AU2003271081A1 - Micro movable device - Google Patents

Micro movable device

Info

Publication number: AU2003271081A1
Authority: AU; Australia
Prior art keywords: movable device; micro movable; micro; movable
Prior art date: 2002-10-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003271081A

Inventor

Satoshi Morishita

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sharp Corp

Original Assignee

Sharp Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-10-03

Filing date

2003-10-02

Publication date

2004-04-23

2003-10-02 Application filed by Sharp Corp filed Critical Sharp Corp

2004-04-23 Publication of AU2003271081A1 publication Critical patent/AU2003271081A1/en

Status Abandoned legal-status Critical Current

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0058—Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations

Landscapes

Engineering & Computer Science (AREA)
Microelectronics & Electronic Packaging (AREA)
Health & Medical Sciences (AREA)
General Health & Medical Sciences (AREA)
Toxicology (AREA)
Computer Hardware Design (AREA)
Micromachines (AREA)
Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

AU2003271081A 2002-10-03 2003-10-02 Micro movable device Abandoned AU2003271081A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2002290780		2002-10-03
JP2002-290780		2002-10-03
PCT/JP2003/012664 WO2004031070A1 (en)	2002-10-03	2003-10-02	Micro movable device

Publications (1)

Publication Number	Publication Date
AU2003271081A1 true AU2003271081A1 (en)	2004-04-23

Family

ID=32063822

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003271081A Abandoned AU2003271081A1 (en)	2002-10-03	2003-10-02	Micro movable device

Country Status (3)

Country	Link
JP (1)	JP4312717B2 (en)
AU (1)	AU2003271081A1 (en)
WO (1)	WO2004031070A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4494130B2 (en) *	2004-08-26	2010-06-30	日本電信電話株式会社	Manufacturing method of electrostatic drive switch
JP4838149B2 (en) *	2005-01-13	2011-12-14	パナソニック株式会社	Torsional resonator and filter using the same
JP4724488B2 (en) *	2005-02-25	2011-07-13	日立オートモティブシステムズ株式会社	Integrated microelectromechanical system
JP2007210083A (en) *	2006-02-13	2007-08-23	Hitachi Ltd	MEMS device and manufacturing method thereof
JP2007222956A (en) *	2006-02-21	2007-09-06	Seiko Epson Corp	MEMS device and method for manufacturing MEMS device
JP2008118264A (en) *	2006-11-01	2008-05-22	Seiko Epson Corp	Tuning fork vibrator and manufacturing method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5529279A (en) *	1994-08-24	1996-06-25	Hewlett-Packard Company	Thermal isolation structures for microactuators
JP2000015804A (en) *	1998-06-30	2000-01-18	Ricoh Co Ltd	Ink-jet head and production thereof
WO2001073730A1 (en) *	2000-03-27	2001-10-04	Ngk Insulators, Ltd.	Display device and method of manufacture thereof
DE10104868A1 (en) *	2001-02-03	2002-08-22	Bosch Gmbh Robert	Micromechanical component and a method for producing a micromechanical component

2003
- 2003-10-02 AU AU2003271081A patent/AU2003271081A1/en not_active Abandoned
- 2003-10-02 WO PCT/JP2003/012664 patent/WO2004031070A1/en active Application Filing
- 2003-10-02 JP JP2004541276A patent/JP4312717B2/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JP4312717B2 (en)	2009-08-12
JPWO2004031070A1 (en)	2006-02-02
WO2004031070A1 (en)	2004-04-15

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Legal Events

Date	Code	Title	Description
2005-06-30	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase