CN104028891B - Welding system for online monitoring laser crystal strain and online monitoring method thereof - Google Patents
Welding system for online monitoring laser crystal strain and online monitoring method thereof Download PDFInfo
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- CN104028891B CN104028891B CN201310069877.1A CN201310069877A CN104028891B CN 104028891 B CN104028891 B CN 104028891B CN 201310069877 A CN201310069877 A CN 201310069877A CN 104028891 B CN104028891 B CN 104028891B
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- 239000013078 crystal Substances 0.000 title claims abstract description 143
- 238000003466 welding Methods 0.000 title claims abstract description 110
- 238000012544 monitoring process Methods 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 42
- 238000001514 detection method Methods 0.000 claims abstract description 53
- 230000010287 polarization Effects 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 7
- 238000007493 shaping process Methods 0.000 claims description 6
- 238000009738 saturating Methods 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 238000005476 soldering Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a welding system for monitoring the strain of a laser crystal on line and an on-line monitoring method thereof, wherein the welding system comprises a crystal welding cavity and an on-line monitoring system, wherein the crystal welding cavity is used for welding the laser crystal in the crystal welding cavity; the online monitoring system is used for emitting a detection laser beam to the laser crystal and monitoring the strain of the laser crystal in the welding process according to the state (including wave front, position and polarization state) of the received detection laser beam passing through the laser crystal. The laser crystal welding on-line monitoring method comprises the following steps: 1) emitting a detection laser beam to a laser crystal in a welding process; 2) and according to the state of the received detection laser beam passing through the laser crystal, monitoring the strain of the laser crystal in the welding process in real time on line. The invention can realize real-time monitoring of the whole crystal welding process, provides basis for the welding process and the improved welding process, and can improve the crystal welding yield.
Description
Technical field
The present invention relates to all solid state laser, particularly for welding laser crystals and the heat sink laser crystals welding system with on-line monitoring crystal strain function in a kind of all solid state laser.
Background technology
All solid state laser (the solid statelaser of semiconductor laser pumping, be called for short DPL) have that volume is little, life-span length, efficiency height, beam quality height, good stability, reliability height, the advantage such as easy to maintenance and electric drive is pollution-free, be a very important developing direction. Crystal in laser apparatus adopts the method with heat sink welding to obtain good cooling performance, thus realizes high power laser light and export. The quality of welding effect directly affects the beam quality of laser apparatus. In welding process, in heating rate, rate of temperature fall and stove, the factor such as air pressure all may make crystal produce strain, and micro-deformation that strain brings causes laser beam quality to worsen. Therefore, by the crystal strain variation of welding process, it is possible to improve weldprocedure, improve crystal welding effect, it is achieved real-time online feedback control welding process.
Now, the strain adopting the method for inspection after welding to evaluate the rear crystal of weldering more, as used wave front analyzer detection laser by the wavefront of crystal after weldering, use polarization state analyser detection laser by the polarization state of crystal, the methods such as the end face of use interferometer detection crystal, by, compared with the test result of crystal before weldering, obtaining the rear strained situation of crystal weldering. Although these methods are reaction soldering effect directly, but cannot analyze which technological process in welding step and increase the strain of crystal. Also parameter cannot be changed when welding crystal in real time by on-line monitoring, it is to increase welding crystal yield rate.
In order to analyzing crystal in welding process due to the uneven thermal load in outside, crystal jig be installed pressure and air pressure effect under the strain that produces, need the on-line monitoring strain when crystal produces in welding process, thus real-time feedback control welding process, improve weldprocedure, it is to increase the welding quality of crystal and yield rate.
Summary of the invention
For prior art Problems existing, an object of the present invention be to provide a kind of can the welding system of on-line monitoring laser crystals strain, this system utilizes the change on-line monitoring welding process by the laser facula of crystal. Another object of the present invention is to provide the on-line monitoring method of a kind of above-mentioned welding system.
For achieving the above object, the welding system of the on-line monitoring laser crystals strain of the present invention, comprises crystal welding chamber and on-line monitoring system, the laser crystals of described crystal welding chamber for welding in crystal welding chamber; Described on-line monitoring system is used for described laser crystals emission detection laser beam, and the state according to the detection laser beam by laser crystals received, the strain of monitoring laser crystals in welding process.
Further, described on-line monitoring system comprises detection laser source, light beam collimating and correcting device, decay contracting bundle device and means of detection, and described detection laser source is for launching described detection laser beam; Described light beam collimating and correcting device be used for detection laser beam carry out shaping and to described vacuum welding chamber output Shaping light beam; Described decay contracting bundle device for exporting described means of detection to after being processed by the detection laser beam of laser crystals; Means of detection is for monitoring the wavefront variation of the detection laser beam by laser crystals, facula position change or the change of polarization state.
Further, described detection laser source is gas laser or solid statelaser.
Further, described crystal welding chamber is provided with the logical light window of the input light inputing in crystal welding chamber for described detection laser beam and the output light for being exported outside crystal welding chamber by the detection laser beam after laser crystals leads to light window; It is provided with the speculum exporting direction for adjusting light beam in crystal welding chamber, the laser crystals that detection laser beam is injected in welding process can be made.
Further, the material of the logical light window of described input light and the logical light window of output light is the saturating material of laser height.
Further, described laser crystals can be crystal pole, crystal lath or crystal disc.
Further, described means of detection is any one in wave front analyzer, facula position analyser, polarization state analyser.
Further, the state of described detection laser beam comprises the polarization state of the wavefront of laser beam, the facula position of laser beam and laser beam.
The laser crystals of the present invention is welded on line monitoring method, comprises the following steps: 1) to the laser crystals emission detection laser beam in welding process; 2) according to the state of the detection laser beam by laser crystals received, the strain of monitoring laser crystals in welding process.
Further, step 2) also comprise step 3) afterwards: the working parameter of adjustment laser crystals welding, state change according to the detection laser beam before and after monitoring parameter adjustment, the working parameter of control laser crystals welding is to reduce the strain of laser crystals in welding process.
Further, the working parameter of laser crystals welding comprises air pressure in the heating in crystal welding chamber, rate of temperature fall and chamber.
The welding process of laser crystals can be carried out on-line real time monitoring by the present invention, it is possible to judge in welding process, which processing parameter increases the strain of crystal according to the result of monitoring, provides foundation for improving laser crystals weldprocedure. Also parameter can be changed when welding crystal in real time by on-line monitoring, it is to increase welding crystal yield rate.
Accompanying drawing explanation
Fig. 1 is the structural representation of the welding system of the present invention;
Fig. 2 is the schematic diagram of present example 1;
Fig. 3 is the schematic diagram of present example 2;
Fig. 4 is the schematic diagram of present example 3;
Fig. 5 is the schematic diagram of present example 4;
The explanatory note of major parts in figure: 1-laser source; 2-optical alignment apparatus for shaping; 3-vacuum welding furnace chamber; 4-laser crystals; 5-decays contracting bundle device; 6-means of detection; 8-speculum; 91, the logical light window in 92-vacuum welding chamber; 81-plays inclined polaroid; 82-analyzing polaroid.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail. Following examples are for illustration of the present invention, but do not limit the scope of the invention.
As shown in Figure 1, the laser crystals welding system of the present invention, comprises laser source 1, light beam collimating and correcting device 2, vacuum welding chamber 3, decay contracting bundle device 5 and means of detection 6. in crystal welding process, laser source 1 exports a branch of stable laser light beam, laser light beam is by exporting, after light beam collimating and correcting device 2 shaping, the light beam that a spot size is slightly less than crystal clear aperture, light beam enters in vacuum welding chamber 3 by the logical light window 91 in vacuum welding chamber, by intracavity reflecting mirror 8, light beam introduced laser crystals 4, light beam is by laser crystals 4, vacuum welding chamber 3 is drawn by the logical light window 92 in speculum 8 and vacuum welding chamber, means of detection 6 is entered after overdamping contracting bundle device 5, means of detection 6 obtains detecting the state of laser source, front and back state according to detection laser source just can judge the strain of laser crystals 4. welding process adjusts the parameter such as air pressure in the heating in vacuum welding chamber, rate of temperature fall and chamber, so that it may with the strain of laser crystals 4 before and after monitoring parameter change, and then the change that can judge which processing parameter increases the strain of crystal.
The shape of general laser crystals 4 is rectangle, parallelogram or round bar shape. When crystal welding process is monitored, different according to the shape of crystal, it is necessary to position and the angle of adjustment speculum make light beam can pass through aforesaid device in order successively. The material of the logical light window of input light and the logical light window of output light is the saturating material of laser height. Laser crystals is selectively crystal pole, crystal lath or crystal disc. Detection laser source 1 is selectively gas laser, solid statelaser or semiconductor laser. Means of detection 6 is selectively wave front analyzer, facula position analyser or polarization state analyser.
Embodiment 1
As shown in Figure 2, on-line monitoring when Nd:YAG parallelogram crystal lath and heat sink single-sided welding. Laser crystals is crystal lath 41, and crystal lath 41 leads to light face 20 × 2mm. Laser source adopts He-Ne Lasers source 11, output wavelength is 632.8nm single-mode laser light beam, light beam is of a size of 18 × 1.8mm by light beam collimating and correcting device 2 output facula shape, light beam enters in welding chamber 3 by welding the logical light window 91 in chamber, light beam is by penetrating chamber from logical light window 92 after the crystal lath 41 in chamber, wave front analyzer 61 is entered, the wavefront variation of wave front analyzer 61 Real-Time Monitoring light beam after overdamping contracting bundle device 5. The material of logical light window 91,92 is silica glass, and Quartz glass surfaces needs to reach: quartz surfaces plating 632.8nm high transmittance film, transmitance >=99%; Diameter >=50mm, parallelism≤30 ", roughness≤1nm; Planeness≤λ/2632.8nm; Smooth finish≤60/40. Wavefront variation according to wave front analyzer 61 Real-Time Monitoring, then according to wavefront variation and the crystal strain relation adjustment heating of soldering furnace, rate of temperature fall, the parameter such as air pressure in stove.
Embodiment 2
As shown in Figure 3, on-line monitoring when Nd:YAG crystal pole and heat sink welding. Laser crystals is crystal pole 42, and crystal pole 42 leads to light face Φ 6mm. Laser source adopts He-Ne Lasers source 11, output wavelength is 632.8nm single-mode laser light beam, light beam is of a size of Φ 5mm by light beam collimating and correcting device 2 output facula shape, light beam enters in welding chamber 3 by welding the logical light window 91 in chamber, light beam is by penetrating chamber from logical light window 92 after the crystal pole 42 in chamber, through overdamping contracting bundle device 5 laggard enter hot spot Position Analyzer 62, facula position analyser 62 Real-Time Monitoring light beam facula position change. The material of logical light window 91,92 is PC resin material, and PC resin material surface needs to reach: PC resin material plated surface 632.8nm high transmittance film, transmitance >=99%; Diameter >=50mm, parallelism≤30 ", roughness≤1nm; Planeness≤λ/2632.8nm; Smooth finish≤60/40. Facula position change according to facula position analyser 62 Real-Time Monitoring, then according to facula position change and the crystal strain relation adjustment heating of soldering furnace, rate of temperature fall, the parameter such as air pressure in stove.
Embodiment 3
As shown in Figure 4, on-line monitoring when Yb:YAG rectangular crystal lath and heat sink two-sided welding. On-line monitoring when Yb:YAG crystal lath and heat sink single-sided welding. Laser crystals is crystal lath 43, and crystal lath 43 leads to light face 10 × 1mm, and logical light face is parallel. Laser source adopts LD LASER Light Source 13, output wavelength is 637nm single-mode laser light beam, collimated beam is of a size of 9 × 0.8mm by light beam collimating and correcting device 2 output facula shape, light beam enters in welding chamber 3 by the logical light window 91 in welding chamber after playing inclined polaroid 81 by one, light beam is by penetrating chamber from logical light window 92 after the crystal lath 43 in chamber, polarization state analyser 63 is entered, the change of the polarization state of polarization state analyser 63 Real-Time Monitoring light beam after analyzing polaroid 82 and decay contracting bundle device 5. The material of logical light window 91,92 is PC resin material, and PC resin material surface needs to reach: PC resin material plated surface 637nm high transmittance film, transmitance >=99%; Diameter >=50mm, parallelism≤30 ", roughness≤1nm; Planeness≤λ/2632.8nm; Smooth finish≤60/40. The change of the light polarization according to polarization state analyser 63 Real-Time Monitoring, according to facula position change and the crystal strain relation adjustment heating of soldering furnace, rate of temperature fall, the parameter such as air pressure in stove.
Embodiment 4
As shown in Figure 5, on-line monitoring when Nd:YAG rectangular crystal disc and heat sink single-sided welding. Laser crystals is crystal disc 44, and crystal disc leads to light face Φ 30mm. Laser source adopts 1064nm LASER Light Source 14, output wavelength is 1064nm single-mode laser light beam, collimated beam is of a size of Φ 10mm by light beam collimating and correcting device 2 output facula shape, light beam enters in welding chamber 3 by welding the logical light window 91 in chamber, light beam penetrates chamber from logical light window 92 after being reflected by the crystal disc 44 in chamber, wave front analyzer 61 is entered, the wavefront variation of wave front analyzer 61 Real-Time Monitoring light beam after overdamping contracting bundle device 5. The material of logical light window 9 is silica glass material, and silica glass material surface needs to reach: quartz surfaces plating 1064nm high transmittance film, transmitance >=99%; Diameter >=50mm, parallelism≤30 ", roughness≤1nm; Planeness≤λ/2632.8nm; Smooth finish≤60/40. Wavefront variation according to wave front analyzer 61 Real-Time Monitoring, then according to wavefront variation and the crystal strain relation data adjustment heating of soldering furnace, rate of temperature fall, the parameter such as air pressure in stove.
Claims (9)
1. the welding system of on-line monitoring laser crystals strain, it is characterised in that, comprise crystal welding chamber and on-line monitoring system, the laser crystals of described crystal welding chamber for welding in crystal welding chamber; Described on-line monitoring system is used for described laser crystals emission detection laser beam, and according to the detection laser beam state by laser crystals received, the strain of on-line real time monitoring laser crystals in welding process;
Described on-line monitoring system comprises detection laser source, light beam collimating and correcting device, decay contracting bundle device and means of detection, and described detection laser source is for launching described detection laser beam; Described light beam collimating and correcting device be used for detection laser beam carry out shaping and to vacuum welding chamber output Shaping light beam; Described decay contracting bundle device for exporting described means of detection to after being processed by the detection laser beam of laser crystals; Means of detection is for monitoring the wavefront variation of the detection laser beam by laser crystals, facula position change or the change of polarization state.
2. welding system as claimed in claim 1, it is characterised in that, described detection laser source is gas laser or solid statelaser.
3. welding system as claimed in claim 1, it is characterized in that, described crystal welding chamber being provided with the logical light window of the input light inputing in crystal welding chamber for described detection laser beam and the output light for being exported outside crystal welding chamber by the detection laser beam after laser crystals leads to light window; It is provided with the speculum exporting direction for adjusting light beam in crystal welding chamber, the laser crystals that detection laser beam is injected in welding process can be made.
4. welding system as claimed in claim 3, it is characterised in that, the material of the logical light window of described input light and the logical light window of output light is the saturating material of laser height.
5. welding system as claimed in claim 1, it is characterised in that, described means of detection is any one in wave front analyzer, facula position analyser, polarization state analyser.
6. welding system as claimed in claim 1, it is characterised in that, described laser crystals is crystal pole, crystal lath or crystal disc.
7. adopt the welding system as described in item as arbitrary in claim 1-6 that laser crystals welding is carried out a method for on-line monitoring, comprise the following steps: 1) to the laser crystals emission detection laser beam in welding process; 2) according to the state receiving the detection laser beam by laser crystals, the strain of on-line real time monitoring laser crystals in welding process.
8. method as claimed in claim 7, it is characterized in that, step 2) also comprise step 3 afterwards): the working parameter of adjustment laser crystals welding, state change according to the detection laser beam before and after monitoring parameter adjustment, the working parameter of control laser crystals welding is to reduce the strain of laser crystals in welding process.
9. method as claimed in claim 8, it is characterised in that, the working parameter of laser crystals welding comprises air pressure in the heating in crystal welding chamber, rate of temperature fall, crystal jig clamping pressure and chamber.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310069877.1A CN104028891B (en) | 2013-03-06 | 2013-03-06 | Welding system for online monitoring laser crystal strain and online monitoring method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310069877.1A CN104028891B (en) | 2013-03-06 | 2013-03-06 | Welding system for online monitoring laser crystal strain and online monitoring method thereof |
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| CN104028891A CN104028891A (en) | 2014-09-10 |
| CN104028891B true CN104028891B (en) | 2016-06-15 |
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| CN107335923B (en) * | 2017-06-09 | 2019-04-19 | 中国科学院上海光学精密机械研究所 | Femtosecond laser space-time focuses metal surface high throughput processes device and method |
| US10751832B2 (en) * | 2017-07-18 | 2020-08-25 | Jtekt Corporation | Optical non-destructive inspection method and optical non-destructive inspection apparatus |
| CN111931431B (en) * | 2020-07-23 | 2023-06-16 | 中国农业大学 | Shock wave front position determining method and device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5135695A (en) * | 1989-12-04 | 1992-08-04 | Board Of Regents The University Of Texas System | Positioning, focusing and monitoring of gas phase selective beam deposition |
| CN1428873A (en) * | 2001-12-28 | 2003-07-09 | 株式会社半导体能源研究所 | Semiconductor device and semiconductor device mfg. system |
| CN1563959A (en) * | 2004-04-06 | 2005-01-12 | 中国科学院上海光学精密机械研究所 | Time-resolved X-ray diffraction chromatographic device |
| CN101251472A (en) * | 2008-03-19 | 2008-08-27 | 中国科学院上海光学精密机械研究所 | Device and method for online real-time measurement of optical film stress by double light beams |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL147788A (en) * | 2001-01-24 | 2008-11-03 | Eitan Zeiler | Emissivity-independent silicon surface temperature measurement |
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- 2013-03-06 CN CN201310069877.1A patent/CN104028891B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5135695A (en) * | 1989-12-04 | 1992-08-04 | Board Of Regents The University Of Texas System | Positioning, focusing and monitoring of gas phase selective beam deposition |
| CN1428873A (en) * | 2001-12-28 | 2003-07-09 | 株式会社半导体能源研究所 | Semiconductor device and semiconductor device mfg. system |
| CN1563959A (en) * | 2004-04-06 | 2005-01-12 | 中国科学院上海光学精密机械研究所 | Time-resolved X-ray diffraction chromatographic device |
| CN101251472A (en) * | 2008-03-19 | 2008-08-27 | 中国科学院上海光学精密机械研究所 | Device and method for online real-time measurement of optical film stress by double light beams |
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