CN1042237A - Fluorescent soft X-ray monochromator - Google Patents
Fluorescent soft X-ray monochromator Download PDFInfo
- Publication number
- CN1042237A CN1042237A CN 89108535 CN89108535A CN1042237A CN 1042237 A CN1042237 A CN 1042237A CN 89108535 CN89108535 CN 89108535 CN 89108535 A CN89108535 A CN 89108535A CN 1042237 A CN1042237 A CN 1042237A
- Authority
- CN
- China
- Prior art keywords
- ray
- fluorescent
- sample
- target
- soft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052802 copper Inorganic materials 0.000 claims abstract description 4
- 239000010949 copper Substances 0.000 claims abstract description 4
- 239000004743 Polypropylene Substances 0.000 claims abstract description 3
- -1 polypropylene Polymers 0.000 claims abstract description 3
- 229920001155 polypropylene Polymers 0.000 claims abstract description 3
- 239000010405 anode material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 230000008859 change Effects 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
A fluorescent soft X-ray monochromator is composed of X-ray tube, fluorescent target chamber, sample chamber, proportional counter tube and vacuum chamber, and features that copper is used as anode of X-ray tube, the fluorescent target and sample are replaced by bellows, and the polypropylene film is used as output window.
Description
The invention belongs to the soft x-ray optics technical field.
Soft X-ray monochromatic instrument can be exported the homogeneous X-ray of a series of wavelength in certain wavelength band.This instrument can be used to measure the quantum efficiency of grenz ray photocathode, measures the transmitance of various substrate films and various grenz ray filter membranes.This instrument also can be used to various soft x-ray detectors are carried out the absolute calibration as sensitive film, x-ray diode, proportional counter tube, microchannel plate, semiconductor detector, image converter tube etc.Existing soft X-ray monochromatic instrument (B.L.Henke et.al., J.Appl.phys.52(3), 1509～1520,1981) adopt the way of repeatedly changing the X-ray tube anode, in the hope of obtaining sufficiently high light intensity at the sample place, so repeatedly destroy vacuum and can bring very big inconvenience, and influenced the precision of test result of specimen to use.This kind monochromator adopts rubber as the rotary seal mechanism that changes fluorescent target and sample, and its grease can cause exporting the reduction of the monochromaticity of X ray to the pollution of fluorescent target.What the output window of this monochromator adopted is carbon film, opens vacuum at every turn and all can break, and needs to change again, brings very big inconvenience to use.
The present invention is a kind of improvement invention.Its purpose is to propose a kind of new fluorescent type soft X-ray monochromatic instrument, makes it have advantage rational in infrastructure, easy to operate, as to improve precision of test result and reliability.
The fluorescent type soft X-ray monochromatic instrument that the present invention proposes, it is to be made of X-ray pipe, fluorescence target chamber, sample chamber, proportional counter tube and vacuum chamber etc.The anode material that it is characterized in that said X-ray pipe is a copper.
The present invention adopts Henke type X-ray pipe as lasing light emitter, makes plate target with copper, can produce two stronger characteristic radiations below anode voltage 15Kev, Cuka line and CuLa line, and its photon energy is respectively 8.04Kev and 0.93Kev.The various fluorescent radiations of the following sufficient intensity of 7.5Kev can be produced with these two spectral lines as exciting light, the plate target material of Henke type X-ray pipe need not be changed.Owing to need not change plate target, avoided some photocathode, be subjected to the influence of ambient humidity as alkali halides such as CsI, CsBr, when change X ray wavelength and sample, do not destroy vacuum, measurement is carried out under identical conditions.The replacing of fluorescent target of the present invention and sample without rubber packing, but is adopted the complete close rotary seal of corrugated tube, has avoided oil contamination, has guaranteed the monochromaticity of output X ray, has improved measuring accuracy.The present invention adopts the material of the polypropylene film of 1 micron thickness as its output window, and this kind film can not break when destroying vacuum to the transmitance height of grenz ray, need not to change, and brings convenience to operation.
Accompanying drawing 1: fluorescent type soft X-ray monochromatic instrument apparatus structure synoptic diagram.
In the accompanying drawings, 1 is X-ray tube, and 2 is the fluorescence target chamber, and 3 is the sample room, and 4 is proportional counter tube, and 5 is vacuum system, and 6 is vavuum pump. The x-ray bombardment that X-ray tube sends is on fluorescent target, and fluorescent target is excited to produce fluorescent radiation, and the photon energy of radiation depends on the fluorescent target material. The characteristic ray of fluorescent target is namely as the output light of monochromatic X-ray source. Part fluorescent X-ray enters the sample room and arrives on the sample, perhaps enters proportional counter tube to carry out luminous intensity measurement by the sample room. Spatially symmetrical another part X ray enters another proportional counter tube as monitoring light by the expansion vacuum chamber.
Claims (3)
1, a kind of fluorescent type soft X-ray monochromatic instrument that is made of X-ray pipe, fluorescence target chamber, sample chamber, proportional counter tube and vacuum chamber etc., the anode material that the invention is characterized in said X-ray pipe is a copper.
2, fluorescent type soft X-ray monochromatic instrument according to claim 1 is characterized in that adopting the material of the polypropylene film of 1 micron thickness as output window.
3, fluorescent type soft X-ray monochromatic instrument according to claim 1 and 2, what it is characterized in that fluorescent target and sample is replaced by the complete close rotary seal of corrugated tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89108535 CN1020127C (en) | 1989-11-09 | 1989-11-09 | Fluorescent soft X-ray monochromator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89108535 CN1020127C (en) | 1989-11-09 | 1989-11-09 | Fluorescent soft X-ray monochromator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1042237A true CN1042237A (en) | 1990-05-16 |
| CN1020127C CN1020127C (en) | 1993-03-17 |
Family
ID=4857614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 89108535 Expired - Fee Related CN1020127C (en) | 1989-11-09 | 1989-11-09 | Fluorescent soft X-ray monochromator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1020127C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526649A (en) * | 2016-09-28 | 2017-03-22 | 北京空间机电研究所 | Calibration system and calibration method for radiation intensity of soft X-ray source |
| CN111208553A (en) * | 2020-03-12 | 2020-05-29 | 中国科学院上海高等研究院 | Fluorescent target detector and detection method thereof |
| CN113566448A (en) * | 2021-07-13 | 2021-10-29 | 中国科学院上海微系统与信息技术研究所 | Cooling device for soft X-ray spectroscopy test |
-
1989
- 1989-11-09 CN CN 89108535 patent/CN1020127C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526649A (en) * | 2016-09-28 | 2017-03-22 | 北京空间机电研究所 | Calibration system and calibration method for radiation intensity of soft X-ray source |
| CN106526649B (en) * | 2016-09-28 | 2019-10-22 | 北京空间机电研究所 | A kind of soft X-ray source radiation intensity calibration system and scaling method |
| CN111208553A (en) * | 2020-03-12 | 2020-05-29 | 中国科学院上海高等研究院 | Fluorescent target detector and detection method thereof |
| CN113566448A (en) * | 2021-07-13 | 2021-10-29 | 中国科学院上海微系统与信息技术研究所 | Cooling device for soft X-ray spectroscopy test |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1020127C (en) | 1993-03-17 |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |