[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

CN104451871A - Method of improving quality of polysilicon material - Google Patents

Method of improving quality of polysilicon material Download PDF

Info

Publication number
CN104451871A
CN104451871A CN201410202285.7A CN201410202285A CN104451871A CN 104451871 A CN104451871 A CN 104451871A CN 201410202285 A CN201410202285 A CN 201410202285A CN 104451871 A CN104451871 A CN 104451871A
Authority
CN
China
Prior art keywords
acid
polycrystalline silicon
silicon material
silicon
polysilicon materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410202285.7A
Other languages
Chinese (zh)
Inventor
彭小勤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZHEJIANG YIHONG OPTOELECTRONICS TECHNOLOGY Co Ltd
Original Assignee
ZHEJIANG YIHONG OPTOELECTRONICS TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZHEJIANG YIHONG OPTOELECTRONICS TECHNOLOGY Co Ltd filed Critical ZHEJIANG YIHONG OPTOELECTRONICS TECHNOLOGY Co Ltd
Priority to CN201410202285.7A priority Critical patent/CN104451871A/en
Publication of CN104451871A publication Critical patent/CN104451871A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B28/00Production of homogeneous polycrystalline material with defined structure
    • C30B28/04Production of homogeneous polycrystalline material with defined structure from liquids
    • C30B28/06Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/08Etching
    • C30B33/10Etching in solutions or melts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

The invention discloses a method of improving the quality of a polysilicon material. The method comprises the following steps: putting a plurality of polished polysilicon materials in an acid and alkali resistance soaking vessel, separating every two adjacent polysilicon materials by a spacer bar, then pouring hydrofluoric acid, and slowly pouring nitric acid after all the polysilicon materials are immersed by the acid liquid, so that the internal impurities of the polysilicon materials are reacted in the mixed acid liquid, and discharged through induction; and after reaction is finished, taking out the polysilicon materials, brushing, then soaking the polysilicon materials into the mixed acid liquid which is used in normal acid pickling for 1-2h, then taking out again, and brushing for standby. According to the method disclosed by the invention, polished silicon mixtures are corroded by strong acid so that the internal impurities of the silicon mixtures are discharged from internal gaps under induction when the strong acid is reacted with the silicon mixtures, and then the silicon mixtures are brushed to eliminate the internal impurities, so that the impurities in the silicon mixtures are controlled, the crystallization ratio of ingot and the growth success rate of silicon crystal are increased, and the quality of the silicon crystal is obviously improved.

Description

A kind of method promoting polycrystalline silicon material quality
Technical field
The present invention relates to sun power crystalline silicon manufacturing technology field, particularly a kind of method improving polycrystalline silicon material quality.
Background technology
Silicon single-crystal and policrystalline silicon are the most frequently used materials of crystal silicon solar energy battery, and the polysilicon material source used in solar battery casting ingot needs to carry out removal of impurities process, and the general impurity removal process of silicon material epidermis is: first sandblasting and polishing, after carry out pickling.But ingot casting finished product is not high through the rate of being up to the standards, found by research, silicon material outward appearance after pickling impurity removal seems clean inclusion-free, smooth finish is better, the more inner impurity of silico briquette are not also got rid of external in acid cleaning process in fact, trace it to its cause, that silicon material is of short duration with the reaction times after sour contact, outside surface slight oxidation or some dirty impurity on surface can be removed, be difficult to remove to the more inner darker impurity of silicon material, such as polycrystalline flaw-piece, T1 expects, expect end to end, the glue trace existed in scrap stock, graphite, silicon carbide, the impurity such as metal-powder, all do not dispose, and these are all have influence on resistance in ingot casting process, few son, yield rate, therefore the present invention is devoted to carry out profound impurities removal process to the various material sources of the polysilicon used in large-scale ingot casting, its impurities removal effect is made to play better, thus improve its quality and degree of cleaning.
Summary of the invention
The present invention is directed to the technical problem existed in above-mentioned prior art, provide and a kind ofly can remove the impurity existed in polycrystalline silicon material as much as possible, to improve silicon material after ingot casting as effect during silicon crystal solar cell raw material, improve crystal forming rate and the turnover ratio of its product, strengthen the cleanliness factor of silicon material.
Technical scheme of the present invention is achieved in that
A kind of method promoting polycrystalline silicon material quality, step is as follows: in acid and alkali-resistance soaking container, put into the polycrystalline silicon material that polylith was polished, separate with parting bead between two pieces of adjacent polycrystalline silicon materials, then hydrofluoric acid is poured into, when acid solution submergence all polycrystalline silicon materials, slowly pour nitric acid into again, the inside impurity of polycrystalline silicon material is reacted in mix acid liquor, induction is taken out of external; After question response, taken out by polycrystalline silicon material and scrub, then the mix acid liquor putting into normal pickling soaks 1 ~ 2 hour, rear taking-up is scrubbed for subsequent use again.
As preferably, described acid and alkali-resistance soaking container is PVC soaking barrel, and parting bead is plastic strip.
As preferably, the volume proportion of hydrofluoric acid and nitric acid is 1:1, and each consumption of nitric acid is 300 ~ 400ml.Because make the reaction of generation larger pour the nitric acid of same equal portions into by 1:1 after, more difficult when processing acid mist, add that silicon material is relatively violent with the reaction of acid, silicon material itself there will be the darker phenomenon of crackle, thus each plant demand of nitric acid to control the effect when 300 ~ 400ml better at every turn.
Have employed the invention has the beneficial effects as follows of technique scheme:
Silicon material strong acid after polishing corrodes by the present invention, makes to discharge from internal voids under the induction of impurity when strong acid and silicon material react in its body, then carries out scrubbing removing; Thus achieve the control of impurity in silicon material, what be conducive to the crystal forming rate of ingot casting and silicon crystal grows into power, and crystal quality is significantly improved.
Embodiment
The specific embodiment of the present invention is as follows:
Embodiment: a kind of method promoting polycrystalline silicon material quality, step is as follows: in PVC soaking barrel, put into the polycrystalline silicon material that polylith was polished, separate with plastic strip between two pieces of adjacent polycrystalline silicon materials, then technical grade hydrofluoric acid is poured into, when hydroflouric acid immersion does not have all polycrystalline silicon materials, more slowly pour the nitric acid of 300 ~ 400ml into, the inside impurity of polycrystalline silicon material is reacted in mix acid liquor, induction is taken out of external, has white smoke occur when reacting; After question response, above-mentioned mix acid liquor is released and waits for second stage employ, polycrystalline silicon material is taken out simultaneously and scrub, the carbon block hammer being exposed at appearance for some is cleaned out, mix acid liquor and the spent acid solution of putting into normal pickling again soak 1 ~ 2 hour, and rear taking-up is scrubbed for subsequent use again.
Adopt the various material sources of aforesaid method to polysilicon to carry out profound impurities removal process, make its impurities removal effect play better, thus improve its quality and degree of cleaning.

Claims (4)

1. one kind promotes the method for polycrystalline silicon material quality, it is characterized in that step is as follows: in acid and alkali-resistance soaking container, put into the polycrystalline silicon material that polylith was polished, separate with parting bead between two pieces of adjacent polycrystalline silicon materials, then hydrofluoric acid is poured into, when acid solution submergence all polycrystalline silicon materials, slowly pour nitric acid into again, the inside impurity of polycrystalline silicon material is reacted in mix acid liquor, induction is taken out of external; After question response, taken out by polycrystalline silicon material and scrub, then the mix acid liquor putting into normal pickling soaks 1 ~ 2 hour, rear taking-up is scrubbed for subsequent use again.
2. a kind of method promoting polycrystalline silicon material quality according to claim 1, it is characterized in that: described acid and alkali-resistance soaking container is PVC soaking barrel, parting bead is plastic strip.
3. a kind of method promoting polycrystalline silicon material quality according to claim 1, is characterized in that: the volume proportion of hydrofluoric acid and nitric acid is 1:1, and each consumption of nitric acid is 300 ~ 400ml.
4. a kind of method promoting polycrystalline silicon material quality according to claim 1, is characterized in that: when the complete white smoke referring to that reaction produces of described reaction disappears.
CN201410202285.7A 2014-05-14 2014-05-14 Method of improving quality of polysilicon material Pending CN104451871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410202285.7A CN104451871A (en) 2014-05-14 2014-05-14 Method of improving quality of polysilicon material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410202285.7A CN104451871A (en) 2014-05-14 2014-05-14 Method of improving quality of polysilicon material

Publications (1)

Publication Number Publication Date
CN104451871A true CN104451871A (en) 2015-03-25

Family

ID=52898597

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410202285.7A Pending CN104451871A (en) 2014-05-14 2014-05-14 Method of improving quality of polysilicon material

Country Status (1)

Country Link
CN (1) CN104451871A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106365170A (en) * 2016-08-25 2017-02-01 泗阳瑞泰光伏材料有限公司 Method of removing impurities from silicon ingot circulating material
CN107572533A (en) * 2017-09-07 2018-01-12 晶科能源有限公司 The minimizing technology of impurity in a kind of silicon material flaw-piece
CN109137065A (en) * 2018-10-24 2019-01-04 镇江环太硅科技有限公司 One kind is for the silicon material recovery and treatment method that gives up

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080069756A1 (en) * 2005-01-27 2008-03-20 Fumitaka Kume Preferential Etching Method and Silicon Single Crystal Substrate
CN101974785A (en) * 2010-11-03 2011-02-16 天津市环欧半导体材料技术有限公司 Cleaning method of policrystalline silicon raw material
CN102295289A (en) * 2011-06-01 2011-12-28 宁夏银星多晶硅有限责任公司 Hydrometallurgical purification process of metal impurities in metallurgical polysilicon
CN102502652A (en) * 2011-11-07 2012-06-20 江西旭阳雷迪高科技股份有限公司 Cleaning process for polycrystalline material

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080069756A1 (en) * 2005-01-27 2008-03-20 Fumitaka Kume Preferential Etching Method and Silicon Single Crystal Substrate
CN101974785A (en) * 2010-11-03 2011-02-16 天津市环欧半导体材料技术有限公司 Cleaning method of policrystalline silicon raw material
CN102295289A (en) * 2011-06-01 2011-12-28 宁夏银星多晶硅有限责任公司 Hydrometallurgical purification process of metal impurities in metallurgical polysilicon
CN102502652A (en) * 2011-11-07 2012-06-20 江西旭阳雷迪高科技股份有限公司 Cleaning process for polycrystalline material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106365170A (en) * 2016-08-25 2017-02-01 泗阳瑞泰光伏材料有限公司 Method of removing impurities from silicon ingot circulating material
CN107572533A (en) * 2017-09-07 2018-01-12 晶科能源有限公司 The minimizing technology of impurity in a kind of silicon material flaw-piece
CN109137065A (en) * 2018-10-24 2019-01-04 镇江环太硅科技有限公司 One kind is for the silicon material recovery and treatment method that gives up

Similar Documents

Publication Publication Date Title
CN101481824B (en) Method for cleaning polycrystal carbon head material
CN102306687B (en) Crystalline silica solar energy cell PECVD rainbow film reworking method
CN103151423A (en) Texturing and cleaning process method of polysilicon wafer
CN101695697A (en) Method for cleaning metallurgical silicon material
CN102757050B (en) Acid cleaning purification method of metallic silicon
CN104451871A (en) Method of improving quality of polysilicon material
CN102151669B (en) Processing method of coating film crushed materials of solar silicon cell
CN106115715A (en) Polycrystalline silicon ingot casting partly melts the circulation tailing cleaning treatment method that technique produces
CN104226647B (en) A kind of annealing silk peeling apparatus
CN114308814B (en) Method for cleaning graphite boat
CN102092716A (en) Silicon material cleaning method
CN103681239B (en) A kind of method cleaning monocrystalline silicon sheet surface
CN102698983A (en) Cleaning method for solar energy level silicon slice
CN103170467A (en) Ingot casting circulation material cleaning and treating method
CN101891259B (en) New process for recycling pickling waste liquid
CN101498055A (en) Polishing treatment method for solar grade monocrystal silicon bar
CN105948060B (en) The acid stripping method of acid-washed quartz sand
CN101362601A (en) Purification processing method of casting ingot cleaved bark slat and head material
CN106315525A (en) Cubic boron nitride purification process
CN205275782U (en) Processing system who contains silicon nitride silicon material
CN202400960U (en) Chemical toughened glass production system
CN101362602A (en) Purification processing method for drawing casting ingot cleaved bark slat and head material
CN207220100U (en) A kind of automatic cleaning hair removing apparatus of wild peach
CN101367523A (en) Acid washing method for polysilicon of flaw-piece and head material of casting ingot
CN101979318A (en) Polycrystalline carbon head material processing method

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20150325

RJ01 Rejection of invention patent application after publication