CA2246374A1 - Apparatus and methods for surface contour measurement - Google Patents
Apparatus and methods for surface contour measurementInfo
- Publication number
- CA2246374A1 CA2246374A1 CA 2246374 CA2246374A CA2246374A1 CA 2246374 A1 CA2246374 A1 CA 2246374A1 CA 2246374 CA2246374 CA 2246374 CA 2246374 A CA2246374 A CA 2246374A CA 2246374 A1 CA2246374 A1 CA 2246374A1
- Authority
- CA
- Canada
- Prior art keywords
- radiation
- point
- sources
- methods
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000005259 measurement Methods 0.000 title 1
- 230000005855 radiation Effects 0.000 abstract 9
- 230000001427 coherent effect Effects 0.000 abstract 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Abstract
Apparatus and methods of measuring position information, typically the depth coordinate, of a point on the surface of an object. In one embodiment, the apparatus includes two sources of radiation (P1, P2) positioned to illuminate the point (Pa) on the surface of the object (10) with radiation from each of the sources. The radiation from each of the sources is coherent with respect to the radiation from the other source. A control system (32) changes the phase of the radiation from at least one of the sources relative to the phase of the radiation from the other source as measured at the point on the surface of the object. A detector (22) is positioned to receive radiation scattered by the point and a processor (28), in communication with the detector, calculates position information in response to the change in phase of the radiation from the source and the received radiation scattered by the point on the surface of the object.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/600,216 | 1996-02-12 | ||
| US08/600,216 US5870191A (en) | 1996-02-12 | 1996-02-12 | Apparatus and methods for surface contour measurement |
| PCT/US1997/001744 WO1997029341A1 (en) | 1996-02-12 | 1997-02-03 | Apparatus and methods for surface contour measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2246374A1 true CA2246374A1 (en) | 1997-08-14 |
| CA2246374C CA2246374C (en) | 2006-08-08 |
Family
ID=29422888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2246374 Expired - Lifetime CA2246374C (en) | 1996-02-12 | 1997-02-03 | Apparatus and methods for surface contour measurement |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA2246374C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115144861A (en) * | 2022-09-05 | 2022-10-04 | 天津帆探科技有限公司 | Hybrid solid-state laser radar and scanning method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103412314B (en) * | 2013-08-01 | 2015-07-29 | 清华大学 | A kind of formation method based on astronomical radiation signal coherency |
-
1997
- 1997-02-03 CA CA 2246374 patent/CA2246374C/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115144861A (en) * | 2022-09-05 | 2022-10-04 | 天津帆探科技有限公司 | Hybrid solid-state laser radar and scanning method |
| CN115144861B (en) * | 2022-09-05 | 2022-11-04 | 天津帆探科技有限公司 | Hybrid solid-state laser radar and scanning method |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2246374C (en) | 2006-08-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKEX | Expiry |
Effective date: 20170203 |