CA594690A - Aryl azides and colloidal material for lithography - Google Patents
Aryl azides and colloidal material for lithographyInfo
- Publication number
- CA594690A CA594690A CA594690A CA594690DA CA594690A CA 594690 A CA594690 A CA 594690A CA 594690 A CA594690 A CA 594690A CA 594690D A CA594690D A CA 594690DA CA 594690 A CA594690 A CA 594690A
- Authority
- CA
- Canada
- Prior art keywords
- lithography
- colloidal material
- aryl azides
- azides
- aryl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- -1 Aryl azides Chemical class 0.000 title 1
- 238000001459 lithography Methods 0.000 title 1
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA594690T |
Publications (1)
Publication Number | Publication Date |
---|---|
CA594690A true CA594690A (en) | 1960-03-22 |
Family
ID=35808217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA594690A Expired CA594690A (en) | Aryl azides and colloidal material for lithography |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA594690A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4783391A (en) * | 1983-08-17 | 1988-11-08 | Toray Industries, Inc. | Radiation-sensitive polyamide polymer composition with anthraquinone monoazide |
-
0
- CA CA594690A patent/CA594690A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4783391A (en) * | 1983-08-17 | 1988-11-08 | Toray Industries, Inc. | Radiation-sensitive polyamide polymer composition with anthraquinone monoazide |
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