CN104480437A - Production method for integrally formed cylindrical target - Google Patents
Production method for integrally formed cylindrical target Download PDFInfo
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- CN104480437A CN104480437A CN201410841972.3A CN201410841972A CN104480437A CN 104480437 A CN104480437 A CN 104480437A CN 201410841972 A CN201410841972 A CN 201410841972A CN 104480437 A CN104480437 A CN 104480437A
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- Prior art keywords
- target
- pipe
- body molded
- production method
- outer tube
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/02—Compacting only
- B22F3/04—Compacting only by applying fluid pressure, e.g. by cold isostatic pressing [CIP]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/16—Both compacting and sintering in successive or repeated steps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Powder Metallurgy (AREA)
Abstract
The invention belongs to the technical field of material processing, and particularly relates to a production method for an integrally formed cylindrical target. Target material powder comprising target elements is put into a jacket, hot isostatic pressing is conducted in a vacuum condition to form the cylindrical target, after hot isostatic pressing, an outer tube and fixing rings are removed from inside the jacket, a blank with a liner tube inside and a target tube outside is obtained, the blank is machined and then the integrally formed cylindrical target is obtained. The jacket comprises an inner tube, the outer tube and the fixing rings, wherein the inner tube and the outer tube are coaxially arranged and the fixing rings are used for fixing two ends of the inner tube and two ends of the outer tube. The hot isostatic pressing method is used successfully to produce the integrally formed tube target, the obtained integrally formed tube target is uniform in content and has no visible segregation, the target tube and the liner tube are closely combined, crystalline grains are fine and small, the purity is high, and the requirements of liquid crystal display and the touch control screen industry can be met.
Description
Technical field
The invention belongs to materials processing technology field, be specifically related to a kind of production method of one-body molded pipe target.
Background technology
In flat pannel display plated film industry, main use molybdenum alloy target, aluminium alloy target, niobium oxide target etc., the molybdenum alloy target that main use molybdenum adds one or more alloying elements and makes in molybdenum is widely used in membrane electrode, film distribution etc. in Slag coating liquid-crystal display (LCD) and touch screen (TP).The alloying element added wherein can be Cr, Hf, Nb, Ta, Ti, V, W etc.In the past, molybdenum alloy target is made into writing board shape mostly.Aluminium alloy target mainly adopts the operational path manufacture difficulty of melting forging binding lower, and niobium oxide target manufacture difficulty the same as molybdenum alloy target is higher, and these targets are progressively to the future development of pipe target.Owing to there is not relative movement with the magnetic field in sputtering equipment, the utilization ratio of this kind of planar targets only has about 30%.This not only causes the waste of target material, also because change the work that target must interrupt sputtering equipment, makes a big impact to production process.
In order to improve the utilization ratio of target, people manufacture more and more and use tubular target (being called for short pipe target), namely target is made tubular shape, actionless magnet is housed inside pipe.In sputter procedure, pipe target rotates, so be also called rotary target material (rotating target/rotary target) with certain speed.Due to rotate pipe target and actionless magnet between there is relative movement, whole pipe target uniformly sputters, and the utilization ratio of target material can up to more than 70%.One-body molded pipe target, particularly uniform composition that liquid-crystal display and touch screen industry need, segregation-free, tiny, the highly purified one-body molded pipe target of crystal grain, extremely lack at present.
Pipe target is made up of pipe and an outer tube in one usually.Outer tube is also target pipe, and its material is the material required for Slag coating film.Interior pipe plays a part to support target pipe, so be also supporting tube or bushing pipe.Known pipe target production method, target pipe is coated to (hot spray process) on bushing pipe by useful thermospray, target pipe is welded to (method for brazing) on bushing pipe by useful solder, has (teeming practice) that directly target pipe be cast on bushing pipe.The pipe target structure that hot spray process is produced is extremely uneven, and containing a large amount of cavities, target material oxidation is serious, can only be used for the less demanding plated film industries such as glass.Method for brazing due to the gap between target pipe and bushing pipe very little, solder is difficult to be evenly distributed in gap, and the comprehensive welding realized between target pipe and bushing pipe acquires a certain degree of difficulty.Teeming practice can only be used for the lower target material of the fusing points such as such as Sn, Zn.
Summary of the invention
The object of this invention is to provide a kind of production method of one-body molded pipe target, one-body molded pipe target uniform composition, the segregation-free of production, crystal grain is tiny, purity is high, can meet liquid-crystal display and touch screen industry requirement.
The production method of one-body molded pipe target of the present invention is that the target material powder elementary composition by target material is placed in jacket, carry out hot isostatic pressing under vacuum and form pipe target, after hot isostatic pressing terminates, outer tube in removing jacket and set collar, for bushing pipe is the base material of target pipe outward in obtaining, namely this base material obtains one-body molded pipe target through machining; Described jacket comprises the set collar at the coaxial inner and outer tubes of setting and the two ends for fixing inner and outer tubes.
Described interior pipe is pipe in 304L stainless steel.
Described interior pipe is nonmagnetic or weak magnetic stainless steel tube.
The outside surface of described interior pipe has electrodeposited chromium layers.The existence of layers of chrome can reduce the mismatch problem of thermal expansivity between target material and stainless steel bushing pipe.
Described outer tube is 304L stainless steel outer tube.
The wall thickness of described outer tube is less than the wall thickness of interior pipe, and the difference of the external diameter of the internal diameter of outer tube and interior pipe is 1-5 times of the thickness of target pipe, and outer tube is welded with extraction pipe in advance.
The temperature of described hot isostatic pressing is 1000-1400 DEG C, and pressure is 100-170MPa, and the time is 1-8 hour.
The relative density of described one-body molded pipe target is 99-100%, and purity is 99.9-99.999%, and median size is 1-100 micron.
Described one-body molded pipe target has bushing pipe and target pipe.
The production method of one-body molded pipe target of the present invention, step is as follows:
(1) target material powder is prepared;
(2) charging and exhaust: welded together one end of inner and outer tubes, make the axis coinciding of two pipes, forms the 1-5 cavity doubly that thickness is the thickness of target pipe between two pipes; Then target material powder is loaded in cavity equably, dress is burn-on in other one end of two pipes after finishing, and the closed at both ends of cavity is lived by two set collars respectively, vacuumize finally by the extraction pipe of prewelding on outer tube, to cavity, vacuum tightness reaches 1.0 × 10
-3-1.0 × 10
-2pa;
(3) hot isostatic pressing: the jacket built with target material powder is placed in hot isostatic apparatus, carries out hot isostatic pressing;
(4) machining: by the outer tube in jacket and two fixing seal ring removings is bushing pipe in obtaining is the base material of target pipe outward, and this base material is machined to and obtains one-body molded pipe target.
Preparation target material powder process described in step (1) is carried out by target material element powders mixing, suppresses, sinters, obtained initial blank, then initial blank pulverized and obtain target material powder.The object of preparation target material powder be in order to avoid or the difference that reduces due to the density between several target material element powders particle and size and the segregation phenomena that may occur.
In cavity described in step (2), vacuum tightness reaches 1.0 × 10
-3-1.0 × 10
-2after Pa, can also argon gas be filled with, then be evacuated to 1.0 × 10
-3-1.0 × 10
-2pa, then puts into process furnace by whole jacket, with the ramp of 80-120 DEG C/h to 600-900 DEG C, in temperature-rise period, continues to bleed, and keeps cavity internal pressure to be 1.0 × 10
-3-1.0 × 10
-2pa, insulation 1-4h, keeps cavity internal pressure to be 1.0 × 10
-3-1.0 × 10
-2pa, is finally welded bleeding point sealing.
The wall thickness of 304L stainless steel outer tube is less than the wall thickness of pipe in 304L stainless steel, is generally advisable with 1-3mm., there is necessary distortion in the 304L steel pipe that intensity is lower, tube wall is thinner, the pipe target material for acquisition high-compactness is favourable in hot isostatic pressing.And the stainless steel tube that intensity is higher, tube wall is thicker, do not occur in hot isostatic pressing or deform less, can use as bushing pipe after machining.
The pressure of hot isostatic pressing is more high more easily obtains high density, considers that the design effort pressure of most of hot isostatic apparatus is 170MPa, so the present invention preferably makes hot isostatic pressing carry out under pressure 170MPa.
The production method of one-body molded pipe target of the present invention, concrete steps are as follows:
(1) target material powder preparation: by mixing, suppress preparation initial blank to target material powder.The object of preparation target material powder be in order to avoid or reduce the segregation phenomena that when filling with substance may occur due to the difference of the density between main body powder particles and alloying element powder particle and size.
(2) making of jacket: (a) chooses one ruler cun (internal diameter, external diameter and length) and be suitable as the stainless steel tube of the non-magnetic of tubular target bushing pipe or weak magnetic and carry out necessary process to its surface, comprises sandblasting, pickling, plating etc.Stainless steel tube that is non-magnetic or weak magnetic is selected to be to allow magnetic line of force can penetration tube target to greatest extent.Sandblasting is mainly in order to remove the dirt settling on surface.After pickling degreasing, plating chromium plating is carried out to stainless steel tube outside surface.The object of chromium plating is mainly in order to reduce the mismatch of thermal expansivity between target material target pipe and stainless steel bushing pipe.B () chooses the 304L thin-wall steel tube that an internal diameter d2 is greater than stainless steel tube outside diameter d 1, make d2-d1>2t, wherein t is the wall thickness of pipe target, d2-d1 is greater than 2t and still reserves enough process redundancy after ensureing sintering shrinkage, usually, d2-d1=(2.1-2.3) t can be got.The wall thickness of 304L thin-wall steel tube is less than the wall thickness of stainless steel tube, is generally advisable with 1-3mm., there is necessary distortion in the 304L steel pipe that intensity is lower, tube wall is thinner, the pipe target material for acquisition high-compactness is favourable in hot isostatic pressing.To 304L thin-wall steel tube, particularly its inwall, takes the method for pickling to carry out necessary cleaning, to remove the iron scale and other dirt that may pollute target.C stainless steel tube and 304L steel pipe are at one end welded together by a set collar by (), make the axis coinciding of two pipes, between two pipes, form thickness is the space being greater than t, and stays the other end to open wide to form the one tubular sheath that can be held metal-powder.
(3) charging and exhaust: by the open end of one tubular sheath, load target material powder as far as possible equably, this obtains the uniform target blank of density distribution after being conducive to hot isostatic pressing.Afterwards, burn-on at open end that (Fig. 1 is the schematic diagram of the present invention's jacket used to another set collar, therefrom visible, is formed with a cavity 3 in 304L stainless steel between pipe 1 and 304L stainless steel outer tube 2, and namely target material powder is loaded in this cavity 3.In 304L stainless steel, the two ends of pipe 1 and 304L stainless steel outer tube 2 are fixed by set collar 4, and set collar 4 is by the end-enclosed of cavity 3, the outer reserved extraction pipe 5 of 304L stainless steel outer tube 2), then by extraction pipe 5, vacuum tightness in cavity 3 is evacuated to 10
-2pa or following, is then filled with Ar gas, then is evacuated to 10
-2pa or following.Then whole jacket is put into process furnace, be warming up to 600 DEG C-900 DEG C with the speed of 100 DEG C/h, in temperature-rise period, continue to bleed, keep jacket internal pressure to be 10
-1pa or following.Insulation 1-8h, continues to bleed, and keeps jacket internal pressure to be 10
-2pa or following.Finally, bleeding point sealing is welded.
(4) hot isostatic pressing: hot isostatic pressing is carried out to prepare target material to the target material powder be sealed in jacket.The hip temperature of metallic substance is generally 0.3-0.7Tm, and Tm is the fusing point of metallic substance.Be 750-1500 DEG C to this temperature range of most molybdenum alloy material, be 800-1200 DEG C for this temperature range of niobium oxides material, it is 1000-1400 DEG C that the present invention gets hip temperature, because lower than 1000 DEG C, the blank density obtained is lower, then too near apart from the fusing point of stainless steel bushing pipe higher than 1400 DEG C, easily make it larger distortion occurs.If the distortion of stainless steel bushing pipe is too large, follow-up machining steps can be had a strong impact on.Hot isostatic pressing pressure is generally not less than 100MPa, and the present invention gets 170MPa, because pressure is more high more easily obtain high density, and the design effort pressure of most of hot isostatic apparatus is 170MPa.Heat-insulation pressure keeping time the present invention of hot isostatic pressing gets 1-8 hour.Time is too short, and what can not ensure between powder particle is fully sintered; Time is oversize, then excessive grain can be made to grow up.Both damage target quality.
(5) machining: 304L stainless steel outer tube and two set collars of removing jacket, be machined to pipe target finished product by pipe in target material and jacket.Wherein in jacket, pipe (i.e. stainless steel tube) serves the effect of bushing pipe.
The present invention compared with prior art, has following beneficial effect:
The present invention successfully utilizes hot isostatic pressing method to produce one-body molded pipe target, and gained one-body molded pipe target uniform composition, without visible segregation, combine closely between target pipe and bushing pipe, crystal grain is tiny, purity is high, can meet liquid-crystal display and touch screen industry requirement.
Accompanying drawing explanation
Fig. 1 is the structural representation of jacket of the present invention;
Fig. 2 is the metallographic structure photo of the Mo-10%Nb molybdenum alloy target pipe of embodiment 1;
Fig. 3 is the metallographic structure photo of the NbOx target pipe of embodiment 2;
In figure: 1, interior pipe; 2, outer tube; 3, set collar; 4, the face of weld of set collar and interior pipe; 5, the face of weld of set collar and outer tube; 6, cavity; 7, extraction pipe; 8, gas-filled valve.
Embodiment
Below in conjunction with embodiment, the present invention is described further.
Embodiment 1
The present embodiment provides a kind of Mo-10 quality %Nb production method of one-body molded pipe target, and concrete steps are as follows:
Take the molybdenum powder that 22.5 kilograms of purity are 99.95%, mean particle size is 10 microns; Take 2.5kg, purity is 99.9%, mean particle size is the metal Nb powder of 50 microns; Jointly put into three-dimensional motion and mix the mixed powder of powder machine 4 hours.The powder mixed is put into mould, and be at room temperature pressed into hydropress the pipe that size is approximately ID133*OD170*400mm, relative density is about 60%.By in the cavity of the jacket shown in pipe load map 1, after air extracting seal, carry out hot isostatic pressing (hot isostatic pressing parameter is 1250 DEG C, 160MPa, 2 hours) and obtain base material.Target is machined to pipe target finished product again.The long 1050mm of this pipe target finished product, bushing pipe external diameter 133mm, its thickness is 9mm.As shown in Figure 2, particle size 10-50 micron, is evenly distributed in metal molybdenum matrix, and metal niobium granular size is 10-50 micron, and target relative density is 99.5%, and target purity is 99.98% in the metallographic structure of the target pipe of this pipe target.
Embodiment 2
The present embodiment provides a kind of Nb
2o
5the production method of the one-body molded pipe target of-5 quality %Nb, concrete steps are as follows:
Take the Nb that 23.75 kilograms of purity are 99.995%, mean particle size is 10 microns
2o
5powder; Take 1.25kg, purity is 99.9%, mean particle size is the metal Nb powder of 50 microns; Jointly put into three-dimensional motion and mix the mixed powder of powder machine 8 hours.The powder mixed is put into mould, and be at room temperature pressed into hydropress the pipe that size is approximately ID133*OD170*400mm, relative density is about 60%.By in the cavity of the jacket shown in pipe load map 1, after air extracting seal, carry out hot isostatic pressing (hot isostatic pressing parameter is 1000 DEG C, 150MPa, 2 hours) and obtain base material.Target is machined to pipe target finished product again.The long 1050mm of this pipe target finished product, bushing pipe external diameter 133mm, its thickness is 9mm.As shown in Figure 3, particle size 10-50 micron, is evenly distributed in metal molybdenum matrix, and metal niobium granular size is 10-50 micron, and target relative density is 99.6%, and target purity is 99.998% in the metallographic structure of the target pipe of this pipe target.
Embodiment 3
The present embodiment provides a kind of Mo-5 quality %Nb-3 atom %Ta production method of one-body molded pipe target, and concrete steps are as follows:
Take the molybdenum powder that 23.25 kilograms of purity are 99.95%, mean particle size is 11 microns; Take 1.25kg, purity is 99.9%, mean particle size is the metal Nb powder of 45 microns; Take 0.75kg, purity is 99.999%, mean particle size is the metal Ta powder of 40 microns; Jointly put into three-dimensional motion and mix the mixed powder of powder machine 6 hours.The powder mixed is put into mould, and be at room temperature pressed into hydropress the pipe that size is approximately ID133*OD170*400mm, relative density is about 60%.By in the cavity of the jacket shown in pipe load map 1, after air extracting seal, carry out hot isostatic pressing (hot isostatic pressing parameter is 1250 DEG C, 170MPa, 2 hours) and obtain base material.Target is machined to pipe target finished product again.The long 1050mm of this pipe target finished product, bushing pipe external diameter 133mm, its thickness is 9mm.The particle size 10-50 micron of this pipe target, is evenly distributed in metal molybdenum matrix, and metal niobium, metal tantalum granular size are 10-50 micron, and target relative density is 99.6%, and target purity is 99.99%.
Claims (10)
1. the production method of an one-body molded pipe target, the target material powder elementary composition by target material is it is characterized in that to be placed in jacket, carry out hot isostatic pressing under vacuum and form pipe target, after hot isostatic pressing terminates, outer tube in removing jacket and set collar, for bushing pipe is the base material of target pipe outward in obtaining, namely this base material obtains one-body molded pipe target through machining; Described jacket comprises the set collar at the coaxial inner and outer tubes of setting and the two ends for fixing inner and outer tubes.
2. the production method of one-body molded pipe target according to claim 1, is characterized in that described interior pipe is pipe in 304L stainless steel.
3. the production method of one-body molded pipe target according to claim 1, is characterized in that the outside surface of described interior pipe has electrodeposited chromium layers.
4. the production method of one-body molded pipe target according to claim 1, is characterized in that described outer tube is 304L stainless steel outer tube.
5. the production method of one-body molded pipe target according to claim 1, is characterized in that the wall thickness of described outer tube is less than the wall thickness of interior pipe, and the difference of the external diameter of the internal diameter of outer tube and interior pipe is 1-5 times of the thickness of target pipe, and outer tube is welded with extraction pipe in advance.
6. the production method of one-body molded pipe target according to claim 1, it is characterized in that the temperature of described hot isostatic pressing is 1000-1400 DEG C, pressure is 100-170MPa, and the time is 1-8 hour.
7. the production method of one-body molded pipe target according to claim 1, it is characterized in that the relative density of described one-body molded pipe target is 99-100%, purity is 99.9-99.999%, and median size is 1-100 micron.
8., according to the production method of the arbitrary described one-body molded pipe target of claim 1-7, it is characterized in that step is as follows:
(1) target material powder is prepared;
(2) charging and exhaust: welded together one end of inner and outer tubes, make the axis coinciding of two pipes, forms the 1-5 cavity doubly that thickness is the thickness of target pipe between two pipes; Then target material powder is loaded in cavity equably, dress is burn-on in other one end of two pipes after finishing, and the closed at both ends of cavity is lived by two set collars respectively, vacuumize finally by the extraction pipe of prewelding on outer tube, to cavity, vacuum tightness reaches 1.0 × 10
-3-1.0 × 10
-2pa;
(3) hot isostatic pressing: the jacket built with target material powder is placed in hot isostatic apparatus, carries out hot isostatic pressing;
(4) machining: by the outer tube in jacket and two fixing seal ring removings is bushing pipe in obtaining is the base material of target pipe outward, and this base material is machined to and obtains one-body molded pipe target.
9. the production method of one-body molded pipe target according to claim 8, it is characterized in that the preparation target material powder process described in step (1) is carried out by target material element powders mixing, suppresses, sinters, obtained initial blank, then initial blank is pulverized and obtains target material powder.
10. the production method of one-body molded pipe target according to claim 8, is characterized in that in the cavity described in step (2), vacuum tightness reaches 1.0 × 10
-3-1.0 × 10
-2after Pa, can also argon gas be filled with, then be evacuated to 1.0 × 10
-3-1.0 × 10
-2pa, then puts into process furnace by whole jacket, with the ramp of 80-120 DEG C/h to 600-900 DEG C, in temperature-rise period, continues to bleed, and keeps cavity internal pressure to be 1.0 × 10
-3-1.0 × 10
-2pa, insulation 1-4h, keeps cavity internal pressure to be 1.0 × 10
-3-1.0 × 10
-2pa, is finally welded bleeding point sealing.
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|---|---|---|---|
| CN201410841972.3A CN104480437A (en) | 2014-12-30 | 2014-12-30 | Production method for integrally formed cylindrical target |
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|---|---|---|---|
| CN201410841972.3A CN104480437A (en) | 2014-12-30 | 2014-12-30 | Production method for integrally formed cylindrical target |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104831245A (en) * | 2015-05-29 | 2015-08-12 | 西北有色金属研究院 | Hot isostatic pressing production method of tubular molybdenum alloy sputtering target |
| CN104889398A (en) * | 2015-05-15 | 2015-09-09 | 安泰科技股份有限公司 | Anti-abrasion anti-etching alloy rod production method through powder metallurgy process |
| CN105817627A (en) * | 2016-03-28 | 2016-08-03 | 航天材料及工艺研究所 | Preparation method for integrally-formed tungsten tube target material with large length-to-diameter ratio |
| CN106541249A (en) * | 2015-09-17 | 2017-03-29 | 宁波江丰电子材料股份有限公司 | The manufacture method of target material assembly |
| CN106676484A (en) * | 2015-11-10 | 2017-05-17 | 航天长征睿特科技有限公司 | Binding method of chrome pipe target material |
| CN107385399A (en) * | 2017-07-25 | 2017-11-24 | 北京兴荣源科技有限公司 | A kind of pressing method of vanadium pipe target |
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| CN109972100A (en) * | 2019-05-13 | 2019-07-05 | 无锡飞而康新材料科技有限公司 | A kind of preparation method of tubulose chromium target |
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| CN112743075A (en) * | 2020-12-29 | 2021-05-04 | 宁波江丰电子材料股份有限公司 | Binding method of tubular target |
| CN112981342A (en) * | 2021-02-04 | 2021-06-18 | 山东昊轩电子陶瓷材料有限公司 | Production process of integrally-formed tube target |
| CN113463047A (en) * | 2021-08-18 | 2021-10-01 | 广东先导稀材股份有限公司 | Electronic auxiliary device of target preparation |
| CN114433842A (en) * | 2022-03-03 | 2022-05-06 | 宁波江丰热等静压技术有限公司 | Sheath for hot isostatic pressing |
| CN115488333A (en) * | 2022-09-27 | 2022-12-20 | 宁波江丰电子材料股份有限公司 | Molybdenum-titanium alloy tube target and preparation method and application thereof |
| CN115874155A (en) * | 2021-09-29 | 2023-03-31 | 有研稀土新材料股份有限公司 | Rare earth rotary target material and preparation method and application thereof |
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