CN104637840A - Rotary type crystal grain detection equipment with multi-rail feeding - Google Patents
Rotary type crystal grain detection equipment with multi-rail feeding Download PDFInfo
- Publication number
- CN104637840A CN104637840A CN201410059941.2A CN201410059941A CN104637840A CN 104637840 A CN104637840 A CN 104637840A CN 201410059941 A CN201410059941 A CN 201410059941A CN 104637840 A CN104637840 A CN 104637840A
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- Prior art keywords
- crystal grain
- rotating turret
- feed
- charging
- station
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- Pending
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- 239000013078 crystal Substances 0.000 title claims abstract description 106
- 238000001514 detection method Methods 0.000 title abstract description 12
- 238000012360 testing method Methods 0.000 claims abstract description 18
- 238000012546 transfer Methods 0.000 claims abstract description 16
- 238000007600 charging Methods 0.000 claims description 27
- 239000000523 sample Substances 0.000 claims description 24
- 238000007599 discharging Methods 0.000 claims description 11
- 230000003028 elevating effect Effects 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011265 semifinished product Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Specific Conveyance Elements (AREA)
Abstract
The invention relates to a multi-rail feeding rotary type crystal grain detection device which mainly comprises a rotating frame, a plurality of crystal grain taking and placing devices, a plurality of feeding devices, a plurality of detection stations and a plurality of classification stations. Wherein, the plurality of crystal grain taking and placing devices are equidistantly arranged on the rotating frame in a surrounding way; a plurality of feed arrangement, a plurality of detection station and a plurality of categorised station equidistance ring locate the radial extension direction of this rotating turret. After the crystal grain is obtained by the feeding device by the crystal grain taking and placing device, the rotating frame rotates to transfer the crystal grains to the detection station for testing, then the crystal grains are transferred to the classification station by rotation to place the crystal grains, and the classification station classifies the crystal grains. Therefore, the invention tests and classifies the crystal grains one by one in a mode of simultaneous multi-track feeding and rotary feeding transfer, thereby being a high-efficiency continuous detection and classification technology.
Description
Technical field
The present invention relates to a kind of rotary crystal grain checkout equipment of many rails charging, particularly a kind of checkout equipment being applicable to detection semiconductor grain.
Background technology
Semiconductor grain in the fabrication process usually can through twice detection, and be once that semi-finished product detect, another time is finished product detection.Wherein, semi-finished product detect usually for the crystal grain completed after basic manufacture of semiconductor, its main purpose is that flaw crystal grain is filtered in leading screening, in order to avoid flaw crystal grain flows into subsequent packet draw together the processing procedures such as glutinous brilliant (die mount), routing (wire bond), sealing (mold) and lettering (mark), cause meaningless expending on cost, and affect yields.
Known crystal grain checkout equipment can announce M439261 patent with reference to TaiWan, China.That is, as shown in Figure 1, it discloses a kind of V-type spiral arm 90, and each spiral arm is respectively equiped with fetching device 91,92.When one of them fetching device 91 is after feed arrangement 93 sucking crystal grains, the probe base 94 just moving on to feed arrangement 93 side is tested.Now, another fetching device 91 is got back on feed arrangement 93 and is drawn next crystal grain, V-type spiral arm 90 constantly back and forth rotation feeding and test accordingly.In addition, after the crystal grain on fetching device 91 has been tested, just directly made the crystal grain of test drop in the feeding-distribution device (not shown) of below, classified with the crystal grain this being completed to test.
Accordingly, known crystal grain checkout equipment is tested in the mode of above-mentioned circulation rotation, although the accuracy rate of its test or testing efficiency have all reached the degree of quite stable.But under the demand facing higher test speed, known crystal grain checkout equipment faces bottleneck, and cannot obviously promote again.
In view of this, one significantly can improve detection speed, possesses again the crystal grain checkout equipment of elasticity extended function, real be one in current industry in the urgent need to.
Summary of the invention
Main purpose of the present invention is the rotary crystal grain checkout equipment providing a kind of many rails charging, its can the simultaneously charging of many rails crystal grain, the crystal grain of transfer simultaneously, test crystal grain and crystal grain of simultaneously classifying simultaneously, and the angle of each rotating transfer is identical, the transfer time can be shortened significantly, compared to known crystal grain checkout equipment, significantly detection speed can be promoted in the mode of several times, and more elasticity, visual actual demand is expanded arbitrarily or is changed various test function.
For achieving the above object, the rotary crystal grain checkout equipment of many rails charging of the present invention mainly comprises rotating turret, multiple crystal grain fetching device, multiple feed arrangement, multiple measuring station and multiple sorting station.Wherein, rotating turret comprises central shaft, and rotating turret rotates along central shaft; Multiple crystal grain fetching device is equidistantly located on rotating turret; Multiple feed arrangement is equidistantly located on the radial bearing of trend of this rotating turret, and the side of the contiguous rotating turret of each feed arrangement comprises a die pick district; Multiple measuring station and multiple sorting station are also equidistantly located on the radial bearing of trend of rotating turret.Wherein, multiple crystal grain fetching device divide be clipped to multiple feed arrangement die pick district on obtain a crystal grain after, rotating turret rotates, and multiple crystal grain fetching device transfer crystal grain to multiple measuring station is tested, then rotating turret rotates again, and multiple crystal grain fetching device transfer crystal grain to multiple sorting station places crystal grain, by multiple sorting station, crystal grain is classified.
Accordingly, the rotary crystal grain checkout equipment of many rails charging provided by the present invention can utilize rotating turret in the mode of constantly swivel feeding transfer, seriatim crystal grain is carried to measuring station by feed arrangement to test, classifying when being completed and crystal grain being carried to sorting station, is high efficiency continuous detection and a sorting technique in fact.In addition, the present invention in the mode of many rails charging simultaneously, significantly improves tested productivity again.
Even more preferably, multiple feed arrangement of the present invention comprises the first feed arrangement and the second feed arrangement, and it is arranged at the both sides of rotating turret with standing far apart facing each other.In other words, the present invention can take the mode of double track charging, and the angle between described two feed arrangements can be 180 degree, accordingly compared to the mode of known single track feeding test, the present invention can improve the tested productivity of more than twice, and on volume, also unlikely increase is too many.But, the present invention not limit by double track feeding manner, also can be three rail chargings, four rail chargings or the charging of other many rails, angle wherein during three rail feeding manners between two adjacent feed arrangements can be 120 °, and angle during four rail feeding manners between two adjacent feed arrangements can be 90 °.
Moreover, each feed arrangement of the present invention can comprise vibrations feeding disc, feed rail and feed back track, and shake feeding disc and can comprise spout, it is communicated with feed rail, and die pick district can be positioned at the side that feed rail is stood far apart facing each other with vibrations feeding disc, feed back track can be arranged at the below of feed rail in addition, and in order to accept the crystal grain dropped from feed rail.
In addition, each measuring station of the present invention can comprise probe base and at least one probe, and probe base can be fixed in the side of at least one probe described, and opposite side can protrude out from the side of probe base and expose; Wherein, multiple crystal grain fetching device transfer crystal grain is in electrical contact with at least one probe described to the top of at least one probe described.In addition, each crystal grain fetching device of the present invention can comprise suction nozzle and elevating mechanism, and elevating mechanism can be assembled on rotating turret and order about suction nozzle and rise or decline.
Moreover, each sorting station of the present invention can comprise rotation sub-feed tube and multiple appearance storehouse, rotate sub-feed tube and can comprise feeding mouth and discharging opening, and feeding mouth can be communicated with rotating the discharging opening of sub-feed tube, and rotation sub-feed tube is rotatable and one that makes discharging opening aim in multiple appearance storehouse; Wherein multiple crystal grain fetching device rotating transfer crystal grain places crystal grain to feeding mouth.In addition, each sorting station of the present invention also can comprise rotary driver, and it connects and drives rotation sub-feed tube to rotate.
Again, multiple measuring station of the present invention can comprise multiple first measuring station and multiple second measuring station, and in the ring circumferential direction that the radial direction that described multiple feed arrangement, multiple first measuring station, multiple second measuring station and multiple sorting station can be laid in rotating turret respectively in order extends.And rotating turret of the present invention can rotate along central shaft steppingly towards same direction of rotation.
Accompanying drawing explanation
Fig. 1 is known crystal grain checkout equipment.
Fig. 2 is the schematic top plan view of first embodiment of the invention.
Fig. 3 be first embodiment of the invention overlook partial enlarged drawing.
Fig. 4 is the end view in the die pick district of the feed arrangement of first embodiment of the invention.
Fig. 5 is the end view of the measuring station of first embodiment of the invention.
Fig. 6 is the end view of the sorting station of first embodiment of the invention.
Fig. 7 is the schematic top plan view of second embodiment of the invention.
Fig. 8 is the schematic top plan view of third embodiment of the invention.
Embodiment
Before the rotary crystal grain checkout equipment of many rails charging of the present invention is described in detail in the present embodiment, it is important to note that in the following description, similar assembly represents with identical element numbers.
Be described with double track feeding manner the first embodiment of the present invention below, please also refer to Fig. 2 ~ Fig. 3, Fig. 2 is the vertical view of first embodiment of the invention, Fig. 3 be first embodiment of the invention overlook partial enlarged drawing.
Show rotating turret 2 in figure, it comprises central shaft 21, and rotating turret 2 rotates along central shaft 21.In the present embodiment, rotating turret 2 rotates steppingly towards same direction of rotation along central shaft 21 by actuator (not shown) drives.Moreover two groups of crystal grain fetching devices 3 comprise the first feed arrangement 41 and the second feed arrangement 42, and it is equidistantly located on the radial bearing of trend of rotating turret 2, that is, be arranged at the corresponding both sides outside rotating turret 2 with standing far apart facing each other in the mode of 180 ° of angles.
In the present embodiment, each feed arrangement 4 comprises vibrations feeding disc 43, feed rail 44 and feed back track 45, and shakes feeding disc 43 and comprise spout 431, and it is communicated with feed rail 44.And the side of the contiguous rotating turret 2 of feed rail 44 comprises die pick district 40, namely die pick district 40 is positioned at the side that feed rail 44 is stood far apart facing each other with vibrations feeding disc 43.As for feed back track 45, it is arranged at the below of feed rail 44, in order to accept the crystal grain C dropped from feed rail 44.
It is the end view in the die pick district 40 of the feed arrangement 4 of first embodiment of the invention please also refer to Fig. 4, Fig. 4.Wherein, rotating turret 2 is equidistantly equipped with eight groups of crystal grain fetching devices 3.As shown in Figure 4, in the present embodiment, each crystal grain fetching device 3 comprises suction nozzle 31 and elevating mechanism 32, and elevating mechanism 32 is assembled on rotating turret 2 and can order about suction nozzle 31 and rise or decline.
It is the end view of the measuring station 5 of first embodiment of the invention please also refer to Fig. 5, Fig. 5.As shown in Figure 2, the measuring station 5 of the present embodiment comprises two the first measuring stations 53 and two the second measuring stations 54, and in the ring circumferential direction that the radial direction that these measuring stations are laid in rotating turret 2 respectively in order extends, and be positioned at the side of feed rail 44.Wherein, the first measuring station 53 and the second measuring station 54 carry out two kinds of different tests to crystal grain C respectively.But, the present invention, not as limit, also can be the form of single measuring station or other multiple measuring station.In addition, in the present embodiment, each measuring station 5 comprises probe base 51, two probes 52, and probe base 51 is fixed in the side of two probes 52, and another side-line protrudes out from the side of probe base 51 and exposes.Wherein, probe 52 in order to crystal grain C in electrical contact, and is tested crystal grain C.
It is the end view of the sorting station 6 of first embodiment of the invention please also refer to Fig. 6, Fig. 6.As shown in Figure 2, two sorting station 6 are equidistantly located on the radial bearing of trend of rotating turret 2, and are positioned at the side of the second measuring station 54.In the present embodiment, each sorting station 6 comprises rotation sub-feed tube 62, rotary driver 64 and eight appearance storehouses 63, and rotation sub-feed tube 62 comprises feeding mouth 61 and discharging opening 621.Wherein, feeding mouth 61 with rotate the discharging opening 621 of sub-feed tube 62 and be communicated with, and rotary driver 64 connects and drives and rotate sub-feed tube 62 and rotate, and the crystal grain C that eight appearance storehouses 63 are respectively different brackets places part.In other words, the sorting station 6 of the present embodiment drives rotation sub-feed tube 62 to rotate by rotary driver 64 and makes discharging opening 621 hold in storehouses 63, to classify to crystal grain C in alignment with eight.
The rotary crystal grain checkout equipment practical manner of many rails charging of the present embodiment is described as follows, first after two crystal grain fetching devices 3 obtain a crystal grain C respectively respectively to the die pick district 40 of the feed arrangement 4 of both sides, then, rotating turret 2 is rotated counterclockwise, and two crystal grain fetching device 3 crystal grain C to two the first measuring stations 53 that transfer is to be tested respectively, to carry out the test of first stage.After treating that the first measuring station 53 detects, rotating turret 2 is rotated counterclockwise by crystal grain C transfer to the second measuring station 54 once more, to carry out the test of second stage.
Be worth special instruction at this, when the first measuring station 53 and the second measuring station 54 are tested, crystal grain fetching device 3 draws crystal grain C all the time.After treating that the second measuring station 54 detects, rotating turret 2 is rotated counterclockwise again, the crystal grain C surveyed just transfers load to above the feeding mouth 61 of sorting station 6 by crystal grain fetching device 3, and make it drop to enter this feeding mouth 61, by rotation sub-feed tube 62, this crystal grain C is classified, make it fall in corresponding appearance storehouse 63.Wherein, in the present embodiment, when the second measuring station 54 is once be completed, its testing result is just sent to sorting station 6 immediately, therefore when the crystal grain C surveyed is transferred load to the feeding mouth 61 of sorting station 6 by crystal grain fetching device 3 by the time, the discharging opening 621 rotating sub-feed tube 62 has also aimed at corresponding appearance storehouse 63, waits for that crystal grain C falls.Accordingly, the crystal grain fetching device 3 of the present embodiment there is no the idle stand-by period in sorting station 6, once place that crystal grain C can carry out next step immediately pick and place task.
But the present invention is not limited with the double track charging of the first embodiment, also can be the feeding manner of three rail chargings, four rail chargings or other more rail.The second embodiment as shown in Figure 7, it is the example of three rail chargings, and the angle wherein between two adjacent feed arrangements 4 is 120 °, and configuration testing production capacity can improve more than three times in this way.In addition, be illustrated in figure 8 four rail feeding manners, the angle wherein between two adjacent feed arrangements 4 is 90 °, and configure in this way, tested productivity can improve more than four times.
Above-described embodiment only citing for convenient explanation, the protection range that the present invention advocates from should being as the criterion with described in claims, but not is only limitted to above-described embodiment.
[symbol description]
90 V-type spiral arms
91,92 fetching devices
93 feed arrangements
94 probe bases
2 rotating turrets
21 central shafts
3 crystal grain fetching devices
31 suction nozzles
32 elevating mechanisms
4 feed arrangements
41 first feed arrangements
42 second feed arrangements
43 vibrations feeding discs
431 spouts
44 feed rail
45 feed back tracks
40 die pick districts
5 measuring stations
51 probe bases
52 probes
53 first measuring stations
54 second measuring stations
6 sorting station
61 feeding mouths
62 rotate sub-feed tube
621 discharging openings
63 hold storehouse
64 rotary drivers.
Claims (10)
1. a rotary crystal grain checkout equipment for the charging of rail more than, comprising:
Rotating turret, it comprises central shaft, and this rotating turret rotates along this central shaft;
Multiple crystal grain fetching device, it is equidistantly located on this rotating turret;
Multiple feed arrangement, it is equidistantly located on the radial bearing of trend of this rotating turret, and the side of each feed arrangement this rotating turret contiguous comprises a die pick district;
Multiple measuring station, it is equidistantly located on the radial bearing of trend of this rotating turret; And
Multiple sorting station, it is equidistantly located on the radial bearing of trend of this rotating turret;
Wherein, the plurality of crystal grain fetching device divide be clipped to the plurality of feed arrangement described die pick district on obtain crystal grain after, this rotating turret rotates, and this crystal grain is transferred load to described multiple measuring station by the plurality of crystal grain fetching device tests, this rotating turret rotates again, and this crystal grain of described multiple crystal grain fetching device transfer to described multiple sorting station places this crystal grain, described multiple sorting station is classified to this crystal grain.
2. the rotary crystal grain checkout equipment of many rails charging as claimed in claim 1, wherein, described multiple feed arrangement comprises the first feed arrangement and the second feed arrangement, relatively arranges outside this rotating turret.
3. the rotary crystal grain checkout equipment of many rails charging as claimed in claim 1, wherein, each feed arrangement comprises vibrations feeding disc and feed rail, this vibrations feeding disc comprises spout, it is communicated with this feed rail, and described die pick district is positioned at side relative with this vibrations feeding disc on this feed rail.
4. the rotary crystal grain checkout equipment of many rails charging as claimed in claim 3, wherein, each feed arrangement also comprises feed back track, and it is arranged at below this feed rail, in order to accept this crystal grain dropped from this feed rail.
5. the rotary crystal grain checkout equipment of many rails charging as claimed in claim 1, wherein, each measuring station comprises probe base and at least one probe, and this probe base is fixed in the side of at least one probe described, and opposite side protrudes out from the side of this probe base and exposes; This crystal grain of described multiple crystal grain fetching device transfer is in electrical contact with at least one probe described to the top of at least one probe described.
6. the rotary crystal grain checkout equipment of many rails charging as claimed in claim 1, wherein, each crystal grain fetching device comprises suction nozzle and elevating mechanism, and this elevating mechanism to be assembled on this rotating turret and to order about this suction nozzle and rises or decline.
7. the rotary crystal grain checkout equipment of many rails charging as claimed in claim 1, wherein, each sorting station comprises rotation sub-feed tube and multiple appearance storehouse, this rotation sub-feed tube comprises feeding mouth and discharging opening, this feeding mouth is communicated with this discharging opening of this rotation sub-feed tube, and this rotation sub-feed tube rotates and makes in the described multiple appearance storehouse of this discharging opening aligning; Described multiple this crystal grain of crystal grain fetching device rotating transfer is to this feeding mouth and place this crystal grain.
8. the rotary crystal grain checkout equipment of many rails charging as claimed in claim 7, wherein, each sorting station also comprises rotary driver, and it connects and drives this rotation sub-feed tube to rotate.
9. the rotary crystal grain checkout equipment of many rails charging as claimed in claim 1, wherein, described multiple measuring station comprises multiple first measuring station and multiple second measuring station, in the ring circumferential direction that the radial direction that described multiple feed arrangement, multiple first measuring station, multiple second measuring station and multiple sorting station are laid in this rotating turret respectively in order extends.
10. the rotary crystal grain checkout equipment of many rails charging as claimed in claim 1, wherein, this rotating turret rotates along this central shaft steppingly towards same direction of rotation.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW102140813A TW201519343A (en) | 2013-11-11 | 2013-11-11 | Multi-track feeding rotary type crystal grain detection device |
| TW102140813 | 2013-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104637840A true CN104637840A (en) | 2015-05-20 |
Family
ID=51323547
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420076728.8U Expired - Fee Related CN203787390U (en) | 2013-11-11 | 2014-02-21 | Rotary type crystal grain detection equipment with multi-rail feeding |
| CN201410059941.2A Pending CN104637840A (en) | 2013-11-11 | 2014-02-21 | Rotary type crystal grain detection equipment with multi-rail feeding |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420076728.8U Expired - Fee Related CN203787390U (en) | 2013-11-11 | 2014-02-21 | Rotary type crystal grain detection equipment with multi-rail feeding |
Country Status (2)
| Country | Link |
|---|---|
| CN (2) | CN203787390U (en) |
| TW (1) | TW201519343A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113363177A (en) * | 2020-03-04 | 2021-09-07 | 均华精密工业股份有限公司 | High-yield die bonding device |
| CN114944351A (en) * | 2022-04-24 | 2022-08-26 | 济南鲁晶半导体有限公司 | Semiconductor wafer chip classification device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201519343A (en) * | 2013-11-11 | 2015-05-16 | Think Technologies Ltd | Multi-track feeding rotary type crystal grain detection device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1968876A (en) * | 2004-04-13 | 2007-05-23 | Tdk株式会社 | Chip part conveyance method, its device, appearance inspection method, and its device |
| KR20100064189A (en) * | 2008-12-04 | 2010-06-14 | (주)에이피텍 | Combined apparatus of vision inspection and sorting for semiconductor die |
| CN202075380U (en) * | 2011-05-10 | 2011-12-14 | 久元电子股份有限公司 | Light-emitting element detecting and classifying device |
| CN102990255A (en) * | 2011-09-16 | 2013-03-27 | 株式会社日立高新技术仪器 | Die bonder and bonding method |
| CN103247562A (en) * | 2013-05-17 | 2013-08-14 | 嘉兴景焱智能装备技术有限公司 | Grain turret type picking up and placing device |
| CN203787390U (en) * | 2013-11-11 | 2014-08-20 | 台北歆科科技有限公司 | Rotary type crystal grain detection equipment with multi-rail feeding |
-
2013
- 2013-11-11 TW TW102140813A patent/TW201519343A/en unknown
-
2014
- 2014-02-21 CN CN201420076728.8U patent/CN203787390U/en not_active Expired - Fee Related
- 2014-02-21 CN CN201410059941.2A patent/CN104637840A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1968876A (en) * | 2004-04-13 | 2007-05-23 | Tdk株式会社 | Chip part conveyance method, its device, appearance inspection method, and its device |
| KR20100064189A (en) * | 2008-12-04 | 2010-06-14 | (주)에이피텍 | Combined apparatus of vision inspection and sorting for semiconductor die |
| CN202075380U (en) * | 2011-05-10 | 2011-12-14 | 久元电子股份有限公司 | Light-emitting element detecting and classifying device |
| CN102990255A (en) * | 2011-09-16 | 2013-03-27 | 株式会社日立高新技术仪器 | Die bonder and bonding method |
| CN103247562A (en) * | 2013-05-17 | 2013-08-14 | 嘉兴景焱智能装备技术有限公司 | Grain turret type picking up and placing device |
| CN203787390U (en) * | 2013-11-11 | 2014-08-20 | 台北歆科科技有限公司 | Rotary type crystal grain detection equipment with multi-rail feeding |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113363177A (en) * | 2020-03-04 | 2021-09-07 | 均华精密工业股份有限公司 | High-yield die bonding device |
| CN114944351A (en) * | 2022-04-24 | 2022-08-26 | 济南鲁晶半导体有限公司 | Semiconductor wafer chip classification device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN203787390U (en) | 2014-08-20 |
| TW201519343A (en) | 2015-05-16 |
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