BE790940A - METHOD OF ADJUSTING THE COMPOSITION OF A FILM - Google Patents

METHOD OF ADJUSTING THE COMPOSITION OF A FILM

Info

Publication number: BE790940A
Authority: BE; Belgium
Prior art keywords: adjusting; film; composition
Prior art date: 1971-11-04

Application number

Other languages

French (fr)

Inventor

D Leibowitz

D M Hoffman

F J Tams Iii

Original Assignee

Rca Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1971-11-04

Publication date

1973-03-01

1973-03-01 Publication of BE790940A publication Critical patent/BE790940A/en

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Oxygen, Ozone, And Oxides In General (AREA)

BE790940D 1971-11-04 METHOD OF ADJUSTING THE COMPOSITION OF A FILM BE790940A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US19578471A	1971-11-04	1971-11-04

Publications (1)

Publication Number	Publication Date
BE790940A true BE790940A (en)	1973-03-01

Family

ID=22722795

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BE790940D BE790940A (en)	1971-11-04		METHOD OF ADJUSTING THE COMPOSITION OF A FILM

Country Status (12)

Country	Link
US (1)	US3756847A (en)
JP (1)	JPS5216467B2 (en)
AU (1)	AU464727B2 (en)
BE (1)	BE790940A (en)
CA (1)	CA975628A (en)
CH (1)	CH590935A5 (en)
DE (1)	DE2252484A1 (en)
FR (1)	FR2156413B1 (en)
GB (1)	GB1392865A (en)
IT (1)	IT975345B (en)
NL (1)	NL7214898A (en)
SE (1)	SE379059B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3889019A (en) *	1969-03-13	1975-06-10	United Aircraft Corp	Vapor randomization in vacuum deposition of coatings
JPS5137667B2 (en) *	1971-11-13	1976-10-16
US4021277A (en) *	1972-12-07	1977-05-03	Sprague Electric Company	Method of forming thin film resistor
JPS5181791A (en) *	1975-01-13	1976-07-17	Osaka Koon Denki Kk	IONKAPUREETEINGUHOHO
US4416912A (en) *	1979-10-13	1983-11-22	The Gillette Company	Formation of coatings on cutting edges
US4617192A (en) *	1982-12-21	1986-10-14	At&T Bell Laboratories	Process for making optical INP devices
US4472453A (en) *	1983-07-01	1984-09-18	Rca Corporation	Process for radiation free electron beam deposition
JPS60251273A (en) *	1984-05-28	1985-12-11	Mitsubishi Heavy Ind Ltd	Method for controlling extent of evaporation in vacuum depositing apparatus
US4842710A (en) *	1987-03-23	1989-06-27	Siemens Aktiengesellschaft	Method of making mixed nitride films with at least two metals
US5514229A (en) *	1993-11-24	1996-05-07	Ramot-University Authority For Applied Research And Industrial Development Ltd., Tel Aviv University	Method of producing transparent and other electrically conductive materials
US7250196B1 (en)	1999-10-26	2007-07-31	Basic Resources, Inc.	System and method for plasma plating
US6521104B1 (en) *	2000-05-22	2003-02-18	Basic Resources, Inc.	Configurable vacuum system and method
US6503379B1 (en) *	2000-05-22	2003-01-07	Basic Research, Inc.	Mobile plating system and method
US20030180450A1 (en) *	2002-03-22	2003-09-25	Kidd Jerry D.	System and method for preventing breaker failure
US20050126497A1 (en) *	2003-09-30	2005-06-16	Kidd Jerry D.	Platform assembly and method
US20080057195A1 (en) *	2006-08-31	2008-03-06	United Technologies Corporation	Non-line of sight coating technique

0
- BE BE790940D patent/BE790940A/en unknown
1971
- 1971-11-04 US US00195784A patent/US3756847A/en not_active Expired - Lifetime
1972
- 1972-10-04 CA CA153,262A patent/CA975628A/en not_active Expired
- 1972-10-11 SE SE7213094A patent/SE379059B/xx unknown
- 1972-10-12 CH CH1489772A patent/CH590935A5/xx not_active IP Right Cessation
- 1972-10-16 AU AU47782/72A patent/AU464727B2/en not_active Expired
- 1972-10-24 IT IT70339/72A patent/IT975345B/en active
- 1972-10-26 DE DE2252484A patent/DE2252484A1/en active Pending
- 1972-10-30 FR FR7238354A patent/FR2156413B1/fr not_active Expired
- 1972-11-02 JP JP47110167A patent/JPS5216467B2/ja not_active Expired
- 1972-11-03 NL NL7214898A patent/NL7214898A/xx unknown
- 1972-11-03 GB GB5076472A patent/GB1392865A/en not_active Expired

Also Published As

Publication number	Publication date
IT975345B (en)	1974-07-20
FR2156413A1 (en)	1973-05-25
FR2156413B1 (en)	1976-05-21
CA975628A (en)	1975-10-07
US3756847A (en)	1973-09-04
JPS4855670A (en)	1973-08-04
DE2252484A1 (en)	1973-05-10
AU464727B2 (en)	1975-09-04
AU4778272A (en)	1974-04-26
CH590935A5 (en)	1977-08-31
GB1392865A (en)	1975-05-07
NL7214898A (en)	1973-05-08
JPS5216467B2 (en)	1977-05-10
SE379059B (en)	1975-09-22

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