CN104999670B - Multi-beam laser interference cross-scale 3D (three dimension) printing system and method - Google Patents
Multi-beam laser interference cross-scale 3D (three dimension) printing system and method Download PDFInfo
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- CN104999670B CN104999670B CN201510526268.3A CN201510526268A CN104999670B CN 104999670 B CN104999670 B CN 104999670B CN 201510526268 A CN201510526268 A CN 201510526268A CN 104999670 B CN104999670 B CN 104999670B
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Abstract
The invention relates to a system and a method for achieving cross-scale 3D (three dimension) printing by adopting a micro-nano composite periodic structure interference light source generated by a multi-beam laser interference technology, belonging to improvement on the existing 3D printing method. The system comprises an image acquisition data processing module (1), a PC control center (2), a laser (3), a beam splitting system (4), a 3D printing platform (5), a printing material (6) and a CCD microscopic imaging system (7). Original 3D printing speed and resolution are improved, a micro-nano composite structure material of a printed object is directly formed, and the system and the method belong to a high-speed large-area efficient micro-nano composite structure 3D printing technology.
Description
Technical field
The present invention relates to the micro-nano composite periodicity constructive interference light source that a kind of employing multi-beam laser interference technique is produced
Obtain the method and system across yardstick 3D printing.Belong to the improvement to existing 3D printing method.
Background technology
3 D-printing (Three Dimension Printing, abbreviation 3DP) is a kind of rapid shaping technique, refers to increasing material
Manufacture, the three-dimensional modeling data of Computer Design first is divided into after synusia model data, will by way of successively increasing material
Mathematical model is manufactured into the process of 3D solid object.3D printing has low cost, the course of work are pollution-free, shaping speed is fast etc.
Advantage.Innovation of the technology to core industries such as Aero-Space, automobile, medical treatment and consumption electronic products has huge impetus.
From the point of view of world wide, through development for many years, 3D printing has formed fairly perfect technical system, and range of application is constantly opened up
Exhibition, industrial chain is preliminarily formed, and market scale realizes rapid growth.
In recent years, it is as follows as the key technology patent of 3D printing expires successively：
Patent name：Quickly and precisely manufacture photocuring parts (Rapid and Accurate Production of
Stereolithographic Parts) U.S. Patent number 5610824, patentee：3D Systems companies；
Patent name：For removing technique (the Process of Support Removal of the support of fused glass pellet
For Fused Deposition Modeling) U.S. Patent number 5503785, patentee：Stratasys companies；
Patent name：Apparatus and method (the Additive Fabrication Apparatus and of increasing material manufacturing
Method) U.S. Patent number 5529471, patentee：University of Southern California；
Patent name：Method (the Method for Production of Three- of three-dimensional body are manufactured by photocuring
Dimensional Objects by Stereolithography) U.S. Patent number 5762856, patentee：3D
Systems companies.
Declining occurs in the cost of 3D printing, and promotes low price 3D printer market Rapid Expansion, its industrial use also will hold
Continuous expansion.Particularly will especially project in industry, biomedical and consumer applications.In medical field, 3D printing is fully adapted to
The particular/special requirement of personal customization.China's issue in 2015《Made in China 2025》Around key industry transition and upgrade and new
Carry out for the great common requirement of the field such as information technology, intelligence manufacture, increasing material manufacturing, new material, biological medicine innovation and development
The research and development of guardian technique.Further propose the demand to 3D printing technique innovation and industrialization.
With maturing, variation and the industrialization of micron technology and nanometer technology, micro-nano complex technique and micro-nano are combined
Material arises at the historic moment.The micro-nano compound structure of material surface can make material produce some unique performances, such as super-hydrophobic, ultraphotic
Absorb, surpass adhesion etc., suffer from wide application at aspects such as daily life, industrial and agricultural production and national defense construction front
Scape.Therefore simple, practical, efficiently to prepare micro-nano compound structure material method, no matter in field of scientific study or in reality
Production application field suffers from very important meaning.
Conventional laser 3D printing technique application single beam laser is focused to light source, and the speed and resolution ratio of printing are all limited by
The size of focal beam spot.
Multi-beam laser interference nano manufacturing technology proposed by the present invention is relevant folded using two beams or two beam above light beams
Plus, the light intensity Energy distribution of intensity periodic modulation is produced, when light intensity Energy distribution and the material phase interaction of this periodic modulation
Used time, two dimension or three-dimensional periodic nanostructured, i.e. micro-nano compound structure pattern can be produced in material surface.Such as patent
201110145715.2《A kind of method and system of simulating moth compound eye optical anti-reflection structure pattern》, it is exactly using multiple beam
What laser interferometry was realized.The characteristic size of pattern, shape and cycle are generated from nanometer to micron continuously adjustabe, and can be
Complete on curved surface, but this patent is only in material surface application, it is impossible to realize the 3D printing of micro-nano compound structure material.And it is of the invention
Successively increase material to generate micro-nano compound structure 3D solid by the way of layering processing, superposition shaping.
The content of the invention
The technology of the present invention solve problem：Overcome the deficiencies in the prior art, there is provided one kind utilizes multi-beam laser interference technique
The micro-nano composite periodicity constructive interference light source of generation obtains across yardstick 3D printing system and method, improves original 3D printing speed
Degree and resolution ratio, are quick, large area, efficiently while realize by the micro-nano compound structure material straight forming of printing objects
Micro-nano compound structure 3D printing technique.
The technology of the present invention solution：A kind of multi-beam laser interferes across yardstick 3D printing system, including：IMAQ number
According to processing module (1), PC control centres (2), laser instrument (3), beam splitting system (4), 3 D-printing platform (5), printed material (6)
With CCD micro imaging systems (7)；Printed material (6) is placed on 3 D-printing platform (5)；First image acquisition data processes mould
Block (1) is layered printing objects 3D physical models, and sends PC control centres (2) to；According to printing nano-pattern dimensional requirement,
PC control centres (2) simulate 3D nano-pattern shaping structures physical models and arrange beam splitting system (4) parameter, make beam splitting system
(4) single beam laser that laser instrument (3) is exported is divided into into multi beam coherent light, and sets incidence angle and the space of each road coherent beam
Angle, the polarization state of each road coherent light is consistent, combines multi beam coherent light by parameter setting, in CCD micro imaging systems (7)
With formation periodicity micro-nano compound structure pattern on the surface of printed material (6)；CCD micro imaging systems (7) detect coherent light
The interference structure pattern-information of formation simultaneously feeds back to PC control centres (2), parameter of the PC control centres (2) to beam splitting system (4)
Amendment, makes CCD micro imaging systems (7) detection interference figure distribution period reach printing nano-pattern dimensional requirement, and parameter sets
Surely complete；PC control centres (2) accurately control sweep speed and mode of the 3 D-printing platform (5) in two dimensional surface, are concerned with
Light according to by printing objects 3D physical model cross section profile point by point scannings, with by printed material (6) effect make to make use material into
Type, obtains the micro-nano compound structure thin slice of the cross section profile, arranges print platform (5) and rises or decline after the distance of one layer of thin slice
Continue demixing scan, being superimposed the mode of shaping successively increases material generation micro-nano compound structure threedimensional model.
The multi beam coherent beam quantity is 2-6 beams, sets each road coherent beam incidence angle as 0 ° -90 °, 0 ° of Space Angle -
360°。
The multi beam coherent light produces the light intensity distributions of strong and weak modulation in interference field, with the light redistributed after modulation
It is distributed as 3D printing light source by force, periodicity micro-nano is formed on the surface of CCD micro imaging systems (7) or printed material (6)
Composite construction pattern.
When the PC control centres (2) arrange beam splitting system (4) parameter so that the interference optical field intensity distribution cycle reaches beats
Print nano-pattern dimensional requirement, pattern period 50-5000nm is adjustable, the micro-nano compound structure figure such as wiregrating, dot matrix, multiple graphs combination
Case is optional, figure dutycycle 1：1-1：10 is optional.
Parameters revision of the PC control centres (2) to beam splitting system (4), it is relevant by CCD micro imaging systems (7) detection
The interference figure information of light formation simultaneously feeds back to PC control centres (2), compares with analogue pattern, adjustment beam splitting system ginseng
Number, reduces error, realizes that CCD micro imaging systems detection interference figure is consistent with print pattern.
The coherent light of the periodicity micro-nano compound structure with by printed material (6) effect, through physically or chemically changing
Make to make use material to be directly formed to micro-nano compound structure.
The PC control centres (2) accurately control scanning speed of the 3 D-printing platform (5) in two dimensional surface according to setting
Degree and mode, sweep speed (1-10mm/s) determines scope by printing objects 3D physical model cross section profiles, and pointwise filling is swept
Retouch, obtain the micro-nano compound structure thin slice of the cross section profile, the distance (100nm-2um) for rising or declining one layer of thin slice continues afterwards
Demixing scan, being superimposed the mode of shaping successively increases material generation micro-nano compound structure threedimensional model.
Multi-beam laser interferes across yardstick 3D printing method, realizes that step is as follows：
A. gathered data processing module (1) is layered printing objects 3D physical models, and sends PC control centres (2) to；
3D nano-pattern shaping structures physical models are simulated according to nano-pattern dimensional requirement is printed by B.PC control centres (2)
And beam splitting system (4) parameter is set, and make beam splitting system (4) that the single beam laser that laser instrument (3) is exported is divided into into multi beam coherent light, make
Printing nano-pattern dimensional requirement must be reached the interference optical field intensity distribution cycle；
C. coherent light produces the light intensity distributions of strong and weak modulation in interference field, with the light distribution redistributed after modulation
As 3D printing light source, periodicity micro-nano composite junction is formed on the surface of CCD micro imaging systems (7) and printed material (6)
Structure pattern；
The interference figure information of D.CCD micro imaging systems (7) detection coherent light formation simultaneously feeds back to PC control centres
(2), compare with analogue pattern, by parameters revision of the PC control centres (2) to beam splitting system (4), reduce error, realize
CCD micro imaging systems detection interference figure is consistent with print pattern；
E. coherent light makes to make use material to be directly formed to by printed material (6) effect through physically or chemically changing
Micro-nano compound structure；
F. by the displacement of PC control centres (2) precise control 3 D-printing platform, coherent light has step demixing scan quilt
Printed material (6), being superimposed the mode of shaping successively increases the 3D printing that material realizes micro-nano compound structure.
It is of the invention to have the advantage that compared with existing 3D printing method and system：
(1) because existing 3D laser printing is focused to light source using single beam laser, the speed and resolution ratio of printing are all received
It is formed on the size of focal beam spot, the micro-nano composite periodicity constructive interference light that the present invention is produced using multi-beam laser interference technique
For light source, exposure field area is big, efficiency high.
(2) because the patterning of laser interferometry generation is from nanoscale to micrometer-adjustable, with graphic feature chi
Very little little, the good, advantage that pattern density adjustability is good of periodicity so that the cycle of micro-nano compound structure 3D printing arranges more convenient.
(3) because the present invention directly generates the 3D printing of micro-nano compound structure, printed material is saved, compares existing method tool
There are quick, large area, precision, be realized with a low cost micro-nano composite 3D printing.
Description of the drawings
Fig. 1 is that the multi-beam laser of the present invention interferes across yardstick 3D printing system principle schematic diagram；
Fig. 2 is the beam laser beam splitting system schematic diagram of the embodiment of the present invention 1 six；
Fig. 3 is that the beam laser of the embodiment of the present invention 1 six interferes 3D printing system schematic；
Fig. 4 is that the computer sim- ulation of the embodiment of the present invention 1 simulates six beam laser two-dimensional structure schematic diagrames；
Fig. 5 is the computer simulation 3D printing shaping schematic view of the embodiment of the present invention 1.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Whole description.Listed embodiment is a part of embodiment of the invention, rather than whole embodiments.Reality based on the present invention
Example is applied, the other embodiment that those skilled in the art are obtained on the premise of without creative work belongs to guarantor of the present invention
Shield object.
Embodiment 1
As shown in figure 1, a kind of multi-beam laser of the invention interferes across yardstick 3D printing system to include：At image acquisition data
Reason module 1, PC control centres 2, laser instrument 3, beam splitting system 4,3 D-printing platform 5, printed material 6, CCD micro imaging systems
7.First image acquisition data processing module 1 will generate physics model layers after printing objects 3D scannings, and send PC controls to
Center 2；According to nano-pattern dimensional requirement is printed, the simulation 3D nano-pattern shaping structures physical models of PC control centres 2 simultaneously set
The parameter of beam splitting system 4 is put, makes beam splitting system 4 that the single beam laser that laser instrument 3 is exported is divided into into multi beam coherent light, and set each road phase
The incidence angle and Space Angle of dry light beam, the polarization state of each road coherent light is consistent, and by parameter setting multi beam coherent light is combined,
Periodicity micro-nano compound structure pattern is formed on the surface of CCD micro imaging systems 7 and printed material 6；CCD micro imaging systems
The interference structure pattern-information of 7 detection coherent lights formation simultaneously feeds back to PC control centres 2, and PC control centres 2 are to beam splitting system 4
Parameters revision, makes the detection interference figure distribution period of CCD micro imaging systems 7 reach printing nano-pattern dimensional requirement, parameter
Setting is completed；PC control centres 2 accurately control sweep speed and mode of the 3 D-printing platform 5 in two dimensional surface, coherent light
According to by printing objects 3D physical model cross section profile point by point scannings, make to make the shaping of use material with being acted on by printed material 6, obtain
Obtain the micro-nano compound structure thin slice of the cross section profile, print platform 5 is set and is risen or is declined and continue to divide after the distance of one layer of thin slice
Layer scanning, being superimposed the mode of shaping successively increases material generation micro-nano compound structure threedimensional model.
As shown in Fig. 2 the laser sent by ultraviolet laser 3 (355nm) is divided into 6 beam interferometer light after beam splitting system 4,
Light path I, II, III are incident beam in figure, and light path IV, V, VI are modulation light beam.The Space Angle of incident light I, II, III is into system
Distribution substantially symmetrical about its central axis, as 0 °, 120 ° and 240 °, modulate light IV, V, VI Space Angle respectively with the space of three beams incident light
Angle is identical, but incidence angle is different.Incident beam incidence angle is 30 °, and modulation beam incident angle is 35 °.Interference structure is with positive triangle
The dot matrix that shape is distributed is for large period (6 μm) and the micro-nano of (500nm) is combined dual two-dimensional structure with Kong Zhen as minor cycle.Such as Fig. 4
Shown in computer sim- ulation simulation drawing.
Six beam lasers interfere 3D printing system as shown in figure 3, will print first by image acquisition data processing module 1
Object (square) 3D physical model slicing delaminations, and send PC control centres 2 to, according to printing nano-pattern dimensional requirement
(500nm/6 μm), the simulation 3D nano-pattern shaping structures physical models of PC control centres 2 simultaneously control beam splitting system 4 by laser instrument 3
The single beam laser of output is divided into six beam coherent lights, and by parameter setting coherent light interference is made, and in the He of CCD micro imaging systems 7
Formed on the surface of printed material 6 (SU8 photoresists) with the dot matrix of equilateral triangle distribution as large period and with Kong Zhen as minor cycle
Micro-nano be combined dual two-dimensional structure.The interference structure pattern-information of CCD micro imaging systems 7 simultaneously feeds back to PC control centres, PC
Control centre makes CCD micro imaging systems detection interference figure distribution period reach printing nanometer beam splitting system parameters revision
Pattern dimension is required.Parameter setting is completed.PC control centres accurately control scanning speed of the 3 D-printing platform 5 in two dimensional surface
Degree 1mm/s, and according to by printing objects 3D physical model cross section profile point by point scannings, coherent light makes to make use with photoresist effect
Material is molded, and Single Slice Mode completes the micro-nano compound structure thin slice for obtaining the cross section profile, arranges print platform and rises or decline
The distance (500nm) of one layer of thin slice continues afterwards demixing scan, is superimposed the mode of shaping and successively increases material, and micro-nano is generated after development
Composite construction threedimensional model.
Computer simulation 3D printing stereo shaping figure as shown in Figure 5.
Above example is provided just for the sake of the description purpose of the present invention, and is not intended to limit the scope of the present invention.This
The scope of invention is defined by the following claims.The various equivalents made without departing from spirit and principles of the present invention and repair
Change, all should cover within the scope of the present invention.
Claims (9)
1. a kind of multi-beam laser interferes across yardstick 3D printing system, it is characterised in that：Including image acquisition data processing module
(1), PC control centres (2), laser instrument (3), beam splitting system (4), 3 D-printing platform (5), printed material (6) and CCD are micro-
Imaging system (7)；Printed material (6) is placed on 3 D-printing platform (5)；First image acquisition data processing module (1) will beat
Print object 3D physical model layerings, and send PC control centres (2) to；According to printing nano-pattern dimensional requirement, in PC controls
The heart (2) is simulated 3D nano-pattern shaping structures physical models and arranges beam splitting system (4) parameter, makes beam splitting system (4) by laser
The single beam laser of device (3) output is divided into multi beam coherent beam, and sets the incidence angle and Space Angle of each road coherent beam, each road phase
The polarization state of dry light beam is consistent, and by parameter setting multi beam coherent beam combination is made, and in CCD micro imaging systems (7) and beats
Periodicity micro-nano compound structure pattern is formed on the surface of printed material material (6)；CCD micro imaging systems (7) detect coherent beam shape
Into interference structure pattern-information and feed back to PC control centres (2), PC control centres (2) repair to the parameter of beam splitting system (4)
Just, CCD micro imaging systems (7) detection interference figure distribution period is made to reach printing nano-pattern dimensional requirement, parameter setting
Complete；PC control centres (2) accurately control sweep speed and mode of the 3 D-printing platform (5) in two dimensional surface, coherent light
Beam makes to make the shaping of use material according to by printing objects 3D physical model cross section profile point by point scannings with printed material (6) effect,
The micro-nano compound structure thin slice of the cross section profile is obtained, the distance that 3 D-printing platform (5) rises or declines one layer of thin slice is set
After continue demixing scan, be superimposed the mode of shaping and successively increase material and generate micro-nano compound structure threedimensional model；
The PC control centres (2) 3 D-printing platform (5) is accurately controlled in the sweep speed of two dimensional surface according to setting and
Mode, sweep speed 1-10mm/s determines scope by printing objects 3D physical model cross section profiles, and pointwise filling scanning is obtained
The micro-nano compound structure thin slice of the cross section profile is obtained, the layering that continues after 100nm-2um for rising or declining one layer of thin slice is swept
Retouch, being superimposed the mode of shaping successively increases material generation micro-nano compound structure threedimensional model.
2. multi-beam laser according to claim 1 interferes across yardstick 3D printing system, it is characterised in that：The multi beam phase
Dry number of beams is 2-6 beams.
3. multi-beam laser according to claim 1 interferes across yardstick 3D printing system, it is characterised in that：The setting is each
Road coherent beam incidence angle is 0 ° -90 °, 0 ° -360 ° of Space Angle.
4. multi-beam laser according to claim 1 and 2 interferes across yardstick 3D printing system, it is characterised in that：It is described many
Beam coherent beam produces the light intensity distributions of strong and weak modulation in interference field, with the light distribution redistributed after modulation as 3D
Light source is printed, periodicity micro-nano compound structure pattern is formed on the surface of CCD micro imaging systems (7) or printed material (6).
5. multi-beam laser according to claim 1 interferes across yardstick 3D printing system, it is characterised in that：The PC controls
When center (2) arranges beam splitting system (4) parameter so that the interference optical field intensity distribution cycle reaches printing nano-pattern size will
Ask, pattern period 50-5000nm is adjustable, wiregrating, dot matrix, multiple graphs combination micro-nano compound structure pattern are optional, figure dutycycle
1：1-1：10 is optional.
6. multi-beam laser according to claim 1 interferes across yardstick 3D printing system, it is characterised in that：The PC controls
Parameters revision of the center (2) to beam splitting system (4), by CCD micro imaging systems (7) interference figure that coherent beam is formed is detected
Information simultaneously feeds back to PC control centres (2), compares with analogue pattern, adjusts beam splitting system parameter, reduces error, realizes
CCD micro imaging systems detection interference figure is consistent with print pattern.
7. multi-beam laser according to claim 1 interferes across yardstick 3D printing system, it is characterised in that：The periodicity
The coherent beam of micro-nano compound structure is acted on printed material (6), through physically or chemically change make to make use material directly into
Type is micro-nano compound structure.
8. multi-beam laser interferes across yardstick 3D printing method, it is characterised in that realize that step is as follows：
A. image acquisition data processing module (1) is layered printing objects 3D physical models, and sends PC control centres (2) to；
B.PC control centres (2) simulate 3D nano-pattern shaping structures physical models and set according to nano-pattern dimensional requirement is printed
Beam splitting system (4) parameter is put, makes beam splitting system (4) that the single beam laser that laser instrument (3) is exported is divided into into multi beam coherent beam so that
The interference optical field intensity distribution cycle reaches printing nano-pattern dimensional requirement；
C. coherent beam produces the light intensity distributions of strong and weak modulation in interference field, is made with the light distribution redistributed after modulation
For 3D printing light source, periodicity micro-nano compound structure is formed on the surface of CCD micro imaging systems (7) and printed material (6)
Pattern；
The interference figure information of D.CCD micro imaging systems (7) detection coherent beam formation simultaneously feeds back to PC control centres (2),
Compare with analogue pattern, by parameters revision of the PC control centres (2) to beam splitting system (4), reduce error, realize CCD
Micro imaging system detection interference figure is consistent with print pattern；
E. coherent beam and printed material (6) are acted on, and make to make use material to be directly formed to micro-nano through physically or chemically changing
Composite construction；
F. by the displacement of PC control centres (2) precise control 3 D-printing platform, coherent beam has step demixing scan to print
Material (6), being superimposed the mode of shaping successively increases the 3D printing that material realizes micro-nano compound structure.
9. multi-beam laser according to claim 8 interferes across yardstick 3D printing method, it is characterised in that：The multi beam phase
Dry number of beams is 2-6 beams, sets each road coherent beam incidence angle as 0 ° -90 °, 0 ° -360 ° of Space Angle.
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