[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

BG97273A - Very high frequency device for the application and etching of thin layers - Google Patents

Very high frequency device for the application and etching of thin layers

Info

Publication number
BG97273A
BG97273A BG97273A BG9727393A BG97273A BG 97273 A BG97273 A BG 97273A BG 97273 A BG97273 A BG 97273A BG 9727393 A BG9727393 A BG 9727393A BG 97273 A BG97273 A BG 97273A
Authority
BG
Bulgaria
Prior art keywords
etching
application
high frequency
thin layers
frequency device
Prior art date
Application number
BG97273A
Inventor
Aleksandar Ja Spasov
Todor I Donchev
Original Assignee
Inst Elektronika
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Elektronika filed Critical Inst Elektronika
Priority to BG97273A priority Critical patent/BG97273A/en
Publication of BG97273A publication Critical patent/BG97273A/en

Links

BG97273A 1993-01-11 1993-01-11 Very high frequency device for the application and etching of thin layers BG97273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
BG97273A BG97273A (en) 1993-01-11 1993-01-11 Very high frequency device for the application and etching of thin layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG97273A BG97273A (en) 1993-01-11 1993-01-11 Very high frequency device for the application and etching of thin layers

Publications (1)

Publication Number Publication Date
BG97273A true BG97273A (en) 1994-10-31

Family

ID=3924850

Family Applications (1)

Application Number Title Priority Date Filing Date
BG97273A BG97273A (en) 1993-01-11 1993-01-11 Very high frequency device for the application and etching of thin layers

Country Status (1)

Country Link
BG (1) BG97273A (en)

Similar Documents

Publication Publication Date Title
EP0658944A3 (en) Thin semiconductor device and method of fabrication.
AU5451494A (en) Micro-hotplate devices and methods for their fabrication
SG45477A1 (en) Liquid application method and method of manufacturing electronic devices using the same liquid application method
AU641767B2 (en) Device for forming slits and method of forming the same
AU2491292A (en) High frequency electronic depilatory device
EP0650197A3 (en) Thin film semiconductor integrated circuit and method of fabricating the same.
EP0600303A3 (en) Method and apparatus for fabrication of dielectric thin film.
EP0560617A3 (en) Method of manufacturing insulating film on semiconductor device and apparatus for carrying out the same
EP0504714A3 (en) Semiconductor substrate having a soi structure and method of producing the same
EP0700087A3 (en) Semiconductor device and method of manufacturing the same
EP0675534A3 (en) SOI substrate and method of producing the same.
KR0138071B1 (en) Thin layer forming method and its manufacturing method of semiconductor device
HK1001420A1 (en) Display device and method of manufacturing the same
HK1004843A1 (en) Semiconductor device and manufacture method of same
AU7512994A (en) Lateral field emitter device and method of manufacturing same
EP0622897A3 (en) Surface acoustic wave device and method of manufacturing the same.
GB9326429D0 (en) An optical device and method of making the same
AU7238194A (en) Semiconductor device and its manufacture
EP0488091A3 (en) Plastic-packaged semiconductor device and method of forming the same
KR960007473B1 (en) Hydrophylic substrate and the method of manufacturing the same
EP0617439A3 (en) Thin film capacitor and method of manufacturing the same.
GB2266622B (en) Diamond film electronic devices and the methods of making the same
GB2309585B (en) Silicon-on-insulator substrate and method of fabricating the same
GB9626954D0 (en) Silicon-on-insulator substrate and method of fabricating the same
GB2284301B (en) Pressure-connection type semiconductor device and method of fabricating the same