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CN104393109A - Chemical vapor deposition preparation method for perovskite solar cell - Google Patents

Chemical vapor deposition preparation method for perovskite solar cell Download PDF

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Publication number
CN104393109A
CN104393109A CN201410586978.0A CN201410586978A CN104393109A CN 104393109 A CN104393109 A CN 104393109A CN 201410586978 A CN201410586978 A CN 201410586978A CN 104393109 A CN104393109 A CN 104393109A
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film
tio
solid phase
perovskite
precipitation
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CN104393109B (en
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罗派峰
刘兆范
夏伟
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Hefei Pusikai New Energy Technology Co.,Ltd.
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Hefei University of Technology
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
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    • H10K30/30Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
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    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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    • Y02E10/50Photovoltaic [PV] energy
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract

The invention discloses a chemical vapor deposition preparation method for a perovskite solar cell. The preparation method is characterized in that a compact layer TiO2 thin film is deposited on a surface on which the FTO thin film of FTO conductive glass is positioned so as to act as an electron transmission layer; a perovskite light absorption layer thin film is prepared on the electron transmission layer via a chemical vapor deposition method; a hole transmission layer is prepared on the perovskite light absorption layer thin film; and an Ag electrode or an Au electrode is vapor-deposited on the hole transmission layer to act as a top electrode so that the perovskite solar cell is obtained. The preparation method is simple and low in cost. The prepared perovskite light absorption layer thin film is high in quality, excellent in substrate coverage and great in stability and repeatability. Preliminary conversion efficiency of the prepared planar heterojunction perovskite solar cell can be 11%.

Description

A kind of chemical gas-phase deposition process for preparing of perovskite solar cell
Technical field
The present invention relates to a kind of preparation method of perovskite solar cell, belong to the preparation technology field of thin film solar cell photovoltaic device.
Background technology
At present, hybrid inorganic-organic perovskite solar cell causes the extensive concern of photovoltaic circle due to the photoelectric characteristic of its excellence, due to its have that conversion efficiency is high, low cost of manufacture and the feature such as preparation technology is simple, and be considered to the solar cell of new generation having development prospect.The novel solar battery that perovskite battery is is light absorbing zone with perovskite thin film material, generally can be expressed as AMX 3, wherein A represents cation radius at the organic of 0.164nm ~ 0.259nm and inorganic group, and common is methylamine Methylammonium (Ma), carbonamidine Formamidinium (Fa) and caesium Cs etc.; M is Pb, Sn and Pb xsn 1-xalloy; X is halogen.Decades in the past, hydridization perovskite material is used as field-effect transistor FET, LED and photodetector etc. more.Until 2009, Kojima uses it for dye-sensitized solar cells first, and obtains the photoelectric conversion efficiency of 3.8%; Subsequently only within short 5 years, perovskite obtains fast development in the application of photovoltaic art, its conversion efficiency is risen to nearly 20% by Yang etc., perovskite solar cell has become the hot subject that current academia falls over each other to study, Quantity of Papers exponentially increases fast, and industrial quarters also starts the study on the industrialization exploitation carrying out being correlated with.
Among the research boom of perovskite battery, mainly report two large class preparation technologies: vacuum thermal evaporation technique and solwution method technique.Vacuum thermal evaporation can obtain high-quality perovskite thin film undoubtedly, but vacuum evaporation apparatus is expensive, processing procedure is complicated, be difficult to accurate control element ratio, and some evaporation source is difficult to the large area preparation realizing homogeneous film.And solwution method technological operation is simple, but cause due to the ultrafast reaction rate of material that film is coarse, porous and the not problem such as covering completely.Meanwhile, the poor perovskite thin film material of film quality is general very unstable in atmosphere, thus needs to operate under the environment of glove box or ultralow humidity, thus further limit the industrialization large-area applications of perovskite solar cell.
Summary of the invention
The invention provides a kind of chemical gas-phase deposition process for preparing of perovskite solar cell, perovskite light absorbing zone film in battery is adopted the method preparation of chemical vapour deposition (CVD), to densification, even and stable high-quality perovskite thin film material can be prepared, and then obtain high efficiency perovskite solar cell.
Perovskite solar cell of the present invention is planar heterojunction structure, be with FTO electro-conductive glass for substrate, deposit electron transfer layer, perovskite light absorbing zone film, hole transmission layer and top electrode from bottom to up successively in the face, FTO film place of described FTO electro-conductive glass;
Described electron transfer layer is compacted zone TiO 2film;
Described perovskite light absorbing zone film is the AMX with perovskite crystal structure 3film, wherein A is the organic or inorganic group of cation radius at 0.164nm ~ 0.259nm, preferred methylamine CH 3nH 3or carbonamidine HC (NH 2) 2; M is Pb, Sn or Pb xsn 1-xalloy; X is halogen.
Described hole transmission layer is 2,2', 7,7'-tetra-[N, N-bis-(4-methoxyphenyl) is amino]-9,9'-spiral shell two fluorenes (spiro-OMeTAD) layers.
Described top electrode is Ag electrode or Au electrode.
Wherein said electric transmission layer thickness is 20 ~ 100nm; Described perovskite light absorbing zone film thickness is 100 ~ 3000nm; Described thickness of hole transport layer is 20 ~ 500nm; Described top electrode thickness is 50 ~ 150nm.
Technical solution problem of the present invention, adopts following technical scheme:
The chemical gas-phase deposition process for preparing of perovskite solar cell of the present invention, its feature is to carry out as follows:
A, FTO film institute deposition compact layer TiO on the whole at FTO electro-conductive glass 2film is as electron transfer layer;
B, on the electron transport layer by chemical vapor deposition perovskite light absorbing zone film;
C, on described perovskite light absorbing zone film, prepare 2,2', 7,7'-tetra-[N, N-bis-(4-methoxyphenyl) is amino]-9,9'-spiral shell two fluorenes layers as hole transmission layer;
D, on the hole transport layer evaporation Ag electrode or Au electrode, as top electrode, obtain perovskite solar cell.
The perovskite light absorbing zone film of perovskite solar cell of the present invention adopts chemical vapour deposition (CVD) (Chemical VaporDeposition, CVD) method preparation, comprise aumospheric pressure cvd (Atmospheric Pressure CVD, APCVD), low-pressure chemical vapor deposition (Low-pressure CVD, LPCVD), high-pressure chemical vapor deposition (High-pressure CVD, HPCVD), plasma enhanced chemical vapor deposition (Plasma enhanced CVD, and single warm area PECVD), two warm area and many temperature-area tubular furnaces CVD etc., preferably two temperature-area tubular furnace CVD.
Step a is at the FTO film institute deposition compact layer TiO on the whole of FTO electro-conductive glass 2film as the method for electron transfer layer is:
Method one: FTO electro-conductive glass FTO film spin coating concentration be on the whole the isopropyl titanate ethanolic solution of 0.24mol/L, at 450 ~ 500 DEG C, sinter 30 ~ 60min in air, be then soaked in the TiCl of 40mM 4in the aqueous solution, 70 DEG C of process 30min, finally sinter 30 ~ 60min again, obtain compacted zone TiO at 450 ~ 500 DEG C of temperature 2film;
Method two: by TiCl 4be added drop-wise in absolute ethyl alcohol, and then add phenmethylol and obtain yellow solution, described TiCl 4, absolute ethyl alcohol and phenmethylol volume ratio be 1:4:20; Described yellow solution water-bath 8h at 80 DEG C is obtained milky white solution, in described milky white solution, adds extracted with diethyl ether go out TiO to be cleaned 2precipitation, successively with ethanol and the described TiO to be cleaned of ether cleaning 2precipitation, then centrifugal acquisition TiO 2precipitation;
By described TiO 2in ethanol, obtaining concentration is 3 ~ 15mg/ml TiO in precipitation dispersion 2alcohol dispersion liquid, then TiO described in 10ml 2alcohol dispersion liquid in add two (acetylacetone based) diisopropyl titanate esters of 0.1 ~ 0.3ml as stabilizer, obtain TiO 2spin coating liquid;
At the FTO film institute TiO described in spin coating on the whole of FTO electro-conductive glass 2spin coating liquid, namely the 30min that then anneals at 150 DEG C obtains compacted zone TiO 2film.
Wherein, method two compacted zone TiO 2the preparation of film, without the need to high-temperature process, achieves the full low temperature process of perovskite solar cell.And can once prepare a large amount of TiO 2spin coating liquid, is convenient to later stage use.
Step b by the method for chemical vapor deposition perovskite light absorbing zone film is on the electron transport layer:
Prepare PbI on the electron transport layer 2, SnI 2film or PbCl 2film, as reactant, is positioned over the thermal treatment zone place of two temperature-area tubular furnace; With iodine methylamine CH 3nH 3i, chloromethane amine CH 3nH 3cl, bromine methylamine CH 3nH 3br, iodine carbonamidine HC (NH 2) 2i, chloromethane amidine HC (NH 2) 2cl, bromine carbonamidine HC (NH 2) 2described gaseous sources, as gaseous sources, is positioned over another thermal treatment zone place of two temperature-area tubular furnace by Br; Described gaseous sources position is heated to 100 ~ 300 DEG C, described reactant position is heated to 50 ~ 300 DEG C simultaneously, namely isothermal reaction 10 ~ 300min obtains perovskite light absorbing zone film.
Wherein:
Iodine methylamine CH 3nH 3i is prepared as follows: the hydriodic acid aqueous solution mixing of to be the methylamine alcohol solution of 33wt% and 10mL mass concentration by 24mL mass concentration be 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying described reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain iodine methylamine CH 3nH 3i powder;
Chloromethane amine CH 3nH 3cl powder is prepared as follows: the HCl aqueous solution of to be the methylamine alcohol solution of 33wt% and 10mL mass concentration by 24mL mass concentration be 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying described reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain chloromethane amine CH 3nH 3cl powder;
Bromine methylamine CH 3nH 3br powder is prepared as follows: the HBr aqueous solution of to be the methylamine alcohol solution of 33wt% and 10mL mass concentration by 24mL mass concentration be 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying described reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain bromine methylamine CH 3nH 3br powder;
Iodine carbonamidine HC (NH 2) 2i is prepared as follows: the hydriodic acid aqueous solution mixing by 4g formamidine acetate and 13.2g mass concentration being 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying described reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain iodine carbonamidine HC (NH 2) 2i powder;
Chloromethane amidine HC (NH 2) 2cl is prepared as follows: the HCl aqueous solution by 4g formamidine acetate and 13.2g mass concentration being 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying described reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain chloromethane amidine HC (NH 2) 2cl powder
Bromine carbonamidine HC (NH 2) 2br is prepared as follows: the HBr aqueous solution by 4g formamidine acetate and 13.2g mass concentration being 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying described reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain bromine carbonamidine HC (NH 2) 2br powder
PbI 2the preparation method of film is: spin coating concentration is on the electron transport layer the PbI of 1M 2dMF solution or PbI 2dMSO solution, at 70 DEG C anneal 10 ~ 30min, obtain PbI 2film;
Described PbCl 2film and described SnI 2film takes the method for thermal evaporation plated film to obtain, and is using lead chloride or stannous iodide as evaporation source, is positioned in crucible, substrate is positioned over plated film position, the vacuum degree of thermal evaporation deposition system is being down to 10 -4during Pa, start plated film, the plated film time is 10 ~ 30min.
Step c prepares 2 on described perovskite light absorbing zone film, 2', 7, 7'-tetra-[N, N-bis-(4-methoxyphenyl) is amino]-9, 9'-spiral shell two fluorenes layer as the method for hole transmission layer is: by 72.3mg 2, 2', 7, 7'-tetra-[N, N-bis-(4-methoxyphenyl) is amino]-9, 9'-spiral shell two fluorenes (Spiro-MeTAD) is dissolved in 1mL chlorobenzene, add the acetonitrile solution that 17.5 μ L concentration are two trifluoromethanesulfonimide lithiums (LiFSFI) of 520mg/mL, add 28.8 μ L 4-tert .-butylpyridine (4-tBP) again, obtain hole transmission layer spin coating liquid, hole transmission layer spin coating liquid described in spin coating on described perovskite light absorbing zone film, each dropping 30 μ L, and 30s is rotated with the speed of 4000rpm after each dropping, obtain hole transmission layer.
Compared with the prior art, beneficial effect of the present invention is embodied in:
The perovskite light absorbing zone film of perovskite solar cell of the present invention adopt simple to operate, with low cost, can large area industrialization chemical vapour deposition (CVD) (CVD) method of amplifying, replace current expensive vacuum evaporation technology and be difficult to amplify solution spin coating proceeding, adopt gas phase-solid phase (G-S) reaction slowly, effectively to overcome in solwution method organic group (as CH 3nH 3i etc.) and inorganic thin film (as TiO 2deng) between ultrafast intercalation problem rate, the defects such as coarse, the porous avoiding film to occur and not exclusively covering, and then prepare that film quality is high, substrate spreadability is good, stability and reproducible perovskite light absorbing zone film, the efficiency of the planar heterojunction perovskite battery of first trial-production is up to 12%.The invention still further relates to compacted zone titanium dioxide TiO 2the low-temperature fabrication of film, can prepare perovskite solar cell under whole 200 DEG C of low temperature.
In sum, the loaded down with trivial details glove box operation that the present invention can effectively avoid current perovskite solar cell to prepare and expensive vacuum evaporation apparatus drop into, and under the non-vacuum condition of complete atmospheric environment, realize the low-cost and high-quality preparation of perovskite solar cell.Perovskite light absorbing zone thin-film material prepared by the method is very fine and close, highly stable, is also applicable to the preparation of the perovskite solar cell of meso-porous nano structure.And this chemical vapor deposition method can be amplified easily in industrialization, thus vital effect is served to the commercial applications promoting perovskite solar cell.
In addition, the present invention, by using the mixed-powder of iodine methylamine and chloromethane amine as gaseous sources, compared with doing gaseous sources, improves degree of crystallinity and the surface coverage of prepared perovskite light absorbing zone film with single iodine methylamine or chloromethane amine; And the chlorine Elements C l of trace, the carrier lifetime of perovskite light absorbing zone film can be made elongated, and the diffusion length of charge carrier is also increased to more than 1000nm by 100nm, thus the greatly very high conversion efficiency of gained perovskite solar cell.
Accompanying drawing explanation
Fig. 1 is the structural representation of perovskite solar cell of the present invention;
Fig. 2 is two temperature-area tubular furnace CVD precipitation equipment schematic diagrames of perovskite light absorbing zone film of the present invention;
The CH of Fig. 3 prepared by the embodiment of the present invention 1 3nH 3pbI 3xRD figure (Fig. 3 (a)) of film and SEM figure (Fig. 3 (b));
The J-V curve of the perovskite solar cell of Fig. 4 prepared by the embodiment of the present invention 1;
Number in the figure: 1 quartz ampoule; 2 pairs of temperature-area tubular furnaces; The 3 gaseous sources thermals treatment zone; The 4 reactant thermals treatment zone; 5 valves and vacuum meter; 6 mechanical pump evacuation passageway; 7 gaseous sources; 8 reactants.
Embodiment
Embodiment 1
The structural representation of the perovskite solar cell of the present embodiment as shown in Figure 1, for substrate with FTO electro-conductive glass, deposit electron transfer layer, perovskite light absorbing zone film, hole transmission layer and top electrode from bottom to up successively in the face, FTO film place of FTO electro-conductive glass, concrete preparation method is:
A, FTO film institute deposition compact layer TiO on the whole at FTO electro-conductive glass 2film is as electron transfer layer: FTO electro-conductive glass FTO film on the whole with the isopropyl titanate ethanolic solution that the speed spin coating 50 μ L concentration of 2000rpm/30s is 0.24mol/L, then at 450 DEG C, sinter 30min in air, be then soaked in the TiCl of 40mM 4in the aqueous solution, 70 DEG C of process 30min, finally sinter 30min again, obtain the compacted zone TiO that thickness is 100nm at 450 DEG C of temperature 2film.
B, prepare perovskite light absorbing zone film by chemical vapour deposition technique on the electron transport layer
B1, preparation CH 3h 3i powder is as gaseous sources: the hydriodic acid aqueous solution of to be the methylamine alcohol solution (directly buy from Chemical Reagent Co., Ltd., Sinopharm Group) of 33wt% and 10mL mass concentration by 24mL mass concentration be 45wt% mixes, reaction 2h obtains reactant liquor, then the precipitation obtained after drying reactant liquor at 60 DEG C is dissolved in 80mL ethanol, add 300mL ether again to extract as extractant, collect solid phase, now still contain a small amount of ether in solid phase, therefore to the dry 24h of the precipitation obtained after solid phase centrifugal segregation ether, namely CH is obtained 3nH 3i powder;
B2, preparation PbI 2film: compound concentration is the PbI of 1M 2dMF solution, and be heated to 70 DEG C, obtain PbI for subsequent use 2spin coating liquid; On the electron transport layer with the speed spin coating 50 μ L PbI for subsequent use of 2000rpm/30s 2spin coating liquid, then has PbI by spin coating 2substrate to anneal at 70 DEG C 30min, obtain PbI 2film;
B3, by PbI 2film is positioned over the thermal treatment zone place (being the reactant thermal treatment zone) of two temperature-area tubular furnace, by CH as reactant 3nH 3i powder is positioned over another thermal treatment zone place (being the gaseous sources thermal treatment zone) of two temperature-area tubular furnace as gaseous sources, gaseous sources position place is heated to 250 DEG C, reactant position place is heated 150 DEG C, and reaction 60min, obtains the CH as perovskite light absorbing zone film 3nH 3pbI 3film;
As shown in Figure 2, for two temperature-area tubular furnace CVD precipitation equipment schematic diagrames of perovskite light absorbing zone film, 1 be quartz ampoule, 2 be two temperature-area tubular furnace in figure, 3 be the gaseous sources thermal treatment zone, 4 be the reactant thermal treatment zone, 5 be mechanical pump evacuation passageway, 7 be gaseous sources, 8 be reactant for valve and vacuum meter, 6.
Fig. 3 a is prepared CH 3nH 3pbI 3the XRD of film, Fig. 3 b is the CH of preparation 3nH 3pbI 3the SEM figure of film.CH can be found out from Fig. 3 a 3nH 3pbI 3the peak of film is 14.07 °, 28.36 °, 31.82 ° and 43.14 °, PbI 2all change into CH 3nH 3pbI 3.As can be seen from Fig. 3 b, prepared CH 3nH 3pbI 3film quality is high, substrate spreadability is good.
C, preparation 2 on perovskite light absorbing zone film, 2', 7,7'-tetra-[N, N-bis-(4-methoxyphenyl) is amino]-9,9'-spiral shell two fluorenes layers are as hole transmission layer: 72.3mg Spiro-MeTAD are dissolved in 1mL chlorobenzene, add the acetonitrile solution that 17.5 μ L concentration are the LiFSFI of 520mg/mL, add 28.8 μ L 4-tBP again, obtain hole transmission layer spin coating liquid; Perovskite light absorbing zone film drips 30 μ L hole transmission layer spin coating liquid, then rotates 30s with the speed of 2000rpm, obtain hole transmission layer.
D, on hole transmission layer, evaporation 100nm Ag electrode, as top electrode, obtains perovskite solar cell.
After tested, the present embodiment gained perovskite solar cell J-V curve as shown in Figure 4, calculates the conversion efficiency of acquisition the present embodiment gained perovskite solar cell up to 11%.
Embodiment 2
The present embodiment prepares perovskite solar cell by the mode that embodiment 1 is identical, and difference is:
1, step a adopts and prepares compacted zone TiO with the following method 2film:
By 0.5ml TiCl 4be added drop-wise in 2ml absolute ethyl alcohol, and then add 10ml phenmethylol and obtain yellow solution; Yellow solution water-bath 8h at 80 DEG C is obtained milky white solution, in milky white solution, adds extracted with diethyl ether go out TiO to be cleaned 2precipitation, cleans TiO to be cleaned with ethanol and ether successively 2precipitate 3 times, then centrifugal go out TiO 2precipitation;
By TiO 2in ethanol, obtaining concentration is 8mg/ml TiO in precipitation dispersion 2alcohol dispersion liquid, then at 10ml TiO 2alcohol dispersion liquid in add two (acetylacetone based) diisopropyls titanate esters (TiAcac) of 0.2ml as stabilizer, obtain TiO 2spin coating liquid;
50 μ LTiO are dripped on the whole at the FTO film of FTO electro-conductive glass 2spin coating liquid, and rotate 30s with the speed of 2000rpm, namely the 30min that then anneals at 150 DEG C obtains compacted zone TiO 2film.
2, in step b3, gaseous sources position place is heated to 250 DEG C, and reactant position place is heated 70 DEG C, and reaction 20min, obtains the CH as perovskite light absorbing zone film 3nH 3pbI 3film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 7%.
Embodiment 3
The present embodiment prepares perovskite solar cell by the mode that embodiment 2 is identical:
Difference is: in step b3, gaseous sources position place is heated to 250 DEG C, and reactant position place is heated 200 DEG C, and reaction 80min, obtains the CH as perovskite light absorbing zone film 3nH 3pbI 3film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 8%.
Embodiment 4
The present embodiment prepares perovskite solar cell by the mode that embodiment 2 is identical:
Difference is: in step b3, gaseous sources position place is heated to 200 DEG C, and reactant position place is heated to 100 DEG C, and reaction 120min, obtains the CH as perovskite light absorbing zone film 3nH 3pbI 3film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 8%.
Embodiment 5
The present embodiment prepares perovskite solar cell by the mode that embodiment 2 is identical:
Difference is: in step b3, gaseous sources position place is heated to 180 DEG C, and reactant position place is heated 100 DEG C, and reaction 40min, obtains the CH as perovskite light absorbing zone film 3nH 3pbI 3film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 6%.
Embodiment 6
The present embodiment prepares perovskite solar cell by the mode that embodiment 2 is identical:
Difference is:
1, in step b1 with chloromethane amine CH 3h 3cl powder is as gaseous sources, preparation method is: the HCl aqueous solution of to be the methylamine alcohol solution of 33wt% and 10mL mass concentration by 24mL mass concentration be 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying described reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, centrifugal being precipitated is carried out to solid phase, to precipitation vacuumize 24h, obtain chloromethane amine CH 3h 3cl powder;
2, in step b3, gaseous sources position place is heated to 180 DEG C, and reactant position place is heated 70 DEG C, and reaction 80min, obtains the CH as perovskite light absorbing zone film 3nH 3pbI 3and CH 3nH 3pbCl 3mixed film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 3%.
Embodiment 7
The present embodiment prepares perovskite solar cell by the mode that embodiment 2 is identical:
Difference is: in step b3, gaseous sources position place is heated to 180 DEG C, and reactant position place is heated 100 DEG C, and reaction 150min, obtains the CH as perovskite light absorbing zone film 3nH 3pbI 3and CH 3nH 3pbCl 3mixed film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 1%.
Embodiment 8:
The present embodiment prepares perovskite solar cell by the mode that embodiment 6 is identical
Difference is:
1, in step b1 with iodine carbonamidine HC (NH 2) 2i powder is as gaseous sources, preparation method is: the hydriodic acid aqueous solution mixing by 4g formamidine acetate and 13.2g mass concentration being 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying described reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, centrifugal being precipitated is carried out to solid phase, to precipitation vacuumize 24h, obtain iodine carbonamidine HC (NH 2) 2i powder;
2, in step b3, gaseous sources position place is heated to 180 DEG C, and reactant position place is heated 70 DEG C, and reaction 40min, obtains the HC (NH as perovskite light absorbing zone film 2) 2pbI 3film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 3%.
Embodiment 9:
The present embodiment prepares perovskite solar cell by the mode that embodiment 8 is identical:
Difference is: in step b3, gaseous sources position place is heated to 180 DEG C, and reactant position place is heated 100 DEG C, and reaction 40min, obtains the HC (NH as perovskite light absorbing zone film 2) 2pbI 3film; Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 4%.
Embodiment 10
The present embodiment prepares perovskite solar cell by the method that embodiment 2 is identical, and difference is:
With PbCl in step b2 2film is as reactant, and preparation method is: electron transfer layer substrate being placed in plated film position, thermal evaporation deposition system vacuum chamber top, being placed on as evaporation source in crucible using 1g lead chloride, is 10 in vacuum degree -4during Pa, start plated film, the plated film time is 10min, then takes out substrate, both obtains PbCl 2film.
In step b3, gaseous sources position place is heated to 180 DEG C, and reactant position place is heated 70 DEG C, and reaction 40min, obtains the CH as perovskite light absorbing zone film 3nH 3pbI 3film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 10%.
Embodiment 11
The present embodiment prepares perovskite solar cell by the method that embodiment 10 is identical, and difference is:
In step b3, gaseous sources position place is heated to 180 DEG C, and reactant position place is heated 100 DEG C, and reaction 40min, obtains the CH as perovskite light absorbing zone film 3nH 3pbI 3film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 8%.
Embodiment 12
The present embodiment prepares perovskite solar cell by the method that embodiment 10 is identical, and difference is:
With SnI in step b2 2film is as reactant, and preparation method is: described electron transfer layer substrate being placed in plated film position, thermal evaporation deposition system vacuum chamber top, being placed on as evaporation source in crucible using 1g stannous iodide, is 10 in vacuum degree -4during Pa, start plated film, the plated film time is 10min, then takes out substrate, both obtains SnI 2film.
In step b3, gaseous sources position place is heated to 180 DEG C, and reactant position place is heated 70 DEG C, and reaction 40min, obtains the CH as perovskite light absorbing zone film 3nH 3snI 3film;
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 2%.
Embodiment 13
The present embodiment prepares perovskite solar cell by the mode that embodiment 2 is identical:
Difference is: with chloromethane amine CH in step b1 3h 3cl powder and iodine methylamine CH 3h 3i powder in mass ratio 1:1 mixes as gaseous sources.
Calculating the conversion efficiency obtaining the present embodiment gained perovskite solar cell is 12%.

Claims (8)

1. a chemical gas-phase deposition process for preparing for perovskite solar cell, is characterized in that carrying out as follows:
A, FTO film institute deposition compact layer TiO on the whole at FTO electro-conductive glass 2film is as electron transfer layer;
B, prepare perovskite light absorbing zone film by chemical vapour deposition technique on the electron transport layer;
C, on described perovskite light absorbing zone film, prepare 2,2', 7,7'-tetra-[N, N-bis-(4-methoxyphenyl) is amino]-9,9'-spiral shell two fluorenes layers as hole transmission layer;
D, on the hole transport layer evaporation Ag electrode or Au electrode, as top electrode, obtain perovskite solar cell.
2. preparation method according to claim 1, is characterized in that: described perovskite light absorbing zone film is the AMX with perovskite crystal structure 3film, wherein A is the organic or inorganic group of cation radius at 0.164nm ~ 0.259nm; M is Pb, Sn or Pb xsn 1-xalloy; X is halogen.
3. preparation method according to claim 2, is characterized in that: described cation radius is methylamine CH at the organic or inorganic group of 0.164nm ~ 0.259nm 3nH 3or carbonamidine HC (NH 2) 2.
4. preparation method according to claim 1, is characterized in that: described electric transmission layer thickness is 20 ~ 100nm; Described perovskite light absorbing zone film thickness is 100 ~ 3000nm; Described thickness of hole transport layer is 20 ~ 500nm; Described top electrode thickness is 50 ~ 150nm.
5. preparation method according to claim 1, is characterized in that:
Step a is at the FTO film institute deposition compact layer TiO on the whole of FTO electro-conductive glass 2film as the method for electron transfer layer is:
Method one: FTO electro-conductive glass FTO film spin coating concentration be on the whole the isopropyl titanate ethanolic solution of 0.24mol/L, at 450 ~ 500 DEG C, sinter 30 ~ 60min in air, be then soaked in the TiCl of 40mM 4in the aqueous solution, 70 DEG C of process 30min, finally sinter 30 ~ 60min again, obtain compacted zone TiO at 450 ~ 500 DEG C of temperature 2film;
Method two: by TiCl 4be added drop-wise in absolute ethyl alcohol, and then add phenmethylol and obtain yellow solution, described TiCl 4, absolute ethyl alcohol and phenmethylol volume ratio be 1:4:20; Described yellow solution water-bath 8h at 80 DEG C is obtained milky white solution, in described milky white solution, adds extracted with diethyl ether go out TiO to be cleaned 2precipitation, successively with ethanol and the described TiO to be cleaned of ether cleaning 2precipitation, then centrifugal acquisition TiO 2precipitation;
By described TiO 2in ethanol, obtaining concentration is 3 ~ 15mg/ml TiO in precipitation dispersion 2alcohol dispersion liquid, then TiO described in 10ml 2alcohol dispersion liquid in add two (acetylacetone based) diisopropyl titanate esters of 0.1 ~ 0.3ml as stabilizer, obtain TiO 2spin coating liquid;
At the FTO film institute TiO described in spin coating on the whole of FTO electro-conductive glass 2spin coating liquid, namely the 30min that then anneals at 150 DEG C obtains compacted zone TiO 2film.
6. the preparation method according to claim 1,2 or 3, is characterized in that:
The method that step b prepares perovskite light absorbing zone film by chemical vapour deposition technique is on the electron transport layer:
Prepare PbI on the electron transport layer 2film, SnI 2film or PbCl 2film, as reactant, is positioned over the thermal treatment zone place of two temperature-area tubular furnace;
With iodine methylamine CH 3nH 3i, chloromethane amine CH 3nH 3cl, bromine methylamine CH 3nH 3br, iodine carbonamidine HC (NH 2) 2i, chloromethane amidine HC (NH 2) 2cl or bromine carbonamidine HC (NH 2) 2br as gaseous sources, or with iodine methylamine CH 3nH 3i and chloromethane amine CH 3nH 3described gaseous sources, as gaseous sources, is positioned over another thermal treatment zone place of two temperature-area tubular furnace by the mixture of Cl;
Described gaseous sources position is heated to 100 ~ 300 DEG C, described reactant position is heated to 50 ~ 300 DEG C simultaneously, namely isothermal reaction 10 ~ 300min obtains perovskite light absorbing zone film.
7. preparation method according to claim 6, is characterized in that:
Described iodine methylamine CH 3nH 3i is prepared as follows: the hydriodic acid aqueous solution mixing of to be the methylamine alcohol solution of 33wt% and 10mL mass concentration by 24mL mass concentration be 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain iodine methylamine CH 3nH 3i powder;
Described chloromethane amine CH 3nH 3cl is prepared as follows: the HCl aqueous solution of to be the methylamine alcohol solution of 33wt% and 10mL mass concentration by 24mL mass concentration be 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain chloromethane amine CH 3nH 3cl powder;
Described bromine methylamine CH 3nH 3br is prepared as follows: the HBr aqueous solution of to be the methylamine alcohol solution of 33wt% and 10mL mass concentration by 24mL mass concentration be 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain bromine methylamine CH 3nH 3br powder;
Described iodine carbonamidine HC (NH 2) 2i is prepared as follows: the hydriodic acid aqueous solution mixing by 4g formamidine acetate and 13.2g mass concentration being 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain iodine carbonamidine HC (NH 2) 2i powder;
Described chloromethane amidine HC (NH 2) 2cl is prepared as follows: the HCl aqueous solution by 4g formamidine acetate and 13.2g mass concentration being 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain chloromethane amidine HC (NH 2) 2cl powder;
Described bromine carbonamidine HC (NH 2) 2br is prepared as follows: the HBr aqueous solution by 4g formamidine acetate and 13.2g mass concentration being 45wt%, reaction 2h obtains reactant liquor, 60 DEG C of precipitations obtained after drying reactant liquor are dissolved in 80mL ethanol, add 300mL ether more wherein to extract as extractant, collect solid phase, carry out centrifugal or suction filtration to solid phase to be precipitated, to precipitation vacuumize 24h, obtain bromine carbonamidine HC (NH 2) 2br powder;
Described PbI 2the preparation method of film is: compound concentration is the PbI of 1M 2dMF solution or PbI 2dMSO solution, and be heated to 70 DEG C, obtain PbI for subsequent use 2spin coating liquid; PbI for subsequent use described in spin coating on the electron transport layer 2spin coating liquid, and then the 10 ~ 30min that anneals at 70 DEG C, obtain PbI 2film;
Described PbCl 2film and described SnI 2film takes the method for thermal evaporation plated film to obtain.
8. preparation method according to claim 4, is characterized in that:
Step c prepares 2 on described perovskite light absorbing zone film, 2', 7,7'-tetra-[N, N-bis-(4-methoxyphenyl) is amino]-9,9'-spiral shell two fluorenes layer as the method for hole transmission layer is: by 72.3mg 2,2', 7,7'-tetra-[N, N-bis-(4-methoxyphenyl) is amino]-9,9'-spiral shell two fluorenes is dissolved in 1mL chlorobenzene, add the acetonitrile solution that 17.5 μ L concentration are two trifluoromethanesulfonimide lithiums of 520mg/mL, then add 28.8 μ L 4-tert .-butylpyridine, obtain hole transmission layer spin coating liquid; On described perovskite light absorbing zone film, hole transmission layer spin coating liquid described in spin coating, obtains hole transmission layer.
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