CN104451579A - High-low voltage conversion device for magnetron sputtering - Google Patents
High-low voltage conversion device for magnetron sputtering Download PDFInfo
- Publication number
- CN104451579A CN104451579A CN201410652562.4A CN201410652562A CN104451579A CN 104451579 A CN104451579 A CN 104451579A CN 201410652562 A CN201410652562 A CN 201410652562A CN 104451579 A CN104451579 A CN 104451579A
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- China
- Prior art keywords
- electrode
- sensor
- rotating shaft
- voltage conversion
- bias voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 25
- 238000001755 magnetron sputter deposition Methods 0.000 title abstract description 7
- 239000003990 capacitor Substances 0.000 claims description 3
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 6
- 238000009413 insulation Methods 0.000 abstract description 3
- 230000006698 induction Effects 0.000 abstract 3
- 239000007888 film coating Substances 0.000 abstract 1
- 238000009501 film coating Methods 0.000 abstract 1
- 206010014357 Electric shock Diseases 0.000 description 4
- 230000007704 transition Effects 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a high-low voltage conversion device which comprises an insulating support frame, an input part, an output part, a sensor induction device, a pneumatic bouncing device, a rotating shaft and a rotating system, wherein the electrodes of the input part and the output part are fixed on the insulating support frame, and the fixed electrode of the output part is connected with the rotating shaft of the rotating system together; and the rotating shaft drives a sensor induction plate to rotate on the path of the sensor induction device, is controlled by a sensor to stop rotation, and the integral rotating system is bounced by the pneumatic bouncing device to connect the input electrode and the output electrode, so that a switch function is achieved. The high-low voltage conversion device disclosed by the invention meets the requirement for multi-time bias voltage conversion in a magnetron sputtering film coating process. Compared with the traditional similar device, the high-low voltage conversion device disclosed by the invention is safer and more reliable in voltage conversion, can realize the switch with high-voltage insulation and 40-50 kV high-voltage impact characteristics and is provided with an automatic control system merged into a magnetron sputtering total control system.
Description
Technical field
The present invention relates to a kind of high/low pressure conversion device being used in magnetic control sputtering vacuum coating field, can realize meeting the requirement using different bias voltage in coating process, and the high pressure Danger Electric shock risk in high-low pressure switching process can be reduced.
Background technology
Need in magnetron sputtering process to use multiple bias, due to the frequent transitions of bias voltage, often need manually electrode to be changed, this is by the complicate of magnetron sputtering, simultaneously due to frequent transitions electrode meeting stored charge, also can increase the danger of electric shock, the person is damaged.Moreover be mostly for transfer lever herein the external switch that Non-follow control electrode is changed at present, although had certain guarantee to operator, or use switches this high pressure manually, and danger still exists.So further on-off control is merged into computer system, by conputer controlled, and by the material parcel of high/low pressure conversion device with high insulation, use pneumatics carries out the switch Closed control between electrode simultaneously, Danger Electric shock risk can be reduced to minimum.
Summary of the invention
The present invention is the difficult problem in order to overcome the convenient and safe conversion of bias voltage in vacuum plating process, provides a kind of safe and reliable high/low pressure conversion device.
To achieve these goals, the present invention adopts following technical proposals:
A kind of high/low pressure conversion device, described device comprises insulating support, importation, output, sensor sensing device, pneumatic bomb lifting device, rotating shaft and rotation system; Fix the electrode of described importation and described output above described insulating support, the fixed electorde of described output and the rotating shaft of described rotation system link together; Described rotating shaft drives catch to rotate on the path of described sensor sensing device, is controlled to stop operating by sensor, to be upspring whole described rotation system, input and output are connected, thus realizes Electrode connection function by described pneumatics.
Further, described rotation system comprises movable electrode, movable isolator, Z axis foundation plate, sensor sensing plate, sensor composition, permanent-split capacitor motor.
Further, described asynchronous motor drives the rotation of described movable electrode and described sensor sensing plate.
Further, the rotation of described rotation system is by described sensor and sensor sensing baffle controls.
Further, the electrode of described importation comprises: conventional bias voltage, ground connection a, special bias voltage, ground connection b, superelevation bias voltage five electrodes.
Further, described pneumatic bomb lifting device controls the connection of the electrode of described movable electrode and described input system.
Further, described electrode major part is covered by the tetrafluoroethylene insulated, and when described fixed electorde contacts with described movable electrode, contact site is invisible is also the position not easily contacted.
Further, the control of described high/low pressure conversion device is by conputer controlled.
The object of the invention is to the conversion avoiding Non-follow control high-low pressure, prevent from getting an electric shock, realize the requirement of multiple conversions bias voltage in magnetic control sputtering vacuum coating process.Compare with existing allied equipment, the voltage transitions of this device is more safe and reliable, can realize the switch of High-Voltage Insulation and 40-50kV impacting with high pressure characteristic, and be designed with automatic control system, and be merged in magnetron sputtering general control system.
Accompanying drawing explanation
Fig. 1 is the structural design drawing of high/low pressure conversion device of the present invention.
Wherein, 1 is fixed electorde, belongs to output system, and 2 is the electrode of input system, 3 is rotating shaft, and 4 is movable isolator, and 5 is Z axis foundation plate, and 6 is sensor sensing plate, 7 is sensor, and 8 is pneumatic bomb lifting device, and 9 is permanent-split capacitor motor, and 10 is movable electrode.
Fig. 2 is the structural representation of high/low pressure conversion device of the present invention.
Wherein 2 is the electrode of input system, and 10 is movable electrode, and 11 is importation, comprising conventional bias voltage, ground connection a, special bias voltage, ground connection b, superelevation bias voltage five electrodes, 12 is the bias electrode in vacuum chamber, and 13 is vacuum chamber, and 14 is rotation system and pneumatic system and device, 15 is whole high/low pressure conversion device, i.e. device as shown in Figure 1.
Embodiment
Elaborate below in conjunction with the embodiment of accompanying drawing to high/low pressure conversion device disclosed by the invention.
As shown in Figure 1, high/low pressure conversion device disclosed by the invention mainly comprises insulating support, importation, output, rotating shaft and movable electrode combined system, sensor sensing system.The electrode of importation and output is fixed above insulating support, fixed electorde and the rotating shaft of output link together, rotating shaft drives catch to rotate on the path of sensor, the position stopped operating is controlled by sensor, to be upspring whole movable electrode combination unit by pneumatics, make input and output Electrode connection, thus make circuit communication, realize switching function.
Particularly, conputer controlled asynchronous motor 9 rotates, drive movable electrode 10 and inductor block tablet 6, when inductor block tablet 6 stops to sensor location corresponding to computer instruction, asynchronous motor 9 stops operating, pneumatic bounce device 8 drives rotation combination (10,4,6,9) to be connected to by movable electrode 10 on the position of input system electrode 2, and so input system electrode 2 is communicated with output system fixed electorde 1, thus plays the closed effect of switch.The electrode of input system has five parts, comprises conventional bias voltage respectively, ground connection a, special bias voltage, ground connection b, superelevation bias voltage five electrodes.Described pneumatic bomb lifting device controls the connection of the electrode of described movable electrode and described input system.Described electrode major part is covered by the tetrafluoroethylene insulated, and when described fixed electorde contacts with described movable electrode, contact site is invisible is also the position not easily contacted, to guarantee the mutually insulated between electrode.The control of described high/low pressure conversion device can have been come by computer, to ensure the safety of operator.
When carrying out high-low pressure conversion on computers, as shown in Figure 2, only need to click corresponding bias voltage on computers, computer can control 14 rotation systems and start up system device carries out bias voltage conversion work, such as want to be switched to superelevation bias voltage from conventional bias voltage, click superelevation bias voltage on computers, movable electrode controls by pneumatics the electrode position ejecting conventional bias voltage, and rotate under the drive of rotation system, through ground connection a, special bias voltage, ground connection b, stop at the electrode position that superelevation bias voltage is corresponding, and by pneumatics upspring connect super high bias electrode.If want discharge accumulation electric charge, ground connection a or ground connection b can be clicked, by aforesaid method by Electrode connection to ground connection a or ground connection b, discharge electric charge.
The foregoing is only the preferred embodiments of the present invention, the numerical value mentioned in the description of above-mentioned specification sheets and numerical range are not limited to the present invention, just for the invention provides preferred embodiment, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. a high/low pressure conversion device, described device comprises insulating support, importation, output, sensor sensing device, pneumatic bomb lifting device, rotating shaft and rotation system; Fix the electrode of described importation and described output above described insulating support, the fixed electorde of described output and the rotating shaft of described rotation system link together; Described rotating shaft drives sensor sensing plate to rotate on the path of described sensor sensing device, is controlled to stop operating by sensor, to be upspring whole described rotation system, input and output are connected, thus realizes high-low pressure handoff functionality by described pneumatics.
2. device according to claim 1, is characterized in that, described rotation system comprises movable electrode, movable isolator, Z axis foundation plate, sensor sensing plate, sensor composition, permanent-split capacitor motor.
3. device according to claim 2, is characterized in that, described asynchronous motor drives the rotation of described movable electrode, movable isolator and described sensor sensing plate.
4. device according to claim 3, is characterized in that, the rotation of described rotation system is by described sensor and sensor sensing baffle controls.
5. device according to claim 1 and 2, is characterized in that, the electrode of described importation comprises: conventional bias voltage, ground connection a, special bias voltage, ground connection b, superelevation bias voltage five electrodes.
6. device according to claim 1 and 2, is characterized in that, described pneumatic bomb lifting device controls the connection of the fixed electorde of described movable electrode and described input system.
7. device according to claim 1 and 2, is characterized in that, described electrode major part is covered by the tetrafluoroethylene insulated, and when described fixed electorde contacts with described movable electrode, contact site is invisible is also the position not easily contacted.
8. device according to claim 1 and 2, is characterized in that, the control of described high/low pressure conversion device can by conputer controlled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410652562.4A CN104451579B (en) | 2014-11-17 | 2014-11-17 | High-low voltage conversion device for magnetron sputtering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410652562.4A CN104451579B (en) | 2014-11-17 | 2014-11-17 | High-low voltage conversion device for magnetron sputtering |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104451579A true CN104451579A (en) | 2015-03-25 |
| CN104451579B CN104451579B (en) | 2017-02-22 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410652562.4A Active CN104451579B (en) | 2014-11-17 | 2014-11-17 | High-low voltage conversion device for magnetron sputtering |
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| CN (1) | CN104451579B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844846A (en) * | 2018-04-04 | 2018-11-20 | 中国科学院力学研究所 | A kind of sampling and test method of the test of round-link chain alumetized steel high-temperature oxydation |
| CN113403589A (en) * | 2021-03-19 | 2021-09-17 | 安徽纯源镀膜科技有限公司 | Knocking rod device for PIC coating equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2018761A1 (en) * | 1968-09-24 | 1970-06-26 | Energy Conversion Devices Inc | |
| US20040105288A1 (en) * | 2002-12-03 | 2004-06-03 | Kiyomi Watanabe | Power conversion device |
| JP2006006053A (en) * | 2004-06-18 | 2006-01-05 | Shihen Tech Corp | Dc power supply device |
| CN102047548A (en) * | 2008-05-26 | 2011-05-04 | 株式会社爱发科 | Bipolar pulse power source and power source device formed by connecting a plurality of bipolar pulse power sources in parallel |
| CN103774111A (en) * | 2014-02-25 | 2014-05-07 | 南华大学 | Circuit equipment and control method for achieving high-power pulse and large-current magnetron sputtering coating function |
-
2014
- 2014-11-17 CN CN201410652562.4A patent/CN104451579B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2018761A1 (en) * | 1968-09-24 | 1970-06-26 | Energy Conversion Devices Inc | |
| US20040105288A1 (en) * | 2002-12-03 | 2004-06-03 | Kiyomi Watanabe | Power conversion device |
| JP2006006053A (en) * | 2004-06-18 | 2006-01-05 | Shihen Tech Corp | Dc power supply device |
| CN102047548A (en) * | 2008-05-26 | 2011-05-04 | 株式会社爱发科 | Bipolar pulse power source and power source device formed by connecting a plurality of bipolar pulse power sources in parallel |
| CN103774111A (en) * | 2014-02-25 | 2014-05-07 | 南华大学 | Circuit equipment and control method for achieving high-power pulse and large-current magnetron sputtering coating function |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844846A (en) * | 2018-04-04 | 2018-11-20 | 中国科学院力学研究所 | A kind of sampling and test method of the test of round-link chain alumetized steel high-temperature oxydation |
| CN108844846B (en) * | 2018-04-04 | 2019-10-29 | 中国科学院力学研究所 | A kind of sampling and test method of the test of round-link chain alumetized steel high-temperature oxydation |
| CN113403589A (en) * | 2021-03-19 | 2021-09-17 | 安徽纯源镀膜科技有限公司 | Knocking rod device for PIC coating equipment |
| CN113403589B (en) * | 2021-03-19 | 2023-08-18 | 安徽纯源镀膜科技有限公司 | Knocking rod device for PIC coating equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104451579B (en) | 2017-02-22 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231117 Address after: 511458 Room 501, building 1, 1119 Haibin Road, Nansha District, Guangzhou City, Guangdong Province Patentee after: Guangdong Aerospace Science and Technology Research Institute (Nansha) Address before: 100190, No. 15 West Fourth Ring Road, Beijing, Haidian District Patentee before: INSTITUTE OF MECHANICS, CHINESE ACADEMY OF SCIENCES |
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| TR01 | Transfer of patent right |