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AU2002212648A1 - Method and apparatus for multi-beam laser machining - Google Patents

Method and apparatus for multi-beam laser machining

Info

Publication number
AU2002212648A1
AU2002212648A1 AU2002212648A AU1264802A AU2002212648A1 AU 2002212648 A1 AU2002212648 A1 AU 2002212648A1 AU 2002212648 A AU2002212648 A AU 2002212648A AU 1264802 A AU1264802 A AU 1264802A AU 2002212648 A1 AU2002212648 A1 AU 2002212648A1
Authority
AU
Australia
Prior art keywords
array
elements
light
light modulator
microlens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002212648A
Inventor
Vladimir Yu. Dmitriev
Nicolai N. Guletsky
Sergei V. Oshemkov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
U-C-Laser Ltd
Original Assignee
U-C-Laser Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by U-C-Laser Ltd filed Critical U-C-Laser Ltd
Publication of AU2002212648A1 publication Critical patent/AU2002212648A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Laser Surgery Devices (AREA)

Abstract

An apparatus for laser machining for optically machining a workpiece. The apparatus comprises a plane polarized primary laser beam source adapted to generate a primary plane polarized light beam; a beam splitter, adapted to split the primary light beam into a plurality of secondary light beams; a light modulator array, comprising an array of individually controllable elements that are each adapted to be set to either allow each beam of the plurality of secondary light beams to traverse through, or effectively block it; a microlens array, comprising an array of microlens elements foci of predetermined lengths, said microlens array elements corresponding to the elements of the light modulator array so that light beam passing through an element of the light modulator array is focused by a corresponding element of the microlens array; and control means adapted to independently switch each of the elements of the light modulator between a transparent and opaque modes in a predetermined manner.
AU2002212648A 2000-10-23 2001-10-22 Method and apparatus for multi-beam laser machining Abandoned AU2002212648A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/694,429 2000-10-23
US09/694,429 US6625181B1 (en) 2000-10-23 2000-10-23 Method and apparatus for multi-beam laser machining
PCT/IL2001/000969 WO2002034446A2 (en) 2000-10-23 2001-10-22 Method and apparatus for multi-beam laser machining

Publications (1)

Publication Number Publication Date
AU2002212648A1 true AU2002212648A1 (en) 2002-05-06

Family

ID=24788787

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002212648A Abandoned AU2002212648A1 (en) 2000-10-23 2001-10-22 Method and apparatus for multi-beam laser machining

Country Status (7)

Country Link
US (1) US6625181B1 (en)
EP (1) EP1345726B1 (en)
AT (1) ATE444136T1 (en)
AU (1) AU2002212648A1 (en)
CA (1) CA2425875A1 (en)
DE (1) DE60140077D1 (en)
WO (1) WO2002034446A2 (en)

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US20060114948A1 (en) * 2004-11-29 2006-06-01 Lo Ho W Workpiece processing system using a common imaged optical assembly to shape the spatial distributions of light energy of multiple laser beams
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WO2008011059A1 (en) * 2006-07-20 2008-01-24 Board Of Trustees Of Michigan State University Laser plasmonic system
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WO2014140047A2 (en) 2013-03-12 2014-09-18 Micronic Mydata AB Method and device for writing photomasks with reduced mura errors
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Also Published As

Publication number Publication date
US6625181B1 (en) 2003-09-23
EP1345726A4 (en) 2008-01-30
EP1345726B1 (en) 2009-09-30
CA2425875A1 (en) 2002-05-02
EP1345726A2 (en) 2003-09-24
WO2002034446A2 (en) 2002-05-02
DE60140077D1 (en) 2009-11-12
ATE444136T1 (en) 2009-10-15
WO2002034446A3 (en) 2003-02-06

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