AU2003252992A1 - Acoustic resonators - Google Patents

Acoustic resonators

Info

Publication number: AU2003252992A1
Authority: AU; Australia
Prior art keywords: acoustic resonators; resonators; acoustic
Prior art date: 2002-08-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003252992A

Inventor

Carl Brancher

Rajkumar Jakkaraju

Christine Janet Shearer

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Trikon Technologies Ltd

Original Assignee

Trikon Technologies Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-08-13

Filing date

2003-08-11

Publication date

2004-02-25

2002-08-13 Priority claimed from GB0218762A external-priority patent/GB0218762D0/en

2002-11-30 Priority claimed from GB0227981A external-priority patent/GB0227981D0/en

2003-08-11 Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd

2004-02-25 Publication of AU2003252992A1 publication Critical patent/AU2003252992A1/en

Status Abandoned legal-status Critical Current

Classifications

- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Physical Vapour Deposition (AREA)
Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

AU2003252992A 2002-08-13 2003-08-11 Acoustic resonators Abandoned AU2003252992A1 (en)

Applications Claiming Priority (7)

Application Number	Priority Date	Filing Date	Title
US40272802P	2002-08-13	2002-08-13
GB0218762A GB0218762D0 (en)	2002-08-13	2002-08-13	Acoustic resonators
US60/402,728		2002-08-13
GB0218762.3		2002-08-13
GB0227981A GB0227981D0 (en)	2002-11-30	2002-11-30	Acoustic resonators
GB0227981.8		2002-11-30
PCT/GB2003/003504 WO2004015862A2 (en)	2002-08-13	2003-08-11	Acoustic resonators

Publications (1)

Publication Number	Publication Date
AU2003252992A1 true AU2003252992A1 (en)	2004-02-25

Family

ID=31721069

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003252992A Abandoned AU2003252992A1 (en)	2002-08-13	2003-08-11	Acoustic resonators

Country Status (5)

Country	Link
JP (2)	JP5116945B2 (en)
AU (1)	AU2003252992A1 (en)
DE (1)	DE10393038B4 (en)
GB (1)	GB2406582A (en)
WO (1)	WO2004015862A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6944922B2 (en) *	2002-08-13	2005-09-20	Trikon Technologies Limited	Method of forming an acoustic resonator
JP5983164B2 (en) *	2012-08-07	2016-08-31	旭硝子株式会社	Glass substrate with Ti film, glass substrate with metal film using the same, glass substrate with Ti film, method for producing glass substrate with metal film using the same, and method for evaluating flatness of glass substrate surface
CN104767500B (en) *	2014-01-03	2018-11-09	佛山市艾佛光通科技有限公司	Cavity type thin film bulk acoustic wave resonator and preparation method thereof

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4482833A (en) *	1981-04-01	1984-11-13	Westinghouse Electric Corp.	Method for obtaining oriented gold and piezoelectric films
US4502932A (en) *	1983-10-13	1985-03-05	The United States Of America As Represented By The United States Department Of Energy	Acoustic resonator and method of making same
JPS61170561A (en) *	1985-01-25	1986-08-01	Nippon Telegr & Teleph Corp <Ntt>	Formation of high melting point metal film
JP2659394B2 (en) *	1988-05-09	1997-09-30	三井東圧化学株式会社	Semiconductor thin film manufacturing method
KR960000190B1 (en) *	1992-11-09	1996-01-03	엘지전자주식회사	Semiconductor manufacturing method and apparatus thereof
US5587620A (en) *	1993-12-21	1996-12-24	Hewlett-Packard Company	Tunable thin film acoustic resonators and method for making the same
JPH10308393A (en) *	1997-05-02	1998-11-17	Tokyo Electron Ltd	Manufacture and manufacturing device of semiconductor device
JP3813740B2 (en) *	1997-07-11	2006-08-23	Ｔｄｋ株式会社	Substrates for electronic devices
US6060818A (en) *	1998-06-02	2000-05-09	Hewlett-Packard Company	SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters
JP2000160337A (en) *	1998-11-30	2000-06-13	Hitachi Ltd	Magnetron sputtering device
JP2000273629A (en) *	1999-03-18	2000-10-03	Ulvac Japan Ltd	Formation of low resistance metallic thin film
GB2349392B (en) *	1999-04-20	2003-10-22	Trikon Holdings Ltd	A method of depositing a layer
JP4327942B2 (en) *	1999-05-20	2009-09-09	Ｔｄｋ株式会社	Thin film piezoelectric element
US6349454B1 (en) *	1999-07-29	2002-02-26	Agere Systems Guardian Corp.	Method of making thin film resonator apparatus
JP4021601B2 (en) *	1999-10-29	2007-12-12	株式会社東芝	Sputtering apparatus and film forming method
JP2001313429A (en) *	2000-04-27	2001-11-09	Tdk Corp	Laminated thin film and manufacturing method for the same, and electronic device
US7378001B2 (en) *	2000-07-27	2008-05-27	Aviza Europe Limited	Magnetron sputtering
JP4016583B2 (en) *	2000-08-31	2007-12-05	株式会社村田製作所	Piezoelectric thin film resonator, filter and electronic device
US6377137B1 (en) *	2000-09-11	2002-04-23	Agilent Technologies, Inc.	Acoustic resonator filter with reduced electromagnetic influence due to die substrate thickness
JP2002374145A (en) *	2001-06-15	2002-12-26	Ube Electronics Ltd	Piezoelectric thin-film resonator
US6828713B2 (en) *	2002-07-30	2004-12-07	Agilent Technologies, Inc	Resonator with seed layer
US20040021529A1 (en) *	2002-07-30	2004-02-05	Bradley Paul D.	Resonator with protective layer

2003
- 2003-08-11 GB GB0501682A patent/GB2406582A/en not_active Withdrawn
- 2003-08-11 WO PCT/GB2003/003504 patent/WO2004015862A2/en active Application Filing
- 2003-08-11 AU AU2003252992A patent/AU2003252992A1/en not_active Abandoned
- 2003-08-11 JP JP2004527057A patent/JP5116945B2/en not_active Expired - Lifetime
- 2003-08-11 DE DE10393038T patent/DE10393038B4/en not_active Expired - Lifetime
2010
- 2010-01-29 JP JP2010019112A patent/JP5074540B2/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JP2005536098A (en)	2005-11-24
GB2406582A (en)	2005-04-06
DE10393038T5 (en)	2005-07-28
JP2010161781A (en)	2010-07-22
GB0501682D0 (en)	2005-03-02
WO2004015862A2 (en)	2004-02-19
WO2004015862A3 (en)	2004-10-14
JP5074540B2 (en)	2012-11-14
JP5116945B2 (en)	2013-01-09
DE10393038B4 (en)	2013-11-07

Publication	Publication Date	Title
AU2003283705A1 (en)	2004-07-09	Electro-acoustic resonator
AU2003303133A1 (en)	2004-07-22	Piezoelectric mems resonator
AU2003290896A1 (en)	2004-07-29	Acoustic web
AU2003242962A1 (en)	2004-02-02	Micro-ring resonator
AU2003229963A1 (en)	2003-12-02	Transducer
AU2002343796A1 (en)	2004-06-03	Filter
AU2003239909A1 (en)	2004-05-25	Enhanced-service provision
AU2003230088A1 (en)	2003-12-02	Filter structure
AU2002952384A0 (en)	2002-11-14	Structures
AU2002326474A1 (en)	2002-07-16	Acoustic wave filter
AU2003278436A1 (en)	2004-01-06	Circuitry for cleaning with sound waves
AU2003294140A1 (en)	2004-07-14	Acoustic actuators
AU2002257683A1 (en)	2003-09-22	Acoustic construction element
AU2003280511A1 (en)	2004-01-19	Vibrator
AU2003230395A1 (en)	2004-01-19	Micro-support structures
AU2003241286A1 (en)	2003-11-03	Buoyant-orbicular-seesaw-system (boss)
AU2002332247A1 (en)	2004-04-19	Electroacoustic transducer
AU2003255418A1 (en)	2004-03-19	Sound synthesiser
AU2003298366A1 (en)	2004-08-13	Telephone-watch with improved acoustics
AU2003214430A1 (en)	2003-10-08	Acoustic emission
AU2003245092A1 (en)	2004-01-23	Sound-absorbing material
AU2003252992A1 (en)	2004-02-25	Acoustic resonators
AU2003231990A1 (en)	2003-10-27	Evanescent resonators
AU2003226539A1 (en)	2003-11-03	Acoustic device
AU2002359224A1 (en)	2004-07-14	Tuning arrangement

Legal Events

Date	Code	Title	Description
2005-04-28	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase