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CN104723196B - Four-degree-of-freedom adjusts platform - Google Patents

Four-degree-of-freedom adjusts platform Download PDF

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Publication number
CN104723196B
CN104723196B CN201310718170.9A CN201310718170A CN104723196B CN 104723196 B CN104723196 B CN 104723196B CN 201310718170 A CN201310718170 A CN 201310718170A CN 104723196 B CN104723196 B CN 104723196B
Authority
CN
China
Prior art keywords
straight line
slide block
pressing plate
adjustment
crosshead shoe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310718170.9A
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Chinese (zh)
Other versions
CN104723196A (en
Inventor
刘红兵
李金明
焦尚才
赵建强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEIJING HIGH-PRECISION TECHNOLOGY Co.,Ltd.
Original Assignee
BEIJING HIGH-PRECISION TECHNOLOGY DEVELOPMENT Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEIJING HIGH-PRECISION TECHNOLOGY DEVELOPMENT Co Ltd filed Critical BEIJING HIGH-PRECISION TECHNOLOGY DEVELOPMENT Co Ltd
Priority to CN201310718170.9A priority Critical patent/CN104723196B/en
Publication of CN104723196A publication Critical patent/CN104723196A/en
Application granted granted Critical
Publication of CN104723196B publication Critical patent/CN104723196B/en
Active legal-status Critical Current
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)

Abstract

The invention discloses a kind of four-degree-of-freedom adjusts platform, including base, two-dimension translational mechanism, slide carriage, two-dimensional rotation mechanism and workbench, the slide carriage is arranged on base by two-dimension translational mechanism, and the workbench is arranged on the slide carriage by two-dimensional rotation mechanism.The four-degree-of-freedom adjustment platform of the present invention arranges two-dimension translational mechanism on base, and slide carriage motion is driven by two-dimension translational mechanism, two-dimensional rotation mechanism is provided with the slide carriage, and working table movement is driven by two-dimensional rotation mechanism, so as to the four-degree-of-freedom for realizing workbench is moved, and by two-dimension translational motion and the separation of two-dimensional rotary motion, frame for movement is simplified, while being also convenient for the control of the motion to four degree of freedom.

Description

Four-degree-of-freedom adjusts platform
Technical field
The present invention relates to a kind of adjustment platform, more particularly to a kind of four-degree-of-freedom adjustment platform.
Background technology
Four-degree-of-freedom adjusts platform during large-scale optical lenses are processed, with very important status.Due to large-scale Optical lenses be used primarily in astronomy, remote sensing, observing and controlling, artificial satellite etc. national leading-edge field, therefore to requirement on machining accuracy compared with It is high.High-precision four-degree-of-freedom adjustment platform is due to needing to realize higher Adjustment precision, therefore complicated in mechanical structure, many at present Platform even using four-degree-of-freedom robot platform in parallel, increased the complexity of control.
The content of the invention
It is an object of the present invention to provide a kind of four-degree-of-freedom adjustment platform of simple structure.
The present invention solves technical problem and adopts the following technical scheme that:A kind of four-degree-of-freedom adjusts platform, including base, two dimension are put down Telephone-moving structure, slide carriage, two-dimensional rotation mechanism and workbench, the slide carriage are arranged on base by two-dimension translational mechanism, the work Make platform to be arranged on the slide carriage by two-dimensional rotation mechanism.
Optionally, the two-dimension translational mechanism includes that first straight line long guideway, second straight line long guideway, the first cross are slided Block, the first governor motion and the second governor motion;
The first straight line long guideway is installed on the base;
First crosshead shoe is slidably disposed on the first straight line long guideway;
The second straight line long guideway is slidably disposed on first crosshead shoe, and the second straight line is long Perpendicular to the first straight line long guideway, the slide carriage is fixed on the second straight line long guideway guide rail;
First governor motion is fixed on the base, and the slide carriage can be made to drive first crosshead shoe Translate along the first straight line long guideway;
Second governor motion is fixed on the slide carriage, and the slide carriage can be made to drive the second straight line length to lead Rail is translated along first crosshead shoe.
Optionally, first governor motion includes first baffle, the first adjusting screw, the first adjustment frame, the second cross Slide block, the 3rd crosshead shoe, the first adjustment slide block, the second adjustment slide block, the 3rd adjustment slide block, the 4th adjustment slide block, the first pressure Plate, the second pressing plate, the 3rd pressing plate and the 4th pressing plate;
The first baffle is fixed on the base of described first straight line long guideway one end;
First pressing plate and the second pressing plate are individually fixed on the slide carriage, and are led positioned at the first straight line length respectively The both sides of rail;
Second crosshead shoe is slidably disposed on one end of the first straight line long guideway;
The first adjustment slide block and the second adjustment slide block are fixed on second crosshead shoe, and respectively slidably It is arranged on first pressing plate and the second pressing plate;
First adjustment frame is arranged on second crosshead shoe, and straight along described first in first adjustment frame The bearing of trend of line length guide rail offers screwed hole;
First adjusting screw passes through the first baffle, coordinates with the screwed hole screw thread of first adjustment frame;
3rd pressing plate and the 4th pressing plate are individually fixed on the slide carriage, and are led positioned at the first straight line length respectively The both sides of rail;
3rd crosshead shoe is slidably disposed on the other end of the first straight line long guideway;
The 3rd adjustment slide block and the 4th adjustment slide block are fixed on the 3rd crosshead shoe, and respectively slidably It is arranged on the 3rd pressing plate and the 4th pressing plate.
Optionally, second governor motion includes second baffle, the second adjusting screw, the second adjustment frame, the 4th cross Slide block, the 5th crosshead shoe, the 5th adjustment slide block, the 6th adjustment slide block, the 7th adjustment slide block, the 8th adjustment slide block, the 5th pressure Plate, the 6th pressing plate, the 7th pressing plate and the 8th pressing plate;
The second baffle is fixed on the slide carriage of described second straight line long guideway one end;
5th pressing plate and the 6th pressing plate are individually fixed on base, and respectively positioned at the two of the second straight line long guideway Side;
4th crosshead shoe is slidably disposed on one end of the second straight line long guideway;
The 5th adjustment slide block and the 6th adjustment slide block are fixed on the 4th crosshead shoe, and respectively slidably It is arranged on the 5th pressing plate and the 6th pressing plate;
Second adjustment frame is arranged on the 4th crosshead shoe, and the second straight line in second adjustment frame The bearing of trend of long guideway offers screwed hole;
Second adjusting screw passes through the second baffle, coordinates with the screwed hole screw thread of second adjustment frame;
7th pressing plate and the 8th pressing plate are individually fixed on the base of the second straight line long guideway both sides;
5th crosshead shoe is slidably disposed on the other end of the second straight line long guideway;
The 7th adjustment slide block and the 8th adjustment slide block are fixed on the 5th crosshead shoe, and respectively slidably It is arranged on the 7th pressing plate and the 8th pressing plate.
Optionally, first governor motion is also straight including the first straight line short lead rail and second being fixed on the slide carriage Line short lead rail, the first straight line short lead rail and second straight line short lead rail are respectively slidably arranged at second crosshead shoe On the 3rd crosshead shoe;And/or second governor motion is also including the 3rd straight line short lead rail being fixed on the base With the 4th straight line short lead rail, the 3rd straight line short lead rail and the 4th straight line short lead rail are respectively slidably arranged at the described 4th On crosshead shoe and the 5th crosshead shoe.
Optionally, the first adjustment slide block, the second adjustment slide block, the 3rd adjustment slide block and the 4th adjust slide block edge respectively Direction perpendicular to the first straight line long guideway offers groove, in first pressing plate, the second pressing plate, the 3rd pressing plate and the 4th It is respectively arranged with pressing plate and the described first adjustment slide block, the second adjustment slide block, the 3rd adjustment slide block and the 4th adjustment slide block The backing pin that groove coordinates;And/or the 5th adjustment slide block, the 6th adjustment slide block, the 7th adjustment slide block and the 8th adjustment slide block point Not along offering groove perpendicular to the direction of the second straight line long guideway, the 5th pressing plate, the 6th pressing plate, the 7th pressing plate and It is respectively arranged with 8th pressing plate and the 5th adjustment slide block, the 6th adjustment slide block, the 7th adjustment slide block and the 8th adjustment slide block The backing pin that groove coordinates.
Optionally, the two-dimensional rotation mechanism includes first bearing seat, second bearing seat, 3rd bearing seat, fourth bearing Seat, middle transition plate, first angle governor motion, second angle governor motion;
The first bearing seat and 3rd bearing seat are installed on the top surface of the slide carriage;
The second bearing seat and fourth bearing seat are installed on the bottom surface of the workbench;
The middle transition plate includes first rotating shaft, the second rotating shaft, the 3rd rotating shaft and the 4th rotating shaft, wherein described first turn Axle and the 3rd rotating shaft core line overlap, and second rotating shaft and the 4th rotating shaft core line overlap, the axial line of the first rotating shaft Vertical with the axial line of second rotating shaft, the first rotating shaft, the second rotating shaft, the 3rd rotating shaft and the 4th rotating shaft are respectively arranged at In the first bearing seat, second bearing seat, 3rd bearing seat and fourth bearing seat;
The first angle governor motion and the second angle governor motion are arranged on the middle transition plate.
Optionally, the first angle governor motion include with integrally formed first pedestal of the middle transition plate, set The first angle adjusting nut that is placed on first pedestal and first jiao coordinated with the first angle adjusting nut screw thread Degree adjusting screw, one end of the first angle adjusting screw is fixed on the top surface of the slide carriage, and/or the second angle Governor motion includes and integrally formed second pedestal of the middle transition plate, the second angle being arranged on second pedestal Adjusting nut and the second angle adjusting screw coordinated with the second angle adjusting nut screw thread, the second angle adjust spiral shell One end of nail is fixed on the bottom surface of the workbench.
Optionally, the first angle governor motion is multiple;And/or the second angle governor motion is multiple.
Optionally, the second angle governor motion also includes the second spheric washer and the second taper faced washer, described second Taper faced washer is arranged in second pedestal, and second spheric washer is arranged on second taper faced washer, and described Two angle adjusting nuts are arranged on second taper faced washer.
The present invention has the advantages that:The four-degree-of-freedom adjustment platform of the present invention is put down by the two dimension being arranged on base Telephone-moving structure, is driven slide carriage motion by two-dimension translational mechanism, is provided with two-dimensional rotation mechanism on the slide carriage, turned by two dimension Motivation structure drives working table movement, so as to the four-degree-of-freedom for realizing workbench is moved, is moved by the two-dimension translational and two dimension The separation of rotational motion, simplifies frame for movement, while being also convenient for the control of the motion to four degree of freedom.
Description of the drawings
Fig. 1 is the structural representation that the four-degree-of-freedom of the present invention adjusts platform;
Fig. 2 is the structural representation of the two-dimension translational mechanism of the four-degree-of-freedom adjustment platform of the present invention;
Fig. 3 is the structural representation of the two-dimension translational mechanism of the four-degree-of-freedom adjustment platform of the present invention;
Fig. 4 is the structural representation of the two-dimensional rotation mechanism of the four-degree-of-freedom adjustment platform of the present invention;
Fig. 5 is the structural representation of the second angle adjustment mechanism of the four-degree-of-freedom adjustment platform of the present invention.
In figure, labelling is illustrated as:1- bases;2- slide carriages;3- workbench;4- first straight line long guideways;5- second straight line length is led Rail;The first crosshead shoes of 6-;7- first baffles;The first adjusting screws of 8-;The first adjustment frames of 9-;The second crosshead shoes of 10-;11- 3rd crosshead shoe;12- first adjusts slide block;13- second adjusts slide block;14- the 3rd adjusts slide block;15- the 4th adjusts slide block; The first pressing plates of 16-;The second pressing plates of 17-;The 3rd pressing plates of 18-;The 4th pressing plates of 19-;20- second baffles;The second adjusting screws of 21-; The second adjustment frames of 22-;The 4th crosshead shoes of 23-;The 5th crosshead shoes of 24-;25- the 5th adjusts slide block;The adjustment of 26- the 6th is slided Block;27- the 7th adjusts slide block;28- the 8th adjusts slide block;The 5th pressing plates of 29-;The 6th pressing plates of 30-;The 7th pressing plates of 31-;32- Eight pressing plates;33- first straight line short lead rails;34- second straight line short lead rails;The 3rd straight line short lead rails of 35-;The 4th straight line short-range missiles of 36- Rail;37- backing pins;38- first bearing seats;39- second bearing seats;40- 3rd bearing seats;41- fourth bearing seats;Mistake in the middle of 42- Cab apron;43- first rotating shafts;The second rotating shafts of 44-;The 3rd rotating shafts of 45-;The 4th rotating shafts of 46-;The first pedestals of 47-;48- first angles Adjusting nut;49- first angle adjusting screws;The second pedestals of 50-;51- second angle adjusting nuts;52- second angles are adjusted Screw;The second spheric washers of 53-;The second taper faced washers of 54-.
Specific embodiment
Technical scheme is further elaborated with reference to embodiment and accompanying drawing.
Embodiment 1
With reference to Fig. 1-5, a kind of four-degree-of-freedom adjustment platform is present embodiments provided, including base 1, two-dimension translational mechanism, slip Plate 2, two-dimensional rotation mechanism and workbench 3, the slide carriage 2 are arranged on base 1 by two-dimension translational mechanism, the workbench 3 It is arranged on the slide carriage 2 by two-dimensional rotation mechanism.
The four-degree-of-freedom adjustment platform of the present invention by the two-dimension translational mechanism that is arranged on base 1, by two-dimension translational machine Structure drives slide carriage 2 to move, and on the slide carriage 2 is provided with two-dimensional rotation mechanism, drives workbench 3 to transport by two-dimensional rotation mechanism It is dynamic, so as to the four-degree-of-freedom for realizing workbench 3 is moved, by two-dimension translational motion and the separation of two-dimensional rotary motion, letter Frame for movement is changed, while being also convenient for the control of the motion to four degree of freedom.
In the present embodiment, optionally, the two-dimension translational mechanism includes first straight line long guideway 4, second straight line long guideway 5th, the first crosshead shoe 6, the first governor motion and the second governor motion;
The first straight line long guideway 4 is installed on the base 1;
First crosshead shoe 6 is slidably disposed on the first straight line long guideway 4;
The second straight line long guideway 5 is slidably disposed on first crosshead shoe 6, and the second straight line Perpendicular to the first straight line long guideway 4, the slide carriage 2 is fixed on the second straight line long guideway 5 long guideway 5;
First governor motion is fixed on the base 1, and the slide carriage 2 can be made to drive first cross to slide Block 6 is translated along the first straight line long guideway 4;
Second governor motion is fixed on the slide carriage 2, and the slide carriage can be made to drive the second straight line long Guide rail 5 is translated along first crosshead shoe 6.
First crosshead shoe 6 includes the first chute and the second chute, the bearing of trend and second of first chute The bearing of trend of chute is vertical, and first chute is coordinated with the first straight line long guideway 4, second chute with it is described Second straight line long guideway 5 coordinates;
The two-dimension translational mechanism makes first crosshead shoe 6 in the drive of the slide carriage 2 by the first governor motion Under, slide along first straight line long guideway 4, to realize two-dimension translational mechanism movement in X direction, while adjusting by second Mechanism, makes the slide carriage 2 drive the second straight line long guideway 5 to translate along first crosshead shoe 6, to realize the two dimension Translation mechanism realizes the two-dimension translational of the two-dimension translational mechanism along the movement of the Y-direction vertical with the X-direction.
In the present embodiment, optionally, first governor motion includes that first baffle 7, the first adjusting screw 8, first are adjusted Whole frame 9, the second crosshead shoe 10, the 3rd crosshead shoe 11, first adjust the adjustment adjustment of slide block the 13, the 3rd of slide block 12, second and slide The adjustment slide block 15 of block the 14, the 4th, the first pressing plate 16, the second pressing plate 17, the 3rd pressing plate 18 and the 4th pressing plate 19;
The first baffle 7 is fixed on the base 1 of described 4 one end of first straight line long guideway;
First pressing plate 16 and the second pressing plate 17 are individually fixed on the slide carriage 2, and straight positioned at described first respectively The both sides of line length guide rail 4;
Second crosshead shoe 10 is slidably disposed on one end of the first straight line long guideway 4;
The first adjustment slide block 12 and the second adjustment slide block 13 are fixed on second crosshead shoe 10, and difference can It is slidingly arranged on first pressing plate 16 and the second pressing plate 17;It is furthermore preferred that the first adjustment slide block 12 and second is adjusted Whole slide block 13 is fixed on two relative sides of second crosshead shoe 10, described two relative sides each parallel to The bearing of trend of the first straight line long guideway 4.
First adjustment frame 9 is arranged in the upper of second crosshead shoe 10, and first adjustment frame 9 along described The bearing of trend of first straight line long guideway offers screwed hole;It is furthermore preferred that first adjustment frame 9 is arranged at the described 20th On the side of word slide block 10, and the side is perpendicular to the bearing of trend of the first straight line long guideway 4.
First adjusting screw 8 passes through the first baffle 7, coordinates with the screwed hole screw thread of first adjustment frame 9;
3rd pressing plate 18 and the 4th pressing plate 19 are individually fixed on the slide carriage 2, and straight positioned at described first respectively The both sides of line length guide rail 4;
3rd crosshead shoe 11 is slidably disposed on the other end of the first straight line long guideway 4;
The 3rd adjustment slide block 14 and the 4th adjustment slide block 15 are fixed on the 3rd crosshead shoe 11, and difference can It is slidingly arranged on the 3rd pressing plate 18 and the 4th pressing plate 19, it is furthermore preferred that the 3rd adjustment slide block 14 and the 4th is adjusted Whole slide block 15 is fixed on two relative sides of the 3rd crosshead shoe 11, described two relative sides each parallel to The bearing of trend of the first straight line long guideway 4.
First governor motion of the present embodiment, by the rotation of the first adjusting screw 8, drives first adjustment frame 9 Linear motion, so that the linear motion of the second crosshead shoe 10 being connected with first adjustment frame 9, further, Slide block 13 and the first pressing plate 16 are adjusted by the first adjustment slide block 12 and second being connected with second crosshead shoe 10 The slide carriage 2 is driven to move along the first straight line long guideway 4 with the second pressing plate 17;And in the present embodiment, by the described 3rd Crosshead shoe 11, the 3rd pressing plate 18, the adjustment of the 4th pressing plate the 19, the 3rd slide block 14 and the 4th adjustment 15 pairs of slide carriages 2 of slide block enter Row is further supported, to improve the rigidity of the two-dimension translational mechanism.
In the present embodiment, optionally, second governor motion includes second baffle 20, the second adjusting screw 21, second Adjustment frame 22, the 4th crosshead shoe 23, the adjustment adjustment slide block the 26, the 7th of slide block the 25, the 6th of the 5th crosshead shoe the 24, the 5th are adjusted The adjustment slide block 28 of slide block the 27, the 8th, the 5th pressing plate 29, the 6th pressing plate 30, the 7th pressing plate 31 and the 8th pressing plate 32;
The second baffle 20 is fixed on the slide carriage 2 of described 5 one end of second straight line long guideway;
5th pressing plate 29 and the 6th pressing plate 30 are individually fixed on base 1, and positioned at the two of the second straight line long guideway 5 Side;
4th crosshead shoe 23 is slidably disposed on one end of the second straight line long guideway 5;
The 5th adjustment slide block 25 and the 6th adjustment slide block 26 are fixed on the 4th crosshead shoe 23, and difference can It is slidingly arranged on the 5th pressing plate 29 and the 6th pressing plate 30;It is furthermore preferred that the first adjustment slide block 12 and second is adjusted Whole slide block 13 is fixed on two relative sides of the 4th crosshead shoe 23, described two relative sides each parallel to The bearing of trend of the second straight line long guideway 5.
Second adjustment frame 22 is arranged on the 4th crosshead shoe 23, and along described in second adjustment frame 22 The bearing of trend of second straight line long guideway 5 offers screwed hole;It is highly preferred that second adjustment frame 22 is arranged at the described 4th On the side of crosshead shoe 23, and the side is perpendicular to the bearing of trend of the second straight line long guideway 5.
Second adjusting screw 21 passes through the second baffle 20, matches somebody with somebody with the screwed hole screw thread of second adjustment frame 22 Close;
7th pressing plate 31 and the 8th pressing plate 32 are individually fixed on the base 1, and it is long to be located at the second straight line The both sides of guide rail 5;
5th crosshead shoe 24 is slidably disposed on the other end of the second straight line long guideway 5;
The 7th adjustment slide block 27 and the 8th adjustment slide block 28 are fixed on the 5th crosshead shoe 24, and difference can It is slidingly arranged on the 7th pressing plate 31 and the 8th pressing plate 32, it is furthermore preferred that the 7th adjustment slide block 27 and the 8th is adjusted Whole slide block 28 is fixed on two relative vertical sides of the 5th crosshead shoe 24, described two relative vertical sides Parallel to the bearing of trend of the second straight line long guideway 5.
Second governor motion of the present embodiment, by the rotation of the second adjusting screw 21, drives second adjustment frame 22 Linear motion so that the linear motion of the 4th crosshead shoe 23 being connected with second adjustment frame 22, more enters one Step, adjusts slide block 26 and the 5th pressing plate by the 5th adjustment slide block 25 and the 6th being connected with the 4th crosshead shoe 23 29 and the 6th pressing plate 30 drive the slide carriage 2 to move along the second straight line long guideway 5;So as to reference to the described first adjustment machine Structure, realizes the two dimensional motion of the two-dimension translational mechanism;And in the present embodiment, pressed by the 5th crosshead shoe the 24, the 7th Plate 31, the adjustment of the 8th pressing plate the 32, the 7th slide block 27 and the 8th adjustment 28 pairs of slide carriages 2 of slide block are further supported, to carry The rigidity of the high two-dimension translational mechanism.
In the present embodiment, optionally, first governor motion also includes that the first straight line being fixed on the slide carriage 2 is short Guide rail 33 and second straight line short lead rail 34, the first straight line short lead rail 33 and second straight line short lead rail 34 respectively slidably set It is placed on second crosshead shoe 10 and the 3rd crosshead shoe 11;And/or second governor motion also includes being fixed on institute State the 3rd straight line short lead rail 35 and the 4th straight line short lead rail 36 on base 1, the 3rd straight line short lead rail 35 and the 4th straight line Short lead rail 36 is respectively slidably arranged on the 4th crosshead shoe 23 and the 5th crosshead shoe 24.
In the present embodiment, optionally, second crosshead shoe 10, the 3rd crosshead shoe 11, the 4th crosshead shoe 23, Five crosshead shoes 24 include the first chute and the second chute, the extension side of the bearing of trend and the second chute of first chute To vertical, the first chute of second crosshead shoe 10 and the 3rd crosshead shoe 11 respectively with the first straight line long guideway 4 Coordinate, the second chute of second crosshead shoe 10 and the 3rd crosshead shoe 11 respectively with the first straight line short lead rail 33 and Second straight line short lead rail 34 coordinates;First chute of the 4th crosshead shoe 23 and the 5th crosshead shoe 24 is respectively with described Two straight line long guideways 5 coordinate, the first chute of the 4th crosshead shoe 23 and the 5th crosshead shoe 24 respectively with the 3rd straight line Short lead rail 35 and the 4th straight line short lead rail 36 coordinate, with by second crosshead shoe 10, the 3rd crosshead shoe the 11, the 40th Word slide block 23 and the 5th crosshead shoe 24 and the guide rail being engaged with each crosshead shoe further improve the two-dimension translational machine The rigidity of structure, improves the rigidity that whole four-degree-of-freedom adjusts platform, so as to improve Adjustment precision.
In the present embodiment, optionally, described first adjustment slide block 12, second adjustment adjustment 14 and of slide block of slide block the 13, the 3rd 4th adjustment slide block 15 respectively along offering groove perpendicular to the direction of the first straight line long guideway 4, first pressing plate 16, It is respectively arranged with second pressing plate 17, the 3rd pressing plate 18 and the 4th pressing plate 19 and slides with the described first adjustment adjustment of slide block 12, second The backing pin that the groove of the adjustment of block the 13, the 3rd slide block 14 and the 4th adjustment slide block 15 coordinates;And/or the 5th adjustment slide block 25, the The six adjustment adjustment of slide block the 26, the 7th slide blocks 27 and the 8th adjustment slide block 28 are respectively along perpendicular to the second straight line long guideway 5 Direction offers groove, be respectively arranged with the 5th pressing plate 29, the 6th pressing plate 30, the 7th pressing plate 31 and the 8th pressing plate 32 with The backing pin 37 that the groove of the 5th adjustment slide block the 25, the 6th adjustment adjustment of slide block the 26, the 7th slide block 27 and the 8th adjustment slide block 28 coordinates, To realize that each adjustment slide block realizes the slip on each pressing plate along the backing pin coordinated with which.
In the present embodiment, optionally, the two-dimensional rotation mechanism includes first bearing seat 38, second bearing seat the 39, the 3rd Bearing block 40, fourth bearing seat 41, middle transition plate 42, first angle governor motion, second angle governor motion;
The first bearing seat 38 and 3rd bearing seat 40 are installed on the top surface of the slide carriage 2;
The second bearing seat 39 and fourth bearing seat 41 are installed on the bottom surface of the workbench 3;
The middle transition plate 42 includes first rotating shaft 43, the second rotating shaft 44, the 3rd rotating shaft 45 and the 4th rotating shaft 46, wherein The first rotating shaft 43 and 45 axial line of the 3rd rotating shaft overlap, and second rotating shaft 44 and 46 axial line of the 4th rotating shaft overlap, institute The axial line for stating first rotating shaft 43 is vertical with the axial line of second rotating shaft 44, the first rotating shaft 43, the second rotating shaft 44, Three rotating shafts 45 and the 4th rotating shaft 46 are respectively arranged at the first bearing seat 38, second bearing seat 39,3rd bearing seat 40 and In four bearing blocks 41;It is furthermore preferred that the first rotating shaft 43, the second rotating shaft 44, the 3rd rotating shaft 45 and the 4th rotating shaft 46 are led to respectively Cross bearing to be arranged in the first bearing seat 38, second bearing seat 39,3rd bearing seat 40 and fourth bearing seat 41;
The first angle governor motion and the second angle governor motion are arranged on the middle transition plate 42, with Adjust the angle of the middle transition plate 42.
The two-dimensional rotation mechanism of the present embodiment passes through the regulation of first angle governor motion and second angle governor motion, makes The axial line rotation of axial line and second rotating shaft 44 of the middle transition plate 42 around first rotating shaft 43, so that the slide carriage 2 two-dimensional rotaries that the workbench 3 is realized by the two-dimensional rotation mechanism.
In the present embodiment, optionally, the first angle governor motion includes being integrally formed with the middle transition plate 42 The first pedestal 47, the first angle adjusting nut 48 being arranged on first pedestal 47 and with the first angle adjust spiral shell The first angle adjusting screw 49 that female 48 screw threads coordinate, the slide carriage 2 is fixed in one end of the first angle adjusting screw 49 Top surface on, with realize to 42 angular adjustment of middle transition plate.
In the present embodiment, optionally, the second angle governor motion includes integrally formed with the middle transition plate Second pedestal 50, the second angle adjusting nut 51 being arranged on second pedestal 50 and with the second angle adjusting nut The second angle adjusting screw 52 that 51 screw threads coordinate, the workbench 3 is fixed in one end of the second angle adjusting screw 52 Bottom surface on, with realize to 42 angular adjustment of middle transition plate.
In the present embodiment, optionally, the first angle governor motion is multiple;And/or the second angle adjusts machine Structure is multiple, to improve rigidity of the angle adjusting mechanism to the support of the middle transition plate 42.
In the present embodiment, optionally, the first angle governor motion also includes the first spheric washer and taper faced washer, institute State the first taper faced washer to be arranged in first pedestal 47, first spheric washer is arranged at first taper faced washer On, the first angle adjusting nut 48 is arranged on first taper faced washer, with when the segmentation of the middle transition plate 42 Angle compensation is done during the axis out of plumb of plane and first angle adjusting screw 49, prevent contact degenerate it is even stuck Problem.
In the present embodiment, optionally, the second angle governor motion also includes the second spheric washer 53 and second conical surface Packing ring 54, second taper faced washer 54 are arranged in second pedestal 50, and second spheric washer 53 is arranged at described On second taper faced washer 54, the second angle adjusting nut 51 is arranged on second taper faced washer 54, with described Between rebound 42 segmentation plane and second angle adjusting screw 52 axis out of plumb when do angle compensation, prevent contact Degenerate even stuck problem.
The sequencing of above example only for ease of description, does not represent the quality of embodiment.
Finally it should be noted that:Above example only to illustrate technical scheme, rather than a limitation;Although With reference to the foregoing embodiments the present invention has been described in detail, it will be understood by those within the art that:Which still may be used To modify to the technical scheme described in foregoing embodiments, or equivalent is carried out to which part technical characteristic; And these modification or replace, do not make appropriate technical solution essence depart from various embodiments of the present invention technical scheme spirit and Scope.

Claims (8)

1. a kind of four-degree-of-freedom adjusts platform, it is characterised in that including base, two-dimension translational mechanism, slide carriage, two-dimensional rotation mechanism and Workbench, the slide carriage are arranged on base by two-dimension translational mechanism, and the workbench is arranged at by two-dimensional rotation mechanism On the slide carriage;
The two-dimension translational mechanism includes first straight line long guideway, second straight line long guideway, the first crosshead shoe, the first regulation machine Structure and the second governor motion;
The first straight line long guideway is installed on the base;
First crosshead shoe is slidably disposed on the first straight line long guideway;
The second straight line long guideway is slidably disposed on first crosshead shoe, and the second straight line long guideway Perpendicular to the first straight line long guideway, the slide carriage is fixed on the second straight line long guideway;
First governor motion is fixed on the base, and the slide carriage can be made to drive first crosshead shoe along institute State the translation of first straight line long guideway;
Second governor motion is fixed on the slide carriage, and the slide carriage can be made to drive the second straight line long guideway edge The first crosshead shoe translation;
First governor motion include first baffle, the first adjusting screw, the first adjustment frame, the second crosshead shoe, the 30th Word slide block, first adjustment slide block, second adjustment slide block, the 3rd adjustment slide block, the 4th adjustment slide block, the first pressing plate, the second pressing plate, 3rd pressing plate and the 4th pressing plate;
The first baffle is fixed on the base of described first straight line long guideway one end;
First pressing plate and the second pressing plate are individually fixed on the slide carriage, and respectively positioned at the first straight line long guideway Both sides;
Second crosshead shoe is slidably disposed on one end of the first straight line long guideway;
The first adjustment slide block and the second adjustment slide block are fixed on second crosshead shoe, and are respectively slidably arranged On first pressing plate and the second pressing plate;
First adjustment frame is arranged on second crosshead shoe, and long along the first straight line in first adjustment frame The bearing of trend of guide rail offers screwed hole;
First adjusting screw passes through the first baffle, coordinates with the screwed hole screw thread of first adjustment frame;
3rd pressing plate and the 4th pressing plate are individually fixed on the slide carriage, and respectively positioned at the first straight line long guideway Both sides;
3rd crosshead shoe is slidably disposed on the other end of the first straight line long guideway;
The 3rd adjustment slide block and the 4th adjustment slide block are fixed on the 3rd crosshead shoe, and are respectively slidably arranged On the 3rd pressing plate and the 4th pressing plate.
2. four-degree-of-freedom according to claim 1 adjusts platform, it is characterised in that second governor motion includes second gear Plate, the second adjusting screw, the second adjustment frame, the 4th crosshead shoe, the 5th crosshead shoe, the 5th adjustment slide block, the 6th adjustment are slided Block, the 7th adjustment slide block, the 8th adjustment slide block, the 5th pressing plate, the 6th pressing plate, the 7th pressing plate and the 8th pressing plate;
The second baffle is fixed on the slide carriage of described second straight line long guideway one end;
5th pressing plate and the 6th pressing plate are individually fixed on base, and respectively positioned at the both sides of the second straight line long guideway;
4th crosshead shoe is slidably disposed on one end of the second straight line long guideway;
The 5th adjustment slide block and the 6th adjustment slide block are fixed on the 4th crosshead shoe, and are respectively slidably arranged On the 5th pressing plate and the 6th pressing plate;
Second adjustment frame is arranged on the 4th crosshead shoe, and the second straight line length is led in second adjustment frame The bearing of trend of rail offers screwed hole;
Second adjusting screw passes through the second baffle, coordinates with the screwed hole screw thread of second adjustment frame;
7th pressing plate and the 8th pressing plate are individually fixed on the base of the second straight line long guideway both sides;
5th crosshead shoe is slidably disposed on the other end of the second straight line long guideway;
The 7th adjustment slide block and the 8th adjustment slide block are fixed on the 5th crosshead shoe, and are respectively slidably arranged On the 7th pressing plate and the 8th pressing plate.
3. four-degree-of-freedom according to claim 2 adjusts platform, it is characterised in that first governor motion also includes fixing First straight line short lead rail and second straight line short lead rail, the first straight line short lead rail and second straight line short-range missile on the slide carriage Rail is respectively slidably arranged on second crosshead shoe and the 3rd crosshead shoe;And/or second governor motion is also Including the 3rd straight line short lead rail and the 4th straight line short lead rail that are fixed on the base, the 3rd straight line short lead rail and the 4th Straight line short lead rail is respectively slidably arranged on the 4th crosshead shoe and the 5th crosshead shoe.
4. four-degree-of-freedom according to claim 2 adjusts platform, it is characterised in that the first adjustment slide block, the second adjustment Slide block, the 3rd adjustment slide block and the 4th adjustment slide block offer groove perpendicular to the direction of the first straight line long guideway in edge respectively, Be respectively arranged with first pressing plate, the second pressing plate, the 3rd pressing plate and the 4th pressing plate with described first adjustment slide block, second The backing pin that the groove of adjustment slide block, the 3rd adjustment slide block and the 4th adjustment slide block coordinates;And/or it is described 5th adjustment slide block, the 6th Adjustment slide block, the 7th adjustment slide block and the 8th adjustment slide block are offered perpendicular to the direction of the second straight line long guideway on edge respectively Groove, be respectively arranged with the 5th pressing plate, the 6th pressing plate, the 7th pressing plate and the 8th pressing plate with the 5th adjustment slide block, the 6th The backing pin that the groove of adjustment slide block, the 7th adjustment slide block and the 8th adjustment slide block coordinates.
5. four-degree-of-freedom according to claim 1 adjusts platform, it is characterised in that the two-dimensional rotation mechanism includes first axle Bearing, second bearing seat, 3rd bearing seat, fourth bearing seat, middle transition plate, first angle governor motion, second angle are adjusted Section mechanism;
The first bearing seat and 3rd bearing seat are installed on the top surface of the slide carriage;
The second bearing seat and fourth bearing seat are installed on the bottom surface of the workbench;
The middle transition plate includes first rotating shaft, the second rotating shaft, the 3rd rotating shaft and the 4th rotating shaft, wherein the first rotating shaft and The coincidence of 3rd rotating shaft core line, second rotating shaft and the coincidence of the 4th rotating shaft core line, the axial line of the first rotating shaft and institute The axial line for stating the second rotating shaft is vertical, and the first rotating shaft, the second rotating shaft, the 3rd rotating shaft and the 4th rotating shaft are respectively arranged at described In first bearing seat, second bearing seat, 3rd bearing seat and fourth bearing seat;
The first angle governor motion and the second angle governor motion are arranged on the middle transition plate.
6. four-degree-of-freedom according to claim 5 adjusts platform, it is characterised in that the first angle governor motion include with Integrally formed first pedestal of the middle transition plate, the first angle adjusting nut being arranged on first pedestal and with institute The first angle adjusting screw of first angle adjusting nut screw thread cooperation is stated, one end of the first angle adjusting screw is fixed on On the top surface of the slide carriage, and/or the second angle governor motion includes and the middle transition plate integrally formed second Pedestal, the second angle adjusting nut being arranged on second pedestal and with the second angle adjusting nut screw thread coordinate Second angle adjusting screw, one end of the second angle adjusting screw are fixed on the bottom surface of the workbench.
7. four-degree-of-freedom according to claim 6 adjusts platform, it is characterised in that the first angle governor motion is many It is individual;And/or the second angle governor motion is multiple.
8. the four-degree-of-freedom according to claim 6 or 7 adjusts platform, it is characterised in that the second angle governor motion is also Including the second spheric washer and the second taper faced washer, second taper faced washer is arranged in second pedestal, and described second Spheric washer is arranged on second taper faced washer, and the second angle adjusting nut is arranged at second taper faced washer On.
CN201310718170.9A 2013-12-23 2013-12-23 Four-degree-of-freedom adjusts platform Active CN104723196B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106405787B (en) * 2016-12-10 2020-08-21 中国科学院长春光学精密机械与物理研究所 Angle adjusting device for reflector optical element
CN107932450A (en) * 2017-12-13 2018-04-20 中科院广州电子技术有限公司 A kind of horizontal universal adjusting device
CN109940478B (en) * 2019-03-05 2021-04-02 重庆两江联创电子有限公司 Polishing jig and polishing method
CN114599142A (en) * 2022-03-07 2022-06-07 盛吉盛(宁波)半导体科技有限公司 Plasma conditioning device, plasma conditioning method, plasma generating device, and semiconductor processing device

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CN202639828U (en) * 2012-04-16 2013-01-02 安庆联控机电科技发展有限公司 Piston ring large-diameter winding machine guide wheel seat device
CN103128628A (en) * 2013-03-18 2013-06-05 厦门大学 Optical element processing and detecting platform based on multi-degree-of-freedom motor
CN203679971U (en) * 2013-12-23 2014-07-02 北京海普瑞森科技发展有限公司 Adjusting table of four degrees of freedom

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US5195407A (en) * 1990-07-31 1993-03-23 Menicon Co., Ltd. Apparatus for making an aspherical lens and a method of making an aspherical lens
CN202639828U (en) * 2012-04-16 2013-01-02 安庆联控机电科技发展有限公司 Piston ring large-diameter winding machine guide wheel seat device
CN103128628A (en) * 2013-03-18 2013-06-05 厦门大学 Optical element processing and detecting platform based on multi-degree-of-freedom motor
CN203679971U (en) * 2013-12-23 2014-07-02 北京海普瑞森科技发展有限公司 Adjusting table of four degrees of freedom

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