CN104332430A - Silicon chip online weighing control system and control method thereof - Google Patents
Silicon chip online weighing control system and control method thereof Download PDFInfo
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- CN104332430A CN104332430A CN201410448204.1A CN201410448204A CN104332430A CN 104332430 A CN104332430 A CN 104332430A CN 201410448204 A CN201410448204 A CN 201410448204A CN 104332430 A CN104332430 A CN 104332430A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 198
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 197
- 239000010703 silicon Substances 0.000 title claims abstract description 197
- 238000005303 weighing Methods 0.000 title claims abstract description 182
- 238000000034 method Methods 0.000 title claims abstract description 91
- 238000012545 processing Methods 0.000 claims abstract description 97
- 238000001514 detection method Methods 0.000 claims abstract description 4
- 230000008569 process Effects 0.000 claims description 71
- 230000007704 transition Effects 0.000 claims description 67
- 230000005540 biological transmission Effects 0.000 claims description 55
- 230000032258 transport Effects 0.000 claims description 51
- 238000007599 discharging Methods 0.000 claims description 40
- 208000020442 loss of weight Diseases 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000013016 damping Methods 0.000 claims description 7
- 230000033001 locomotion Effects 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 6
- 230000002159 abnormal effect Effects 0.000 claims description 4
- 238000003032 molecular docking Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000005457 optimization Methods 0.000 claims description 3
- 230000007115 recruitment Effects 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 230000001502 supplementing effect Effects 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 2
- 230000007363 regulatory process Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000010835 comparative analysis Methods 0.000 abstract description 4
- 210000001503 joint Anatomy 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 235000008216 herbs Nutrition 0.000 description 4
- 210000002268 wool Anatomy 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000004579 marble Substances 0.000 description 1
- 230000003020 moisturizing effect Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000001256 tonic effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Automation & Control Theory (AREA)
- Weight Measurement For Supplying Or Discharging Of Specified Amounts Of Material (AREA)
Abstract
The invention discloses a silicon chip online weighing control system which includes a processing device used for carrying out technological processing on a silicon chip, and a feed weighing system and a discharge weighing system, which are arranged at the two ends of the processing device and are in butt joint with the processing device. All of the feed and discharge weighing systems and the processing device are connected with a central processing system. The central processing system controls the feed and discharge weighing systems to weigh and transport the silicon chip and records weight data fed back by the feed and discharge weighing systems and calculates a reduction weight before and after a silicon chip technological processing and then compares a reduction weight with a standard reduction weight so as to judge whether the reduction weight is normal and then adjusts processing parameters of the processing device according to the judgment result. The invention also discloses a control method for the silicon chip online weighing control system. The system is capable of realizing automatic online detection of silicon chip weights before and after processing and carries out automatic comparative analysis and adjustment of the processing parameters through the central processing control system so that the production quality and production efficiency of the silicon chip are improved.
Description
Technical field
The present invention relates to photovoltaic industry cleaning equipment and wet processing apparatus, particularly relate to a kind of silicon chip online weighing control system and control method thereof.
Background technology
In the cleaning process and wet treatment flow process of solar silicon wafers, especially making herbs into wool and wet-etching technology flow process, silicon chip loss of weight is one of key factor directly reflecting its making herbs into wool and etching effect, and the test of silicon chip loss of weight is at present depend on to complete manually completely, concrete grammar first silicon chip is taken weighed amount on electronic scale on one side and records, then put to corresponding treatment facility and carried out PROCESS FOR TREATMENT, the weight after same electronic scale weighing up process is taken again after processing, its loss of weight amount is calculated with weight one_to_one corresponding before treatment, the technological parameter adjusting relevant device is removed again according to loss of weight amount, when apparatus and process adjust enter batch production time, the above process that repeats of not timing is also needed to inspect by random samples to guarantee that exception does not appear in PROCESS FOR TREATMENT to silicon chip.
Not only loaded down with trivial details with upper type, but also can not ensure that abnormal energy Timeliness coverage appears in technique when producing in batches completely, thus bad of this operation may be caused to flow to subsequent processing, finally cause the cell piece occurring that large batch of photoelectric conversion efficiency is low.
Therefore, the silicon chip weight before and after a kind of on-line checkingi process, automatically comparative analysis how is designed and the silicon chip online weighing control system of adjusting process parameter and control method thereof the technical problem that to be industry urgently to be resolved hurrily.
Summary of the invention
For solving the problems of the technologies described above, the present invention proposes silicon chip weight before and after a kind of on-line checkingi process, automatically comparative analysis and the silicon chip online weighing control system of adjusting process parameter and control method thereof.
The technical solution used in the present invention is, design a kind of silicon chip online weighing control system, comprise: for carrying out process equipment and the central processing unit of PROCESS FOR TREATMENT to silicon chip, the two ends of described process equipment are provided with the charging weighing system and discharging weighing system that dock with it, and described charging and discharging weighing system is all connected with central processing unit; Described charging weighing system and discharging weighing system include: successively docking arrange the aligning apparatus for silicon chip material loading and alignment, the weighing device of weighing for silicon chip, for by the transition apparatus of the silicon chip smooth transfer after having weighed to next process equipment; Described central processing unit controls charging and discharging weighing system and weighs to silicon chip and transmit, the weight data of record charging and discharging weighing system feedback the loss of weight amount calculated before and after silicon chip PROCESS FOR TREATMENT, then the loss of weight amount calculated and standard loss of weight amount are contrasted and judge whether exception, adjust according to the technological parameter of judged result to process equipment.
Described aligning apparatus comprises: at least one group of alignment transmission channel, described alignment transmission channel is provided with: support, parallel being located on support transports belt for two alignment of transporting silicon chip, the alignment motor of belt movement is transported for driving described two alignment, be located at first and second sense switch that belt head and the tail two ends are transported in alignment respectively, the second sense switch often in group alignment transmission channel is in same position and is provided with the motor that independently aligns.
Described weighing device comprises: the transmission channel of weighing coordinated with transmission channel quantity of aliging, described transmission channel of weighing is provided with: centre is provided with through hole and liftablely props up platform, parallel being located at props up on platform for two weighing transport belt of transporting silicon chip, weigh for driving described two and transport the motor of weighing of belt, fixedly stretch out through hole and lower than the LOAD CELLS of transporting belt end face of weighing, the 3rd sense switch propped up on platform is adjacent to mutually with LOAD CELLS, be located at the cylinder propping up platform base, be located at the 4th sense switch propped up outside platform; 4th sense switch is provided with upper and lower two detection positions.
Described transition apparatus comprises: the transition transmission channel coordinated with transmission channel quantity of aliging, and described transition transmission channel comprises: support, parallel being located on support transport belt, for driving described two transition to transport the adjustable speed transition motor of belt movement, being located at the 5th sense switch that belt tail end is transported in transition for two transition of transporting silicon chip.
First and second sense switch controls the on off state of alignment motor, 3rd sense switch controls to weigh the on off state of motor, the on off state of the 3rd sense switch and the 4th sense switch co-controlling cylinder, 5th sense switch controls the on off state of transition motor, and the second sense switch, the 3rd sense switch are all connected with central processing unit with the 5th sense switch.
Described charging and discharging weighing system also comprises: be installed on below weighing device for reducing vibrations damping device, be installed on weighing device both sides for reducing the wind-proof device of air-flow.
Described damping device comprises: be fixed on the foot rest on ground, the beam be located on foot rest, the balancing weight be located on beam, the mounting bracket be located on balancing weight, and described LOAD CELLS is fixedly installed on described mounting bracket; Described wind-proof device comprises: be fixed at the translucent cover of weighing in transmission channel, and described translucent cover end face machine surrounding sealing, the side that described translucent cover coordinates with transmission channel two ends of weighing respectively is provided with the breach holding silicon chip and pass in and out.
Described central processing system comprises: central processing unit, with the display alarm module, supervisory control system and the database that are connected central processing unit and connect, the running status of described supervisory control system monitoring charging and discharging weighing system, whether described central processing unit judges to subtract weight data abnormal.
Present invention also offers a kind of control method of above-mentioned silicon chip online weighing control system, comprise the following steps:
Step 1, startup optimization, system initialization;
Step 2, artificial or automatics are to charging weighing system material loading;
The silicon chip often organized in transmission channel is all transported to the second sense switch place by the aligning apparatus of step 3, charging weighing system, then transports silicon chip to charging weighing device;
Silicon chip is transported to weighing positions and weighs by step 4, charging weighing device, and central processing unit is preserved weight data, and charging weighing device continues to transport silicon chip backward;
Silicon chip transition is transported to next process equipment by step 5, charging transition apparatus;
Step 6, process equipment carry out PROCESS FOR TREATMENT to silicon chip, then transport silicon chip to discharging weighing system;
The silicon chip often organized in transmission channel is all transported to the second sense switch place by the aligning apparatus of step 7, discharging weighing system, then transports silicon chip to discharging weighing device;
Silicon chip is transported to weighing positions and weighs by step 8, discharging weighing device, central processing unit is preserved weight data and is analyzed the weight data before and after PROCESS FOR TREATMENT and judges, adjust according to the technological parameter of judged result to process equipment, and discharging weighing device continues to transport silicon chip backward;
Silicon chip transition is transported to next process equipment by step 9, discharging transition apparatus.
The silicon chip transport alignment procedure of described step 7 is identical with step 3, and described step 3 comprises:
First sense switch of step 3.1, certain group transmission channel detects silicon chip;
Step 3.2, the alignment motor started in this transmission channel, transmit rearward silicon chip at a high speed;
Step 3.3, the second sense switch stop the alignment motor of this transmission channel after detecting that silicon chip arrives;
Step 3.4, all silicon chip detected when often organizing the second sense switch, or wherein several groups there is no silicon chip but the first sense switch does not detect new silicon chip charging in setting-up time time, carry out step 3.5, otherwise returns step 3.2;
Step 3.5, all alignment motors start simultaneously, the electric motor starting of weighing of weighing device, transport silicon chip to charging weighing device, and central processing unit carries out record to often organizing silicon chip simultaneously;
Step 3.6, alignment motor stop after the second sense switch loss signal.
Wherein, described step 4 comprises:
Step 4.1, motor of weighing transport silicon chip backward, after the 3rd sense switch detects that silicon chip arrives, and motor stalls of weighing;
Step 4.2, central processing unit confirm that whether the silicon chip that the 3rd sense switch detects is consistent with record silicon chip quantity, inconsistent then alarm;
Step 4.3, cylinder decline, and make silicon chip fall within LOAD CELLS, and the 4th sense switch detects and props up platform arrival bottom, and cylinder stops;
Step 4.4, central processing unit read weight data, and each scan period records a weight data, removes the invalid data of large deviation simultaneously, when valid data reach set point number, calculates averaged weight value, and is stored to database;
Step 4.5, weighed, cylinder rises, and the 4th sense switch detects and props up platform and arrive upper, and cylinder stops, electric motor starting of weighing, the electric motor starting of transition simultaneously;
Step 4.6, motor of weighing stop after the 3rd sense switch loss signal.
Wherein, described step 8 comprises:
Step 8.1, motor of weighing transport silicon chip backward, after the 3rd sense switch detects that silicon chip arrives, and motor stalls of weighing;
Step 8.2, central processing unit confirm that whether the silicon chip that the 3rd sense switch detects is consistent with record silicon chip quantity, inconsistent then alarm;
Step 8.3, cylinder decline, and make silicon chip fall within LOAD CELLS, and the 4th sense switch detects and props up platform arrival bottom, and cylinder stops;
Step 8.4, central processing unit read weight data, each scan period records a weight data, remove the invalid data of large deviation simultaneously, when valid data reach set point number, calculate averaged weight value, and be stored to database, and the weight data before and after PROCESS FOR TREATMENT be analyzed and judge, adjust according to the technological parameter of judged result to process equipment;
Step 8.5, weighed, cylinder rises, and the 4th sense switch detects and props up platform and arrive upper, and cylinder stops, electric motor starting of weighing, the electric motor starting of transition simultaneously;
Step 8.6, motor of weighing stop after the 3rd sense switch loss signal.
Wherein, it is identical that process is transported in described step 9 and the silicon chip transition of step 5, and described step 5 comprises:
Step 5.1, transition motor transport silicon chip backward, and when the 5th sense switch detects silicon chip, transition motor is regulated the speed and to be consistent with the travelling speed of process equipment;
Step 5.2, central processing unit confirm that whether silicon chip quantity is identical with record quantity, inconsistent then alarm;
Step 5.3, transition motor stop after the 5th sense switch loss signal.
Wherein, described step 8.4 comprises:
Step 8.4.1, central processing unit read weight data;
Step 8.4.2, each scan period record a weight data, remove the invalid data of large deviation simultaneously;
Step 8.4.3, when valid data reach set point number, calculate averaged weight value, and be stored to database;
The weight data before and after same silicon chip PROCESS FOR TREATMENT transferred by step 8.4.4, central processing unit, compares and draws loss of weight amount, and loss of weight amount shows in real time with curve mode, is stored to database simultaneously;
Step 8.4.5, actual loss of weight amount and preset standard value compare, if subtract gravimetric anomaly, carry out step 7.4.6, otherwise do not carry out;
Step 8.4.6, judge to need supplementary liquid or water according to difference, and calculate magnitude of recruitment according to default formula;
Step 8.4.7, process equipment carry out supplementing of liquid or water to treatment trough.
Compared with prior art, the present invention can realize silicon chip weight before and after automatic on-line check processing, by the automatic comparative analysis of central process control system and adjusting process parameter, improve the quality of production and the production efficiency of silicon chip.
Accompanying drawing explanation
Below in conjunction with embodiment and accompanying drawing, the present invention is described in detail, wherein:
Fig. 1 is Whole Work Flow schematic diagram of the present invention;
Fig. 2 is entry/exit material weighing system structural front view of the present invention;
Fig. 3 is entry/exit material weighing system structure vertical view of the present invention;
Fig. 4 is that weighing device of the present invention is in upper schematic diagram;
Fig. 5 is that weighing device of the present invention is in the next schematic diagram;
Fig. 6 is the entry/exit material weighing system structural front view after the present invention installs wind-proof device;
Fig. 7 is system initialization workflow diagram of the present invention;
Fig. 8 is the workflow schematic diagram of entry/exit material aligning apparatus of the present invention;
Fig. 9 is the schematic flow sheet of weighing of charging weighing device of the present invention;
Figure 10 is the schematic flow sheet of weighing of discharging weighing device of the present invention;
Figure 11 is the workflow schematic diagram of entry/exit material transition apparatus of the present invention;
Figure 12 is that loss of weight amount of the present invention judges and technical arrangement plan schematic flow sheet.
Embodiment
The silicon chip online weighing control system that the present invention proposes, twice measurement is carried out by the weight untreated and processed to silicon chip, contrast the loss of weight amount of twice measurement, contrast according to loss of weight amount and standard loss of weight amount judges whether exception, and technological parameter is adjusted, loss of weight amount is made to recover normal range (NR), especially online weighing control is carried out for the making herbs into wool of silicon chip and wet-etching technology flow process, established technology equipment is making herbs into wool or wet-method etching equipment, this kind of process equipment is typically provided with conveyer belt, rinse bath, water pipe and drug liquid tube, technological parameter is the liquor strength in rinse bath, water or liquid is added to rinse bath by water pipe or drug liquid tube, thus change rinse bath liquor strength, improve the silicon chip quality of production.
As shown in Figure 1, specifically comprise: for carrying out the process equipment of PROCESS FOR TREATMENT to silicon chip, the two ends of process equipment are provided with the charging weighing system and discharging weighing system that dock with it, and charging and discharging weighing system is all connected with central processing system with process equipment; Central processing system controls charging and discharging weighing system and weighs to silicon chip and transmit, the weight data of record charging and discharging weighing system feedback the loss of weight amount calculated before and after silicon chip PROCESS FOR TREATMENT, then the loss of weight amount calculated and standard loss of weight amount are contrasted and judge whether exception, adjust according to the technological parameter of judged result to process equipment.
Central processing system comprises: central processing unit, with the display alarm module, supervisory control system and the database that are connected central processing unit and connect, the running status of supervisory control system monitoring charging and discharging weighing system, whether central processing unit judges to subtract weight data abnormal, and database is shared at local server.Central processing unit can adopt PLC (Programmable Logic Controller).Display alarm module comprises display and sound-producing device.When central processing unit judges loss of weight data exception, then send alarm signal with the form such as word, sound and point out, central processing unit can adjust various process parameters automatically according to the formula preset simultaneously, makes loss of weight amount automatically reply normal range (NR).Supervisory control system by input and output material weight data, loss of weight data etc. all stored in database, can export result to facilitate, show and inquires about at any time.
As shown in Figure 2, charging weighing system and discharging weighing system include: successively docking arrange the aligning apparatus 1 for silicon chip material loading and alignment, the weighing device 2 of weighing for silicon chip, for by the transition apparatus 3 of the silicon chip smooth transfer after having weighed to next processing equipment, central processing system is located in electric appliance control box 6.
Wherein, as shown in Figure 3, aligning apparatus 1 comprises: at least one group of alignment transmission channel, alignment transmission channel is provided with: support, parallel being located on support transports belt 13 for two alignment of transporting silicon chip, the alignment motor 12 transporting belts 13 for driving two alignment and move, being located at alignment respectively and transporting belt 13 head and the tail two ends and first and second sense switch transporting belt 13 end face lower than alignment; The second sense switch 11 often in group alignment transmission channel is in same position and is provided with the motor 12 that independently aligns, and first and second sense switch controls the on off state of alignment motor 12, and the second sense switch 11 is connected with central processing unit.First sense switch 10 transports on belt 13 head end whether have silicon chip for detecting alignment, and startup alignment motor 12 transmits rearward silicon chip, when silicon chip arrives the second sense switch 11, alignment motor 12 stops the rotation, all stop on the second sense switch 11 when often organizing silicon chip, or wherein several groups there is no silicon chip but this group first sense switch 10 has not detected silicon chip charging in setting-up time time, alignment motor 12 starts simultaneously silicon chip is sent to weighing device 2, and central processing unit carries out record to often organizing silicon chip simultaneously.
As shown in Fig. 3 to 5, weighing device 2 comprises: the transmission channel of weighing coordinated with transmission channel quantity of aliging, transmission channel of weighing is provided with: centre is provided with through hole and liftablely props up platform 25, parallel be located at prop up on platform 25 for transport silicon chip two weigh transport belt 23, weigh for driving two and transport the motor 22 of weighing of belt 23, fixedly stretch out through hole and lower than the LOAD CELLS 20 of transporting belt 23 end face of weighing, be adjacent to mutually with LOAD CELLS 20 and prop up on platform 25 and transport the 3rd sense switch 21 of belt 23 end face lower than weighing, be located at the cylinder 27 propping up platform 25 bottom surface, be located at the 4th sense switch 29 propped up outside platform 25, 4th sense switch 29 is provided with upper and lower two detection positions, often group transmission channel of weighing is driven by same motor 22 of weighing simultaneously, 3rd sense switch 21 controls to weigh the on off state of motor 22, the on off state of the 3rd sense switch 21 and the 4th sense switch 29 co-controlling cylinder 27, the 3rd sense switch 21 is connected with central processing unit.When the 3rd sense switch 21 detects silicon chip, motor 22 of weighing stops the rotation, whether the silicon chip that central processing unit contrast the 3rd sense switch 21 detects is consistent with the silicon chip quantity recorded in central processing unit, inconsistent, alarm module is reported to the police, cylinder 27 drive props up platform 25 and declines, make silicon chip depart from weigh transport belt 23 fall within LOAD CELLS 20, 4th sense switch 29 detects and props up platform 25 when arriving bottom, silicon chip is placed in LOAD CELLS 20 completely, cylinder 27 stop motion, after having weighed, cylinder 27 starts drive and props up platform 25 and rise, 4th sense switch 29 detect prop up platform 25 arrive upper after, motor 22 of weighing starts silicon chip is sent to transition apparatus 3.
As shown in Figure 3, transition apparatus 3 comprises: the transition transmission channel coordinated with transmission channel quantity of aliging, and transition transmission channel comprises: support, parallel be located on support for two transition of transporting silicon chip transport belts 32, for drive two transition to transport belts 32 to move adjustable speed transition motor 31, be located at transition and transport belt 32 tail end and the 5th sense switch 30 transporting belt 32 end face lower than transition; Often organize transition transmission channel to be driven by same transition motor 31, the 5th sense switch 30 controls the on off state of transition motor 31, and the 5th sense switch 30 is connected with central processing unit simultaneously.When the 5th sense switch 30 detects silicon chip, adjustment rotary speed is consistent with the travelling speed of next processing equipment automatically for transition motor 31, central processing unit confirms that the silicon chip quantity that the 5th sense switch 30 detects is identical with the quantity of central processing unit record simultaneously, not identical then alarm module is reported to the police, and silicon chip is sent to next processing equipment.
Transmission channel can be arranged according to the transmission channel quantity of processing equipment, also can arrange according to actual needs, in the present embodiment, aligning apparatus is provided with five groups of alignment transmission channels, the course of work is as follows, receive and start movement instruction, as shown in Figure 7, central processing unit calls initialize routine and carries out self-inspection and initialization to control system parts.After artificial or automatics material loading, first sense switch 10 detects silicon chip, start alignment motor 12 and be sent to the second sense switch 11, alignment motor 12 suspends, after silicon chip alignment, alignment motor 12 starts silicon chip is sent to weighing device 2, motor 22 of weighing starts simultaneously, when silicon chip is transferred into the 3rd sense switch 21, motor 22 of weighing suspends, cylinder 27 starts drive and props up the bottom that platform 25 drops to the 4th sense switch 29, LOAD CELLS 20 pairs of silicon chips are weighed, after having weighed, cylinder 27 starts drive and props up platform 25 and rise, when the 4th sense switch 29 confirms that propping up platform 25 arrives upper, motor 22 of weighing starts silicon chip is sent to transition apparatus 3, transition motor 31 starts simultaneously, when silicon chip is transferred into the 5th sense switch 30, adjustment rotary speed is consistent with the travelling speed of next processing equipment automatically for transition motor 31, continue to be fed forward with this speed, until the 5th sense switch signal 30, transition motor 31 quits work.Above-mentioned motion flow has all been controlled by central processing unit.In addition, central processing unit is the responsible collection to weight data, analysis also, and output feedback signal, to the processing equipment docked with it, makes it complete the automatic adjustment of technological parameter as required.
More excellent, in order to ensure the accuracy of weighing of weighing system, charging and discharging weighing system also comprises: being installed on below weighing device for reducing the damping device 4 of vibrations, being installed on weighing device both sides for reducing the wind-proof device 5 of air-flow.
Wherein, as shown in Figure 5,6, damping device 4 comprises: be fixed on the foot rest 43 on ground, the beam 41 be located on foot rest, the balancing weight 42 be located on beam, the mounting bracket 40 be located on balancing weight, LOAD CELLS 20 is fixedly installed on mounting bracket 40, beam 41 adopts silica gel material to make, and can reduce the impact of vibrations on weighing data, balancing weight 42 adopts marble, can filter further and conduct by ground the vibrations come, make vibrations more steady.Wind-proof device 5 comprises: be fixed at the translucent cover of weighing in transmission channel, translucent cover end face machine surrounding seals, the side that translucent cover coordinates with transmission channel two ends of weighing respectively is provided with the breach holding silicon chip and pass in and out, translucent cover can effectively barrier air for the impact of weighing data, the position of the corresponding LOAD CELLS of translucent cover is provided with opening, opening part is provided with can the door of switch, is carrying out calibration operation whenever necessary to facilitate to LOAD CELLS.Damping device and wind-proof device heighten weighing precision to greatest extent, make weighing system better be applicable to the application scenario of milligram level.
Present invention also offers a kind of control method of above-mentioned silicon chip online weighing control system, comprise the following steps:
Step 1, startup optimization, system initialization;
Step 2, artificial or automatics are to charging weighing system material loading;
The silicon chip often organized in transmission channel is all transported to the second sense switch place by the aligning apparatus of step 3, charging weighing system, then transports silicon chip to charging weighing device;
Silicon chip is transported to weighing positions and weighs by step 4, charging weighing device, and central processing unit is preserved weight data, and charging weighing device continues to transport silicon chip backward;
Silicon chip transition is transported to next process equipment by step 5, charging transition apparatus;
Step 6, process equipment carry out PROCESS FOR TREATMENT to silicon chip, then transport silicon chip to discharging weighing system;
The silicon chip often organized in transmission channel is all transported to the second sense switch place by the aligning apparatus of step 7, discharging weighing system, then transports silicon chip to discharging weighing device;
Silicon chip is transported to weighing positions and weighs by step 8, discharging weighing device, central processing unit is preserved weight data and is analyzed the weight data before and after PROCESS FOR TREATMENT and judges, adjust according to the technological parameter of judged result to process equipment, and discharging weighing device continues to transport silicon chip backward;
Silicon chip transition is transported to next process equipment by step 9, discharging transition apparatus.
As shown in Figure 8, the silicon chip transport alignment procedure of step 7 is identical with step 3, and step 3 comprises:
First sense switch of step 3.1, certain group transmission channel detects silicon chip;
Step 3.2, the alignment motor started in this transmission channel, transmit rearward silicon chip at a high speed;
Step 3.3, the second sense switch stop the alignment motor of this transmission channel after detecting that silicon chip arrives;
Step 3.4, all silicon chip detected when often organizing the second sense switch, or wherein several groups there is no silicon chip but the first sense switch does not detect new silicon chip charging in setting-up time time, carry out step 3.5, otherwise returns step 3.2;
Step 3.5, all alignment motors start simultaneously, the electric motor starting of weighing of weighing device, transport silicon chip to charging weighing device, and central processing unit carries out record to often organizing silicon chip simultaneously;
Step 3.6, alignment motor stop after the second sense switch loss signal.
As shown in Figure 9, step 4 comprises:
Step 4.1, motor of weighing transport silicon chip backward, after the 3rd sense switch detects that silicon chip arrives, and motor stalls of weighing;
Step 4.2, central processing unit confirm that whether the silicon chip that the 3rd sense switch detects is consistent with record silicon chip quantity, inconsistent then alarm; Inconsistent explanation silicon chip drops from transmission channel in transport way, and in practical application, after alarm, central processing unit can be set to autostop, after manually silicon chip being put corresponding 3rd sense switch position, proceeds to weigh; Also can not arrange any action by central processing unit after alarm, proceed to weigh, in processing procedure of weighing, the feed weight data of this group transmission channel are vacant, take out the silicon chip dropped after manually seeing alarm;
Step 4.3, cylinder decline, and make silicon chip fall within LOAD CELLS, and the 4th sense switch detects and props up platform arrival bottom, and cylinder stops;
Step 4.4, central processing unit read weight data, and each scan period records a weight data, removes the invalid data of large deviation simultaneously, when valid data reach set point number, calculates averaged weight value, and is stored to database;
Step 4.5, weighed, cylinder rises, and the 4th sense switch detects and props up platform and arrive upper, and cylinder stops, electric motor starting of weighing, the electric motor starting of transition simultaneously;
Step 4.6, motor of weighing stop after the 3rd sense switch loss signal.
As shown in Figure 10, step 8 comprises:
Step 8.1, motor of weighing transport silicon chip backward, after the 3rd sense switch detects that silicon chip arrives, and motor stalls of weighing;
Step 8.2, central processing unit confirm that whether the silicon chip that the 3rd sense switch detects is consistent with record silicon chip quantity, inconsistent then alarm; It is identical with charging weighing device that central processing unit after alarm arranges action;
Step 8.3, cylinder decline, and make silicon chip fall within LOAD CELLS, and the 4th sense switch detects and props up platform arrival bottom, and cylinder stops;
Step 8.4, central processing unit read weight data, each scan period records a weight data, remove the invalid data of large deviation simultaneously, when valid data reach set point number, calculate averaged weight value, and be stored to database, and the weight data before and after PROCESS FOR TREATMENT be analyzed and judge, adjust according to the technological parameter of judged result to process equipment;
Step 8.5, weighed, cylinder rises, and the 4th sense switch detects and props up platform and arrive upper, and cylinder stops, electric motor starting of weighing, the electric motor starting of transition simultaneously;
Step 8.6, motor of weighing stop after the 3rd sense switch loss signal.
As shown in figure 11, it is identical that process is transported in step 9 and the silicon chip transition of step 5, and step 5 comprises:
Step 5.1, transition motor transport silicon chip backward, and when the 5th sense switch detects silicon chip, transition motor is regulated the speed and to be consistent with the travelling speed of process equipment;
Step 5.2, central processing unit confirm that whether silicon chip quantity is identical with record quantity, inconsistent then alarm; It is identical with charging weighing device that central processing unit after alarm arranges action;
Step 5.3, transition motor stop after the 5th sense switch loss signal.
As shown in figure 12, step 8.4 comprises:
Step 8.4.1, central processing unit read weight data;
Step 8.4.2, each scan period record a weight data, remove the invalid data of large deviation simultaneously;
Step 8.4.3, when valid data reach set point number, calculate averaged weight value, and be stored to database;
The weight data before and after same silicon chip PROCESS FOR TREATMENT transferred by step 8.4.4, central processing unit, compares and draws loss of weight amount, and loss of weight amount shows in real time with curve mode, is stored to database simultaneously;
Actual loss of weight amount and preset standard value compare by step 8.4.5, central processing unit, if subtract gravimetric anomaly, carry out step 8.4.6, otherwise do not carry out;
Step 8.4.6, judge to need supplementary liquid or water according to difference, and calculate magnitude of recruitment according to default formula, the criterion of the present embodiment is: loss of weight amount is greater than standard value then moisturizing, on the contrary then tonic liquid;
Step 8.4.7, process equipment carry out supplementing of liquid or water to treatment trough, have supplemented liquid after circulation after a while, repetition step 2.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a silicon chip online weighing control system, comprising: for carrying out process equipment and the central processing unit of PROCESS FOR TREATMENT to silicon chip, it is characterized in that,
The two ends of described process equipment are provided with the charging weighing system and discharging weighing system that dock with it, and described charging and discharging weighing system is all connected with central processing unit;
Described charging weighing system and discharging weighing system include: successively docking arrange the aligning apparatus for silicon chip material loading and alignment, the weighing device of weighing for silicon chip, for by the transition apparatus of the silicon chip smooth transfer after having weighed to next process equipment;
Described central processing unit controls charging and discharging weighing system and weighs to silicon chip and transmit, the weight data of record charging and discharging weighing system feedback the loss of weight amount calculated before and after silicon chip PROCESS FOR TREATMENT, then the loss of weight amount calculated and standard loss of weight amount are contrasted and judge whether exception, adjust according to the technological parameter of judged result to process equipment.
2. silicon chip online weighing control system as claimed in claim 1, it is characterized in that, described aligning apparatus comprises: at least one group of alignment transmission channel, described alignment transmission channel is provided with: support, parallel being located on support transports belt for two alignment of transporting silicon chip, the alignment motor of belt movement is transported for driving described two alignment, be located at first and second sense switch that belt head and the tail two ends are transported in alignment respectively, the second sense switch often in group alignment transmission channel is in same position and is provided with the motor that independently aligns;
Described weighing device comprises: the transmission channel of weighing coordinated with transmission channel quantity of aliging, described transmission channel of weighing is provided with: centre is provided with through hole and liftablely props up platform, parallel being located at props up on platform for two weighing transport belt of transporting silicon chip, weigh for driving described two and transport the motor of weighing of belt, fixedly stretch out through hole and lower than the LOAD CELLS of transporting belt end face of weighing, the 3rd sense switch propped up on platform is adjacent to mutually with LOAD CELLS, be located at the cylinder propping up platform base, be located at the 4th sense switch propped up outside platform; 4th sense switch is provided with upper and lower two detection positions;
Described transition apparatus comprises: the transition transmission channel coordinated with transmission channel quantity of aliging, and described transition transmission channel comprises: support, parallel being located on support transport belt, for driving described two transition to transport the adjustable speed transition motor of belt movement, being located at the 5th sense switch that belt tail end is transported in transition for two transition of transporting silicon chip;
First and second sense switch controls the on off state of alignment motor, 3rd sense switch controls to weigh the on off state of motor, the on off state of the 3rd sense switch and the 4th sense switch co-controlling cylinder, 5th sense switch controls the on off state of transition motor, and the second sense switch, the 3rd sense switch are all connected with central processing unit with the 5th sense switch.
3. silicon chip online weighing control system as claimed in claim 2, it is characterized in that, described charging and discharging weighing system also comprises: be installed on below weighing device for reducing vibrations damping device, be installed on weighing device both sides for reducing the wind-proof device of air-flow;
Described damping device comprises: be fixed on the foot rest on ground, the beam be located on foot rest, the balancing weight be located on beam, the mounting bracket be located on balancing weight, and described LOAD CELLS is fixedly installed on described mounting bracket;
Described wind-proof device comprises: be fixed at the translucent cover of weighing in transmission channel, and described translucent cover end face machine surrounding sealing, the side that described translucent cover coordinates with transmission channel two ends of weighing respectively is provided with the breach holding silicon chip and pass in and out.
4. silicon chip online weighing control system as claimed in claim 3, it is characterized in that, described central processing unit comprises: central processing unit, with the display alarm module, supervisory control system and the database that are connected central processing unit and connect, the running status of described supervisory control system monitoring charging and discharging weighing system, described central processing unit judges to subtract the whether abnormal various process parameters also automatically regulating process equipment according to the formula preset of weight data.
5. a control method for silicon chip online weighing control system as claimed in claim 1, is characterized in that, comprise the following steps:
Step 1, startup optimization, system initialization;
Step 2, artificial or automatics are to charging weighing system material loading;
The silicon chip often organized in transmission channel is all transported to the second sense switch place by the aligning apparatus of step 3, charging weighing system, then transports silicon chip to charging weighing device;
Silicon chip is transported to weighing positions and weighs by step 4, charging weighing device, and central processing unit is preserved weight data, and charging weighing device continues to transport silicon chip backward;
Silicon chip transition is transported to next process equipment by step 5, charging transition apparatus;
Step 6, process equipment carry out PROCESS FOR TREATMENT to silicon chip, then transport silicon chip to discharging weighing system;
The silicon chip often organized in transmission channel is all transported to the second sense switch place by the aligning apparatus of step 7, discharging weighing system, then transports silicon chip to discharging weighing device;
Silicon chip is transported to weighing positions and weighs by step 8, discharging weighing device, central processing unit is preserved weight data and is analyzed the weight data before and after PROCESS FOR TREATMENT and judges, adjust according to the technological parameter of judged result to process equipment, and discharging weighing device continues to transport silicon chip backward;
Silicon chip transition is transported to next process equipment by step 9, discharging transition apparatus.
6. control method as claimed in claim 5, is characterized in that, the silicon chip transport alignment procedure of described step 7 is identical with step 3, and described step 3 comprises:
First sense switch of step 3.1, certain group transmission channel detects silicon chip;
Step 3.2, the alignment motor started in this transmission channel, transmit rearward silicon chip at a high speed;
Step 3.3, the second sense switch stop the alignment motor of this transmission channel after detecting that silicon chip arrives;
Step 3.4, all silicon chip detected when often organizing the second sense switch, or wherein several groups there is no silicon chip but the first sense switch does not detect new silicon chip charging in setting-up time time, carry out step 3.5, otherwise returns step 3.2;
Step 3.5, all alignment motors start simultaneously, the electric motor starting of weighing of weighing device, transport silicon chip to charging weighing device, and central processing unit carries out record to often organizing silicon chip simultaneously;
Step 3.6, alignment motor stop after the second sense switch loss signal.
7. control method as claimed in claim 6, it is characterized in that, described step 4 comprises:
Step 4.1, motor of weighing transport silicon chip backward, after the 3rd sense switch detects that silicon chip arrives, and motor stalls of weighing;
Step 4.2, central processing unit confirm that whether the silicon chip that the 3rd sense switch detects is consistent with record silicon chip quantity, inconsistent then alarm;
Step 4.3, cylinder decline, and make silicon chip fall within LOAD CELLS, and the 4th sense switch detects and props up platform arrival bottom, and cylinder stops;
Step 4.4, central processing unit read weight data, and each scan period records a weight data, removes the invalid data of large deviation simultaneously, when valid data reach set point number, calculates averaged weight value, and is stored to database;
Step 4.5, weighed, cylinder rises, and the 4th sense switch detects and props up platform and arrive upper, and cylinder stops, electric motor starting of weighing, the electric motor starting of transition simultaneously;
Step 4.6, motor of weighing stop after the 3rd sense switch loss signal.
8. control method as claimed in claim 7, it is characterized in that, described step 8 comprises:
Step 8.1, motor of weighing transport silicon chip backward, after the 3rd sense switch detects that silicon chip arrives, and motor stalls of weighing;
Step 8.2, central processing unit confirm that whether the silicon chip that the 3rd sense switch detects is consistent with record silicon chip quantity, inconsistent then alarm;
Step 8.3, cylinder decline, and make silicon chip fall within LOAD CELLS, and the 4th sense switch detects and props up platform arrival bottom, and cylinder stops;
Step 8.4, central processing unit read weight data, each scan period records a weight data, remove the invalid data of large deviation simultaneously, when valid data reach set point number, calculate averaged weight value, and be stored to database, and the weight data before and after PROCESS FOR TREATMENT be analyzed and judge, adjust according to the technological parameter of judged result to process equipment;
Step 8.5, weighed, cylinder rises, and the 4th sense switch detects and props up platform and arrive upper, and cylinder stops, electric motor starting of weighing, the electric motor starting of transition simultaneously;
Step 8.6, motor of weighing stop after the 3rd sense switch loss signal.
9. control method as claimed in claim 8, is characterized in that, it is identical that process is transported in described step 9 and the silicon chip transition of step 5, and described step 5 comprises:
Step 5.1, transition motor transport silicon chip backward, and when the 5th sense switch detects silicon chip, transition motor is regulated the speed and to be consistent with the travelling speed of process equipment;
Step 5.2, central processing unit confirm that whether silicon chip quantity is identical with record quantity, inconsistent then alarm;
Step 5.3, transition motor stop after the 5th sense switch loss signal.
10. control method as claimed in claim 9, it is characterized in that, described step 8.4 comprises:
Step 8.4.1, central processing unit read weight data;
Step 8.4.2, each scan period record a weight data, remove the invalid data of large deviation simultaneously;
Step 8.4.3, when valid data reach set point number, calculate averaged weight value, and be stored to database;
The weight data before and after same silicon chip PROCESS FOR TREATMENT transferred by step 8.4.4, central processing unit, compares and draws loss of weight amount, and loss of weight amount shows in real time with curve mode, is stored to database simultaneously;
Actual loss of weight amount and preset standard value compare by step 8.4.5, central processing unit, if subtract gravimetric anomaly, carry out step 8.4.6, otherwise do not carry out;
Step 8.4.6, judge to need supplementary liquid or water according to difference, and calculate magnitude of recruitment according to default formula;
Step 8.4.7, process equipment carry out supplementing of liquid or water to treatment trough.
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