CN104131330B - needle electrode and preparation method thereof - Google Patents
needle electrode and preparation method thereof Download PDFInfo
- Publication number
- CN104131330B CN104131330B CN201410379919.6A CN201410379919A CN104131330B CN 104131330 B CN104131330 B CN 104131330B CN 201410379919 A CN201410379919 A CN 201410379919A CN 104131330 B CN104131330 B CN 104131330B
- Authority
- CN
- China
- Prior art keywords
- rod
- corrosion
- electrode
- conductor
- bucket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The present invention relates to a kind of method preparing needle electrode, said method comprising the steps of: a. puts into aqueous slkali as electrolyte in electrolytic vessel, place two corrosion-resistant buckets of the conductor varied in size the most with one heart, negative electrode is set outside the corrosion-resistant bucket of big conductor；B. W rod is placed in described electrolyte as anode so that W rod and liquid level are perpendicular to and at the center of the corrosion-resistant bucket of conductor, the diameter of electrolytic etching to the most required needle electrode；The insulative pipe sleeve of the diameter that c. internal diameter is slightly larger than required needle electrode forms the position of needle point in W rod lower end to expection, and lifting W is excellent but still keeps the position forming needle point to be still immersed in described electrolyte；D. electrolytic etching W rod is continued until W rod ruptures.
Description
Technical field
Technical field: the invention belongs to quantum information technology field, is specifically related to a kind of needle electrode
Preparation, it is adaptable to the applications such as the quantum information of ion trap systems, quantum calculation.
Background technology
Ion trap is as one of the system of quantum information and quantum calculation, because being in ultra-high vacuum environment,
Make that ion degree of being environmentally isolated with is good, the decoherence time is long, and recognized because its extensibility is good
For being the system having most practical prospect.Ion trap application rf electric field carrys out bound atom, applies laser pair
Bound ion manipulates, and applies the collection optics such as PMT, CCD to carry out the receipts of optical signal
Collection.Wherein ion trap electrodes is device the most direct with atomic interaction, penetrating used by bound atom
Frequently electric field is applied on ion by this needle electrode.
The needle electrode manufacture method before applied is mainly machining: made with grinding by machine cut
Obtain electrode and gradually become most advanced and sophisticated by oval rod shape.But its method is complicated, cycle length, precision be the highest,
Cost is high and makes making electrode very inconvenient.
The second is to make probe electrode in the corrosion of STM field Applied Electrochemistry.But its requirement
Tip diameter change is very violent, and is not applied for ion trap.And because the electronics system of its complexity
System so that apparatus for preparation prepares complexity.
Summary of the invention
A kind of preparation method carrying out ion trap needle electrode of our main inventive, employing can be easily obtained
Equipment and simple step, prepare the needle electrode being applicable to ion trap.Electrode is gradient-thickness
And smooth surface, rather than STM probe is the same, diameter change is acutely.
One aspect of the present invention relates to a kind of method preparing needle electrode, and described method includes following
Step:
A. in electrolytic vessel, put into aqueous slkali as electrolyte, place two the most with one heart simultaneously
The individual corrosion-resistant bucket of the conductor varied in size, arranges negative electrode outside the corrosion-resistant bucket of big conductor；
B. W rod is placed to described electrolyte as anode so that W rod also position vertical with liquid level
In the center of the corrosion-resistant bucket of conductor, the diameter of electrolytic etching to required needle electrode；
C. internal diameter is slightly larger than the insulative pipe sleeve of diameter of required needle electrode in W rod lower end extremely
Expection forms the position of needle point, promotes W rod but still keeps the position forming needle point to be still immersed in described
In electrolyte；
D. electrolytic etching W rod is continued until W rod ruptures.
In one embodiment of the invention, the corrosion-resistant bucket of conductor is stainless steel cask.
In one embodiment of the invention, insulation tube is plastic tube.
In one embodiment of the invention, the described corrosion-resistant bucket of big conductor is higher than liquid level of solution；With
/ or a diameter of 5mm to 10mm of the corrosion-resistant bucket of little conductor, preferably 1mm to 10mm, further preferably
5mm to 9mm, most preferably 8mm.
In one embodiment of the invention, the height of the corrosion-resistant bucket of little conductor is 6mm to 12mm,
Preferably 5mm to 15mm, further preferably 10mm to 12mm, most preferably 12mm.
In one embodiment of the invention, aqueous slkali is NaOH solution or KOH solution.
In one embodiment of the invention, the concentration of aqueous slkali is 2mol/L to 3.5mol/L,
Preferably 1mol/L to 3.5mol/L, further preferably 2mol/L to 2.5mol/L, most preferably 2mol/L.
In one embodiment of the invention, not corrosion-resistant with the big conductor bucket of negative electrode directly contacts.
In one embodiment of the invention, negative electrode is graphite electrode.
In one embodiment of the invention, in stepb the placement of W rod is made to electrolyte
Obtain the length 2mm to 5mm longer than the length of required needle electrode of electrolyte submergence W rod,
Preferably 2mm to 6mm, further preferably 2mm to 4mm, most preferably 3mm.
In one embodiment of the invention, electrolytic etching is in the voltage zone corresponding to electrochemical polish
Territory is carried out.
In one embodiment of the invention, the voltage in electrolytic etching is 5V to 7V, preferably
5V to 7V, further preferably 5.5V to 6.5V, most preferably 6V.
In one embodiment of the invention, step b is made up of following two step:
B1. W rod is immersed 5mm-10mm longer than the length of required needle electrode in electrolyte,
Preferably 5 to 9mm, further preferably 5 to 8mm, most preferably 6mm, electrolytic etching 30 to 120 points
Clock；
B2. W rod is taken out after cleaning, then W rod is immersed in electrolyte than required needle-like
The long 2mm-5mm of length of electrode, preferably 1mm to 5mm, further preferably 2mm to 4mm,
Preferably 3mm, the diameter of electrolytic etching to required needle electrode.
In one embodiment of the invention, step c promotes W rod 1mm to 2mm, excellent
Select 1mm to 2mm, further preferably 1mm to 2mm, most preferably 2mm.
Another aspect of the present invention relates to a kind of device for preparing needle electrode, described device bag
Include: electrolytic vessel；
Electrolyte, described electrolyte is aqueous slkali, is arranged in described electrolytic vessel；
The big corrosion-resistant bucket of conductor and the corrosion-resistant bucket of little conductor, the described corrosion-resistant bucket of big conductor and little conductor are resistance to
Corrosion bucket is arranged concentrically on the center of described electrolytic vessel；
Insulated sleeve, the diameter of described insulated sleeve is slightly larger than the diameter of required needle electrode；
Negative electrode, described negative electrode is arranged on outside the corrosion-resistant bucket of conductor；
Anode, described anode is the W rod of needle electrode to be made, and is arranged on electrolytic vessel center.
Prepared according to the methods of the invention needle electrode is related in another aspect of the invention.
Preparation method of the present invention is simple, it is easy to draw materials, and yield rate is high, it is easy to large-scale production.And
The electrode produced is grading profile, and the RF fields near ion apply ion trap is less.
Under full manual operation state, a skilled student, make 10 electrodes, finished product averagely can have
8-10.Owing at solution and air interface, corrosion rate for corrosion material is faster than inside solution,
So electrode can first corrode disconnected in gas-liquid intersection, the electrode dropped is enclosed in below liquid level, keeps away simultaneously
Exempt from the air corrosion to electrode, ensure that electrode surface is not oxidized the most simultaneously.
Owing to adding 304 stainless steel casks of large size, strengthen electric field, and be that electric field becomes axle pair
Claim distribution, electrode is placed in bucket central authorities simultaneously so that corrode the electrode and be also distributed for axial symmetry.If
Aforementioned condition is unsatisfactory for, then the shape that electrode corrosion goes out is not the most axisymmetric.The electric field strengthened, makes
The W rod to be prepared that length is identical must be had close corrosion potentials (such as 40mm, 50mm, 60mm
It is 6V).
Accompanying drawing explanation
Fig. 1 is that the eletrode tip diameter of example 1 preparation averagely only has 100nm
Fig. 2 is experimental provision schematic diagram
Fig. 3 is the electrode that the embodiment 1 that optical microscope shoots prepares
Fig. 4 is the electrode difference that contrast STM is prepared with this method.The left side is STM manufacture method
The electrode of lower preparation, right-hand member is the electrode that a process for preparing.
Fig. 5 is test data of experiment, and applying voltage of the present invention should make to be in polishing during electrode corrosion
District.
Fig. 6 is ion trap electrodes schematic diagram
Fig. 7 is the optical microscope photograph of the electrode of embodiment 2.
Fig. 8 is the SEM electron scanning micrograph of the electrode of embodiment 2.
Fig. 9 is the optical microscope photograph of the electrode of embodiment 3
Figure 10 is the SEM electron scanning micrograph of the electrode of embodiment 3.
Figure 11 is the corruption rough for 3V30mm2mol/L NaOH of optical microscope shooting
Erosion result。
Detailed description of the invention
For solving above technical problem, the present invention proposes a kind of needle electrode preparation method.Method is divided into
Two pieces, first is the making of electrode body, and second is the making of electrode needle point.
Corrosion principle:
Using electrode as anode, it is immersed in alkaline electrolyte (such as NaOH), adds DC direct current inclined
Pressure, W rod occurs to react as follows:
Anode: 6H2O+6e-→3H2(g)+6OH-
Negative electrode: W(s)+8OH-→WO4 2-+4H2O+6e-
Overall: W(s)+2OH-+2H2O→WO4 2-+3H2(g)。 (1)
Final result is that anode W is oxidized to WO4 entrance solution, removes from W rod surface；Cloudy
Pole produces hydrogen.Owing to reaction rate reaches maximum, as the latter half W at liquid level air interface
Rod weight is more than corroding the stress that the fastest cervical region can bear, and breaking at liquid level intersection is two joints, often
Part all forms a needle point.
Comprise the following steps:
1. with ethanol and distilled water, tungsten bar carried out surface cleaning, and use dust-free paper wiped clean.
2. step up to be installed on the one-dimensional translation stage of vertical direction by electrode drill chuck, and corruption will be treated
The tungsten bar of erosion is connected with positive source.
3. the NaOH solution preparing 2mol/L is placed in 500mL beaker.Beaker is put with one heart
Put small one and large one two 304 rustless steel steel drums, big height be higher than liquid level of solution, little diameter 10mm,
Highly 8mm.Between big stainless steel cask and beaker, (electrode can not be with big rustless steel for placing graphite electrode
Bucket has directly contact), and graphite electrode is connected with power cathode.
4. adjusting one-dimensional translation stage makes W rod to be corroded go deep into the following certain length of liquid level of solution.This
Length is prepared and is added 5mm-10mm required by electrode required for being.
5. turn on the power, adjust voltage and (make to be in corresponding to electrochemical polish when clicking on corrosion
Voltage regime) tungsten bar carried out pre-etching, time 1min.
6. take out W rod, and with distilled water, surface NaOH is cleaned up.Measure W rod diameter,
And be again placed in corroding on platform, adjust one-dimensional translation stage and make W rod go deep into liquid level system claimed below
Standby length adds 2mm-5mm again.
7. adjustment W rod is vertical with liquid level (observes its inverted image below liquid level, with the tungsten in air
Rod overlap be can determine whether during a straight line modulated whole good), and be in big 304 stainless steel cask middles,
The most just to 304 little stainless steel casks.
8. adjust appropriate voltage (to make to be in the voltage zone corresponding to electrochemical polish when clicking on corrosion
Territory), turn on the power, start corrosion.
9., after a period of time, taking out its diameter of electrode measurement, if reaching requirement, then carrying out next step
Suddenly, this step is otherwise repeated.
10. after electrode diameter reaches requirement, by internal diameter slightly larger than the plastics with required electrode diameter
Pipe box, in W rod lower end, adjusts appropriate length, in order to stop the electrode reaching diametric requirements to continue
Corrosion.Being reduced by the electrode packaging pipe clips on drill chuck, is raised above behind the position before being adjusted to
Electrode bar 1-2mm (prevents treating that before electrode prepares completely corrosion electrode has been eclipsed disconnected), starts
Corrosion needle point.
11. turn on the power so that electrode starts corrosion, until W rod to be corroded ruptures and drops to
In the little stainless steel cask of lower section, whole electrode preparation work completes.
12. electrodes prepared with observation by light microscope, measurement, check whether to reach requirement.
The W rod used is pure tungsten tungsten bar and NaOH solution.In order to prepare the concordance of electrode with
Success rate, electrode must be in 304 stainless steel cask middles, and vertical with liquid level.
Embodiment
The preparation of ion trap electrodes is described with an example below.
Embodiment 1
Choose pure tungsten tungsten bar, diameter 1.6mm, 30V, 3A voltage source.Need to prepare 50mm length
The electrode of dt=0.500mm diameter.
The first step: measure tungsten bar diameter d0=1.564mm, and clean with distilled water.
Second step: be placed in by tungsten bar on corrosion platform, take out after pre-etching 1min is straight after measuring corrosion
Footpath d1=1.555mm.Diameter after measurement should prepare electrode diameter needed for being not less than.Calculate in 1min
The electrode diameter change that corrosion causes, then corrosion rate is about (d0-d1)=0.009mm/min.
Second step: again place and treat that corrosion electrode, on a translation stage, adjusts electrode position and makes leaching
Entering the following electrode length of liquid level is 40mm.
3rd step: adjust voltage source output voltage 6V, and turn on the power.About a period of time
(d1-dt)/(d0-d1)=(1.555-0.500)/(1.564-1.555)=117min (the actual waiting time is 110min,
Maximum time 117min less than estimating) after again measure W rod diameter, if not up to requiring, continue corruption
Erosion, until reaching diametric requirements.
4th step: intercept 40mm long internal diameter 0.5mm-0.7mm plastic tube, be placed on tungsten bar lower end to be corroded.
It is replaced on corrosion platform and corrodes, turn on the power, until corrosion electrode is dropped little with following
In 304 stainless steel casks.
Experiment condition: diameter 1.6mm tungsten bar, 6V voltage, 2mol/LNaOH solution, submergence 40mm
Measurement result:
| Away from distance between two tips | Measure diameter |
| 0nm | 113nm |
| 193.7nm | 462.7nm |
| 613.4nm | 655.7nm |
| 1.5um | 772.2nm |
| 1mm | 153.8um |
| 15mm | 0.509mm |
| 30mm | 0.508mm |
| 45mm | 0.505mm |
Embodiment 2
Choose diameter 0.5mm, submergence 40mm, NaOH concentration 2mol/L, voltage 5V, according to
In embodiment one, step makes, it is possible to obtaining finished product needlepoint electrode, measurement result is as follows:
| Away from distance between two tips | Measure diameter |
| 0nm | 153.2nm |
| 326nm | 619.4nm |
| 1.2um | 701.2nm |
| 3.1um | 947.2nm |
| 10mm | 0.489mm |
| 20mm | 0.478mm |
| 30mm | 0.491mm |
| 40mm | 0.475mm |
Embodiment 3
Choose diameter 0.5mm, submergence 40mm, NaOH concentration 2mol/L, voltage 7V, according to
In embodiment one, step makes, it is possible to obtaining finished product needlepoint electrode, measurement result is as follows:
| Away from distance between two tips | Measure diameter |
| 0nm | 142.5nm |
| 165.1nm | 495.4nm |
| 726.6nm | 1.046um |
| 1.2um | 1.108um |
| 2.8um | 1.131um |
| 10mm | 0.476mm |
| 20mm | 0.493mm |
| 30mm | 0.484mm |
| 40mm | 0.473mm |
Embodiment 4
Choose diameter 0.5mm, submergence 30mm, NaOH concentration 2mol/L, voltage 7V, according to
In embodiment one, step makes, it is possible to obtaining finished product needlepoint electrode, measurement result is as follows:
| Away from distance between two tips | Measure diameter |
| 0nm | 91.06nm |
| 200nm | 364.3nm |
| 566.7nm | 571.9nm |
| 1.4um | 765.2nm |
| 2.4um | 768.9nm |
| 10mm | 0.496mm |
| 20mm | 0.495mm |
| 30mm | 0.495mm |
Embodiment 5
Choose diameter 0.5mm, submergence 50mm, NaOH concentration 2mol/L, voltage 7V, according to
In embodiment one, step makes, it is possible to obtaining finished product needlepoint electrode, measurement result is as follows:
| Away from distance between two tips | Measure diameter |
| 65.8nm | 134.0nm |
| 263.2nm | 137.0nm |
| 565.8nm | 320.6nm |
| 881.6nm | 443.1nm |
| 1.4um | 565.3nm |
| 10mm | 0.499mm |
| 20mm | 0.496mm |
| 30mm | 0.497mm |
| 40mm | 0.478mm |
| 50mm | 0.487mm |
Claims (13)
1. the method preparing needle electrode, said method comprising the steps of:
A. in electrolytic vessel, put into aqueous slkali as electrolyte, place two the most with one heart
The corrosion-resistant bucket of conductor varied in size, the corrosion-resistant bucket of big conductor is higher than liquid level of solution, at big conductor corrosion resistant
Outside erosion bucket, negative electrode is set, and not corrosion-resistant with the big conductor bucket of described negative electrode directly contacts；
B. W rod is placed to described electrolyte as anode so that W rod also position vertical with liquid level
In the center of the corrosion-resistant bucket of conductor, the diameter of electrolytic etching to required needle electrode；
C. internal diameter is slightly larger than the insulative pipe sleeve of diameter of required needle electrode in W rod lower end extremely
Expection forms the position of needle point, promotes W rod but still keeps the position forming needle point to be still immersed in described
In electrolyte；
D. electrolytic etching W rod is continued until W rod ruptures；
The W rod dropped in the corrosion-resistant bucket of little conductor of lower section is required needle electrode.
Method the most according to claim 1, a diameter of 5mm of its corrosion-resistant bucket of medium and small conductor
To 10mm；The height of the corrosion-resistant bucket of little conductor is 6mm to 10mm.
Method the most according to claim 1, wherein said aqueous slkali is NaOH solution or KOH
Solution.
Method the most according to claim 1, the concentration of wherein said aqueous slkali be 2mol/L extremely
3.5mol/L。
Method the most according to claim 1, wherein said negative electrode is graphite electrode.
Method the most according to claim 1, places W rod to electrolysis the most in stepb
Liquid makes the length 2mm longer than the length of required needle electrode of electrolyte submergence W rod extremely
5mm。
Method the most according to claim 1, wherein said electrolytic etching is corresponding to W rod electricity
The voltage regime of chemical polishing is carried out.
Method the most according to claim 1, the voltage in wherein said electrolytic etching be 5V extremely
7V。
Method the most according to claim 1, wherein step b is made up of following two step:
B1. W rod is immersed 5mm-10mm longer than the length of required needle electrode in electrolyte,
Electrolytic etching 30 to 120 minutes；
B2. W rod is taken out after cleaning, then W rod is immersed in electrolyte than required needle-like
The long 2mm-5mm of length of electrode, the diameter of electrolytic etching to required needle electrode.
Method the most according to claim 1, promotes W rod 1mm in wherein said step c
To 2mm.
11. methods according to claim 1, the most in stepb, adjust W rod and liquid level
Vertically, observe W rod inverted image below liquid level, adjust W rod and make inverted image and the tungsten bar in air
Coincidence is a straight line, to ensure equally distributed electric field around W rod.
12. 1 kinds of devices being used for preparing needle electrode, described device includes:
Electrolytic vessel；
Electrolyte, described electrolyte is aqueous slkali, is arranged in described electrolytic vessel；
The big corrosion-resistant bucket of conductor and the corrosion-resistant bucket of little conductor, the described corrosion-resistant bucket of big conductor and little conductor are resistance to
Corrosion bucket is arranged concentrically on the center of described electrolytic vessel, and the described corrosion-resistant bucket of big conductor is higher than molten
Liquid liquid level；
Insulated sleeve, the diameter of described insulated sleeve is slightly larger than the diameter of required needle electrode；
Negative electrode, described negative electrode is arranged on outside the corrosion-resistant bucket of conductor, and described negative electrode is not resistance to big conductor
Corrosion bucket directly contacts；
Anode, described anode is the W rod of needle electrode to be made, and is arranged on electrolytic vessel center.
13. 1 kinds of needle electrodes, arbitrary by according in claim 1 to 11 of described needle electrode
Prepared by the method described in Xiang.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410379919.6A CN104131330B (en) | 2014-08-04 | 2014-08-04 | needle electrode and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410379919.6A CN104131330B (en) | 2014-08-04 | 2014-08-04 | needle electrode and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104131330A CN104131330A (en) | 2014-11-05 |
| CN104131330B true CN104131330B (en) | 2016-08-17 |
Family
ID=51804176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410379919.6A Active CN104131330B (en) | 2014-08-04 | 2014-08-04 | needle electrode and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104131330B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107245754A (en) * | 2017-06-02 | 2017-10-13 | 南开大学 | Electrochemical erosion method prepares the micro-nano metal cone of nodular |
| CN118016376B (en) * | 2024-04-08 | 2024-08-13 | 国开启科量子技术(安徽)有限公司 | Method for preparing needle electrode of ion trap |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856727A (en) * | 1981-09-24 | 1983-04-04 | Fujitsu Ltd | Manufacture of electrode chip for ion source |
| JPS6436799A (en) * | 1987-07-30 | 1989-02-07 | Sony Corp | Electrolytic polishing method of acicular electrode |
| JPH08262059A (en) * | 1995-03-28 | 1996-10-11 | Toshiba Emi Ltd | Apparatus and method for manufacturing needle-shaped body |
| US5849173A (en) * | 1996-12-23 | 1998-12-15 | Lucent Technologies Inc. | Electrolytic-etching method of reshaping an electrode for fiber splicing |
| KR20060000036A (en) * | 2004-06-28 | 2006-01-06 | 박철우 | Manufacturing apparatus and method for sub-micro needle electrode |
| CN101692100A (en) * | 2009-10-09 | 2010-04-07 | 南京大学 | Method and device for preparing pinpoint of scanning tunnel microscope (STM) |
| CN101701352A (en) * | 2008-12-15 | 2010-05-05 | 中国矿业大学(北京) | Method for preparing high-resolution emitter tungsten tip and device thereof |
| CN102586854A (en) * | 2012-02-24 | 2012-07-18 | 西安交通大学 | High-efficiency automatic tungsten needle manufacturing device and method |
| CN103014826A (en) * | 2012-12-06 | 2013-04-03 | 东南大学 | Preparation method and preparation device of tungsten probe for electrical measurement of nanometer device |
| CN103630488A (en) * | 2012-08-28 | 2014-03-12 | 中国科学院金属研究所 | In situ observation experiment apparatus for electrochemical corrosion measurement |
| CN203700577U (en) * | 2014-03-04 | 2014-07-09 | 中国矿业大学 | Microprobe electrochemical grinding device of microbubble generator |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102721832A (en) * | 2012-06-25 | 2012-10-10 | 天津大学 | Preparation method and application of metal tungsten nano-probe |
| TWI472651B (en) * | 2012-07-27 | 2015-02-11 | Academia Sinica | Preparation method of nanoscale tip |
-
2014
- 2014-08-04 CN CN201410379919.6A patent/CN104131330B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5856727A (en) * | 1981-09-24 | 1983-04-04 | Fujitsu Ltd | Manufacture of electrode chip for ion source |
| JPS6436799A (en) * | 1987-07-30 | 1989-02-07 | Sony Corp | Electrolytic polishing method of acicular electrode |
| JPH08262059A (en) * | 1995-03-28 | 1996-10-11 | Toshiba Emi Ltd | Apparatus and method for manufacturing needle-shaped body |
| US5849173A (en) * | 1996-12-23 | 1998-12-15 | Lucent Technologies Inc. | Electrolytic-etching method of reshaping an electrode for fiber splicing |
| KR20060000036A (en) * | 2004-06-28 | 2006-01-06 | 박철우 | Manufacturing apparatus and method for sub-micro needle electrode |
| CN101701352A (en) * | 2008-12-15 | 2010-05-05 | 中国矿业大学(北京) | Method for preparing high-resolution emitter tungsten tip and device thereof |
| CN101692100A (en) * | 2009-10-09 | 2010-04-07 | 南京大学 | Method and device for preparing pinpoint of scanning tunnel microscope (STM) |
| CN102586854A (en) * | 2012-02-24 | 2012-07-18 | 西安交通大学 | High-efficiency automatic tungsten needle manufacturing device and method |
| CN103630488A (en) * | 2012-08-28 | 2014-03-12 | 中国科学院金属研究所 | In situ observation experiment apparatus for electrochemical corrosion measurement |
| CN103014826A (en) * | 2012-12-06 | 2013-04-03 | 东南大学 | Preparation method and preparation device of tungsten probe for electrical measurement of nanometer device |
| CN203700577U (en) * | 2014-03-04 | 2014-07-09 | 中国矿业大学 | Microprobe electrochemical grinding device of microbubble generator |
Non-Patent Citations (2)
| Title |
|---|
| STM探针电化学腐蚀装置的设计及实验研究;潘金福;《现代机械》;20081030(第5期);第14-16页 * |
| 扫描隧道探针的制备研究;刘平;《现代仪器》;20031130(第6期);第30-32页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104131330A (en) | 2014-11-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102213654B (en) | Electrolytic extraction and detection method of nonmetallic inclusion in steel by utilizing organic solution | |
| Mu et al. | Crevice corrosion behavior of X70 steel in NaCl solution with different pH | |
| CN104131330B (en) | needle electrode and preparation method thereof | |
| CN103014826A (en) | Preparation method and preparation device of tungsten probe for electrical measurement of nanometer device | |
| CN102181914A (en) | Preparation process for tunneling scanning microscope probe with reverse exponent shape and depth-to-length-diameter ratio | |
| CN102901846B (en) | The device and method of preparation metal needle point | |
| CN106501555A (en) | A kind of preparation facilitiess of ultralow roughness tungsten tipped probe and method | |
| CN106370891A (en) | Preparation method for scanning probe of scanning tunneling microscope and control circuit | |
| CN101648736A (en) | Method for removing chlorine in chlorinated organic pollutant through electrochemistry method | |
| Burham et al. | Effect of hydrofluoric acid (HF) concentration to pores size diameter of silicon membrane | |
| CN106319614A (en) | Method for processing microstructural array | |
| CN106053175A (en) | Simple method for extracting carbides in tool steel | |
| JP2012515264A5 (en) | ||
| CN116695230A (en) | Preparation device and method for high-deflection micro-shovel structure metal needle tip and electrode | |
| CN108196093B (en) | Auxiliary device for preparing metal nano probe | |
| CN205333718U (en) | Be used for magnesium electrolysis production medium voltage to fall measuring device | |
| CN104880580A (en) | Method for cleaning surface of silver nanometer needle point by using sodium borohydride aqueous solution | |
| CN104089803B (en) | Electrolytic stripping device and method for steel sample-embedded carbon extraction replica | |
| CN103693721A (en) | Adjustable sewage treatment equipment | |
| CN206177991U (en) | Scanning tunnel microscope scanning probe's control circuit | |
| JP2002113618A (en) | Electrochemical machining method for manufacturing superfine cylindrical electrode | |
| JP6870389B2 (en) | How to remove the oxide film on the surface of metal material | |
| CN107764878B (en) | Submicron/nano carbon fiber electrode with high spatial resolution | |
| CN102650073A (en) | Electrochemical etching method for directly obtaining micro nanowire at one end of macroscopic filament | |
| CN101539497B (en) | Hot acid electrolytic corrosion method for macroscopic examination of metal samples |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |