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AU2002306683A1 - Self-aligned mram contact and method of fabrication - Google Patents

Self-aligned mram contact and method of fabrication

Info

Publication number
AU2002306683A1
AU2002306683A1 AU2002306683A AU2002306683A AU2002306683A1 AU 2002306683 A1 AU2002306683 A1 AU 2002306683A1 AU 2002306683 A AU2002306683 A AU 2002306683A AU 2002306683 A AU2002306683 A AU 2002306683A AU 2002306683 A1 AU2002306683 A1 AU 2002306683A1
Authority
AU
Australia
Prior art keywords
fabrication
self
aligned mram
mram contact
aligned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002306683A
Inventor
Roger Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micron Technology Inc
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Publication of AU2002306683A1 publication Critical patent/AU2002306683A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/01Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Hall/Mr Elements (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Semiconductor Memories (AREA)
AU2002306683A 2001-03-15 2002-03-12 Self-aligned mram contact and method of fabrication Abandoned AU2002306683A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US80591501 2001-03-15
US09/805,915 2001-03-15
PCT/US2002/007285 WO2002075808A2 (en) 2001-03-15 2002-03-12 Self-aligned mram contact and method of fabrication

Publications (1)

Publication Number Publication Date
AU2002306683A1 true AU2002306683A1 (en) 2002-10-03

Family

ID=53015433

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002306683A Abandoned AU2002306683A1 (en) 2001-03-15 2002-03-12 Self-aligned mram contact and method of fabrication

Country Status (2)

Country Link
AU (1) AU2002306683A1 (en)
WO (1) WO2002075808A2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5650958A (en) * 1996-03-18 1997-07-22 International Business Machines Corporation Magnetic tunnel junctions with controlled magnetic response
US6153443A (en) * 1998-12-21 2000-11-28 Motorola, Inc. Method of fabricating a magnetic random access memory
US6165803A (en) * 1999-05-17 2000-12-26 Motorola, Inc. Magnetic random access memory and fabricating method thereof

Also Published As

Publication number Publication date
WO2002075808A3 (en) 2004-02-12
WO2002075808A2 (en) 2002-09-26

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase