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CN104661450B - A kind of method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN - Google Patents

A kind of method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN Download PDF

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Publication number
CN104661450B
CN104661450B CN201510084217.XA CN201510084217A CN104661450B CN 104661450 B CN104661450 B CN 104661450B CN 201510084217 A CN201510084217 A CN 201510084217A CN 104661450 B CN104661450 B CN 104661450B
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China
Prior art keywords
hole
laser
copper
gradually
method based
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CN201510084217.XA
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Chinese (zh)
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CN104661450A (en
Inventor
何波
向勇
张庶
陆云龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhuhai Zhongjing Yuansheng Electronic Technology Co.,Ltd.
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Zhuhai Topsun Electronic Technology Co Ltd
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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0044Mechanical working of the substrate, e.g. drilling or punching
    • H05K3/0047Drilling of holes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/107Using laser light

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laser Beam Processing (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

The present invention discloses and to provide a kind of technique convenient and simple, without consuming a large amount of chemicals and energy conservation and environmental protection, method of the obtained metal layer adhesion property preferably based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN.This method includes:Surface roughening treatment is carried out to copper foil;Using laser drill, and copper foil fusing at the position of hole, which is collapsed, makes it cover hole wall;Pickling, carries out electric plating of whole board behind whole hole, completes the metallization in hole.The advantages of this method is that drilling and the via hole process are combined into a step, and hole wall metal layer switching performance is excellent, reduces process costs, improves production efficiency, and need not consume a large amount of chemicals and energy conservation and environmental protection.

Description

A kind of method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN
Technical field
The present invention relates to a kind of method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN
Background technology
With the continuous improvement of electronic equipment requirement, the printed circuit board of carrier is realized as electronic equipment electric function It is evolving, in the market sale proportion reported according to PCB industry state of development, single sided board and dual platen are Less than 10%, and multi-layer board such as HDI, multi-layer flexible circuit board etc. then account for more than half.
In order to realize the electrical connection of each layer circuit, multilayer circuit board is usually using hole metallization technique.Hole metallization is Dielectric material between circuit board copper foil such as drills on polyimides, epoxy resin material, and is plated in the hole wall drilled out One layer of copper, realize two layers or multilayer copper foil circuit between conducting.Hole metallization based on chemical plating process is a kind of relatively biography The hole metallization technique of system.This technique generally comprises the steps:Drilling → desmearing → washing → roughening → catalysis(It is living Change)→ washing → electroless copper → washing → electro-coppering → washing → drying.The advantages of this method is that technique is very ripe, but It is complex, and covers the use of chemical process more, consumes a large amount of medicines and cause environmental pollution.
The content of the invention
The technical problems to be solved by the invention are convenient and simple, the nothings that overcomes the deficiencies of the prior art and provide a kind of technique A large amount of chemicals need to be consumed and energy conservation and environmental protection, obtained metal layer adhesion property are preferably based on the direct Kong Jin of laser drill The method of categoryization.
The technical solution adopted in the present invention is:The present invention comprises the following steps:
(1)Brown processing is carried out to copper-clad plate;
(2)Drilled using laser positioning, and it is covered hole wall copper foil fusing at hole;
(3)Pickling, electric plating of whole board, increase hole wall plating copper thickness are carried out behind whole hole.
Further, the method further includes
(4)Whole hole, carries out the whole hole of plasma to the base material after pickling, removes the organic detritus brought during drilling;
(5)Plating, whole plate plating is carried out to the base material behind whole hole, to meet that circuit board is thick to copper thickness and hole wall layers of copper The requirement of degree.
Further, step is being carried out(1)Before, first the copper-clad plate is etched it is thinned, obtain suitable copper foil thickness Micro- brown processing is carried out after degree again.
Further, the step(2)In using CO2 laser process equipments.
Further, the step(2)In, it should gradually increase laser power at the position of hole before organic material vaporization, and working as has Machine material vaporizes, and laser power should be gradually reduced after being formed in drilling hole position.
Further, the step(2)In, laser positioning drills initial pulse energy control in 6-10 mJ, focal height 120-130 mm, laser frequency are controlled in 5000-6000 Hz;When reaching peak power by 15 ms, pulse energy is gradually controlled System is in 10 mJ, and gradually control is gradually controlled in 5000 Hz focal height in 120 mm, laser frequency;Drilling cycle end, pulse Gradually control is in 6 mJ for energy, and focal height is gradually controlled in 120 mm, and the gradual control of laser frequency is in 5600 Hz.
Further, the step(3)In using preferable to the oxide removal of copper to elemental copper not damaged Acids.
The beneficial effects of the invention are as follows:The present invention is carried using substrate organic material and the larger difference of copper foil vapourizing temperature A kind of new process to metallize while copper-clad plate drills to hole wall is gone out, this technique can be to avoid using chemical plating Copper, the problem of reducing chemicals cost and environmental pollution, while processing step is shortened, process cost is reduced, and Obtained metal layer adhesion property is preferable.
Brief description of the drawings
Fig. 1 is that what is do not dealt with cover the structure diagram of copper dual platen;
Fig. 2 is the structure diagram that brown processing is carried out to copper foil;
Fig. 3 is the structure diagram of laser drill;
Fig. 4 is the structure diagram of hole position copper foil fusing;
Fig. 5 is the structure diagram that hole position copper foil sink;
Fig. 6 is the structure diagram of drilling and completion of metallizing;
Fig. 7 is the structure diagram of whole plate plating.
Embodiment
It is described in detail below according to embodiment.Following embodiment is intended merely to the present invention preferably Technical principle explaination is clear, and not representing the present invention can only limit using the embodiment.
Embodiment one:
The present embodiment be by the use of double-sided copper-clad soft board as base material, and realize blind hole metallize, reach electrical connection Purpose, specifically include following steps:
A. as shown in Figure 1, the selection common polyimides double face copper of in the market is as base material, and cut into and be adapted to add The size of work;
B. as shown in Fig. 2, carrying out micro- brown processing to polyimides double-sided copper-clad soft board plate, the condition of brown processing is: Brown line is gone over the speed of 0.5 m/min so that the thickness of copper foil reaches 6-7M, the thicker copper-clad plate of copper foil need to lose Brown again after being thinned is carved, the purpose of brown is to allow copper foil to absorb CO2 laser energies;
C. as shown in figure 3, the copper-clad plate after brown is placed in CO2 laser process equipments, drilled using laser positioning, and Laser drilling parameters are controlled, the copper foil fusing of hole position is sunk, hole position organic media is heated vaporization, and hole wall stays after laser action There is one layer of thin copper layer.Specifically copper-clad plate is placed in laser process equipment, after equipment input laser operations file, to copper-clad plate Laser drill is carried out, while automatic control and adjustment laser power exports, initial pulse energy control is in 6-10mJ, focal height control System is controlled in 5000-6000 Hz in 120-130 mm, laser frequency;When reaching peak power by 15 ms, pulse energy by Gradually control in 10 mJ, gradually control is gradually controlled in 5000 Hz focal height in 120 mm, laser frequency;Drilling cycle end, Gradually control is in 6 mJ for pulse energy, and focal height is gradually controlled in 120 mm, and the gradual control of laser frequency is in 5600 Hz;
D. as shown in figure 4, pickling, remove oxide layer that micro- brown leaves in copper foil surface, it is necessary to select to elemental copper without Damage to the preferable acids of oxide removal of copper, to ensure the reliability of hole wall layers of copper, this example selects dilute hydrochloric acid to make Mordant;
E. as shown in figure 5, whole hole, since laser action can bring brill dirty, can carry out hole wall using plasma clear It is clean, plasma treatment time 30min;
F. as shown in fig. 6, whole plate is electroplated, what it is due to selection is the relatively thin copper-clad plate of copper thickness, or have passed through etching Reduction processing is, it is necessary to integrally electroplate copper-clad plate;The metallization layers of copper of borehole wall is also required to thicken to meet circuit board process It is required that;
G. as shown in fig. 7, after the completion of plating, washing and drying enters next process.
Embodiment two:
The present embodiment is the double face copper by the use of epoxy resin fiberglass cloth as substrate, and realizes blind hole metal Change, achieve the purpose that electrical connection, specifically include following steps:
A. as shown in Figure 1, the selection common FR-4 double face coppers of in the market are as base material, and cut into and be adapted to processing Size;
B. as shown in Fig. 2, carrying out micro- brown processing to covering copper hardboard, the condition of brown processing is:With the speed of 0.5 m/min Degree goes over brown line so that the thickness of copper foil reaches 6-7M, the thicker copper-clad plate of copper foil need etching brown again after being thinned Change, the purpose of brown is to allow copper foil to absorb CO2 laser energies;
C. as shown in figure 3, the copper-clad plate after brown is placed in CO2 laser process equipments, drilled using laser positioning, and Laser drilling parameters are controlled, the copper foil fusing of hole position is sunk, hole position organic media is heated vaporization, and hole wall stays after laser action There is one layer of thin copper layer, specifically copper-clad plate is placed in laser process equipment, after equipment input laser operations file, to copper-clad plate Laser drill is carried out, while automatic control and adjustment laser power exports, initial pulse energy control is in 6-10mJ, focal height control System is controlled in 5000-6000 Hz in 120-130 mm, laser frequency;When reaching peak power by 15 ms, pulse energy by Gradually control in 10 mJ, gradually control is gradually controlled in 5000 Hz focal height in 120 mm, laser frequency;Drilling cycle end, Gradually control is in 6 mJ for pulse energy, and focal height is gradually controlled in 120 mm, and the gradual control of laser frequency is in 5600 Hz;
D. as shown in figure 4, pickling, remove oxide layer that micro- brown leaves in copper foil surface, it is necessary to select to elemental copper without Damage to the preferable acids of oxide removal of copper, to ensure the reliability of hole wall layers of copper, this example selects dilute hydrochloric acid to make Mordant;
E. as shown in figure 5, whole hole, since laser action can bring brill dirty, can carry out hole wall using plasma clear It is clean, plasma treatment time 30min;
F. as shown in fig. 6, whole plate is electroplated, what it is due to selection is the relatively thin copper-clad plate of copper thickness, or have passed through etching Reduction processing is, it is necessary to integrally electroplate copper-clad plate;The metallization layers of copper of borehole wall is also required to thicken to meet circuit board process It is required that;
G. as shown in fig. 7, after the completion of plating, washing and drying enters next process.
Above-mentioned two example, which can be seen that, can apply the copper-clad plate species of the method for the present invention very much, include but not limited to Common various soft or hard copper-clad plates.
The present invention is described in detail in above two example, but does not mean that the present invention is limited only to both Example.In the case where not departing from the technology of the present invention principle, make improvements and deform in the claims in the present invention and technology Within, it should also belong to protection scope of the present invention.

Claims (6)

  1. A kind of 1. method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN, it is characterised in that:It comprises the following steps:
    (1)Brown processing is carried out to copper-clad plate;
    (2)Drilled using laser positioning, and it is covered hole wall copper foil fusing at hole;
    (3)Pickling, electric plating of whole board, increase hole wall plating copper thickness are carried out behind whole hole;
    The step(2)In, it should gradually increase laser power at the position of hole before organic material vaporization, and when organic material vaporization, bore Kong Kongwei should be gradually reduced laser power after being formed.
  2. A kind of 2. method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN according to claim 1, it is characterised in that:The side Method further includes
    (4)Whole hole, carries out the whole hole of plasma to the base material after pickling, removes the organic detritus brought during drilling;
    (5)Plating, whole plate plating is carried out to the base material behind whole hole, to meet circuit board to copper thickness and hole wall copper layer thickness It is required that.
  3. A kind of 3. method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN according to claim 1, it is characterised in that:Carry out Step(1)Before, first the copper-clad plate is etched thinned, micro- brown processing is carried out again after obtaining suitable copper foil thickness.
  4. A kind of 4. method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN according to claim 1, it is characterised in that:The step Suddenly(2)In using CO2 laser process equipments.
  5. A kind of 5. method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN according to claim 1, it is characterised in that:The step Suddenly(2)In, laser positioning drills initial pulse energy control in 6-10 mJ, focal height 120-130 mm, laser frequency control In 5000-6000 Hz;When reaching peak power by 15 ms, pulse energy gradually in 10 mJ, focal height gradually control by control System is gradually controlled in 5000 Hz in 120 mm, laser frequency;Drilling cycle end, gradually control is high in 6 mJ, focusing for pulse energy Gradually control is gradually controlled in 5600 Hz degree in 120 mm, laser frequency.
  6. A kind of 6. method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN according to claim 1, it is characterised in that:The step Suddenly(3)In using to elemental copper not damaged and to the preferable acids of oxide removal of copper.
CN201510084217.XA 2015-02-16 2015-02-16 A kind of method based on laser drill DIRECT HOLE METALLIZATION TECHNIQUE IN Active CN104661450B (en)

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105517374B (en) * 2015-12-17 2019-02-05 深圳崇达多层线路板有限公司 A kind of production method of thin core plate HDI plate
CN107454760A (en) * 2017-08-24 2017-12-08 高德(无锡)电子有限公司 The radium-shine through-hole approaches of carbon dioxide laser
CN108156759B (en) * 2017-12-28 2019-12-24 广州兴森快捷电路科技有限公司 Reworking method for printed circuit board with smaller laser aperture
CN109661126A (en) * 2018-12-17 2019-04-19 盐城维信电子有限公司 A kind of via hole whole plate Electrocoppering method of flexible circuit board
CN110278669A (en) * 2019-07-23 2019-09-24 信泰电子(西安)有限公司 The production method of via hole on multi-layer PCB board
CN114143970A (en) * 2021-11-29 2022-03-04 广东依顿电子科技股份有限公司 Manufacturing method of single-side copper-based HDI board convenient for heat dissipation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3562009A (en) * 1967-02-14 1971-02-09 Western Electric Co Method of providing electrically conductive substrate through-holes
US4341942A (en) * 1978-10-31 1982-07-27 International Business Machines Corporation Method of bonding wires to passivated chip microcircuit conductors
CN101588679A (en) * 2009-06-25 2009-11-25 西安交通大学 Method for manufacturing micropores for electric conduction among copper foil of high-density multilayer circuit boards

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4582938B2 (en) * 2001-02-28 2010-11-17 京セラ株式会社 Insulating sheet manufacturing method and wiring board manufacturing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3562009A (en) * 1967-02-14 1971-02-09 Western Electric Co Method of providing electrically conductive substrate through-holes
US4341942A (en) * 1978-10-31 1982-07-27 International Business Machines Corporation Method of bonding wires to passivated chip microcircuit conductors
CN101588679A (en) * 2009-06-25 2009-11-25 西安交通大学 Method for manufacturing micropores for electric conduction among copper foil of high-density multilayer circuit boards

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Address after: No.17, Xianggong Road, Hongwan Industrial Zone, Xiangzhou District, Zhuhai City, Guangdong Province, 519000

Patentee after: Zhuhai Zhongjing Yuansheng Electronic Technology Co.,Ltd.

Address before: No. 17, Xianggong Road, Hongwan Industrial Zone, Nanping, Xiangzhou District, Zhuhai City, Guangdong Province, 519060

Patentee before: ZHUHAI TOPSUN ELECTRONIC TECHNOLOGY Co.,Ltd.

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