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AU2003281574A1 - Detection method and apparatus - Google Patents

Detection method and apparatus

Info

Publication number
AU2003281574A1
AU2003281574A1 AU2003281574A AU2003281574A AU2003281574A1 AU 2003281574 A1 AU2003281574 A1 AU 2003281574A1 AU 2003281574 A AU2003281574 A AU 2003281574A AU 2003281574 A AU2003281574 A AU 2003281574A AU 2003281574 A1 AU2003281574 A1 AU 2003281574A1
Authority
AU
Australia
Prior art keywords
detection method
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003281574A
Inventor
Victor Higgs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aoti Operating Co Inc
Original Assignee
Aoti Operating Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aoti Operating Co Inc filed Critical Aoti Operating Co Inc
Publication of AU2003281574A1 publication Critical patent/AU2003281574A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
AU2003281574A 2002-07-19 2003-07-14 Detection method and apparatus Abandoned AU2003281574A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0216815A GB0216815D0 (en) 2002-07-19 2002-07-19 Detection method and apparatus
GB0216815.1 2002-07-19
PCT/GB2003/003022 WO2004010121A1 (en) 2002-07-19 2003-07-14 Detection method and apparatus

Publications (1)

Publication Number Publication Date
AU2003281574A1 true AU2003281574A1 (en) 2004-02-09

Family

ID=9940777

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003281574A Abandoned AU2003281574A1 (en) 2002-07-19 2003-07-14 Detection method and apparatus

Country Status (4)

Country Link
AU (1) AU2003281574A1 (en)
GB (1) GB0216815D0 (en)
TW (1) TW200427978A (en)
WO (1) WO2004010121A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9618897D0 (en) 1996-09-10 1996-10-23 Bio Rad Micromeasurements Ltd Micro defects in silicon wafers
GB0308182D0 (en) 2003-04-09 2003-05-14 Aoti Operating Co Inc Detection method and apparatus
TWI439684B (en) 2005-07-06 2014-06-01 Nanometrics Inc Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpiece
TWI391645B (en) 2005-07-06 2013-04-01 Nanometrics Inc Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece
US9633865B2 (en) 2008-02-22 2017-04-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Low-stain polishing composition
JP2011527510A (en) * 2008-07-09 2011-10-27 ビーティー イメージング ピーティーワイ リミテッド Thin film imaging method and apparatus
CN102144284B (en) * 2008-08-19 2016-03-02 Bt成像股份有限公司 For the method and apparatus of defects detection
US8441639B2 (en) * 2009-09-03 2013-05-14 Kla-Tencor Corp. Metrology systems and methods
US20130062536A1 (en) * 2010-01-04 2013-03-14 BT Imaging Pty. Ltd. Illumination Systems and Methods for Photoluminescence Imaging of Photovoltaic Cells and Wafers
US8629411B2 (en) 2010-07-13 2014-01-14 First Solar, Inc. Photoluminescence spectroscopy
US9354177B2 (en) * 2013-06-26 2016-05-31 Kla-Tencor Corporation System and method for defect detection and photoluminescence measurement of a sample
CN110854032A (en) * 2019-11-13 2020-02-28 上海华力集成电路制造有限公司 Method for detecting particle defects in germanium-silicon process
CN111337458A (en) * 2020-03-30 2020-06-26 创能动力科技有限公司 Defect detection method and system for semiconductor layer
CN114486926B (en) * 2021-12-30 2024-03-26 深圳瑞波光电子有限公司 Failure analysis method for semiconductor laser chip

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571685A (en) * 1982-06-23 1986-02-18 Nec Corporation Production system for manufacturing semiconductor devices
GB9618897D0 (en) * 1996-09-10 1996-10-23 Bio Rad Micromeasurements Ltd Micro defects in silicon wafers
GB9803842D0 (en) * 1998-02-25 1998-04-22 Shin Etsu Handotai Europ Ltd Semiconductor wafer inspection apparatus

Also Published As

Publication number Publication date
GB0216815D0 (en) 2002-08-28
WO2004010121A1 (en) 2004-01-29
TW200427978A (en) 2004-12-16

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase