[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

AU2002311155A1 - Dry-etcching method - Google Patents

Dry-etcching method

Info

Publication number
AU2002311155A1
AU2002311155A1 AU2002311155A AU2002311155A AU2002311155A1 AU 2002311155 A1 AU2002311155 A1 AU 2002311155A1 AU 2002311155 A AU2002311155 A AU 2002311155A AU 2002311155 A AU2002311155 A AU 2002311155A AU 2002311155 A1 AU2002311155 A1 AU 2002311155A1
Authority
AU
Australia
Prior art keywords
etcching
dry
etcching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002311155A
Inventor
Ethuo Iijima
Norikazu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002311155A1 publication Critical patent/AU2002311155A1/en
Abandoned legal-status Critical Current

Links

AU2002311155A 2001-06-15 2002-06-07 Dry-etcching method Abandoned AU2002311155A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-182193 2001-06-15
JP2001-319755 2001-10-17

Publications (1)

Publication Number Publication Date
AU2002311155A1 true AU2002311155A1 (en) 2003-01-02

Family

ID=

Similar Documents

Publication Publication Date Title
AU2002360430A1 (en) 14-methyl-epothilones
AU2002341150A1 (en) Method
AU2001237530A1 (en) Method
AU2002319532A1 (en) Feeding-bottles
AUPR974501A0 (en) Surcraft
AU2001241636A1 (en) Halotherapy method
AU2002302604A1 (en) Process connection
AUPR633101A0 (en) Method
AU2002313943A1 (en) Electromobile
AU2002361985A1 (en) Microemulsifier
AU2002226571A1 (en) Biligands
AU2002308561A1 (en) Selection method
AU2001100406A4 (en) DriverSMS
AU2001235770A1 (en) Method
AU2002228975A1 (en) Method
AU2002313073A1 (en) Phytocystatin
AU2002249345A1 (en) Method
AUPR858501A0 (en) Impregnational method
AU2002311155A1 (en) Dry-etcching method
AU2002249473A1 (en) Method
AU2002251479A1 (en) Drawing method
AU2002304420A1 (en) Novel method
AU2002353664A1 (en) Routeplanner
AU2002242668A1 (en) Method for rock-chiseling
AUPR517901A0 (en) Selection method