CN104317034B - f-theta optical lens - Google Patents
f-theta optical lens Download PDFInfo
- Publication number
- CN104317034B CN104317034B CN201410457580.7A CN201410457580A CN104317034B CN 104317034 B CN104317034 B CN 104317034B CN 201410457580 A CN201410457580 A CN 201410457580A CN 104317034 B CN104317034 B CN 104317034B
- Authority
- CN
- China
- Prior art keywords
- lens
- curved surface
- curvature
- radius
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 66
- 239000000463 material Substances 0.000 claims description 17
- 239000011521 glass Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000009738 saturating Methods 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 210000001747 pupil Anatomy 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims description 2
- 238000001259 photo etching Methods 0.000 abstract description 17
- 238000000034 method Methods 0.000 abstract description 11
- 239000000758 substrate Substances 0.000 abstract description 6
- 238000013507 mapping Methods 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 239000012141 concentrate Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000011165 process development Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
Abstract
The invention provides an f-theta optical lens which comprises a first lens, a second lens, a third lens, a fourth lens and a fifth lens, wherein the first lens, the second lens, the third lens, the fourth lens and the fifth lens are arranged along the incident direction of light rays, the first lens is a concave-convex positive lens, the second lens is a biconcave negative lens, the third lens is a concave-convex positive lens, the fourth lens is a concave-convex positive lens, and the fifth lens is a plano-convex positive lens. The f-theta optical lens realizes the accurate linear mapping relation between the angle change of ultraviolet laser beams with 355nm wavelength in the range of half-field incidence angles of 0-11 degrees in the X/Y direction and the photoetching position on the substrate within the range of 0-50 mm, so that the laser beam focus is positioned more accurately, the energy distribution is more uniform and concentrated, the precision requirement of the photoetching process is met, and the f-theta optical lens has a compact structure and lower cost.
Description
Technical field
The present invention relates to optical lens design field, more particularly to a kind of F-theta optical lens.
Background technology
Traditional contact photolithography technique and projection lithography technique are required for making mask, realize litho pattern by covering
Masterplate turns over quarter to substrate, is adapted to the production technology of the big semiconductor product of batch, but for IC products research and development
Then input cost is big, expends the cycle long.
Laser direct-writing formula photoetching process need not make mask plate, and the laser beam after focusing is projected directly at the phase of substrate
Position is answered, to realize photo resist photosensitive at this, is combined with X/Y galvanometer scanning systems, is realized that focus exists by the swing of laser beam
Completing the photoetching process of full wafer, above-mentioned laser direct-writing formula photoetching process is mainly used in travelling-wave tubes sphere aperture plate for the movement of work surface
Write-through photoetching process.F-theta camera lenses are the core components for realizing laser direct-writing formula photoetching, and which is used to realize that laser beam is burnt
The relevant position for being accurately irradiated to substrate is selected, to complete the photoetching process of travelling-wave tubes grids pattern.However, with photoetching process
Development, existing f-theta camera lenses cannot meet the required precision of photoetching process.
The content of the invention
The purpose of the present invention is to propose to a kind of F-theta optical lens, realize laser beam X/Y axial directions ±
The change of 11 ° of angles and the accurate linear mapping relation of photoetching position in ± 50mm, make the positioning of laser beam foucing more accurate, energy
Amount is more evenly distributed and concentrates, and meets the required precision of photoetching process, and compact conformation, cost are relatively low.
To reach above-mentioned purpose, the present invention proposes a kind of F-theta optical lens, including along light incident direction setting
The first lens, the second lens, the 3rd lens, the 4th lens and the 5th lens, wherein, first lens are that concave-convex type is just saturating
Mirror, second lens are double concave type negative lens, and the 3rd lens are concave-convex type positive lens, and the 4th lens are concave-convex type
Plus lens, the 5th lens are planoconvex positive lens, and the focal length of the camera lens is 257mm, and Entry pupil diameters are 15mm, incident light wave
A length of 355nm, the angle of visual field are 11 °, and working (finishing) area is 100 × 100mm.
Further, in above-mentioned F-theta optical lens, first lens include relative first surface and second
Curved surface, wherein, the radius of curvature of the first surface is -485mm, and the radius of curvature of second curved surface is -155mm；It is described
The optical axis center thickness of the first lens is 10mm, and the material of first lens is quartz glass, the refraction of first lens
Rate is 1.46.
Further, in above-mentioned F-theta optical lens, second lens include relative the 3rd curved surface and the 4th
Curved surface, wherein, the radius of curvature of the 3rd curved surface is -73mm, and the radius of curvature of the 4th curved surface is 197mm；Described
The optical axis center thickness of two lens is 10mm, and the material of second lens is K9 glass, and the refractive index of second lens is
1.53。
Further, in above-mentioned F-theta optical lens, the 3rd lens include relative the 5th curved surface and the 6th
Curved surface, wherein, the radius of curvature of the 5th curved surface is -133mm, and the radius of curvature of the 6th curved surface is -90mm；Described
The optical axis center thickness of three lens is 15mm, and the material of the 3rd lens is quartz glass, the refractive index of the 3rd lens
For 1.46.
Further, in above-mentioned F-theta optical lens, the 4th lens include relative the 7th curved surface and the 8th
Curved surface, wherein, the radius of curvature of the 7th curved surface is -534mm, and the radius of curvature of the 8th curved surface is -159mm；It is described
The optical axis center thickness of the 4th lens is 20mm, and the material of the 4th lens is K9 glass, the refractive index of the 4th lens
For 1.53.
Further, in above-mentioned F-theta optical lens, the 5th lens include relative zigzag face and the tenth
Curved surface, wherein, the radius of curvature in the zigzag face is infinity, and the radius of curvature of the tenth curved surface is -133mm；It is described
The optical axis center thickness of the 5th lens is 30mm, and the material of the 5th lens is K9 glass, the refractive index of the 5th lens
For 1.53.
Further, in above-mentioned F-theta optical lens, first lens with the distance of laser scanning galvanometer are
Between 30-50mm.
Further, in above-mentioned F-theta optical lens, the first described lens and the second lens on optical axis away from
From for 50mm, the distance of second lens and the 3rd lens on optical axis is 15mm, and the 3rd lens and the 4th lens exist
Distance on optical axis is 12mm, and the distance of the 4th lens and the 5th lens on optical axis is 30mm.
Further, in above-mentioned F-theta optical lens, first lens, the second lens, the 3rd lens, the 4th
Positioned by multiple spacer rings between lens and the 5th lens.
F-theta optical lens of the present invention are realized the ultraviolet of 355nm wavelength by combining with X/Y galvanometer scanning systems
Laser beam photoetching in the range of angle change and 0～50mm on substrate in half field-of-view's incident angle range in 0～11 ° of X/Y directions
The accurate linear mapping relation of position, makes the positioning of laser beam foucing more accurate, Energy distribution evenly and concentrate, meet light
The required precision of carving technology, and compact conformation, cost are relatively low.
Description of the drawings
Fig. 1 is the structural representation of F-theta optical lens of the present invention.
Fig. 2 is the disc of confusion schematic diagram of F-theta optical lens preferred embodiment of the present invention.
Fig. 3 is the distortion correction figure of F-theta optical lens preferred embodiment of the present invention.
Fig. 4 is the MTF transmission function figures of F-theta optical lens preferred embodiment of the present invention.
Fig. 5 is that the present invention can MTF transmission letter of the dynamic laser direct-writing formula etching system focused under 345mm operating distances
Number figure.
Fig. 6 is that the present invention can MTF transmission letter of the dynamic laser direct-writing formula etching system focused under 350mm operating distances
Number figure.
Fig. 7 is that the present invention can MTF transmission letter of the dynamic laser direct-writing formula etching system focused under 355mm operating distances
Number figure.
Specific embodiment
Describe the preferred embodiments of the present invention below in conjunction with the accompanying drawings in detail.
Refer to Fig. 1, the first lens L1 that F-theta optical lens of the present invention include arranging along light incident direction, the
Two lens L2, the 3rd lens L3, the 4th lens L4 and the 5th lens L5, wherein, the first lens L1 is concave-convex type positive lens,
The second lens L2 is double concave type negative lens, and the 3rd lens L3 is concave-convex type positive lens, and the 4th lens L4 is recessed
Convex plus lens, the 5th lens L5 are planoconvex positive lens.
Wherein, the first lens L1 includes relative first surface S1 and the second curved surface S2, wherein, the first surface
The radius of curvature of S1 is -485mm, and the radius of curvature of the second curved surface S2 is -155mm；In the optical axis of the first lens L1
Heart thickness d 2 is 10mm, and the material of the first lens L1 is quartz glass, and the refractive index of the first lens L1 is 1.46.
The second lens L2 includes the 3rd relative curved surface S3 and the 4th curved surface S4, wherein, the 3rd curved surface S3's
Radius of curvature is -73mm, and the radius of curvature of the 4th curved surface S4 is 197mm；The optical axis center thickness of the second lens L2
D4 is 10mm, and the material of the second lens L2 is K9 glass, and the refractive index of the second lens L2 is 1.53.
The 3rd lens L3 includes the 5th relative curved surface S5 and the 6th curved surface S6, wherein, the 5th curved surface S5's
Radius of curvature is -133mm, and the radius of curvature of the 6th curved surface S6 is -90mm；The optical axis center thickness of the 3rd lens L3
D6 is 15mm, and the material of the 3rd lens L3 is quartz glass, and the refractive index of the 3rd lens L3 is 1.46.
The 4th lens L4 includes the 7th relative curved surface S7 and the 8th curved surface S8, wherein, the 7th curved surface S7's
Radius of curvature is -534mm, and the radius of curvature of the 8th curved surface S8 is -159mm；The optical axis center of the 4th lens L4 is thick
Degree d8 is 20mm, and the material of the 4th lens L4 is K9 glass, and the refractive index of the 4th lens L4 is 1.53.
The 5th lens L5 includes relative zigzag face S9 and the tenth curved surface S10, wherein, the zigzag face S9's
Radius of curvature is infinity, and the radius of curvature of the tenth curved surface S10 is -133mm；The optical axis center of the 5th lens L5 is thick
Degree d10 is 30mm, and the material of the 5th lens L5 is K9 glass, and the refractive index of the 5th lens L5 is 1.53.
The diaphragm diameter of the F-theta optical lens laser light incident side is maximum up to 15mm, the first lens L1
With laser scanning galvanometer apart from d1 be 30-50mm between, the first described lens L1 and the second lens L2 on optical axis away from
From d3 be 50mm, the second lens L2 and the 3rd lens L3 on optical axis apart from d5 be 15mm, the 3rd lens L3 and
4th lens L4 is 12mm apart from d7 on optical axis, and the 4th lens L4 and the 5th lens L5 apart from d9 is on optical axis
30mm。
The first lens L1, the second lens L2, between the 3rd lens L3, the 4th lens L4 and the 5th lens L5 by many
Individual spacer ring is accurately positioned, and the clear aperture of the inner ring of the plurality of spacer ring according to the gradually increase of laser beam hunting range and
Mutually strain greatly, to ensure passing through for laser beam, microscope base internal diameter is coordinated with small―gap suture with lens, it is ensured that the axiality of each lens
Use requirement is met with site error.The gap of the external diameter of the alignment lens of lens and the internal diameter of f-theta lens microscope bases
The tolerance strict guarantee of cooperation.
The focal length of F-theta optical lens of the present invention is 257mm, and Entry pupil diameters are 15mm, and incident wavelength is 355nm, depending on
Rink corner is 11 °, and working (finishing) area is 100 × 100mm2。
Fig. 2, Fig. 3 and Fig. 4 are referred to, its disc of confusion for being respectively F-theta optical lens preferred embodiment of the present invention shows
Intention, distortion correction figure, optical transfer function MTF figures.
Compared to prior art, F-theta optical lens of the present invention have the advantage that：
The accurate Linear Mapping of photoetching position in change and the ± 50mm of the angle for the 1, realizing X/Y axial direction ± 11 °
Relation, positioning point tolerance are less than ± 5m。
2nd, focus point disc of confusion of the laser after f-theta lens is smaller in size than 20M, meets laser direct-writing formula photoetching
Precision need.
3rd, design of Optical System is telecentric beam path, and laser beam impinges perpendicularly on work surface, make the positioning of laser beam foucing more
Accurately, Energy distribution evenly and concentrate.
4th, in system, the optical material of big lens is K9 glass, effectively saves cost, and cost performance is high.
To sum up, F-theta optical lens of the present invention are realized 355nm wavelength by combining with X/Y galvanometer scanning systems
UV laser beam is in half field-of-view's incident angle range in 0～11 ° of X/Y directions in the range of angle change and 0～50mm on substrate
The accurate linear mapping relation of photoetching position, makes the positioning of laser beam foucing more accurate, Energy distribution evenly and concentrate, meet
The required precision of photoetching process, and compact conformation, cost be relatively low.
Here description of the invention and application are illustrative, are not wishing to limit the scope of the invention to above-described embodiment
In.The deformation and change of embodiments disclosed herein is possible, real for those skilled in the art
The replacement and equivalent various parts for applying example is known.It should be appreciated by the person skilled in the art that without departing from the present invention
Spirit or essential characteristics in the case of, the present invention can in other forms, structure, arrangement, ratio, and with other components,
Material and part are realizing.In the case of without departing from scope and spirit of the present invention, embodiments disclosed herein can be entered
Other deformations of row and change.
Claims (8)
1. a kind of F-theta optical lens, it is characterised in that the first lens for including arranging along light incident direction, second saturating
Mirror, the 3rd lens, the 4th lens and the 5th lens, wherein, first lens are concave-convex type positive lens, and second lens are
Double concave type negative lens, the 3rd lens are concave-convex type positive lens, and the 4th lens are concave-convex type positive lens, and the described 5th is saturating
Mirror is planoconvex positive lens, and the focal length of the camera lens is 257mm, and Entry pupil diameters are 15mm, a length of 355nm of incident light wave, the angle of visual field
For 11, working (finishing) area is 100 × 100mm；
First lens include relative first surface and the second curved surface, wherein, the radius of curvature of the first surface for-
485mm, the radius of curvature of second curved surface is -155mm；The optical axis center thickness of first lens is 10mm, described the
The material of one lens is quartz glass, and the refractive index of first lens is 1.46.
2. F-theta optical lens according to claim 1, it is characterised in that second lens include relative
Three curved surfaces and the 4th curved surface, wherein, the radius of curvature of the 3rd curved surface is -73mm, and the radius of curvature of the 4th curved surface is
197mm；The optical axis center thickness of second lens is 10mm, and the material of second lens is K9 glass, and described second is saturating
The refractive index of mirror is 1.53.
3. F-theta optical lens according to claim 1, it is characterised in that the 3rd lens include relative
Five curved surfaces and the 6th curved surface, wherein, the radius of curvature of the 5th curved surface is -133mm, the radius of curvature of the 6th curved surface
For -90mm；The optical axis center thickness of the 3rd lens is 15mm, and the material of the 3rd lens is quartz glass, described the
The refractive index of three lens is 1.46.
4. F-theta optical lens according to claim 1, it is characterised in that the 4th lens include relative
Seven curved surfaces and the 8th curved surface, wherein, the radius of curvature of the 7th curved surface is -534mm, the radius of curvature of the 8th curved surface
For -159mm；The optical axis center thickness of the 4th lens is 20mm, and the material of the 4th lens is K9 glass, the described 4th
The refractive index of lens is 1.53.
5. F-theta optical lens according to claim 1, it is characterised in that the 5th lens include relative
Zigzag face and the tenth curved surface, wherein, the radius of curvature in the zigzag face is infinity, the radius of curvature of the tenth curved surface
For -133mm；The optical axis center thickness of the 5th lens is 30mm, and the material of the 5th lens is K9 glass, the described 5th
The refractive index of lens is 1.53.
6. F-theta optical lens according to claim 1, it is characterised in that first lens are shaken with laser scanning
The distance of mirror is between 30-50mm.
7. F-theta optical lens according to claim 6, it is characterised in that the first described lens and the second lens
Distance on optical axis be 50mm, the distance of second lens and the 3rd lens on optical axis be 15mm, the 3rd lens
It is 12mm with distance of the 4th lens on optical axis, the distance of the 4th lens and the 5th lens on optical axis is 30mm.
8. F-theta optical lens according to claim 1, it is characterised in that first lens, the second lens,
Positioned by multiple spacer rings between three lens, the 4th lens and the 5th lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410457580.7A CN104317034B (en) | 2014-09-10 | 2014-09-10 | f-theta optical lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410457580.7A CN104317034B (en) | 2014-09-10 | 2014-09-10 | f-theta optical lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104317034A CN104317034A (en) | 2015-01-28 |
| CN104317034B true CN104317034B (en) | 2017-04-19 |
Family
ID=52372283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410457580.7A Expired - Fee Related CN104317034B (en) | 2014-09-10 | 2014-09-10 | f-theta optical lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104317034B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109425962A (en) * | 2017-08-30 | 2019-03-05 | 上海微电子装备（集团）股份有限公司 | A kind of F-theta camera lens for laser processing |
| CN112292627B (en) * | 2018-07-11 | 2022-07-15 | 大族激光科技产业集团股份有限公司 | Telecentric lens and laser processing equipment |
| CN108873265B (en) * | 2018-08-23 | 2020-08-11 | 安徽大学 | Alignment lens for laser direct imaging photoetching |
| CN110146968B (en) * | 2019-04-04 | 2023-11-28 | 南京波长光电科技股份有限公司 | 355nm ultraviolet telecentric f-theta lens capable of eliminating field curvature and astigmatism |
| DE102022105366A1 (en) | 2022-03-08 | 2023-09-14 | Trumpf Laser Gmbh | F-theta lens and scanner device therewith |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4925279A (en) * | 1988-09-20 | 1990-05-15 | Dainippon Screen Mfg. Co., Ltd. | Telecentric f-θ lens system |
| CN103323932A (en) * | 2012-03-21 | 2013-09-25 | 业纳光学系统有限公司 | Color-corrected F-theta objective for laser material processing |
| CN203786376U (en) * | 2013-07-16 | 2014-08-20 | 业纳光学系统有限公司 | F-theta objective lens |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5817408A (en) * | 1981-07-24 | 1983-02-01 | Olympus Optical Co Ltd | Uniform-velocity scanning lens |
-
2014
- 2014-09-10 CN CN201410457580.7A patent/CN104317034B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4925279A (en) * | 1988-09-20 | 1990-05-15 | Dainippon Screen Mfg. Co., Ltd. | Telecentric f-θ lens system |
| CN103323932A (en) * | 2012-03-21 | 2013-09-25 | 业纳光学系统有限公司 | Color-corrected F-theta objective for laser material processing |
| CN203786376U (en) * | 2013-07-16 | 2014-08-20 | 业纳光学系统有限公司 | F-theta objective lens |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104317034A (en) | 2015-01-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104317034B (en) | f-theta optical lens | |
| CN104238285B (en) | Laser direct-writing type photoetching system capable of dynamically focusing | |
| CN103499877B (en) | Large-numerical-aperture projection optical system | |
| CN101598849B (en) | Optical imaging system and manufacturing method thereof | |
| KR102659492B1 (en) | Lithographic projection objectives | |
| CN103926683B (en) | Zoom optical system | |
| CN107783206B (en) | double-layer microlens array optical element | |
| WO2019062941A1 (en) | Projection objective | |
| CN102629082A (en) | Design method of extreme ultra-violet lithography compound eye lighting system | |
| CN102645749A (en) | Magnification regulating method of projection optical system | |
| CN103984078A (en) | F-theta optical lens for making laser spot and indicating light spot coincide with each other | |
| CN103499876B (en) | Pure refraction type projection optical system with large numerical aperture | |
| CN102662307A (en) | High-resolution projection optical system | |
| CN103676096B (en) | A kind of projection objective lens optical system | |
| CN104062746B (en) | Catadioptric immersion projection optical system with large numerical aperture | |
| CN104035187B (en) | Pure refraction type dry projection optical system with large numerical aperture | |
| CN110764224B (en) | Photoetching projection objective lens | |
| CN104950427B (en) | Large-view-field high-numerical-aperture global surface photoetching machine projection objective | |
| CN107797224A (en) | Optical lens and laser process equipment and laser processing | |
| CN202512297U (en) | Projection optical system | |
| CN109507789B (en) | Telecentric lens for laser processing, laser processing device and processing method | |
| CN109375480B (en) | Photoetching projection objective and photoetching machine | |
| CN112292627B (en) | Telecentric lens and laser processing equipment | |
| CN114029609B (en) | Ultraviolet lens and optical system and marking device thereof | |
| CN102608737B (en) | Extreme-ultraviolet-projection photoetching objective lens |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170419 Termination date: 20170910 |