[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

CH564692A5 - - Google Patents

Info

Publication number
CH564692A5
CH564692A5 CH448873A CH448873A CH564692A5 CH 564692 A5 CH564692 A5 CH 564692A5 CH 448873 A CH448873 A CH 448873A CH 448873 A CH448873 A CH 448873A CH 564692 A5 CH564692 A5 CH 564692A5
Authority
CH
Switzerland
Application number
CH448873A
Original Assignee
Leybold Heraeus Verwaltung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung filed Critical Leybold Heraeus Verwaltung
Publication of CH564692A5 publication Critical patent/CH564692A5/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CH448873A 1972-06-19 1973-03-28 CH564692A5 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2229724A DE2229724B2 (de) 1972-06-19 1972-06-19 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
CH564692A5 true CH564692A5 (it) 1975-07-31

Family

ID=5848074

Family Applications (1)

Application Number Title Priority Date Filing Date
CH448873A CH564692A5 (it) 1972-06-19 1973-03-28

Country Status (5)

Country Link
US (1) US3826588A (it)
CH (1) CH564692A5 (it)
DE (1) DE2229724B2 (it)
FR (1) FR2190184A5 (it)
GB (1) GB1397179A (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4645413A (en) * 1983-05-17 1987-02-24 Leybold-Heraeus Gmbh Friction pump

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2518201C3 (de) * 1975-04-24 1979-03-15 Battelle-Institut E.V., 6000 Frankfurt Vorrichtung zum Trennen von Gasgemischen in Bestandteile unterschiedlicher Molekülmassen
US4422822A (en) * 1980-08-11 1983-12-27 Norman Milleron Rotating fiber array molecular driver and molecular momentum transfer device constructed therewith
GB2128687B (en) * 1982-10-13 1986-10-29 Rolls Royce Rotor or stator blade for an axial flow compressor
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
JPH1089284A (ja) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd ターボ分子ポンプ
JP3092063B2 (ja) * 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
US8668436B2 (en) * 2008-02-15 2014-03-11 Shimadzu Corporation Turbomolecular pump
JP5369591B2 (ja) 2008-10-03 2013-12-18 株式会社島津製作所 ターボ分子ポンプ
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
JP6241223B2 (ja) * 2013-03-13 2017-12-06 株式会社島津製作所 真空ポンプ
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
JP7052752B2 (ja) * 2019-01-30 2022-04-12 株式会社島津製作所 ターボ分子ポンプ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4645413A (en) * 1983-05-17 1987-02-24 Leybold-Heraeus Gmbh Friction pump

Also Published As

Publication number Publication date
DE2229724B2 (de) 1980-06-04
GB1397179A (en) 1975-06-11
DE2229724A1 (de) 1974-01-10
US3826588A (en) 1974-07-30
FR2190184A5 (it) 1974-01-25

Similar Documents

Publication Publication Date Title
FR2196286B1 (it)
FR2190184A5 (it)
FR2198623A5 (it)
FR2174122B1 (it)
JPS4945772A (it)
JPS495379U (it)
FR2187417B3 (it)
JPS49921A (it)
JPS5216946Y1 (it)
JPS4967290U (it)
JPS4958097U (it)
JPS494324A (it)
IN139439B (it)
CH588644A5 (it)
CH577969A5 (it)
CH604331A5 (it)
CH603760A5 (it)
CH602657A5 (it)
CH595023A5 (it)
CH593254A5 (it)
CH589995A5 (it)
CH589147A5 (it)
CH589094A5 (it)
NL7215336A (it)
CH588094A5 (it)

Legal Events

Date Code Title Description
PL Patent ceased
PL Patent ceased