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CN104439695B - A kind of vision inspection apparatus of laser-processing system - Google Patents

A kind of vision inspection apparatus of laser-processing system Download PDF

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Publication number
CN104439695B
CN104439695B CN201310422766.4A CN201310422766A CN104439695B CN 104439695 B CN104439695 B CN 104439695B CN 201310422766 A CN201310422766 A CN 201310422766A CN 104439695 B CN104439695 B CN 104439695B
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China
Prior art keywords
laser
light source
laser processing
speculum
image
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CN201310422766.4A
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CN104439695A (en
Inventor
舒远
王光能
闫静
米野
高云峰
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Shenzhen Hans Electric Motor Co Ltd
Han s Laser Technology Industry Group Co Ltd
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Shenzhen Hans Electric Motor Co Ltd
Han s Laser Technology Industry Group Co Ltd
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Priority to CN201310422766.4A priority Critical patent/CN104439695B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/032Observing, e.g. monitoring, the workpiece using optical means

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Laser Beam Processing (AREA)

Abstract

The present invention is applied to technical field of laser processing, more particularly to a kind of vision inspection apparatus of laser-processing system, and described device includes:Image capturing system, the image for gathering the Laser Processing object on laser processing plane;Lighting source, for being highlighted to the Laser Processing object on laser processing plane;Speculum, for reflecting the illumination light that lighting source is sent, makes Laser Processing image objects on laser processing plane to image capturing system.The present invention in the middle of laser-processing system focus lamp with processing plane by setting a speculum, the image for laser machining object is reflexed to by image capturing system by speculum, simultaneously by setting a coaxial light source and annular light source to carry out brightness enhancing to Laser Processing object before image collecting device, realize and the real-time vision for laser machining object is detected.

Description

A kind of vision inspection apparatus of laser-processing system
Technical field
The invention belongs to the vision-based detection dress of laser work detection technique field, more particularly to a kind of laser-processing system Put.
Background technology
Present electronic product is much required for being marked by laser, as the demand being marked using laser is more next Bigger, user is increasing to the demand of laser marking machine, while the also more and more higher of the requirement to laser marking machine, in production If operation is carried out using the laser marking machine containing laser vision system, due to there is the laser marking machine of laser vision system can It is automatically positioned with realization, automatic focusing and automatic detection are accepted so as to obtain more users, existing laser vision system The vision inspection apparatus of laser marking machine mainly have two ways:Using coaxial vision inspection apparatus, mark square toes and into The light path of picture system is identical, and this mode can monitor mark quality in real time, and laser scanning head and camera can be beaten simultaneously Mark and take pictures, it is possible to achieve one side mark is while observe, but coaxial vision inspection apparatus accuracy of detection is inadequate, it is impossible to meet The problem of big visual field blur-free imaging, another mode is the vision inspection apparatus using paraxonic, and camera and mark square toes are into one Fixed angle.This mode is designed simply, it is not necessary to change existing mark square head structure, still, laser scanning head mark it Taken pictures afterwards, it is necessary to which the workpiece after mark is moved into camera position, it is impossible to detection in real time, and need the relative position of demarcation in advance Put.Requirement based on laser marking field to cost, and the requirement to mark precision and production efficiency, laser marking machine is in spirit Active and full-automatic property Challenge.
The content of the invention
The purpose of the embodiment of the present invention is to provide a kind of vision inspection apparatus of laser-processing system, by adding in laser One speculum is set in the middle of work system focus lamp and laser processing plane, the image for laser machining object is reflected by speculum To image capturing system, while passing through the annular that a coaxial light source is set before image collecting device and is provided below in speculum Light source carries out brightness enhancing to Laser Processing object, realizes and the real-time vision for laser machining object is detected.
The embodiment of the present invention is achieved in that a kind of vision inspection apparatus of laser-processing system, and described device includes:
Image capturing system, the image for gathering the Laser Processing object on laser processing plane;
Lighting source, for being highlighted to the Laser Processing object on laser processing plane;
Speculum, for reflecting the illumination light that lighting source is sent, makes the Laser Processing on laser processing plane Image objects are to image capturing system.
Further, the speculum and laser processing plane angle at 45 °.
Further, the lighting source includes:
Coaxial light source and/or annular light source, wherein coaxial light source are placed in before image capturing system, and annular light source is placed in reflection Under mirror.
Further, the speculum is to laser total transmissivity.
Further, the speculum is totally reflected to illumination light.
Further, the annular light source includes multiple strip lights, and annular light source is constituted to laser by multiple strip lights Laser Processing object in processing plane highlights.
Further, rotating shaft is provided with the strip light, can adjust each bar shaped light irradiation by rotating shaft swashs The angle of light processing object.
Further, sliding block is provided with the strip light, strip light can be changed apart from ring light by sliding slider The distance at source center.
The embodiment of the present invention is by a kind of vision inspection apparatus of laser-processing system, by increasing in laser-processing system Plus a speculum, speculum to laser total transmissivity to selected axis light and annular light total reflection, while in laser processing plane warp One coaxial light source and image capturing system are set in the plane for crossing speculum total reflection, and image capturing system collection Laser Processing is flat Laser Processing subject image on face, coaxial light source carries out brightness enhancing to Laser Processing object.
Brief description of the drawings
Fig. 1 is a kind of vision inspection apparatus schematic diagram for laser-processing system that first embodiment of the invention is provided;
Fig. 2 is the top view for the annular light source that first embodiment of the invention is provided;
Fig. 3 is the upward view for the annular light source that first embodiment of the invention is provided;
Fig. 4 is a kind of schematic diagram of the vision inspection apparatus for laser-processing system that second embodiment of the invention is provided;
Fig. 5 is the picture for the processing stand collected that second embodiment of the invention is provided;
Fig. 6 is the picture for the processing stand after image procossing that second embodiment of the invention is provided;
Fig. 7 is the testing result for the processing stand that second embodiment of the invention is provided.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.
Implementing for the present invention is described in detail below in conjunction with specific embodiment:
Embodiment one:
Fig. 1 shows a kind of vision inspection apparatus schematic diagram for laser-processing system that first embodiment of the invention is provided, For convenience of description, it illustrate only the part related to the embodiment of the present invention.
Laser-processing system includes laser, laser head, focus lamp and laser processing plane.By in Laser Processing system Increase a speculum, image capturing system, lighting source in system, wherein lighting source is specifically included:Coaxial light source, ring light Source, wherein image capturing system are specifically included:Camera lens and camera;Clearly image information is gathered by camera lens and camera, constituted Image capturing system.In specific implement, laser head is used to launch laser, and focus lamp is used to add laser beam focus to laser Laser Processing object in work plane is laser machined, and specific processing can include mark cutting.Image capturing system, is used In the image of the Laser Processing object on collection laser processing plane, processing effect when being laser machined is detected in real time, its In to Laser Processing object be processed when, by coaxial light source and/or annular light source to the laser on laser processing plane Processing object is highlighted, and wherein coaxial light source is placed in before image capturing system, and annular light source is specifically arranged at below speculum, The top view of annular light source, can by sliding slider as shown in Fig. 2 be provided with a sliding block in each strip light of annular light source To change distance of the strip light relative to annular light source center.When by sliding slider make strip light to annular light source exterior measuring move When, the width increase of annular light source can now increase the irradiated area of whole annular light source, when making bar shaped by sliding slider When light surveys mobile into annular light source, the broadband of annular light source reduces, and can now reduce the irradiated area of whole annular light source. Wherein the width of strip light can be set according to specific use environment.Can partial occlusion when sliding bar shaped light by sliding block The firmly broadband of strip light.The upward view of annular light source is as shown in figure 3, annular light source constitutes implementation of the present invention by multiple strip sources Using four strip lights in example, wherein four strip lights can adjust four strip lights according to the concrete condition of Laser Processing object The angle of irradiation Laser Processing object, as shown in figure 3, strip light can also be by changing the width of strip light to translating from inside to outside Degree causes increase to reduce the area of bar shaped light irradiation.Coaxial light source is coaxial with image capturing system, and coaxial light source is placed in image and adopted Before collecting system, coaxial light source send light by speculum vertical irradiation on laser processing plane, on laser processing plane Laser Processing object carry out brightness enhancing, reflected while laser machining the light that is sent to light source of object, the light after reflection Coaxial light source is back to by speculum, through after coaxial light source image capturing system be imaged.By setting two light sources pair Laser machine object and carry out brightness enhancing, while image capturing system is coaxially placed in after axis light, be easy to Laser Processing Object carries out IMAQ, to cause when by laser machining, and vision-based detection, wherein speculum are carried out to Laser Processing object The angle of 45 ° of the use of angle preferably between laser processing plane, need to only ensure the light of coaxial light irradiation here certainly It can be radiated at by speculum on laser processing plane, the light of the Laser Processing object reflection on laser processing plane is by anti- The image capturing system coaxial with axis light can be irradiated to later by penetrating mirror reflection, while ensureing speculum projection pair complete to laser Lighting source is totally reflected.Angle between speculum and laser processing plane can according to the speculum material specifically used and The plated film situation of speculum is configured.
The embodiment of the present invention is by the above-mentioned means, a kind of vision inspection apparatus of laser-processing system, by adding in laser A speculum is set up in the middle of the focus lamp and laser processing plane of work system, speculum can be with total transmissivity laser, but is totally reflected Lighting source is axis light and the photoemissive light for strengthening Laser Processing object brightness of annular, and wherein image capturing system is put In after axis light, it is totally reflected by the minute surface of enhanced brightness and speculum, image capturing system can acquire one The image of the Laser Processing object of big visual field, while it is fine to obtain an imaging effect by the minute surface total reflection of speculum Image, and can detect the processing effect of Laser Processing in real time, be convenient for control, realize to Laser Processing object Monitoring in real time and detect, while with the use of the system of automation, it is possible to achieve the automation of whole system processing, and can be with Reach high accuracy and high accuracy.
Embodiment two:
Fig. 4 shows a kind of principle of the vision inspection apparatus for laser-processing system that second embodiment of the invention is provided Figure, for convenience of description, illustrate only the part related to the embodiment of the present invention.
In specific implementation process, first testing laser processing object whether can on image capturing system it is clear into Picture, it is ensured that the uniform illumination of coaxial light source and annular light source on laser processing plane.Wherein annular light source can pass through rotation The rotating shaft of each strip light changes the angle of the polishing of each strip light in annular light source, and then changes the irradiation of whole ring light Bar shaped optical width between angle, and each ring light can inwardly be displaced outwardly changing whole ring light by sliding slider The width in source, the area of whole annular light irradiation can be increased or reduce by changing the width of whole annular light source.Laser is passed through Cross laser after handling by focus lamp after X, Y speculum of processing head to be focused, Laser Processing object is processed.Wherein Speculum is all transmissions to laser, and the ring light that the axis light launched coaxial light source and annular light source are launched is total reflection 's.When the surface for laser machining object is very coarse, preferably using annular optical illumination, when the table of Laser Processing object Face it is very smooth and to the reflectivity of light it is very high when, the coaxial optical illumination of use preferably can also make simultaneously when light is poor Illuminated simultaneously with ring light and axis light.Axis light or ring light are impinged upon on Laser Processing object, and reflected mirror reflection finally exists The image of Laser Processing object is collected on image capturing system, can be collected and clearly schemed by mirror mirror reflection Picture.The image got to image capturing system carries out image procossing, and testing result is shown over the display.Due to adopting With ring light and axis light to Laser Processing object illumination, the brightness of enhancing Laser Processing object can obtain fine definition Imaging effect, after the process image that clear and big visual field is collected by image capturing system, then pass through image procossing will The vision-based detection of the processing effect to laser machining object is realized in analysis.
Wherein to Laser Processing object carry out image procossing process it is as follows, acquired real processing result with Afterwards, image is shown in systems, and the image of display is contrasted with default image, while comparing the position of processing is The no Working position to pre-set, advanced row position judgment, the mode to position judgment can be used before process, be The image of system collection machine component is determined to the position of machine component, i.e., determine that position is sat by way of image tagged Mark, after working process is complete, it is possible to find the position correctly processed.
After time processing is completed, the result to processing carries out three-dimensional measurement, by handling the image collected Three-dimensional measurement is carried out to object, that is, marks the coordinate of each location point of object and the three-dimensional height of each point.Pass through processing Automatic focusing, the automatic focusing of processing is realized using the height of each point of the object after three-dimensional measurement.Complete adding for automation Work.The implementation process of wherein automatic focusing is:Mobile image acquisition system photographs a series of images, obtains the sequence chart of label Picture, the information included using each image in the mode abstraction sequence image of image procossing obtains the three-dimensional information of mark object, Using the elevation information in three-dimensional information, the adjust automatically of focal length is carried out.By taking processing stand as an example, processing effect is supervised in real time Control and detection.Fig. 5 is the picture of the processing stand collected, and Fig. 6 is the picture of the processing stand after image procossing, and Fig. 7 is to add The testing result of work point.Vision-based detection is carried out to Laser Processing object by the vision inspection apparatus of laser-processing system, can be with Realize that processing machine can carry out the image processing process of different functions according to the requirement of user to Laser Processing object.
The embodiment of the present invention is by the above-mentioned means, a kind of vision inspection apparatus of laser-processing system, by adding in laser Processed in work system in the middle of square toes and plane up to standard and set up a speculum, object is processed by control system for processing, led to Cross image capturing system processing effect is carried out to monitor and detect in real time, the image collected is carried out by image processing software Image procossing, realizes the real-time monitoring and detection to processing effect.Whole system realizes the automation of processing, and improves The precision of processing and the degree of accuracy of processing.
In order that the purpose of the present invention, technical scheme are more clearly, above in association with drawings and examples, the present invention is entered Detailed description is gone, it is impossible to assert that the specific implementation of the present invention is confined to these explanations.Led for technology belonging to the present invention For the those of ordinary skill in domain, without departing from the inventive concept of the premise, some simple deductions and replacement can also be made, Protection scope of the present invention should be all considered as.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention Any modifications, equivalent substitutions and improvements made within refreshing and principle etc., should be included in the scope of the protection.

Claims (2)

1. a kind of vision inspection apparatus of laser-processing system, it is characterised in that described device includes:
Image capturing system, the image for gathering the Laser Processing object on laser processing plane;
Lighting source, for being highlighted to the Laser Processing object on laser processing plane;
Speculum, reflects for total transmissivity laser, and to the illumination light that lighting source is sent, makes on laser processing plane Image objects are laser machined to image capturing system;
Wherein, the speculum is arranged in the middle of the focus lamp of the laser-processing system and laser processing plane;
The lighting source includes:
Coaxial light source and annular light source, wherein coaxial light source are placed in before image capturing system, and annular light source is placed under speculum;
Annular light source includes multiple strip lights, and constitute annular light source by multiple strip lights adds to the laser on laser processing plane Work object highlights;
Rotating shaft is provided with the strip light, the angle that each bar shaped light irradiation laser machines object can be adjusted by rotating shaft Degree;
Sliding block is provided with the strip light, the distance of the annular light source center of strip light distance can be changed by sliding slider;
Make the strip light to during movement on the outside of the annular light source when sliding the sliding block, the width of the annular light source increases Plus, and then increase the irradiated area of the annular light source, make the strip light into the annular light source when sliding the sliding block When side is moved, the broadband of the annular light source reduces, and then reduces the irradiated area of the annular light source;Pass through sliding block slider bar Shape light realizes that part shelters from the broadband of strip light.
2. device as claimed in claim 1, it is characterised in that the speculum and laser processing plane angle at 45 °.
CN201310422766.4A 2013-09-16 2013-09-16 A kind of vision inspection apparatus of laser-processing system Active CN104439695B (en)

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Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105128539B (en) * 2015-09-21 2017-12-29 大族激光科技产业集团股份有限公司 A kind of method and laser marking system of optical projection laser marking
CN106851182B (en) * 2015-12-04 2024-06-18 彭翔 Intelligent vision monitoring system of laser processing system
CN106041325A (en) * 2016-07-05 2016-10-26 潍坊路加精工有限公司 Laser drilling method
CN106442327B (en) * 2016-12-08 2024-02-20 苏州德创测控科技有限公司 Optical system for detecting object side image information
CN108406092B (en) * 2016-12-22 2019-08-27 温州大学激光与光电智能制造研究院 A kind of vibration mirror scanning laser processing of coaxial real-time detection
CN108303236B (en) * 2017-01-11 2019-12-17 福建省莆田市中涵机动力有限公司 Laser scanning head installation calibration inspection system
EP3683002B1 (en) * 2017-09-11 2023-08-02 Panasonic Intellectual Property Management Co., Ltd. Laser processing head, optical fiber inspection device, and optical fiber inspection method
CN107790895A (en) * 2017-11-01 2018-03-13 中国振华(集团)新云电子元器件有限责任公司(国营第四三二六厂) The cutter device and its cutting method of electrode foil
CN108406124B (en) * 2018-03-28 2020-10-02 歌尔股份有限公司 Laser marking method and system
CN109738434A (en) * 2018-12-03 2019-05-10 珠海迈超智能装备有限公司 A kind of glass detection device
CN109714899B (en) * 2019-01-29 2021-01-01 深圳市大族数控科技有限公司 Target recognition device, PCB drilling system and PCB drilling method
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CN111070907B (en) * 2020-01-06 2021-05-28 珠海格力智能装备有限公司 Marking detection equipment
CN112044870B (en) * 2020-07-15 2021-07-27 中国科学院西安光学精密机械研究所 Laser cleaning method and device based on coaxial ranging and real-time adjustable focal length
CN111766690B (en) * 2020-07-24 2022-03-25 苏州天准科技股份有限公司 Alignment imaging equipment and laser direct imaging system
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Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100343966C (en) * 2005-05-12 2007-10-17 上海交通大学 Welding disk vision identifying and positioning system for flexible laser ball implanting machine
DE102010020183B4 (en) * 2010-05-11 2013-07-11 Precitec Kg Laser cutting head and method for cutting a workpiece by means of a laser cutting head
WO2012005816A2 (en) * 2010-06-30 2012-01-12 Resonetics Llc Precision laser ablation
CN201841362U (en) * 2010-10-09 2011-05-25 苏州德龙激光有限公司 Picosecond laser scribing device for LED wafer
CN202185675U (en) * 2011-07-08 2012-04-11 黄熠 Laser cutting device
CN102554463A (en) * 2012-02-14 2012-07-11 中国科学院福建物质结构研究所 Coaxial CCD (charge coupled device) imaging system applied to laser cutting
CN102581495B (en) * 2012-02-14 2016-06-15 中国科学院福建物质结构研究所 A kind of double; two CCD imaging systems being applied to cut
CN202780232U (en) * 2012-05-23 2013-03-13 武汉凌云光电科技有限责任公司 Coaxial temperature-measuring imaging laser focusing system

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