CN104064435B - A kind of field emission planar light source and preparation method thereof - Google Patents
A kind of field emission planar light source and preparation method thereof Download PDFInfo
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- CN104064435B CN104064435B CN201310096262.8A CN201310096262A CN104064435B CN 104064435 B CN104064435 B CN 104064435B CN 201310096262 A CN201310096262 A CN 201310096262A CN 104064435 B CN104064435 B CN 104064435B
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Abstract
The invention provides a kind of field emission planar light source, including anode, slider, focusing electrode, grid and negative electrode, anode and negative electrode are separated by slider and are oppositely arranged, three forms an airtight receiving space, and wherein, slider is integrated, including isolating main bodies and side wall supports, isolating main bodies offers funnel-form through hole, and the big opening of isolating main bodies connects with luminescent layer, and little opening connects with side wall supports；Focusing electrode and grid are arranged on the inwall of side wall supports with preset distance, and grid is arranged on negative electrode side；Grid offers gate via, and focusing electrode offers focusing through hole；Negative electrode includes cathode base and emitter, is provided with annular protrusion in the middle part of cathode base, and emitter is arranged on annular protrusion.The field emission planar light source that the present invention provides, by arranging the slider of special construction, improves life-span and the stability of device.Present invention also offers the preparation method of this field emission planar light source.
Description
Technical field
The present invention relates to feds field, be specifically related to a kind of field emission planar light source and preparation method thereof.
Background technology
Feds is a kind of emerging light source, is the device launching electron bombardment anode light by applying electric field from cathode electrode, can realize utilizing high-power high density electron stream luminous.Field emission planar light source, because having energy-saving and environmental protection, can work in the presence of a harsh environment (such as high and low temperature environment), the advantage such as frivolous, can be widely applied to each lighting field.Field emission planar light source compared with traditional backlight module, not only simple structure, and energy-conservation, volume is little, be prone to large-area planar, brightness high, has met the growth requirement of following planar light source.Although field emission planar light source has irreplaceable advantage in following city's competition, but, it exists some problems on reality is applied needs to solve.
The sixty-four dollar question that field emission planar light source is faced is about stability and life-span.And the main cause limiting its life-span has: anode can produce a certain amount of residual gas under beam bombardment, partial ionization can less than from emission of cathode high energy electron beam energy out when, ionization phenomena can occur, produced cation understands bombarding cathode nano material in terms of vertical cathode surface under highfield effect, nano material is caused to be damaged, cause falling of transmitting, affect stability and the life-span of device work.Wherein, slider is bigger on the impact of device lifetime, and the generally material requirements to slider has a following aspect: (1) slider moderate dimensions；(2) there is certain rigidity, intensity；(3) there is certain resistivity；(4) discharge quantity is little.The shape size of slider and putting position, except the distribution of force of substrate is affected bigger in addition to, the Electric Field Distribution of cathode surface is the most quite had an impact, is to cause one of uneven reason of transmitting.
But in the experiment of the device detection of common Flied emission, be more consider slider to the fixing support effect of cathode-anode plate and the insulating properties of spacer material, the problem consideration that cathode surface Electric Field Distribution affect by the slider of difformity size and putting position fewer.
Summary of the invention
In consideration of it, be necessary to provide a kind of field emission planar light source, it has the slider of applicable field emission planar light source, it is thus possible to be effectively improved the service life of field emission planar light source.
First aspect present invention provides a kind of field emission planar light source, including anode, slider, focusing electrode, grid and negative electrode, described anode and negative electrode are separated by slider and are oppositely arranged, and three forms an airtight receiving space, described focusing electrode and grid are housed in described airtight receiving space
Described anode includes anode substrate, conductive layer and luminescent layer successively；
Described slider is integrated, and including isolating main bodies and side wall supports, described isolating main bodies offers funnel-form through hole, and the big opening of described isolating main bodies connects with described luminescent layer, and little opening connects with described side wall supports；
Described focusing electrode and grid are arranged on the inwall of described side wall supports with preset distance, and described grid is arranged on described negative electrode side；Described grid offers the gate via that can make to pass through from the electron beam of described emission of cathode, and described focusing electrode offers the focusing through hole that can make described Electron Beam Focusing；
Described negative electrode includes cathode base and emitter, is provided with annular protrusion in the middle part of described cathode base, and described emitter is arranged on described annular protrusion.
Preferably, described focusing electrode includes conducting plate and is arranged on the projection above described conducting plate, and described focusing through hole runs through described conducting plate and described projection and has diameter at minimum on described projection top.
Preferably, the opening bore of the little opening of described isolating main bodies is less than or equal to diameter at the minimum of described focusing through hole.
Preferably, described emitter is in same axial location with the funnel-form through hole of described gate via, described focusing through hole and described isolating main bodies.
Preferably, the material of described slider is pottery, glass or boron carbide.
Preferably, the material of described anode substrate is glass, and described conductive layer is metallic aluminium, gold or silver layer, or indium tin oxide layer, and described luminescent layer is to inspire the phosphor powder layer that wavelength is 420nm～480nm blue light.
Preferably, the material of described focusing electrode and described grid is copper.
Preferably, described cathode base is that middle part has a corrosion resistant plate of annular protrusion or middle part is provided with the conducting glass substrate of rustless steel annular protrusion.
Preferably, described emitter is zinc oxide nano rod or CNT.
Second aspect present invention provides the preparation method of a kind of above-mentioned field emission planar light source, comprises the following steps:
Clean anode substrate uses magnetron sputtering method or vapour deposition method prepare conductive layer, then prepare luminescent layer at described conductive layer surface, obtain anode；
There is in the middle part of making the cathode base of annular protrusion, then use the mode of direct growth or coating to prepare emitter on described annular protrusion surface, obtain negative electrode；
Using insulant to make slider, described slider is integrated, and including isolating main bodies and side wall supports, described isolating main bodies offers funnel-form through hole；
Make and offer the grid of gate via that can make to be passed through by the electron beam of emission of cathode；Make and offer the focusing electrode focusing on through hole that can make described Electron Beam Focusing；
Described anode, focusing electrode, grid, negative electrode and slider are assembled, the big opening of described isolating main bodies connects with described luminescent layer, little opening connects with described side wall supports, described focusing electrode and described grid are arranged on the inwall of described side wall supports with preset distance, and described grid is arranged on described negative electrode side；Described anode, focusing electrode, grid, negative electrode and slider assemble and form a receiving space, and evacuation seals described receiving space, prepare field emission planar light source.
Field emission planar light source in sum, " funnel-form " special construction due to slider, after applying corresponding voltage at each electrode, after beam bombardment positive plate, produced cation accelerates toward negative electrode under electric field action in a perpendicular direction, the pilot process accelerated will be intercepted by the isolating main bodies inwall of " funnel-form ", owing to the diameter of funnel through hole little opening opening is less, so greatly reducing the quantity of the cation of bombarding cathode, reduce the damage degree to negative electrode nano material, thus improve stability and the life-span of device work.In addition, the prominent negative electrode of field emission planar light source annular replaces the cathode construction of traditional plane form, so under the preset distance and same grid voltage of same grid to negative electrode, the electric field that cathode surface distribution is higher can be made, thus beneficially grid controls, and also has some improvement the stability of device.It addition, slider is processed into integrated structure be conducive to the encapsulation of device and the maintenance of internal vacuum.
Accompanying drawing explanation
Fig. 1 is the profile of field emission planar light source in first embodiment of the invention；
Fig. 2 is the anode construction figure of field emission planar light source in first embodiment of the invention；
Fig. 3 is the focus electrode structure figure of field emission planar light source in first embodiment of the invention；
Fig. 4 is the grid structure figure of field emission planar light source in first embodiment of the invention；
Fig. 5 is the cathode construction figure of field emission planar light source in first embodiment of the invention；
Fig. 6 is the section working effect schematic diagram of field emission planar light source in first embodiment of the invention.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art are obtained under not making creative work premise, broadly fall into the scope of protection of the invention.
With reference to Fig. 1～5, a kind of field emission planar light source that first embodiment of the invention provides, including anode 10, slider 20, focusing electrode 40, grid 50 and negative electrode 30.Anode 10 and negative electrode 30 are separated by slider 20 and are oppositely arranged, three forms an airtight receiving space, anode 10 includes anode substrate 11, conductive layer 12 and luminescent layer 13, negative electrode 30 includes cathode base 31 and emitter 32, conductive layer 12, luminescent layer 13, emitter 32, and focusing electrode 40 and grid 50 are housed in airtight receiving space, slider 20 includes isolating main bodies 21 and side wall supports 22, isolating main bodies 21 offers funnel-form through hole 211, the big opening 212 of isolating main bodies 21 connects with luminescent layer 13, and little opening 213 connects with side wall supports 22；Focusing electrode 40 and grid 50 are arranged on side wall supports 22 inwall with preset distance, and grid 50 is arranged on negative electrode 30 side；Grid 50 offers the gate via 51 that the electron beam launched from negative electrode 30 can be made to pass through, and focusing electrode 40 offers the focusing through hole 41 that can make Electron Beam Focusing；Negative electrode 30 includes cathode base 31 and emitter 32, is provided with annular protrusion 311 in the middle part of cathode base 31, and emitter 32 is arranged on annular protrusion 311.
Wherein, the profile of the field emission planar light source that Fig. 1 provides for the present embodiment.
Slider 20 includes isolating main bodies 21 and side wall supports 22, and isolating main bodies 21 offers funnel-form through hole 211, and side wall supports 22 is central column, and the big opening 212 of isolating main bodies 21 connects with luminescent layer 13, and little opening 213 connects with side wall supports 22.Slider 20 is integrated, and i.e. isolating main bodies 21 and side wall supports 22 are an integrated member.The external surface shape of slider 20 is not particularly limited, and can be cylindricality.Described cylindricality can be cylindrical, it is also possible to is square column type.In the present embodiment, the outer surface of slider 20 is cylindrical.The material of slider 20 can be pottery, glass or boron carbide.In the present embodiment, the material of slider 20 is pottery.
In the present embodiment, the inwall of side wall supports 22 being provided for fixed-focus pole 40, grid 50 and the groove of negative electrode 30 with preset distance, isolating main bodies 21 is provided with the groove for fixed anode 10.In other embodiments of the present invention, it is also possible to directly use adhesive focusing electrode 40, grid 50 and negative electrode 30 to be arranged on the inwall of side wall supports 22, without arranging groove.
The funnel-form through hole 211 of isolating main bodies 21 can be square or circular.In the present embodiment, funnel-form through hole 211 is circular.
Fig. 2 is the anode construction figure of field emission planar light source in the present embodiment.Anode 10 includes anode substrate 11 and the conductive layer 12 being formed on anode substrate 11 and luminescent layer 13, and luminescent layer 13 is formed on conductive layer 12.Wherein, anode substrate 11 is selected from glass or the circle of ceramic material or square plate.Conductive layer 12 is metallic aluminium, gold or silver layer, or indium tin oxide (ITO) layer, it is preferred to use aluminium lamination, is prepared on anode substrate 11 by magnetron sputtering method.Luminescent layer 13 is to inspire the phosphor powder layer that wavelength is 420nm～480nm blue light.Luminescent layer 13 can use the mode of silk screen printing to prepare.The thickness of anode substrate 11, conductive layer 12 and luminescent layer 13 is not particularly limited by the present invention.
Fig. 3 is the focus electrode structure figure of field emission planar light source in the present embodiment.Fig. 4 is the grid structure figure of field emission planar light source in the present embodiment.Focusing electrode 40 includes conducting plate 42 and is arranged on the projection 43 above conducting plate 42, focuses on through hole 41 and runs through conducting plate 40 and projection 43 and have diameter at minimum on projection 43 top.In the present embodiment, the opening bore of the little opening of isolating main bodies 21 213 is less than focusing on diameter at the minimum of through hole 41.In other embodiments, the opening bore of the little opening of isolating main bodies 21 213 can be equal to focusing on diameter at the minimum of through hole 41.Focusing electrode 40 and grid 50 are circular or square plate metallic plate, preferably metal copper plate.
In the present embodiment, emitter is in same axial location with the funnel-form through hole of gate via, focusing through hole and isolating main bodies.
Focusing electrode 40 and grid 50 are arranged with preset distance, and this preset distance can be according to practical situation Scientific Establishment, so that device obtains best launching effect, this is not done particular determination by the present invention.
Fig. 5 is the cathode construction figure of field emission planar light source in the present embodiment.Negative electrode 30 includes cathode base 31 and emitter 32, and negative electrode 30 is oppositely arranged with anode 10, and anode 10, slider 20 and negative electrode 30 form an airtight receiving space.Focusing electrode 40 and grid 50 are housed in this space.
The shape of cathode base 31 matches with anode substrate 11, can be circular or square.In the present embodiment, cathode base 31 is circular.Emitter 32 is arranged on the surface of annular protrusion 311.Emitter 32 can be zinc oxide nano rod or CNT.Emitter 32 can use the mode of direct growth (such as chemical vapour deposition technique) or coating (such as silk screen print method) to prepare on annular protrusion 311 surface.In the present embodiment, cathode base 31 can be that the corrosion resistant plate that middle part has annular protrusion, i.e. annular protrusion 311 are integrated with cathode base 31.In other embodiments of the present invention, it is independent structure that cathode base 31 is provided with the conducting glass substrate 312 of rustless steel annular protrusion 311, i.e. annular protrusion 311 for middle part, uses silver slurry to be pasted onto on conducting glass substrate 312.Wherein, conducting glass substrate 312 can be the glass substrate with indium tin oxide (ITO) layer.
Fig. 6 is the section working effect schematic diagram of field emission planar light source in the present embodiment.The operation principle of the field emission planar light source that the present embodiment provides is as follows: by negative electrode 30 ground connection, apply a forward voltage V at grid 50g, apply a negative voltage V at focusing electrode 40 simultaneouslyf, apply a bigger accelerating potential V of opposing gate voltage at anode conductive layer 12a, at this time, anode light layer 12 can be bombarded through the impact of focusing electrode voltage and the high-tension acceleration of anode with the form launched from electron beam 60 produced by negative electrode 30, with traditional field emission planar light source difference be, electron beam 60 pilot process that after bombarding anode light layer 12, produced cation accelerates toward negative electrode 30 under electric field action in a perpendicular direction is intercepted by the main body that is dielectrically separated from of " funnel " shape, owing to the little opening opening diameter of funnel-form through hole is less, so greatly reducing the amount of positive ions of bombarding cathode 30, thus reduce the damage degree to cathode emitter, improve stability and the life-span of device work.In addition, the prominent negative electrode of field emission planar light source annular replaces the cathode construction of traditional plane form, so under the preset distance and same grid voltage of same grid to negative electrode, the electric field that cathode surface distribution is higher can be made, thus beneficially grid controls, and also has some improvement the stability of device.It addition, slider is processed into the structure of integration, negative electrode integration is conducive to encapsulation and the maintenance of internal vacuum of device.
On the other hand, the preparation method of above-mentioned field emission planar light source is as follows:
First, selecting one piece of circular glass as anode substrate, thickness of glass is 3mm, a diameter of 100mm, by anode substrate successively with acetone, ethanol, deionized water ultrasonic cleaning 15 minutes and dry up or dry.Then use the method for magnetron sputtering to prepare on the anode substrate of this cleaning metallic aluminium conductive layer that thickness is 2 microns, subsequently in the border circular areas that this aluminium lamination Anodic substrate mid diameter is 80mm, use cladding process to coat the ZnS:Ag blue light emitting phosphor layer that a layer thickness is 35 microns, obtain anode；
Use the method processing stainless steel plates such as cutting, polishing, obtain one piece of middle part and there is the stainless steel cathode substrate of annular protrusion, annular protrusion outer annular diameter is 30mm, annular diameters is 10mm, use on annular protrusion surface cladding process to coat the carbon nano-tube emitter that a layer thickness is 5 microns again, obtain negative electrode；
Use that the processing method such as cutting, polishing is one-body molded obtains an outer surface for cylindrical, periphery circular diameter is the ceramic material slider of 130mm, slider includes isolating main bodies and side wall supports, funnel-form through hole is offered in the middle part of isolating main bodies, side wall supports is central column, and annular diameters is 80mm；Isolating main bodies inwall is provided with the groove for fixed anode, and side wall supports inwall is arranged at intervals with the groove for fixed-focus pole, grid and minus plate with preset distance；
The method processing such as cutting, polishing are used to obtain a diameter of 100mm, and center has the circular metal copper coin of focusing through hole as focusing electrode, this focusing electrode includes metallic copper flat board and is arranged on the projection above metallic copper flat board, focus on through hole run through metallic copper flat board and projection and on projection top, there is diameter at minimum, at this minimum, diameter is equal to the little opening opening bore of isolating main bodies funnel-form through hole, for 2mm；Equally, use the method processing such as cutting, polishing to obtain a diameter of 100mm, and center has the circular metal copper coin of gate via as grid；
Above-mentioned gained anode, focusing electrode, grid, negative electrode and slider are assembled, the big opening of isolating main bodies connects with luminescent layer, uses low glass powder to be fixed, and little opening connects with side wall supports, focusing electrode and grid are fixed in pre-groove, and grid is fixed on negative electrode side；Emitter is in same axial location with the funnel-form through hole of gate via, focusing through hole and isolating main bodies；Finally assemble and form a receiving space, be evacuated to 1 × 10-5Pa, seals this receiving space, prepares field emission planar light source.
Above in conjunction with accompanying drawing, embodiments of the invention are described; but the invention is not limited in above-mentioned detailed description of the invention; above-mentioned detailed description of the invention is only schematically; rather than it is restrictive; those of ordinary skill in the art is under the enlightenment of the present invention; in the case of without departing from present inventive concept and scope of the claimed protection, it may also be made that a lot of form, within these belong to the protection of the present invention.
Claims (10)
1. a field emission planar light source, including anode, slider, focusing electrode, grid and negative electrode, described anode and negative electrode are separated by slider and are oppositely arranged, three forms an airtight receiving space, described focusing electrode and grid are housed in described airtight receiving space, it is characterised in that
Described anode includes anode substrate, conductive layer and luminescent layer successively；
Described slider is integrated, and including isolating main bodies and side wall supports, described isolating main bodies offers funnel-form through hole, and the big opening of described isolating main bodies connects with described luminescent layer, and little opening connects with described side wall supports；
Described focusing electrode and grid are arranged on the inwall of described side wall supports with preset distance, and described grid is arranged on described negative electrode side；Described grid offers the gate via that can make to pass through from the electron beam of described emission of cathode, and described focusing electrode offers the focusing through hole that can make described Electron Beam Focusing；
Described negative electrode includes cathode base and emitter, is provided with annular protrusion in the middle part of described cathode base, and described emitter is arranged on described annular protrusion.
2. field emission planar light source as claimed in claim 1, it is characterized in that, described focusing electrode includes conducting plate and is arranged on the projection above described conducting plate, and described focusing through hole runs through described conducting plate and described projection and has diameter at minimum on described projection top.
3. field emission planar light source as claimed in claim 2, it is characterised in that the opening bore of the little opening of described isolating main bodies is less than or equal to diameter at the minimum of described focusing through hole.
4. field emission planar light source as claimed in claim 1, it is characterised in that described emitter is in same axial location with the funnel-form through hole of described gate via, described focusing through hole and described isolating main bodies.
5. field emission planar light source as claimed in claim 1, it is characterised in that the material of described slider is pottery, glass or boron carbide.
6. field emission planar light source as claimed in claim 1, it is characterized in that, the material of described anode substrate is glass, and described conductive layer is metallic aluminium, gold or silver layer, or indium tin oxide layer, described luminescent layer is to inspire the phosphor powder layer that wavelength is 420nm～480nm blue light.
7. field emission planar light source as claimed in claim 1, it is characterised in that the material of described focusing electrode and described grid is copper.
8. field emission planar light source as claimed in claim 1, it is characterised in that described cathode base is that middle part has a corrosion resistant plate of annular protrusion or middle part is provided with the conducting glass substrate of rustless steel annular protrusion.
9. field emission planar light source as claimed in claim 1, it is characterised in that described emitter is zinc oxide nano rod or CNT.
10. the preparation method of the field emission planar light source as described in any one of claim 1～9, it is characterised in that comprise the following steps:
Clean anode substrate uses magnetron sputtering method or vapour deposition method prepare conductive layer, then prepare luminescent layer at described conductive layer surface, obtain anode；
There is in the middle part of making the cathode base of annular protrusion, then use the mode of direct growth or coating to prepare emitter on described annular protrusion surface, obtain negative electrode；
Using insulant to make slider, described slider is integrated, and including isolating main bodies and side wall supports, described isolating main bodies offers funnel-form through hole；
Make and offer the grid of gate via that can make to be passed through by the electron beam of emission of cathode；Make and offer the focusing electrode focusing on through hole that can make described Electron Beam Focusing；
Described anode, focusing electrode, grid, negative electrode and slider are assembled, the big opening of described isolating main bodies connects with described luminescent layer, little opening connects with described side wall supports, described focusing electrode and described grid are arranged on the inwall of described side wall supports with preset distance, and described grid is arranged on described negative electrode side；Described anode, focusing electrode, grid, negative electrode and slider assemble and form a receiving space, and evacuation seals described receiving space, prepare field emission planar light source.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2001065586A2 (en) * | 2000-03-01 | 2001-09-07 | Chad Moore | Fiber-based field emission display |
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| EP0405262B1 (en) * | 1989-06-19 | 1994-06-01 | Matsushita Electric Industrial Co., Ltd. | Flat panel display device |
| US6509687B1 (en) * | 1999-11-30 | 2003-01-21 | International Business Machines Corporation | Metal/dielectric laminate with electrodes and process thereof |
| CN1636256A (en) * | 2001-11-09 | 2005-07-06 | 皇家飞利浦电子股份有限公司 | Vacuum display device |
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