CN104568391B - Double light path switching mutually refers to high-precision A OTF performance test methods and device - Google Patents
Double light path switching mutually refers to high-precision A OTF performance test methods and device Download PDFInfo
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Abstract
High-precision A OTF performance test methods and device are mutually referred to the invention discloses a kind of switching of double light path.The method of testing realizes the stable switching of detection light path ± 1 grade using light path switching component, and realize the stable alternately testing of light path using detector rotating device, effectively eliminate luminous energy unstability and the influence of the factor to test result such as energy meter sonde response is inconsistent.The invention has that optical system for testing is compact, testing procedure is concisely easy to operate, data processing method and the features such as clear and definite flow, can realize that high efficiency is tested while measuring accuracy and the stability of a system is improved.
Description
Technical field：
The present invention relates to optical measuring technique, a kind of double light path switching is referred specifically to mutually with reference to high-precision A OTF performance test sides
Method and device, it is used to realize high-precision acousto-optic tunable filter performance test.
Background technology：
Acousto-optic tunable filter (Acousto-optic tunable filter, AOTF) is a kind of new dispersion point
Optical device, it is based on acoustooptical effect, electric tuning spectral filtering can be realized by radio frequency, has because of its all solid state structure preferably
Power, thermal characteristics；There is flexible optical electivity performance because of its electric tuning spectral filtering；And can with spectrum sample interval
Control, the advantages of length scanning is quick.Spectrographic detection is adapted to very much to flexible and efficient data acquisition requirement, current this technology is
It is widely used among non-imaged and imaging spectral instrument equipment.
AOTF light-dividing principle：As shown in Figure 1, AOTF is by acousto-optic medium (generally TeO2), wave absorption device and change
Can device composition.When crystal with Photoelasticity of a branch of polychromatic light by dither, certain of momentum matching is met
The light vector of one wavelength will produce nonlinear interaction in crystals with sound wave vector and produce diffracted beam, with certain diffraction
Angle is transmitted from crystal, the polychromatic light of diffraction does not occur then along the former light direction of propagation directly from crystal outgoing, thus
Reach the effect of light splitting.When crystal vibration frequency changes, diffraction goes out monochromatic wavelength and also accordingly changed, so as to realize electric tune
Humorous light filtering.AOTF diffraction properties include diffraction efficiency, spectral resolution etc., and parameter of its performance with wavelength and crystal in itself has
Close, the test to AOTF diffraction properties usually requires to realize that all band is covered.
Light source is used a laser as, zero level and diffraction luminous energy are measured and calculated using energy acceptance system, so that
AOTF diffraction efficiency is drawn, is one of feasible means.But the means can not be met pair due to the monochromaticjty limitation of laser
AOTF carries out the demand of continuous spectral coverage test.It is another feasible by the use of Wavelength tunable laser as continuously adjustabe light source
Settling mode (patent CN 101706361), as shown in Fig. 2 continuously adjustabe of this method by light source, and utilize beam splitter drop
Influence of the low luminous energy unstability to measuring accuracy, it is possible to achieve the test of broadband and degree of precision.But this method is also deposited
In limitation, it is mainly shown as：(1) need to switch the beam splitter for adapting to different spectral coverage when wide spectrum is tested, while to ensure to survey
Examination precision needs to test wavelength-beam splitting curve of the beam splitter, wastes time and energy；(2) it is a certain in ± the 1 of AOTF devices grade
Level (such as+1 grade) is completed after test, and extra installation binder is needed to another level (such as -1 grade), and to readjust light path, is operated
Property and uniformity are poor；(3) stability of the deviation and beam splitter itself of basic vector will influence measuring accuracy.Patent (CN
103913297) propose to realize the AOTF method of testings that luminous energy is referred to using acousto-optical device self-characteristic.As shown in figure 3, this method
The light intensity of 0 grade of light and diffraction light is alternately measured by exchanging the position of two energy meters, can effectively eliminate light source it is unstable with
And the inconsistent influence to measurement of explorer response.But two energy meter place-exchange processes described in this method are introduced into alignment
Position deviation, so as to be impacted to measuring accuracy；In addition, place-exchange and Glan prism ± 1 grade of light of switching of energy meter
Operation, also inevitably causes the change of follow-up test light path, requires operation high and influence stability of instrument.
The content of the invention：
The high accuracy that double light path is mutually referred to is realized it is an object of the invention to provide a kind of changeable component of novel utilization
AOTF light-splitting devices performance test methods and device.
Wherein light path switching component (reflection index glass) realizes the stabilization of ± 1 grade of optical system for testing, portable switching；Detector rotates
Device is realized to the mutual reference alternately testing of double light path.The present invention can effectively eliminate luminous energy unstability and energy meter probe sound
Answer in the case of inconsistent influence, realize elimination while being switched fast test of ± 1 grade of light path to subsequent optical path system architecture
Influence.Compared with prior art, there is the marked improvement of following several respects：1) a kind of novel method of testing and dress are provided
Put, the RELATED APPLICATION detection of double light path is realized in rotation, is formed corresponding data processing formula, is eliminated luminous energy unstability and energy
Count the AOTF diffraction property test errors of the inconsistent introducing of sonde response；2) a kind of novel method of testing device is provided, realized
The switching of the portable stabilization of AOTF ± 1 grade optical diffraction performance test light path.The invention has that optical system for testing is compact, testing procedure is concise
The features such as easy to operate, data processing method and clear and definite flow, height can be realized while measuring accuracy and the stability of a system is improved
Efficiency test.
General principle：As shown in figure 1, according to acoustic optic interaction principle, when a branch of polychromatic light is by AOTF, the polychromatic light
It is divided into two bunch polarised lights, i.e. o light and e light.After RF drive frequency is applied on crystal, wherein e light occurs after diffraction, shape
Into+1 order diffraction light (o light) and 0 grade of light；Diffraction also occurs simultaneously for o light, forms -1 order diffraction light (e light) and 0 grade of light.Using treating
- 1 grade of light and 0 grade of luminous energy total amount surveyed after the o optical diffractions of AOTF crystal are consistent with incidence o light ,+1 order diffraction light after e optical diffractions
And 0 grade of luminous energy total amount also characteristic consistent with incident e light, diffraction property can be tested.
Method of testing and device：
1) as shown in fig. 6, test device includes tunable laser (1), neutral-density filter (2), aperture
(3), Glan prism (4), two-dimentional electrical turntable (5), AOTF crystal to be checked and radio driver (6), reflection index glass (7), detection
Device rotating device (8), the first energy meter probe (8.1), the second energy meter probe (8.2).Tunable laser (1) wave-length coverage
210nm-2300nm, power 40mW-80mW.Neutral-density filter (2) attenuation range 10%-80%.Aperture (3) aperture
Scope is in 0.05mm-0.15mm.Reflect index glass (7) reflectivity and be more than 99%.Explorer response wavelength 210nm-2300nm, rotation
0 ° -180 ° of device rotation angle range.
During test, the laser beam of Wavelength tunable laser (1) outgoing is successively by neutral-density filter (2), small
Obtained after hole diaphragm (3), Glan prism (4) on the quasi- one-wavelength laser of linear polarization and vertical incidence AOTF (6), radio driver pair
AOTF (6) applies certain radio-frequency driven, and the angle of adjustment reflection index glass (7) makes 0 grade of light and wherein first-order diffraction light (such as -1
Level) detector rotating device is reflexed to, realize test.
Wherein, the first energy meter probe (8.1) and the second energy can be realized when detector rotating device (8) is in 0 ° and 180 °
Gauge probe (8.2) stable switching interaction detection portable to 0 grade of light and -1 order diffraction light respectively, by(η
For AOTF to be checked diffraction efficiency, E00 grade of light when detector rotating device is in 0 ° is received for the first energy meter probe 8.1
Energy, E1The diffraction light energies received for now the second energy meter probe 8.2；E0' received for the first energy meter probe 8.1
Detector rotating device is in 180 ° of diffraction light energy, E1' it is 0 grade of luminous energy that now the second energy meter probe 8.2 is received
Amount) processing, the influence that flashing is qualitative and energy meter sonde response is inconsistent is mutually eliminated with reference to detection by double light path, realized
The high precision measurement of diffraction efficiency of acousto-optic tunable filter；
Wherein reflection index glass (7) rotates and combined the polarization state of the anglec of rotation change incident light of Glan prism (4), real
Existing AOTF-1 order diffractions light completes the test to AOTF-1 order diffraction light efficiencies to the switching of+1 grade of light and its detection light path.
2) reflect the position of index glass in test device and parameter is determined as follows, as shown in Figure 4, if the angle of diffraction is
β, mirror center is from being L with a distance from Exit positions, and the 0 grade of vertical range of light away from detector is H, and M is the water of two detectors
Flat distance.When crystal diffraction light is -1 grade, the position of speculum is A, and the angle with horizontal direction is α；When diffraction light is+1
During level, the position of speculum is B, and the angle with horizontal direction is γ.It is anti-that the rotation of two secondary reflection index glass meets light path just
It is incident upon the center of two energy meters probe.Then according to geometric optical theory, it should meet：
Angle of diffraction β, mirror center is from being L with a distance from Exit positions, and vertical range H of the 0 grade of light away from detector is once
It is determined that, for -1 order diffraction light, the angle of itself and horizontal direction is α, and the size for meeting 45 ° of+β/2, M of α ＞ is determined by above formula, when
During mobile reflection index glass, the angle γ of itself and horizontal direction meets equation below：
Tan (2 α -90 °) tan (2 α -90 ° of-β)+tan (90 ° of -2 γ) tan (β -90 °+2 γ)=0
The angle for thereby determining that the position of reflection index glass and rotating twice.Realize the switching of ± 1 order diffraction light and measure.
3) detector rotating device (8) and detector (8.1), (8.2) have the following characteristics that in test device：Detector revolves
The rotating shaft of rotary device (8) by the center of detector (8.1) and detector (8.2) photosurface and with detector 8.1,8.2 lines
Rotate the plane formed vertically, easy switching and the position deviation that energy meter exchange generation can be prevented effectively from；In test device
Aperture (3) size is less than detector photosurface size, further eliminates position and switches influence to test, realize light path and
The stabilization of measurement.
4) test device is switched using wide spectrum Glan prism and its rotation adjustment binder and is finely tuned incident ray polarized light phase
Position, adapts to ± 1 order diffraction performance test to the demand of light source while optical efficiency is improved and reduces polarization basic vector deviation pair
The influence of measuring accuracy.
Concrete analysis and explanation：
1) when testing, the wavelength of Wavelength tunable laser is adjusted, certain radio-frequency driven is applied to AOTF6, Glan is rotated
Prism, rotary reflection index glass to position A tests the diffraction efficiency of -1 order diffraction light.First energy meter probe 8.1 receive 0
Level light energy is E0, the diffraction light energy that the second energy meter probe 8.2 is received is E1；Detector rotating device is rotated 180 °,
Realize that two energy meters probe is alternately measured the light of two-way light, i.e. 0 grade of light energy that the second energy meter probe 8.2 is received is
E0', the diffraction light energy that the first energy meter probe 8.1 is received is E1', the calculation formula of diffraction efficiency is as follows：
It is analyzed as follows：It is unstable in view of the energy of Wavelength tunable laser 1, two energy meters probe of same model
Responsiveness can reduce the precision of test result there is also deviation, realize that two energy meters are popped one's head in by above-mentioned detector rotating device
Alternating to two-way light, which is measured and calculated by above-mentioned formula, can effectively improve precision.
If applying to AOTF6 after certain radio-frequency driven, the actual energy of 0 grade of light is e0, the actual energy of diffraction light is e1,
Its ideal diffraction efficiency is：
If the factor of influence coefficient caused by energy of lasers is unstable is β, the response coefficient of the first energy meter probe is
A, for a, (1+ Δ x), Δ x are the inconsistent produced phase of two energy meter sonde responses to the response coefficient of the second energy meter probe
To deviation.The light energies that then two energy meters probes 8.1,8.2 are obtained, which are responded, is：E0=β ae0, E1=β a (1+ Δ x) e1.Keep
Driving frequency is constant, 180 ° of rotary detector rotating device, and two energy meter probes are realized and alternately measure 0 grade of light and diffraction light,
The two obtain light energy be：E0'=β a (1+ Δ x) e0, E1'=β ae1, it is available according to diffraction efficiency formula：
AOTF6 diffraction efficiency calculation formula are：
If being tested without optical path alignment, now the limit error of diffraction efficiency is Δ η ', it is known that：
Δ η '=η1-ηreal 1-5
Carry out after light path switching alternately testing, now the limit error of diffraction efficiency is Δ η ", it is known that：
Formula 1-5 and 1-6 can be derived as by formula 1-2,1-3 and 1-4：
Δ η "=η-ηreal=0
Accompanying drawing 5 is ηrealWhen respectively 0.1,0.3 and 0.5, Δη(including Δ η ' and Δ η ") and Δ x graph of relation
(Δ x spans are between 0-5%).From accompanying drawing：Using double light path switching energy meter probe rotating device alternately testing
Method diffraction efficiency theoretical limit error be 0, compared with the result without alternately testing, substantially increase test essence
Degree.
The advantage of the invention is that：
1) characteristic based on AOTF crystal is there is provided a kind of novel method of testing and device, using detector rotating device
Realize to the mutual reference alternately testing of double light path；Using light path switching component (reflection index glass) realize ± 1 grade of optical system for testing stabilization,
Portable switching；± 1 can be realized in the case of luminous energy unstability and the inconsistent influence of energy meter sonde response is effectively eliminated
The influence eliminated while being switched fast test to subsequent optical path system architecture of level light path.
2) calculating processing is carried out to the data obtained using diffraction efficiency formula, diffraction efficiency is obtained by theoretical error analysis
Theoretical limit error be 0, compared with prior art and processing method, the precision of test is substantially increased, based on the model
Optical test path method can also be used in other field of optical measurements, with important application value and reference significance.
Brief description of the drawings：
Figure 1A OTF light-dividing principle figures.
Fig. 2 tunable laser method AOTF diffraction efficiency test system schematic diagrames.
Fig. 3 self-references acousto-optic tunable filter high accuracy diffraction property test device.
Fig. 4 reflects index glass and detector rotating device schematic diagram.
Fig. 5 theoretical error curve maps (ηreal=0.1,0.3,0.5).
The switching of Fig. 6 double light paths mutually refers to high-precision A OTF performance testing device schematic diagrames.
Embodiment：
It is the of the invention preferably embodiment provided according to Fig. 6, the structure to illustrate the present invention as described below
Feature and implementation, rather than for limiting the scope of the present invention.
Double light path switching mutually includes following several parts with reference to high-precision A OTF performance testing devices：
(1) Wavelength tunable laser 1：EKSPLA NT342/1/UV tunable wave length laser is selected in present implementation
Device is as light source, and the laser can produce 210nm-2300nm continuously adjustable laser beams, power output 50mW.
(2) neutral-density filter 2：The present embodiment selects Spiricon neutral-density filters.
(3) aperture 3：The present embodiment selects Daheng's photoelectricity GCM-57 iris diaphgrams.
(4) Glan prism 4：The GL15Glan-Laser Calcite of Thorlabs companies are selected in the present embodiment
Polarizers, extinction ratio is better than 10000:1, spectral region is between 350nm-2300nm, to realize that wide spectrum is tested.
(5) two electrical turntables 5：Friendship ties 148 × 142 2 electrical turntable is selected in the present embodiment.Adjustable range
360 °, the gearratio 1 of motor:360,0.1 ° of scale least count, motor synchronizing 0.005 ° of resolution ratio of operation.
(6) index glass 7 is reflected：Cyclopentadienyl Feng Guang electricity silverskin speculum OQAg-12.7 are selected in the present embodiment, wavelength covering is visible
Light and infrared, diameter 12.7mm, reflectivity are more than 99%.
(7) detector (8.1,8.2) and detector rotating device (8)：The present embodiment selects Coherent companies of the U.S.
EPM1000 energy meters are popped one's head in, and probe selects J4-09 and J45LP-MB respectively.Energy is realized from the fixed mirror holder of Custom Prosthesis rotation
Count the fixation and rotation of probe.
The short-wave infrared AOTF6 that electricity 26 is developed during embodiment is selected is as acousto-optic crsytal to be measured, and it is supporting to take its
Radio driver 62 is used as AOTF components, short-wave infrared AOTF wave-length coverages 900-2300nm.Method of testing is comprised the steps of：
1) output wavelength of Wavelength tunable laser 1 is selected, the two-dimentional electrical turntable 5 of adjustment, laser beam successively passes through
After neutral-density filter, aperture, Glan prism on vertical incidence to AOTF6 crystal, adjusted by rotating Glan prism
Glan prism binder and to finely tune incident ray polarized light phase to make to incide light on crystal be linearly polarized light (e light)；
2) radio driver applies the radio-frequency driven of corresponding frequencies, adjustment reflection index glass to special angle, detection to AOTF6
Device rotating device is placed in 0 °, light path is reflexed to the center of two energy meters probe just, is connect by the first energy meter probe 8.1
0 grade of light energy is received, the second energy meter probe 8.2 receives diffraction light (o light) energy；
3) holding driving frequency is constant, and 180 ° of rotary detector rotating device realizes friendship of two detector probes to light path
For test, i.e., diffraction light (o light) energy is received by the first energy meter probe 8.1, the second energy meter probe 8.2 receives 0 grade of luminous energy
Amount；AOTF diffraction efficiency is calculated using the formula (1-1) of above-mentioned calculating diffraction efficiency；
4) AOTF+1 grade (o light) is completed after test, by rotating adjustment Glan prism binder and to finely tune incident ray inclined
Shake light phase, so as to change the polarization state for the linearly polarized light for being incident to AOTF6, diffraction light is switched to another level (e light), and revolve
Turn reflection index glass to ad-hoc location, repeat the above steps 1-3, completes the test to e light diffraction efficiencies.
AOTF diffraction properties method of testing involved in the present invention is simple, and light path is compact, and testing procedure is concisely easy to operate, surely
It is qualitative strong, compared to traditional AOTF diffraction efficiency method of testings, effectively reduce unstable caused by LASER Light Source energy hunting
Property and the inconsistent influence caused to test result of energy meter sonde response rate, greatly improve measuring accuracy.By introducing reflection
Index glass, can realize the influence eliminated while being switched fast test to subsequent optical path system architecture of ± 1 grade of light path.By drawing
Enter detector device rotating device, the RELATED APPLICATION detection of light path can be realized, eliminate luminous energy unstability and energy meter probe rings
Answer the AOTF diffraction property test errors of inconsistent introducing, effectively prevent exchange probe positions during introduce position it is inclined
Influence of the difference to test result, operation is succinct, reliable and stable；Test result is handled by diffraction efficiency calculation formula,
Measuring accuracy is further improved, reduces test error.The high-precision diffraction of theoretically ideal acousto-optic tunable filter
Performance testing device.
Claims (4)
1. a kind of switching of double light path mutually refers to high-precision A OTF performance testing devices, it include Wavelength tunable laser (1), in
Property density filters (2), aperture (3), Glan prism (4), two-dimentional electrical turntable (5), acousto-optic tunable filter to be checked
And drive device (6), reflection index glass (7), detector rotating device (8), the first energy meter probe (8.1), the second energy meter are visited
Head (8.2), it is characterised in that：
The laser beam of Wavelength tunable laser (1) outgoing successively passes through neutral-density filter (2), aperture (3), lattice
Obtained after blue prism (4) on the quasi- one-wavelength laser of linear polarization and vertical incidence AOTF (6), radio driver applies one to AOTF (6)
Fixed radio-frequency driven, the angle of adjustment reflection index glass (7) makes 0 grade of light and -1 order diffraction light reflex to the energy meter of detector first
Pop one's head in (8.1) and the second energy meter probe (8.2), or 0 grade of light and+1 order diffraction light is reflexed to the energy meter of detector first
Pop one's head in (8.1) and the second energy meter probe (8.2), realize test；
Described detector rotating device (8) rotates 180 ° and realizes that two energy meters probe is alternately measured two-way light.
2. a kind of double light path switching according to claim 1 mutually refers to high-precision A OTF performance testing devices, its feature exists
In：The rotating shaft of described detector rotating device (8) is popped one's head in by the first energy meter probe (8.1) and the second energy meter thereon
(8.2) center of photosurface and to rotate the plane to be formed vertical with energy meter probe (8.1,8.2) line, it is to avoid energy meter is exchanged
The position deviation of generation.
3. a kind of double light path switching according to claim 1 mutually refers to high-precision A OTF performance testing devices, its feature exists
In the aperture of described aperture (3) is less than detector photosurface size, eliminates influence of the position switching to test.
4. a kind of double light path switching based on described in claim 1 is mutually with reference to the AOTF diffraction of high-precision A OTF performance testing devices
The method of testing of efficiency, it is characterised in that method is as follows：
Detector rotating device (8) can realize the first energy meter probe (8.1) and the second energy meter probe when being in 0 ° and 180 °
(8.2) stable switching interaction detection portable to 0 grade of light and -1 order diffraction light respectively, diffraction efficiency computational methods are as follows：
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In formula：E00 grade of light energy when detector rotating device is in 0 °, E are received for the first energy meter probe (8.1)1For this
When the second energy meter probe (8.2) diffraction light energy for receiving；E0' receive detector for the first energy meter probe (8.1)
Rotating device is in 180 ° of diffraction light energy, E1' it is 0 grade of light energy that now the second energy meter probe (8.2) is received, lead to
Cross double light path and mutually eliminate the influence that flashing is qualitative and energy meter sonde response is inconsistent with reference to detection, realize acousto-optic tunable
The high precision measurement of filter diffraction efficiency；Reflection index glass (7) rotational angle α or γ and combines Glan prism in the horizontal direction
(4) the anglec of rotation changes the polarization state of incident light, realizes AOTF by -1 order diffraction light to+1 grade of light and its detects light path
Switching, completes the test to AOTF-1 order diffraction light efficiencies；Reflect index glass (7) rotational angle α or γ determination sides in the horizontal direction
Method is as follows：
Wherein：β be the AOTF angles of diffraction, L be mirror center from Exit positions with a distance from, H be 0 grade of light away from the vertical of detector
Distance, M is the horizontal range of two detectors, and α meets 45 ° of+β/2, γ of α ＞ and meets equation：
Tan (2 α -90 °) tan (2 α -90 ° of-β)+tan (90 ° of -2 γ) tan (β -90 °+2 γ)=0 (3)
The angle for thereby determining that the position of reflection index glass and rotating twice, realizes the switching of ± 1 order diffraction light and measures.
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| US4448494A (en) * | 1981-06-17 | 1984-05-15 | Hazeltine Corporation | Acousto-optical signal detector |
| CN101441111A (en) * | 2008-12-29 | 2009-05-27 | 中国科学院长春光学精密机械与物理研究所 | Grating diffraction efficiency tester with CCD multicolor machine |
| CN101545826A (en) * | 2009-04-30 | 2009-09-30 | 中国科学院上海光学精密机械研究所 | Device and method for measuring diffraction efficiency of grating |
| CN101907513A (en) * | 2010-07-23 | 2010-12-08 | 中国科学院上海技术物理研究所 | Diffraction property low-light test system and method of acousto-optic tunable filter (AOTF) |
| CN103913297A (en) * | 2014-03-28 | 2014-07-09 | 中国科学院上海技术物理研究所 | Method and device for testing diffraction performance of self-referential acousto-optic tunable filter |
| CN204679246U (en) * | 2015-01-21 | 2015-09-30 | 中国科学院上海技术物理研究所 | Double light path switches mutually with reference to high-precision A OTF performance testing device |
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