AU2002237526A1 - Plasma processing system - Google Patents

Plasma processing system

Info

Publication number: AU2002237526A1
Authority: AU; Australia
Prior art keywords: processing system; plasma processing; plasma; processing
Prior art date: 2001-02-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002237526A

Inventor

Kouji Mitsuhashi

Nobuyuki Nagayama

Hiroyuki Nakayama

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Tokyo Electron Ltd

Original Assignee

Tokyo Electron Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-02-22

Filing date

2002-02-21

Publication date

2002-09-04

2002-02-21 Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd

2002-09-04 Publication of AU2002237526A1 publication Critical patent/AU2002237526A1/en

Status Abandoned legal-status Critical Current

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2001-47278		2001-02-22

Publications (1)

Publication Number	Publication Date
AU2002237526A1 true AU2002237526A1 (en)	2002-09-04

Family

ID=

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