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CH371212A - Evaporator ion pump - Google Patents

Evaporator ion pump

Info

Publication number
CH371212A
CH371212A CH7112359A CH7112359A CH371212A CH 371212 A CH371212 A CH 371212A CH 7112359 A CH7112359 A CH 7112359A CH 7112359 A CH7112359 A CH 7112359A CH 371212 A CH371212 A CH 371212A
Authority
CH
Switzerland
Prior art keywords
evaporator
ion pump
ion
pump
evaporator ion
Prior art date
Application number
CH7112359A
Other languages
German (de)
Inventor
Albert Dr Lorenz
Blaske Werner
Original Assignee
Heraeus Gmbh W C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Gmbh W C filed Critical Heraeus Gmbh W C
Publication of CH371212A publication Critical patent/CH371212A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
CH7112359A 1958-05-30 1959-03-23 Evaporator ion pump CH371212A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH33442A DE1083485B (en) 1958-05-30 1958-05-30 Evaporator ion pump

Publications (1)

Publication Number Publication Date
CH371212A true CH371212A (en) 1963-08-15

Family

ID=7152149

Family Applications (1)

Application Number Title Priority Date Filing Date
CH7112359A CH371212A (en) 1958-05-30 1959-03-23 Evaporator ion pump

Country Status (5)

Country Link
US (1) US3074621A (en)
CH (1) CH371212A (en)
DE (1) DE1083485B (en)
FR (1) FR1221434A (en)
GB (1) GB901468A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3181775A (en) * 1962-03-20 1965-05-04 Wisconsin Alumni Res Found Pumping apparatus
US3251536A (en) * 1963-10-08 1966-05-17 Cons Vacuum Corp Getter-ion pumps
US3313474A (en) * 1964-08-04 1967-04-11 Cons Vacuum Corp Vaporized material source
US3352482A (en) * 1965-09-13 1967-11-14 Electro Optical Systems Inc Ion sputter pumping collector
US3377499A (en) * 1966-05-16 1968-04-09 Varian Associates Relatively large consumable pelletized getter source element for sublimation type getter vacuum pumps
US3383032A (en) * 1967-01-31 1968-05-14 Atomic Energy Commission Usa Vacuum pumping method and apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2727167A (en) * 1952-04-18 1955-12-13 Westinghouse Electric Corp Ion pump
US2796555A (en) * 1954-06-29 1957-06-18 High Voltage Engineering Corp High-vacuum pump
GB795551A (en) * 1955-09-27 1958-05-28 Ass Elect Ind Improvements relating to electron vacuum pumping systems
US2850225A (en) * 1955-11-10 1958-09-02 Wisconsin Alumni Res Found Pump

Also Published As

Publication number Publication date
GB901468A (en) 1962-07-18
DE1083485B (en) 1960-06-15
US3074621A (en) 1963-01-22
FR1221434A (en) 1960-06-01

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