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CA2496467A1 - Stabilized, aqueous silicon dioxide dispersion - Google Patents

Stabilized, aqueous silicon dioxide dispersion Download PDF

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Publication number
CA2496467A1
CA2496467A1 CA002496467A CA2496467A CA2496467A1 CA 2496467 A1 CA2496467 A1 CA 2496467A1 CA 002496467 A CA002496467 A CA 002496467A CA 2496467 A CA2496467 A CA 2496467A CA 2496467 A1 CA2496467 A1 CA 2496467A1
Authority
CA
Canada
Prior art keywords
silicon dioxide
stabilized
dioxide dispersion
aqueous silicon
cation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002496467A
Other languages
French (fr)
Other versions
CA2496467C (en
Inventor
Wolfgang Lortz
Christoph Batz-Sohn
Gabriele Perlet
Werner Will
Gerrit Schneider
Peter Neugebauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2496467A1 publication Critical patent/CA2496467A1/en
Application granted granted Critical
Publication of CA2496467C publication Critical patent/CA2496467C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/28Compounds of silicon
    • C09C1/30Silicic acid
    • C09C1/3045Treatment with inorganic compounds
    • C09C1/3054Coating
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/14Colloidal silica, e.g. dispersions, gels, sols
    • C01B33/146After-treatment of sols
    • C01B33/149Coating
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/28Compounds of silicon
    • C09C1/30Silicic acid
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1436Composite particles, e.g. coated particles
    • C09K3/1445Composite particles, e.g. coated particles the coating consisting exclusively of metals
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1454Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463Aqueous liquid suspensions
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/12Surface area

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Composite Materials (AREA)
  • Dispersion Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Colloid Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

Aqueous dispersion containing silicon dioxide powder, which is stable in a pH
range of 2 to 6, which contains a cation-providing compound that is at least partially soluble in this pH range and the zeta potential of which is less than or equal to zero. It is produced by bringing silicon dioxide powder and at least one cation-providing compound into contact whilst moving in an aqueous medium. The dispersion can be used for chemical-mechanical polishing of metal surfaces.
CA002496467A 2002-08-22 2003-07-29 Stabilized, aqueous silicon dioxide dispersion Expired - Fee Related CA2496467C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10238463.0 2002-08-22
DE10238463A DE10238463A1 (en) 2002-08-22 2002-08-22 Stabilized, aqueous silicon dioxide dispersion
PCT/EP2003/008333 WO2004018359A1 (en) 2002-08-22 2003-07-29 Stabilized, aqueous silicon dioxide dispersion

Publications (2)

Publication Number Publication Date
CA2496467A1 true CA2496467A1 (en) 2004-03-04
CA2496467C CA2496467C (en) 2008-12-09

Family

ID=31197230

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002496467A Expired - Fee Related CA2496467C (en) 2002-08-22 2003-07-29 Stabilized, aqueous silicon dioxide dispersion

Country Status (10)

Country Link
EP (1) EP1529014A1 (en)
JP (1) JP4448030B2 (en)
KR (1) KR100772258B1 (en)
CN (1) CN100447082C (en)
AU (1) AU2003250188A1 (en)
CA (1) CA2496467C (en)
DE (1) DE10238463A1 (en)
NO (1) NO20051492L (en)
PL (1) PL203972B1 (en)
WO (1) WO2004018359A1 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200613485A (en) * 2004-03-22 2006-05-01 Kao Corp Polishing composition
DE102004021092A1 (en) * 2004-04-29 2005-11-24 Degussa Ag Use of a cationic silica dispersion as a textile finishing agent
AT500776B1 (en) * 2004-08-18 2008-12-15 Wagner Friedrich USE OF A COMPOSITION FOR APPLYING A RECESSIBLE, HEIGHT-BUILDING STRUCTURAL COATING
AT502282B1 (en) * 2005-07-26 2008-12-15 Friedrich Wagner SLIP-RESISTANT SPRAYER FOR MOBILE FLOORING
WO2006046463A1 (en) * 2004-10-28 2006-05-04 Konica Minolta Photo Imaging, Inc. Cationic fine particle dispersions and ink-jet recording papaers
DE102005012409A1 (en) 2005-03-17 2006-09-21 Wacker Chemie Ag Aqueous dispersions of partially hydrophobic silicic acids
DE102005062606A1 (en) * 2005-12-23 2007-07-05 Deutsche Institute Für Textil- Und Faserforschung Denkendorf New nano-scale primary particle based on silicon oxide/mixed oxide of silicon oxide and other metal oxide, useful e.g. for hydrophilic coating of hydrophobic textile materials
JP2007258606A (en) * 2006-03-24 2007-10-04 Fujifilm Corp Polishing solution for chemical-mechanical polishing
CN101490200B (en) 2006-07-12 2012-09-05 卡伯特微电子公司 Cmp method for metal-containing substrates
DE102006049526A1 (en) * 2006-10-20 2008-04-24 Evonik Degussa Gmbh Stable aqueous dispersions of silica
CN101918500B (en) * 2007-11-19 2015-05-20 格雷斯股份有限两合公司 Submicron anti-corrosive particles
DE102007059861A1 (en) * 2007-12-12 2009-06-18 Evonik Degussa Gmbh Process for the preparation of silica dispersions
DE102008041466A1 (en) 2008-08-22 2010-02-25 Wacker Chemie Ag Aqueous dispersions of hydrophobic silicic acids
CN101838479B (en) * 2010-03-19 2013-11-20 福建师范大学 Method for preparing dispersible ultra-fine silicon dioxide
KR102205327B1 (en) * 2013-06-10 2021-01-19 닛산 가가쿠 가부시키가이샤 Silica sol and method for producing silica sol
CN105778775B (en) * 2014-12-23 2021-03-02 安集微电子(上海)有限公司 Preparation method of neutral colloidal silicon dioxide
CN104830300A (en) * 2015-04-30 2015-08-12 河南大学 Small-particle size nanometer polysilicon emulsion and preparation method thereof
CN108751204A (en) * 2018-05-14 2018-11-06 江苏联瑞新材料股份有限公司 A kind of preparation method of submicron silicon dioxide dispersion liquid
CN111777949A (en) * 2020-07-13 2020-10-16 长沙金硅地环保科技有限公司 High-molecular nano-silicon and hydrosol polymer and application thereof
JP2022067800A (en) * 2020-10-21 2022-05-09 山口精研工業株式会社 Silica dispersion, and polishing agent composition
CN114044520B (en) * 2021-11-29 2024-06-28 苏州西丽卡电子材料有限公司 Preparation method of high-aluminum ultrapure synthetic quartz sand

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2892797A (en) * 1956-02-17 1959-06-30 Du Pont Process for modifying the properties of a silica sol and product thereof
US3007878A (en) * 1956-11-01 1961-11-07 Du Pont Aquasols of positively-charged coated silica particles and their production
SE501214C2 (en) * 1992-08-31 1994-12-12 Eka Nobel Ab Silica sol and process for making paper using the sun
US6420039B1 (en) * 1998-10-02 2002-07-16 Cabot Corporation Recording medium

Also Published As

Publication number Publication date
JP4448030B2 (en) 2010-04-07
AU2003250188A1 (en) 2004-03-11
WO2004018359A1 (en) 2004-03-04
DE10238463A1 (en) 2004-03-04
CN1675128A (en) 2005-09-28
KR20050050646A (en) 2005-05-31
PL373839A1 (en) 2005-09-19
JP2005536426A (en) 2005-12-02
NO20051492L (en) 2005-05-13
EP1529014A1 (en) 2005-05-11
KR100772258B1 (en) 2007-11-01
PL203972B1 (en) 2009-11-30
CN100447082C (en) 2008-12-31
CA2496467C (en) 2008-12-09

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Effective date: 20220301

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Effective date: 20200831