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AU7665194A - Liquid spin coating method and apparatus therefor - Google Patents

Liquid spin coating method and apparatus therefor

Info

Publication number
AU7665194A
AU7665194A AU76651/94A AU7665194A AU7665194A AU 7665194 A AU7665194 A AU 7665194A AU 76651/94 A AU76651/94 A AU 76651/94A AU 7665194 A AU7665194 A AU 7665194A AU 7665194 A AU7665194 A AU 7665194A
Authority
AU
Australia
Prior art keywords
coating method
spin coating
apparatus therefor
liquid spin
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU76651/94A
Inventor
Hidemasa Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordson Corp
Original Assignee
Nordson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordson Corp filed Critical Nordson Corp
Publication of AU7665194A publication Critical patent/AU7665194A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0278—Arrangement or mounting of spray heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/842—Coating a support with a liquid magnetic dispersion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
AU76651/94A 1993-09-14 1994-09-14 Liquid spin coating method and apparatus therefor Abandoned AU7665194A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP5-252201 1993-09-14
JP25220193A JPH0780387A (en) 1993-09-14 1993-09-14 Spin coating method for liquid and device therefor
PCT/JP1994/001519 WO1995007764A1 (en) 1993-09-14 1994-09-14 Liquid spin coating method and apparatus therefor

Publications (1)

Publication Number Publication Date
AU7665194A true AU7665194A (en) 1995-04-03

Family

ID=17233912

Family Applications (1)

Application Number Title Priority Date Filing Date
AU76651/94A Abandoned AU7665194A (en) 1993-09-14 1994-09-14 Liquid spin coating method and apparatus therefor

Country Status (3)

Country Link
JP (1) JPH0780387A (en)
AU (1) AU7665194A (en)
WO (1) WO1995007764A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07108616A (en) * 1993-10-15 1995-04-25 Fuji Electric Co Ltd Method and apparatus for impregnating power transmitting frictional plate with resin
US6352747B1 (en) 1999-03-31 2002-03-05 Ppg Industries Ohio, Inc. Spin and spray coating process for curved surfaces
US7448258B2 (en) 1999-10-29 2008-11-11 Avery Dennison Corporation High throughput screening for moisture barrier characteristics of materials
JP2007058200A (en) * 2005-07-28 2007-03-08 Hoya Corp Mask blank manufacturing method and exposure mask manufacturing method
US20110027478A1 (en) * 2008-03-31 2011-02-03 Showa Denko K.K. Double-side coating apparatus, method for coating double sides with coating solution, edge rinsing apparatus, and edge rinsing method
JP6093321B2 (en) * 2014-03-17 2017-03-08 東京エレクトロン株式会社 Coating apparatus, coating method, and recording medium
JP7095394B2 (en) * 2018-05-15 2022-07-05 株式会社デンソー Resin application method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62185322A (en) * 1986-02-10 1987-08-13 Nec Corp Applicator for photo-resist
JPH04114473U (en) * 1991-03-14 1992-10-08 日本電気株式会社 Dispenser of rotary coating equipment

Also Published As

Publication number Publication date
WO1995007764A1 (en) 1995-03-23
JPH0780387A (en) 1995-03-28

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