CN104296649A - Linearity calibration method for capacitive displacement sensor - Google Patents
Linearity calibration method for capacitive displacement sensor Download PDFInfo
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- CN104296649A CN104296649A CN201410508663.4A CN201410508663A CN104296649A CN 104296649 A CN104296649 A CN 104296649A CN 201410508663 A CN201410508663 A CN 201410508663A CN 104296649 A CN104296649 A CN 104296649A
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Abstract
The invention belongs to the technical field of displacement measurement and provides a linearity calibration method for a capacitive displacement sensor. The problem that the measurement precision of the capacitive displacement sensor cannot meet the locating precision requirement of a micrometric displacement adjusting mechanism is solved. The calibration method comprises the following steps: installing devices on a calibration structure, adjusting and calibrating a light path of a laser interferometer, calculating a control decoupling matrix, adopting a PID control strategy to make a driver move in the measurement range of the sensor to collect measurement data, and calculating calibration parameters. By means of the linearity calibration method for the capacitive displacement sensor, the linearity of the capacitive displacement sensor is calibrated, and the linearity of the capacitive displacement sensor can be improved by nearly one order of magnitude, so that the precision index of the calibrated capacitive displacement sensor meets the requirement for high locating precision. The calibrating process of the linearity calibration method for the capacitive displacement sensor can be achieved through software, and the advantages of being simple, convenient and high in automation degree are achieved. Meanwhile, the method can also be applied to calibration of the linearity of other non-contact displacement sensors except other than the capacitive displacement sensor.
Description
Technical field
The present invention relates to displacement measuring technology field, relate to a kind of linearity scaling method of capacitive displacement transducer.
Background technology
Use capacitive transducer to provide displacement datum in regulating structure for micro displacement, therefore the performance of capacitive transducer directly determines the closed-loop control precision of micro-displacement mechanism, therefore needs to demarcate the precision of capacitive transducer.
According to Error Theory, measuring accuracy is defined as the difference between measured value and true value, and measures true value and cannot obtain, therefore measuring accuracy also cannot obtain.So utilize, the linearity of sensor is approximate characterizes its precision level.At present, the linearity of the capacitive transducer product of internationally recognizable capacitive transducer supplier (as Micro-Epsilon, PhysikInstrument) only can reach 0.05%/200 μm, and its precision level is only 100nm.When the positioning precision demand of regulating structure for micro displacement is less than 100nm (as in photoetching projection objective lens exposure process, the range of eyeglass movement is tens microns, positioning precision is 10-20nm), the precision level of sensor cannot meet the demand of micro-displacement mechanism control accuracy.
Summary of the invention
For the measuring accuracy solving capacitive displacement transducer cannot meet the problem of the positioning precision demand of regulating structure for micro displacement, the present invention proposes a kind of method demarcating to improve the linearity of sensor by the high-precision displacement measuring equipment of employing to capacitive transducer.The method can improve the linearity of capacitive transducer significantly, meets the demand of regulating structure for micro displacement for positioning precision.
The technical scheme that technical solution problem of the present invention adopts is as follows:
A linearity scaling method for capacitive displacement transducer, the method comprises following equipment: laser interferometer, spectroscope, catoptron, capacitive transducer, piezoelectric actuator and calibration structure; Piezoelectric actuator and spectroscope are installed by the lower floor of calibration structure; Calibration structure upper strata stationary shaft is to regulating element, capacitive transducer and the first catoptron; Second catoptron is connected with spectroscope; Enter the second catoptron when laser interferometer sends laser rear portion light through spectroscope transmission, get back in laser interferometer by spectroscope transmission after reflection; Another part light enters the first catoptron through dichroic mirror, returns in laser interferometer after reflection by dichroic mirror, and two-beam realizes interfering; Piezoelectric actuator vertical motion driving axial regulating element, controls calibration structure upper layer motion; The method comprises the steps:
Step one: calibration laser interferometer, reduces the cosine error in optical path;
Step 2: control piezoelectric actuator and capacitive transducer is moved in its stroke, laser interferometer gathers the displacement of capacitive transducer; The data gathered respectively by capacitive transducer and laser interferometer calculate the coupled relation matrix between them;
Step 3: control calibration structure and make it move to capacitive transducer measurement starting point, with fixing stepping-in amount one-way movement, gather capacitive transducer data, until positive stroke measured by capacitive transducer when moving to fixing stepping-in amount position; Laser interferometer and capacitive transducer synchronous acquisition;
Step 4: with capacitive transducer measured value for the measured value in measuring accuracy definition, laser interferometer measurements is true value, calculate capacitive transducer linearity calibrating parameters, and by parameter read-in control register to improve the measure linear degree of sensor, improve the measuring accuracy of sensor.
The invention has the beneficial effects as follows: the present invention is that benchmark is demarcated capacitive transducer by utilizing high-precision measuring equipment-laser interferometer.After demarcating, the linearity of capacitive transducer can improve nearly order of magnitude, thus meets the demand of micro-displacement platform.The calibration process of this method, all by software simulating, has easy, that automaticity is high feature; This method also can be applicable to the demarcation (as Spectral Confocal sensor) of other non-contact displacement transducer linearities except capacitive transducer simultaneously.
Accompanying drawing explanation
The linearity scaling method installation drawing of a kind of capacitive displacement transducer of Fig. 1 the present invention.
The linearity scaling method process flow diagram of a kind of capacitive displacement transducer of Fig. 2 the present invention.
Fig. 3 is automatic reflection method schematic diagram of the present invention;
Fig. 4 is center of gravity sciagraphy schematic diagram of the present invention.
In figure:
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further details.
As shown in Figure 1, the linearity calibration system of capacitive displacement transducer used in the present invention comprises, a linearity scaling method for capacitive displacement transducer, the method comprises following equipment: three laser interferometer, three spectroscopes, three mirror holders, catoptron, capacitive transducer, piezoelectric ceramic actuator (PZT) and calibration structure; Piezoelectric ceramic actuator and three mirror holders are installed by the lower floor of described calibration structure, and three spectroscopes are arranged on mirror holder; Three the second catoptrons are connected with three spectroscopes respectively; Calibration structure upper strata stationary shaft is to regulating element, capacitive transducer and three the first catoptrons; Enter the second catoptron when laser interferometer sends laser rear portion light through spectroscope transmission, get back in laser interferometer by spectroscope transmission after reflection; Another part light enters the first catoptron through dichroic mirror, returns in laser interferometer after reflection by dichroic mirror, and two-beam realizes interfering; Piezoelectric ceramic actuator vertical motion driving axial regulating element, controls calibration structure upper layer motion.
As shown in Figure 2, a kind of linearity scaling method of capacitive displacement transducer comprises the steps:
Step one: regulate laser instrument and interferometer mirror group, make beam path alignment.Because the measurement range of capacitive transducer is very little, be generally less than 500 μm.In so little measurement range, use conventional laser interferometer alignment method can produce larger cosine error, make the measured value of laser interferometer depart from the measured value of capacitive transducer, the linearity calibration value obtained also is insecure.Therefore the cosine error in automatic reflection method reduction light path is adopted, as shown in Figure 3.
In Fig. 3, the first catoptron is replaced by plane mirror, and is fixed on mirror holder.According to theory of geometric optics, when spectroscopical light vertical incidence level crossing, light path can return on former road; And when there is drift angle between incident laser and spectroscope, also there is drift angle between spectroscope light and level crossing and light is returned not according to former road.Automatic reflection method for the at right angle setting position of level crossing by the restriction of electric capacity sensor measurement stroke, the distance dependent only and between laser interferometer and spectroscope.Cosine error can be reduced by the distance extended between laser interferometer and spectroscope.The present invention gets this distance for 1m, then the cosine error that light path produces is 0.9nm.After using automatic reflection method to regulate light path that the former road of reflected light path is returned, the position of fixing spectroscope and laser interferometer.Plane mirror is replaced by the first catoptron, regulates the position of the first catoptron, make transmitted ray and reflection ray interfere phenomenon in the light target position of laser instrument.
Step 2: control PZT makes capacitive transducer move in its stroke, laser interferometer gathers the displacement of capacitive transducer; By the data that capacitive transducer and laser interferometer gather respectively, calculate the coupled relation matrix between them.
Step 3: control calibration structure and make it move to capacitive transducer measurement starting point, with fixing stepping-in amount one-way movement, gather capacitive transducer data, until positive stroke measured by capacitive transducer when moving to fixing stepping-in amount position; Laser interferometer and capacitive transducer synchronous acquisition.Should ensure displacement location precision in control procedure simultaneously and control step number, controlling step number, to cross displacement accuracy at least poor, and controlling step number increase can improve positioning precision, but can coupling capacitance sensor drift value and reduce measuring accuracy.
Step 4: with capacitive transducer measured value for the measured value in measuring accuracy definition, laser interferometer measurements is true value, calculate capacitive transducer linearity calibrating parameters, and by parameter read-in control register to improve the measure linear degree of sensor, improve the measuring accuracy of sensor.
The acquisition of the displacement true value of capacitive transducer installed position utilizes three path laser interferometer displacement readings to adopt the method for center of gravity projection to obtain.In three tunnel closed-loop controls, the increment of motion of displacement is identical, namely tested surface is relative to installed surface axial translation, but the restriction of the control accuracy due to the resolution of mechanism itself, rigidity and control system, make the motion of three axles to realize axial translation, the error of its translation is 10nm magnitude.So the displacement at sensor mounting location place is not equal to the shift value of three path laser interferometers.The method projected by center of gravity can obtain the displacement true value at sensor mounting location place, as shown in Figure 4.
According to Fig. 4, the placement location of three tunnel first catoptrons forms equilateral triangle, and the installation site of capacitive transducer is the center of gravity of equilateral triangle.When there is non-equilibrium motion in three road drivers, can think that the parallel projection of equilateral triangle center of gravity is still the center of gravity of projected triangle, the displacement true value of capacitive transducer installed position can be calculated by the displacement between the moving displacement amount of the mounting distance between three tunnel first catoptrons, each path laser interferometer and two centers of gravity.
Adopt least-square fitting approach to obtain capacitive transducer linearity calibrating parameters, the shift value of limited laser interferometer measurement can be carried out matching by the shift value be used in the whole measure scope of actual capacitance sensor, improve the measuring accuracy of capacitive transducer.If the displacement measurement of capacitive transducer is x
i=x
1, x
2..., x
n-1, x
m, capacitive transducer installed position displacement measurement true value is y
i=y
1, y
2..., y
n-1, y
m
By the relation between polynomial repressentation xy, the present invention uses 4 rank polynomial expressions, n=4.Polynomial coefficient is a
0, a
1..., a
n-1, a
n.Expression formula is as follows:
y＝a
0+a
1x+…+a
n-1x
n-1+a
nx
n
By least square method determination coefficient a
0, a
1..., a
n-1, a
n, require observed reading y
ithe weighted sum of squares of deviation be minimum, then have
According to least square method, then there is XA=Y, thus A=X
-1y.
Vector A is the capacitive transducer linearity calibrating parameters calculated, and parameter read-in controller is obtained the calibrated capacitive transducer linearity.
Claims (6)
1. a linearity scaling method for capacitive displacement transducer, the method comprises following equipment: laser interferometer, spectroscope, catoptron, capacitive transducer, piezoelectric actuator and calibration structure; Piezoelectric actuator and spectroscope are installed by the lower floor of described calibration structure; Calibration structure upper strata stationary shaft is to regulating element, capacitive transducer and the first catoptron; Second catoptron is connected with spectroscope; Enter the second catoptron when laser interferometer sends laser rear portion light through spectroscope transmission, get back in laser interferometer by spectroscope transmission after reflection; Another part light enters the first catoptron through dichroic mirror, returns in laser interferometer after reflection by dichroic mirror, and two-beam realizes interfering; Piezoelectric actuator vertical motion driving axial regulating element, controls calibration structure upper layer motion; It is characterized in that, the method comprises the steps:
Step one: calibration laser interferometer, reduces the cosine error in optical path;
Step 2: control piezoelectric actuator and capacitive transducer is moved in its stroke, laser interferometer gathers the displacement of capacitive transducer; By the data that capacitive transducer and laser interferometer gather respectively, calculate the coupled relation matrix between them;
Step 3: control calibration structure and make it move to capacitive transducer measurement starting point, with fixing stepping-in amount one-way movement, gather capacitive transducer data, until positive stroke measured by capacitive transducer when moving to fixing stepping-in amount position; Laser interferometer and capacitive transducer synchronous acquisition;
Step 4: with capacitive transducer measured value for the measured value in measuring accuracy definition, laser interferometer measurements is true value, calculate capacitive transducer linearity calibrating parameters, and by parameter read-in control register to improve the measure linear degree of sensor, improve the measuring accuracy of sensor.
2. the linearity scaling method of a kind of capacitive displacement transducer as claimed in claim 1, is characterized in that, in the equipment that the method comprises, laser interferometer is three groups; Spectroscope, the first catoptron and the second catoptron are three groups; Capacitive transducer is arranged in the center of gravity place of the first catoptron composition triangle.
3. the linearity scaling method of a kind of capacitive displacement transducer as claimed in claim 1, is characterized in that, the calibration laser interferometer described in step one is realized by automatic reflection method; First catoptron is replaced by plane mirror, when there is drift angle between incident laser and spectroscope, there is drift angle between spectroscope light and level crossing makes light return not according to former road, can cosine error be reduced by the distance extended between laser interferometer and spectroscope, after fixed range, plane mirror is replaced with the first catoptron.
4. the linearity scaling method of a kind of capacitive displacement transducer as claimed in claim 1, is characterized in that, in described step 3, adopts PID (proportional-integral-differential) control strategy in capacitance sensor calibration process.
5. the linearity scaling method of a kind of capacitive displacement transducer as claimed in claim 1, is characterized in that, the acquisition of described capacitive transducer linearity calibrating parameters adopts the method for polynomial least mean square fitting to obtain.
6. the linearity scaling method of a kind of capacitive displacement transducer as claimed in claim 1, it is characterized in that, described laser interferometer adopts Britain Renishaw XL80 to provide displacement measurement benchmark, and piezoelectric actuator adopts German PI N-111.20 to provide displacement feeding.
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104654997A (en) * | 2015-02-14 | 2015-05-27 | 中国科学院测量与地球物理研究所 | MDOF (multi-degree of freedom) differential capacitance displacement sensor calibration device |
| CN105423885A (en) * | 2015-11-10 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Displacement detection device and detection method of built-in strain gauge piezoelectric ceramic |
| CN107367218A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of declination error compensation |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
| CN107367220A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device that double air-float guide rails are oriented to |
| CN107367250A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance displacement sensor calibration method and device of grand micro- combination |
| CN107367219A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | Lorentz force motor-direct-drive type inductance sensor calibration method and device |
| CN108534650A (en) * | 2018-04-04 | 2018-09-14 | 大连理工大学 | The linearity optimization method of the high-precision calibration of current vortex sensor curve of output |
| CN109059745A (en) * | 2018-09-04 | 2018-12-21 | 天津大学 | Capacitance sensor calibration method and apparatus for oil film thickness measurement |
| CN110044530A (en) * | 2019-04-12 | 2019-07-23 | 金华职业技术学院 | A kind of high-precision method for measuring stress |
| CN110132115A (en) * | 2019-05-16 | 2019-08-16 | 无锡市迈日机器制造有限公司 | The signal adapter and signal correction method of submicron order high-precision HBT displacement sensor |
| CN111551917A (en) * | 2020-04-30 | 2020-08-18 | 中国科学院沈阳自动化研究所 | Calibration method of laser triangulation displacement sensor |
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Cited By (17)
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| CN104654997A (en) * | 2015-02-14 | 2015-05-27 | 中国科学院测量与地球物理研究所 | MDOF (multi-degree of freedom) differential capacitance displacement sensor calibration device |
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| CN105423885A (en) * | 2015-11-10 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Displacement detection device and detection method of built-in strain gauge piezoelectric ceramic |
| CN105423885B (en) * | 2015-11-10 | 2018-01-05 | 中国科学院长春光学精密机械与物理研究所 | The displacement detector and detection method of built-in strain sheet type piezoelectric ceramic |
| CN107367220A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device that double air-float guide rails are oriented to |
| CN107367250A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance displacement sensor calibration method and device of grand micro- combination |
| CN107367219A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | Lorentz force motor-direct-drive type inductance sensor calibration method and device |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
| CN107367218A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of declination error compensation |
| CN107367219B (en) * | 2016-05-12 | 2019-01-11 | 哈尔滨工业大学 | Lorentz force motor-direct-drive type inductance sensor calibrating installation |
| CN107367224B (en) * | 2016-05-12 | 2019-01-11 | 哈尔滨工业大学 | The inductance sensor calibrating installation of three optical axis laser interferometer measurements |
| CN108534650A (en) * | 2018-04-04 | 2018-09-14 | 大连理工大学 | The linearity optimization method of the high-precision calibration of current vortex sensor curve of output |
| CN109059745A (en) * | 2018-09-04 | 2018-12-21 | 天津大学 | Capacitance sensor calibration method and apparatus for oil film thickness measurement |
| CN110044530A (en) * | 2019-04-12 | 2019-07-23 | 金华职业技术学院 | A kind of high-precision method for measuring stress |
| CN110132115A (en) * | 2019-05-16 | 2019-08-16 | 无锡市迈日机器制造有限公司 | The signal adapter and signal correction method of submicron order high-precision HBT displacement sensor |
| CN111551917A (en) * | 2020-04-30 | 2020-08-18 | 中国科学院沈阳自动化研究所 | Calibration method of laser triangulation displacement sensor |
| CN113432625A (en) * | 2021-07-09 | 2021-09-24 | 安徽创谱仪器科技有限公司 | Calibration system and calibration method of hydrostatic level |
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