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CA2246374A1 - Apparatus and methods for surface contour measurement - Google Patents

Apparatus and methods for surface contour measurement

Info

Publication number
CA2246374A1
CA2246374A1 CA 2246374 CA2246374A CA2246374A1 CA 2246374 A1 CA2246374 A1 CA 2246374A1 CA 2246374 CA2246374 CA 2246374 CA 2246374 A CA2246374 A CA 2246374A CA 2246374 A1 CA2246374 A1 CA 2246374A1
Authority
CA
Canada
Prior art keywords
radiation
point
sources
methods
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2246374
Other languages
French (fr)
Other versions
CA2246374C (en
Inventor
Lyle G. Shirley
Michael S. Mermelstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Massachusetts Institute of Technology
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/600,216 external-priority patent/US5870191A/en
Application filed by Individual filed Critical Individual
Publication of CA2246374A1 publication Critical patent/CA2246374A1/en
Application granted granted Critical
Publication of CA2246374C publication Critical patent/CA2246374C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Apparatus and methods of measuring position information, typically the depth coordinate, of a point on the surface of an object. In one embodiment, the apparatus includes two sources of radiation (P1, P2) positioned to illuminate the point (Pa) on the surface of the object (10) with radiation from each of the sources. The radiation from each of the sources is coherent with respect to the radiation from the other source. A control system (32) changes the phase of the radiation from at least one of the sources relative to the phase of the radiation from the other source as measured at the point on the surface of the object. A detector (22) is positioned to receive radiation scattered by the point and a processor (28), in communication with the detector, calculates position information in response to the change in phase of the radiation from the source and the received radiation scattered by the point on the surface of the object.
CA 2246374 1996-02-12 1997-02-03 Apparatus and methods for surface contour measurement Expired - Lifetime CA2246374C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/600,216 US5870191A (en) 1996-02-12 1996-02-12 Apparatus and methods for surface contour measurement
US08/600,216 1996-02-12
PCT/US1997/001744 WO1997029341A1 (en) 1996-02-12 1997-02-03 Apparatus and methods for surface contour measurement

Publications (2)

Publication Number Publication Date
CA2246374A1 true CA2246374A1 (en) 1997-08-14
CA2246374C CA2246374C (en) 2006-08-08

Family

ID=29422888

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2246374 Expired - Lifetime CA2246374C (en) 1996-02-12 1997-02-03 Apparatus and methods for surface contour measurement

Country Status (1)

Country Link
CA (1) CA2246374C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115144861A (en) * 2022-09-05 2022-10-04 天津帆探科技有限公司 Hybrid solid-state laser radar and scanning method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103412314B (en) * 2013-08-01 2015-07-29 清华大学 A kind of formation method based on astronomical radiation signal coherency

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115144861A (en) * 2022-09-05 2022-10-04 天津帆探科技有限公司 Hybrid solid-state laser radar and scanning method
CN115144861B (en) * 2022-09-05 2022-11-04 天津帆探科技有限公司 Hybrid solid-state laser radar and scanning method

Also Published As

Publication number Publication date
CA2246374C (en) 2006-08-08

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Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry

Effective date: 20170203