CA968864A - Method and apparatus for producing electric resistors on a high ohmic supporting base - Google Patents

Method and apparatus for producing electric resistors on a high ohmic supporting base

Info

Publication number: CA968864A
Authority: CA; Canada
Prior art keywords: supporting base; producing electric; high ohmic; electric resistors; resistors
Prior art date: 1971-09-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA151,799A

Other versions

CA151799S (en

Inventor

Eberhard Krimmel

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Siemens AG

Original Assignee

Siemens AG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1971-09-17

Filing date

1972-09-15

Publication date

1975-06-03

1971-09-17 Priority claimed from DE19712146662 external-priority patent/DE2146662C3/en

1972-09-15 Application filed by Siemens AG filed Critical Siemens AG

1975-06-03 Application granted granted Critical

1975-06-03 Publication of CA968864A publication Critical patent/CA968864A/en

Status Expired legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/2404—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by charged particle impact, e.g. by electron or ion beam milling, sputtering, plasma etching
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49099—Coating resistive material on a base

Landscapes

Engineering & Computer Science (AREA)
Microelectronics & Electronic Packaging (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Manufacturing & Machinery (AREA)
Electromagnetism (AREA)
Apparatuses And Processes For Manufacturing Resistors (AREA)
Semiconductor Integrated Circuits (AREA)
Electrodes Of Semiconductors (AREA)
Physical Vapour Deposition (AREA)
Thermistors And Varistors (AREA)

CA151,799A 1971-09-17 1972-09-15 Method and apparatus for producing electric resistors on a high ohmic supporting base Expired CA968864A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE19712146662 DE2146662C3 (en)		1971-09-17	Process for producing an electrically conductive layer

Publications (1)

Publication Number	Publication Date
CA968864A true CA968864A (en)	1975-06-03

Family

ID=5819937

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA151,799A Expired CA968864A (en)	1971-09-17	1972-09-15	Method and apparatus for producing electric resistors on a high ohmic supporting base

Country Status (12)

Country	Link
US (1)	US3818413A (en)
JP (1)	JPS4839180A (en)
AT (1)	AT321411B (en)
BE (1)	BE788894A (en)
CA (1)	CA968864A (en)
CH (1)	CH566063A5 (en)
FR (1)	FR2152942B1 (en)
GB (1)	GB1387166A (en)
IT (1)	IT967539B (en)
LU (1)	LU66097A1 (en)
NL (1)	NL7212362A (en)
SE (1)	SE381530B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3898607A (en) *	1974-02-28	1975-08-05	Motorola Inc	High value vertical resistors by ion implantation and method for making same
US4318072A (en) *	1979-09-04	1982-03-02	Vishay Intertechnology, Inc.	Precision resistor with improved temperature characteristics
DE3138960A1 (en) *	1981-09-30	1983-04-14	Siemens AG, 1000 Berlin und 8000 München	METHOD FOR PRODUCING ELECTRICALLY CONDUCTING LAYERS
JPS59162580A (en) *	1983-03-08	1984-09-13	Fuji Photo Film Co Ltd	Process head for electrophotographing device
US6373118B1 (en) *	1999-08-11	2002-04-16	Lewyn Consulting, Inc.	High-value integrated circuit resistor
CN110824137B (en) *	2019-10-10	2022-03-11	中国建筑材料科学研究总院有限公司	Method and device for predicting crystallization order of silver film in low-emissivity glass on substrate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2999339A (en) *	1956-12-07	1961-09-12	Bansch & Lomb Inc	Method of providing an electrically conductive surface
US3287161A (en) *	1962-10-01	1966-11-22	Xerox Corp	Method for forming a thin film resistor
US3380156A (en) *	1965-11-15	1968-04-30	Trw Inc	Method of fabricating thin film resistors
US3562022A (en) *	1967-12-26	1971-02-09	Hughes Aircraft Co	Method of doping semiconductor bodies by indirection implantation
US3585088A (en) *	1968-10-18	1971-06-15	Ibm	Methods of producing single crystals on supporting substrates

0
- BE BE788894D patent/BE788894A/en unknown
1972
- 1972-08-10 AT AT693072A patent/AT321411B/en not_active IP Right Cessation
- 1972-08-10 CH CH1181272A patent/CH566063A5/xx not_active IP Right Cessation
- 1972-09-01 US US00285933A patent/US3818413A/en not_active Expired - Lifetime
- 1972-09-12 NL NL7212362A patent/NL7212362A/xx not_active Application Discontinuation
- 1972-09-14 FR FR7232531A patent/FR2152942B1/fr not_active Expired
- 1972-09-14 JP JP47092747A patent/JPS4839180A/ja active Pending
- 1972-09-15 LU LU66097A patent/LU66097A1/xx unknown
- 1972-09-15 CA CA151,799A patent/CA968864A/en not_active Expired
- 1972-09-15 IT IT29257/72A patent/IT967539B/en active
- 1972-09-15 GB GB4281072A patent/GB1387166A/en not_active Expired
- 1972-09-15 SE SE7211940A patent/SE381530B/en unknown

Also Published As

Publication number	Publication date
DE2146662A1 (en)	1973-03-22
CH566063A5 (en)	1975-08-29
IT967539B (en)	1974-03-11
US3818413A (en)	1974-06-18
FR2152942A1 (en)	1973-04-27
SE381530B (en)	1975-12-08
AT321411B (en)	1975-03-25
DE2146662B2 (en)	1976-04-08
NL7212362A (en)	1973-03-20
LU66097A1 (en)	1973-01-17
BE788894A (en)	1973-01-02
FR2152942B1 (en)	1976-08-13
GB1387166A (en)	1975-03-12
JPS4839180A (en)	1973-06-08

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