mirror, optical beam scanning system and illumination objective lens are successively placed on light source
Emergent ray direction, gathers object lens and beam splitting system is successively placed on the reflection light direction of sample, laser-induced breakdown light
Spectrum detection system is placed on dichroic light-dividing device transmission direction, and dichroic optical system and Raman spectroscopic detection system are placed on point
The reflection direction of photosystem, confocal detection system are placed on the reflection direction to color beam splitting system.
It is raising system transverse resolution in apparatus of the present invention, system can also add between collimator and extender mirror and illumination objective lens
Enter illumination end iris filter, or collection terminal iris filter added between dichroism beam splitting system and measurement lens,
Or add illumination end simultaneously between collimator and extender mirror and illumination objective lens and between dichroic optical system and measurement lens
Iris filter and collection terminal iris filter.
It is raising system transverse resolution in apparatus of the present invention, can also adds between collimator and extender mirror and optical beam scanning system
Enter Polarization Modulation system, or Polarization Modulation system is added between illumination objective lens and illumination end iris filter.
The detection device of confocal detection system can be point probe either ccd detector in apparatus of the present invention.
Also include the last data handling system for carrying out Data Fusion in apparatus of the present invention.
Raman spectroscopic detection system can be confocal spectroscopic detection device in apparatus of the present invention, including the first condenser, position
In the pin hole of the first condenser focal point, second condenser lens, after the spectrometer and spectrometer of second condenser lens focal point
Second detector；It can also be common spectral detection device, including second condenser lens, the spectrum positioned at second condenser lens focal point
The second detector after instrument and spectrometer；LIBS detection system includes laser-induced breakdown condenser, is located at
The pin hole of laser-induced breakdown condenser focal position, spectrometer and the 3rd detector after pin hole.
Beneficial effect
The inventive method, contrast prior art have following innovative point：
1) present invention organically combines laser twin shaft confocal technology and spectrographic detection technology, has merged the confocal skill of laser twin shaft
The high-precision axial tracking of art focuses ability, and accurate focus can be carried out to sample and ensures that focused activating light spot is minimum, and then is obtained
Sample minimum excites the spectrum parameter in focal beam spot region, realizes the high-space resolution detection of sample microscopic spectrum, and this is difference
In one of innovative point of existing spectrographic detection technology；
2) present invention can be to containing the raman scattering spectrum and laser-induced breakdown light of different information by rationally designing
Spectrum is detected simultaneously, realizes that structure shares and had complementary functions, and is realized to sample element composition and chemical bond and molecular structure
High-resolution detection, obtain sample material component integrated information, this be different from existing spectrographic detection technology innovative point it
Two；
3) laser twin shaft confocal microscope system and spectrum imaging system are structurally and functionally being blended, can both realizing sample
The imaging of product microcell geometry appearance, the spectrographic detection of sample microcell can be realized again, i.e., simultaneously realize minute yardstick tomography,
A variety of imaging patterns such as collection of illustrative plates tomography and spectrum test, this is the three of the innovative point for being different from existing spectrographic detection technology；
4) laser cross-compound arrangement is it is possible to prevente effectively from the system veiling glare that excitation beam backscattering introduces, reduces spectrum and visit
Noise is surveyed, improves detection signal to noise ratio and Spectral resolution, this is the four of the innovative point for being different from existing spectrographic detection technology；
The inventive method has following features：
1) laser twin shaft confocal technology and spectrographic detection technology are merged, using being accurately positioned for confocal system focusing, greatly
Width improves the spatial resolution of spectrographic detection；
2) can be combined by LIBS and laser Raman spectroscopy, realize excite with detecting structure share and
The complementation of function, obtain the integrated informations such as element composition, chemical bond and the molecular structure of sample component；
3) illuminate and detect by the way of cross-compound arrangement oblique incidence, effectively inhibit the interference of sample back-scattering light,
Improve spectrographic detection signal to noise ratio；
4) twin shaft confocal arrangement can realize that high resolution axially focuses using small value aperture object lens, take into account range ability
With resolution capability；
Brief description of the drawings
Fig. 1 is the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection method schematic diagram；
Fig. 2 is the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection device schematic diagram；
Fig. 3 is the confocal induced breakdown of the laser twin shaft with Polarization Modulation-Raman spectrum imaging detection device schematic diagram；
Fig. 4 is the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection device with detection focal spot amplification system
Schematic diagram；
Fig. 5 is the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection method and device embodiment schematic diagram；
Wherein, 1- light sources, 2- illumination objective lens, 3- samples, 4- lighting optical axis, 5- measuring surface normals, 6- θ1, 7- collections
Object lens, 8- beam splitting systems, 9- measurement lens, 10- focal spot amplification systems, 11- point probes, the confocal dummy pinholes of 12-, 13- are surveyed
Measure optical axis, the confocal Raman curves of 14-, 15- confocal detection systems, 16- focal spot patterns, the condensers of 17- first, 18- pin holes, 19-
Raman spectroscopic detection system, 20- collection optical axises, 21- data handling systems, 22- second condenser lens, 23- spectrometers, 24- detections
Device, 25- collimating and beam expanding systems, 26- optical beam scanning systems, 27- confocal curves, 28- illumination end iris filters, 29- polarizations are adjusted
System processed, 30- collection terminal iris filters, 31- θ2, 32- dichroic optical systems, 33- LIBSs detection system
System, 34- LIBSs collection optical axis, 35- LIBS condensers, 36- pin holes, 37- spectrometers,
38- detectors.
Embodiment
The invention will be further described with reference to the accompanying drawings and examples.
Embodiment
In the present embodiment, light source 1 is laser, and image enhancement system 10 is enlarging objective, and image capturing system 11 is CCD
Detector, data handling system 21 are computer, and detector 24 is ccd detector, and Polarization Modulation system 29 is radial polarisation light
Generator, dichroic optical system 32 are Notch filter.
As shown in Figure 1, Figure 2 with shown in Fig. 5, illumination objective lens 2 are symmetrically distributed in the both sides of measuring surface normal 5 with collection object lens 7, and
The angle of lighting optical axis 4 and measuring surface normal 5 is θ16, the angle of collection optical axis 20 and measuring surface normal 5 is θ231, wherein θ1=
θ2, twin shaft confocal laser induced breakdown-method for measuring Raman spectrum, its measuring process is：
First, after the collimated beam-expanding system 25 of light beam that laser 1 is sent, turn into after expand outgoing and illumination objective lens
The equal directional light of 2 Entry pupil diameters, turn into radial polarisation light after radial polarisation photogenerator 29, radial polarisation light is through illumination
Light beam is modulated after the iris filter 28 of end, and illuminated object lens 2 form compression hot spot and focus on quilt after optical beam scanning system 26
The surface of test sample product 3, and inspire Reyleith scanttering light and be loaded with the Raman diffused light and laser-induced breakdown light of the spectral characteristic of sample 3
Spectrum, sample 3 can strengthen technology by spectrum such as enhanced spectrum nano-particles and be handled, to improve the intensity for scattering light.
Axially (i.e. in figure z to) mobile sample 3, dissipate Reyleith scanttering light and the Raman of the correspondence different zones of sample 3
Penetrate spectrum and LIBS is reflected into collection object lens 7, the light beam collected by gathering object lens 7 is split system
8 are divided, and wherein transmitted light beam enters LIBS detection system 33, and reflected light is by Notch filter 32
It is divided again, wherein Raman diffused light enters Raman spectroscopic detection system 19 transmitted through Notch filter32, Reyleith scanttering light and swashs
Photoinduction breakdown spectral reflexes to confocal detection system 15 by Notch filter32.
Light beam into LIBS detection system 33 is assembled by LIBS condenser 35
Needle passing hole 36 enters spectrometer 37, and the LIBS I (λ for obtaining sample 3 are finally received by detector 38L)(λ
For wavelength)；
Raman diffused light into Raman spectroscopic detection system 19 converges to pin hole 18 by the first condenser 17, by second
Condenser 22, which is assembled, enters spectrometer 23, finally incides ccd detector 24, obtains the Raman spectrum I (λ of sample 3R)(λ
For wavelength), as shown in confocal Raman curve 14；
Into confocal detection system 15 light beam by collection terminal iris filter 30 modulation after, into confocal detection system
15, enter line convergence through measuring lens 9, focused light spot is amplified and is imaged on ccd detector 11 by enlarging objective 10；
After computer 21 obtains focal spot pattern 16 from ccd detector 11, the center of now focal spot pattern 16 is calculated, with
This center is as the origin of coordinates, the coordinate system (x established in CCD image planesd′,yd'), at the origin sets a circle confocal virtual
The focal spot pattern 16 of pin hole 12 is detected；When sample 3 is scanned, computer 21 calculates confocal dummy pinhole 12
In the range of pixel grey scale summation, obtain confocal intensity response I (x, y, z), as shown in confocal curves 27, pass through confocal curves 27
" extreme point " obtains the elevation information of sample surfaces, reconstructs the three-dimensional surface shape of sample 3.
The accurate corresponding characteristic of extreme point and system focus according to confocal curves 27, accurate acquisition system focus position,
Sample 3 is moved to focus O positions, reacquires the spectral signal I (λ of focus O positionsR) and I (λL)。
After completing above-mentioned steps, transversal scanning (x, y direction i.e. in figure) is carried out to sample 3, is moved to next
After point, repeat the above steps and obtain the confocal intensity response I of subsequent point (x, y, z) and spectral signal I (λ of sample 3R)、I
(λL)。
By I (λR) and I (λL), I (x, y, z) be sent to computer 21 carry out data processing, so as to obtain comprising sample
Four-dimensional metrical information I (x, y, z, the λ of 3 topographical informations and spectral informationR,λL)。
Only the confocal detection system 15 for receiving Reyleith scanttering light is obtained detection hot spot handled to obtain confocal response I (x, y,
Z), the focal position for exciting hot spot is accurately captured by its " extreme point ", system can carry out the three dimension scale of high-space resolution
Tomography；Only the spectral response I (λ that the Raman spectroscopic detection system 19 of Raman diffused light obtains are received in dockingR) 14 handled
When, system can carry out Raman spectroscopic detection；The LIBS detection system of docking laser induced breakdown spectroscopy
The 33 spectral response I (λ obtainedL) when being handled, system can carry out LIBS detection；It is simultaneously auspicious to receiving
The confocal response I (x, y, z) of the acquisition of ccd detector 11 of sharp light, the Raman spectroscopic detection system 19 of Raman diffused light obtain
Spectral signal I (λR) and LIBS LIBS detection system 33 obtain spectral response I (λL)
When being handled, system can with to reflection the pattern of sample 3 and component integrated information, that is, realize the topographical information of sample 3
With " collection of illustrative plates " Effect on Detecting of the high-space resolution of spectral information.
As shown in figure 5, twin shaft confocal laser induced breakdown-raman spectroscopy measurement device includes swashing along what light path was sequentially placed
Light device 1, collimating and beam expanding system 25, radial polarisation photogenerator 29, illumination end iris filter 28, optical beam scanning system 26, photograph
Bright object lens 2, sample 3, and light path reflection direction collection object lens 7, beam splitting system 8, positioned at the transmission direction of beam splitting system 8
LIBS detection system 33；Notch filter 32, Raman spectrum positioned at the reflection direction of beam splitting system 8 are visited
Examining system 19, positioned at the confocal detection system 15 of the reflection directions of Notch filter 32, and connection confocal detection system 15, drawing
The computer 21 of graceful spectrum investigating system 19 and LIBS detection system 33；Wherein, Raman spectroscopic detection system
19 include be sequentially placed along light path the first condensers 17, the pin hole 18 positioned at the focal position of the first condenser 17, positioned at pin hole
Second condenser lens 22 after 18, the spectrometer 23 positioned at the focal position of second condenser lens 22 and the CCD detection after spectrometer
Device 24；LIBS detection system 33 include be sequentially placed along light path LIBS condenser 35,
Pin hole 36 positioned at the focal position of LIBS condenser 35, the spectrometer 37 after pin hole 36 and positioned at light
Detector 38 after spectrometer 37；Confocal detection system 15 includes the enlarging objective 10 positioned at the measurement focal point of lens 9, and positioned at putting
The ccd detector 11 of the big focal point of object lens 10.
Collimator and extender device 25 in fig. 2 is with adding radial polarisation photogenerator 29 in illumination objective lens 2, light beam scanning is
System 26, illumination end iris filter 28, collection terminal iris filter is added between Notch filter32 and measurement lens 9
30, i.e. pie graph 3, addition radial polarisation photogenerator 29, illumination end iris filter 28, collection terminal iris filter 30 are used for
Structure and polarization state modulation are carried out to light beam, improves transverse resolution.
Focused on as shown in figure 4, increasing the measurement by magnification lens 9 of focal spot amplification system 10 in Fig. 2 confocal detection system 15
The Aili spot of formation, it is easy to receive using ccd detector 11.
The embodiment of the present invention is described above in association with accompanying drawing, but these explanations can not be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (10)
1. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection method, it is characterised in that：Light path lighting optical axis and detection
Optical axis is distributed into angle, excites light irradiation to be irradiated to sample surfaces along illumination path and inspire Reyleith scanttering light and be loaded with sample component and believes
The LIBS and Raman spectrum of breath, Reyleith scanttering light, LIBS and Raman spectrum quilt and illumination path
Detection light path into angle is received, and the element of LIBS detection system acquisition sample is partly into by light splitting
Information is formed, the Raman diffused light in another part enters Raman spectroscopic detection system through dichroic optical system and obtains sample
Chemical bond and molecular structure information, Reyleith scanttering light and LIBS are reflected into confocal by dichroic optical system
Detection system carries out light intensity detection and obtains sample surfaces height and topographical information；LIBS detection, Raman spectrum
Detection and the confocal topographical information detection triplicity of laser twin shaft can realize that structure shares and had complementary functions, and realize high-space resolution
Light spectrum image-forming and detection, the specific implementation step of this method it is as follows：
1) illumination objective lens (2) are symmetrically distributed in measuring surface normal (5) both sides with collection object lens (7), and lighting optical axis (4) are with surveying
The angle of amount face normal (5) is θ1(6) angle for, gathering optical axis (20) and measuring surface normal (5) is θ2(31), with measuring surface method
Line (5) direction is measurement axis, establishes system coordinate system (x, y, z), wherein θ1=θ2；
2) exciting light is focused on sample (3) via illumination objective lens (2), is inspired Reyleith scanttering light and is loaded with sample spectrum
The Raman spectrum and LIBS of characteristic, the Reyleith scanttering light being inspired and be loaded with sample (3) material composition letter
The Raman spectrum and LIBS of breath are reflected into collection object lens (7), and collected object lens (7) converge to light splitting
System (8), light beam are divided into two beams of transmission and reflection after beam splitting system (8) light splitting, and transmitted light path enters laser-induced breakdown light
Compose detection system (33) and obtain LIBS signal I (λL)；The reflected beams are by dichroic optical system (32) point
Light, the Raman spectrum in reflected light enter Raman spectroscopic detection system (19) through dichroic optical system (32) and obtain Raman light
Spectrum signal I (λR), Reyleith scanttering light and LIBS in the reflected beams are reflected into by dichroic optical system (32)
Confocal detection system (15)；
3) light intensity detection is carried out to the optical signal for entering confocal detection system (15), the measured lens of measuring beam (9) are assembled
Onto point probe (11), point probe (11) detection focused light spot near central regions light intensity signal, with reference to sample (3)
Axial movement distance obtain confocal curves (27), obtain confocal signal I (x, y, z), utilize confocal curves peak point and focus
The characteristic of position correspondence, by peak point position come localized excitation beam focus O positions, realize the focus positioning of sample；
4) control laser beam accurately to focus on sample (3) according to confocal signal I (x, y, z), reacquire detected sample
Spectral signal I (the λ of product (3)L) and I (λR)；
5) data handling system (21) is utilized by the confocal signal I (x, y, z) of acquisition, spectral signal I (λL) and I (λR) enter line number
According to fusion treatment, to obtain four-dimensional metrical information I (x, y, z, the λ of the topographical information of sample and material composition informationL,λR)；
6) after completing above-mentioned steps, control light beam is scanned detection to sample (3), next to sample (3) surface
Individual repeat step 2), 3), 4), 5) until scanning complete；
7) when individually handling confocal signal I (x, y, z), the three-dimensional appearance information of the high-space resolution of sample (3) is obtained；It is single
Stay alone reason raman spectral signal I (λR) when, the chemical bond and molecular structure information of acquisition sample (3)；Individually processing laser
Induced breakdown spectroscopy signal I (λL) when, the element for obtaining sample (3) forms information；Simultaneously handle confocal signal I (x, y,
Z), spectral signal I (λL) and I (λR) when, obtain high-space resolution pattern and " the collection of illustrative plates conjunction of microcell material composition of sample (3)
One " imaging detection.
2. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection method according to claim 1, its feature exist
In：Point probe (11) in confocal detection system (15) can also be image capturing system, and data handling system (21) is from figure
After obtaining focal spot pattern (16) in acquisition system, the center of now focal spot pattern (16) is calculated, and take focal spot pattern
(16) immediate vicinity region carries out light intensity detection, forms confocal dummy pinhole (12), when sample (3) carries out axial scan shifting
When dynamic, data handling system (21) calculates pixel grey scale summation in the range of confocal dummy pinhole (12), and it is strong to obtain confocal axial direction
Degree response.
3. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection method according to claim 1, its feature exist
In：For compression measurement focused spot size and system transverse resolution is improved, the excitation beam is light beam；Or by light
The structure light beam of pupil filtering technique generation.
4. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection method according to claim 1, its feature exist
In：This method can also detect fluorescence, Compton scattering light.
5. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection device, including light source (1), illumination objective lens (2) and collection
Object lens (7), it is characterised in that：Also include collimator and extender mirror (25), optical beam scanning system (26), beam splitting system (8), dichroic point
Photosystem (32), confocal detection system (15), Raman spectroscopic detection system (19) and LIBS detection system
(33)；Wherein, illumination objective lens (2) and collection object lens (7) are symmetrically laid out in measuring surface normal (5) both sides, lighting optical axis (4) with
The angle of measuring surface normal (5) is θ1(6) angle for, gathering optical axis (20) and measuring surface normal (5) is θ2(31), wherein θ1=
θ2, collimator and extender mirror (25), optical beam scanning system (26) and illumination objective lens (2) are successively placed on the emergent ray direction of light source (1),
Collection object lens (7) and beam splitting system (8) are successively placed on the reflection light direction of sample (3), and LIBS is visited
Examining system (33) is placed on beam splitting system (8) transmission direction, and dichroic optical system (32) and Raman spectroscopic detection system (19) are put
The reflection direction in beam splitting system (8) is put, confocal detection system (15) is placed on the reflection direction of dichroic optical system (32).
6. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection device according to claim 5, its feature exist
In：To improve system transverse resolution, system can also add illumination end light between collimator and extender mirror (25) and illumination objective lens (2)
Pupil wave filter (28), or collection terminal iris filter is added between dichroism beam splitting system (32) and measurement lens (9)
(30) two while, or between collimator and extender mirror (25) and illumination objective lens (2) adding illumination end iris filter (28)
To addition collection terminal iris filter (30) between color beam splitting system (32) and measurement lens (9).
7. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection device according to claim 5 or 6, its feature
It is：To improve system transverse resolution, polarization can be also added between collimator and extender mirror (25) and optical beam scanning system (26)
Modulating system (29), or Polarization Modulation system (29) is added between illumination objective lens (2) and illumination end iris filter (28).
8. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection device according to claim 5 or 6, its feature
It is：The detection device of confocal detection system (15) can be point probe either ccd detector.
9. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection device according to claim 5, its feature exist
In：Also include the last data handling system (21) for carrying out Data Fusion.
10. the confocal induced breakdown of laser twin shaft-Raman spectrum imaging detection device according to claim 5 or 6, its feature
It is：Raman spectroscopic detection system (19) can be confocal spectroscopic detection device, including the first condenser (17), poly- positioned at first
Pin hole (18), second condenser lens (22), the spectrometer (23) and light positioned at second condenser lens (22) focal point of light microscopic focal point
The second detector (24) after spectrometer (23)；Can also be common spectral detection device, including second condenser lens (22), positioned at
The second detector (24) after the spectrometer (23) and spectrometer (23) of two condensers (22) focal point；LIBS
Detection system (33) includes laser-induced breakdown condenser (35), the pin positioned at laser-induced breakdown condenser (35) focal position
Hole (36), spectrometer (37) and the 3rd detector (38) after pin hole (36).
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