CA2085982A1 - Structures and processes for fabricating field emission cathodes - Google Patents
Structures and processes for fabricating field emission cathodesInfo
- Publication number
- CA2085982A1 CA2085982A1 CA2085982A CA2085982A CA2085982A1 CA 2085982 A1 CA2085982 A1 CA 2085982A1 CA 2085982 A CA2085982 A CA 2085982A CA 2085982 A CA2085982 A CA 2085982A CA 2085982 A1 CA2085982 A1 CA 2085982A1
- Authority
- CA
- Canada
- Prior art keywords
- field emission
- structures
- cathode
- processes
- cusp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000000463 material Substances 0.000 abstract 6
- 238000000151 deposition Methods 0.000 abstract 2
- 238000000605 extraction Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Abstract
The present invention relates generally to new structures for a field emission cathode and processes for fabricating the same. The field emission is made of any material that is capable of emitting electrons under the influence of an electrical potential. A process for making one embodiment of the invention includes the steps of forming a hole (15) in a substrate (5), depositing a first material (20) in said hole to form a cusp (21), depositing an electron emitting material (30) to fill at least partly said cusp and removing the first material to expose a portion (31) of the electron emitting material. The field emission cathode has several unique three dimensional structures. The basic structure comprises a layer of material with cathode tips. For a more complex structure the cathode tip is preferably accurately aligned inside an extraction/control electrode structure, in preferably a vacuum environment. The structures of this invention can be fabricated to be connected to other similar field emission cathodes or to other electronic devices.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US55521390A | 1990-07-18 | 1990-07-18 | |
| US555,213 | 1990-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2085982A1 true CA2085982A1 (en) | 1992-01-19 |
| CA2085982C CA2085982C (en) | 1999-03-09 |
Family
ID=24216420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002085982A Expired - Fee Related CA2085982C (en) | 1990-07-18 | 1990-10-17 | Structures and processes for fabricating field emission cathodes |
Country Status (12)
| Country | Link |
|---|---|
| EP (1) | EP0539365B1 (en) |
| JP (1) | JP2602584B2 (en) |
| KR (1) | KR950001485B1 (en) |
| CN (1) | CN1021389C (en) |
| AU (1) | AU639342B2 (en) |
| CA (1) | CA2085982C (en) |
| DE (1) | DE69030589T2 (en) |
| DK (1) | DK0539365T3 (en) |
| ES (1) | ES2100178T3 (en) |
| MY (1) | MY106537A (en) |
| NZ (1) | NZ238590A (en) |
| WO (1) | WO1992002031A1 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9210419D0 (en) * | 1992-05-15 | 1992-07-01 | Marconi Gec Ltd | Cathode structures |
| US5795208A (en) * | 1994-10-11 | 1998-08-18 | Yamaha Corporation | Manufacture of electron emitter by replica technique |
| US5599749A (en) * | 1994-10-21 | 1997-02-04 | Yamaha Corporation | Manufacture of micro electron emitter |
| KR100343205B1 (en) * | 2000-04-26 | 2002-07-10 | 김순택 | Field emission array using carbon nanotube and fabricating method thereof |
| US6986693B2 (en) | 2003-03-26 | 2006-01-17 | Lucent Technologies Inc. | Group III-nitride layers with patterned surfaces |
| US7952109B2 (en) | 2006-07-10 | 2011-05-31 | Alcatel-Lucent Usa Inc. | Light-emitting crystal structures |
| US7266257B1 (en) | 2006-07-12 | 2007-09-04 | Lucent Technologies Inc. | Reducing crosstalk in free-space optical communications |
| CN104064434A (en) * | 2013-03-22 | 2014-09-24 | 海洋王照明科技股份有限公司 | Field transmission plane light source and preparation method thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3753022A (en) * | 1971-04-26 | 1973-08-14 | Us Army | Miniature, directed, electron-beam source |
| DE2951287C2 (en) * | 1979-12-20 | 1987-01-02 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | Process for producing surfaces with a multitude of very fine points |
| US4307507A (en) * | 1980-09-10 | 1981-12-29 | The United States Of America As Represented By The Secretary Of The Navy | Method of manufacturing a field-emission cathode structure |
| US4721885A (en) * | 1987-02-11 | 1988-01-26 | Sri International | Very high speed integrated microelectronic tubes |
| US5012153A (en) * | 1989-12-22 | 1991-04-30 | Atkinson Gary M | Split collector vacuum field effect transistor |
| US5100355A (en) * | 1991-06-28 | 1992-03-31 | Bell Communications Research, Inc. | Microminiature tapered all-metal structures |
-
1990
- 1990-10-17 DE DE69030589T patent/DE69030589T2/en not_active Expired - Lifetime
- 1990-10-17 EP EP90916570A patent/EP0539365B1/en not_active Expired - Lifetime
- 1990-10-17 JP JP2515595A patent/JP2602584B2/en not_active Expired - Lifetime
- 1990-10-17 ES ES90916570T patent/ES2100178T3/en not_active Expired - Lifetime
- 1990-10-17 CA CA002085982A patent/CA2085982C/en not_active Expired - Fee Related
- 1990-10-17 DK DK90916570.6T patent/DK0539365T3/en active
- 1990-10-17 WO PCT/US1990/005964 patent/WO1992002031A1/en active IP Right Grant
-
1991
- 1991-06-18 KR KR91010044A patent/KR950001485B1/en not_active IP Right Cessation
- 1991-06-18 AU AU78494/91A patent/AU639342B2/en not_active Ceased
- 1991-06-18 CN CN91104165.6A patent/CN1021389C/en not_active Expired - Lifetime
- 1991-06-18 NZ NZ238590A patent/NZ238590A/en unknown
- 1991-06-18 MY MYPI91001091A patent/MY106537A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP0539365A1 (en) | 1993-05-05 |
| DE69030589D1 (en) | 1997-05-28 |
| AU639342B2 (en) | 1993-07-22 |
| CN1021389C (en) | 1993-06-23 |
| JP2602584B2 (en) | 1997-04-23 |
| CN1058295A (en) | 1992-01-29 |
| CA2085982C (en) | 1999-03-09 |
| ES2100178T3 (en) | 1997-06-16 |
| KR950001485B1 (en) | 1995-02-25 |
| WO1992002031A1 (en) | 1992-02-06 |
| DK0539365T3 (en) | 1997-10-27 |
| AU7849491A (en) | 1992-01-23 |
| NZ238590A (en) | 1993-07-27 |
| EP0539365B1 (en) | 1997-04-23 |
| DE69030589T2 (en) | 1997-11-13 |
| JPH05507580A (en) | 1993-10-28 |
| MY106537A (en) | 1995-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |