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AU2001296420A1 - Formation of a smooth surface on an optical component - Google Patents

Formation of a smooth surface on an optical component

Info

Publication number
AU2001296420A1
AU2001296420A1 AU2001296420A AU9642001A AU2001296420A1 AU 2001296420 A1 AU2001296420 A1 AU 2001296420A1 AU 2001296420 A AU2001296420 A AU 2001296420A AU 9642001 A AU9642001 A AU 9642001A AU 2001296420 A1 AU2001296420 A1 AU 2001296420A1
Authority
AU
Australia
Prior art keywords
formation
optical component
smooth surface
smooth
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001296420A
Inventor
James R. Velebir Jr.
Chi Wu
Xiaoming Yin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lightcross Inc
Original Assignee
Lightcross Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/896,127 external-priority patent/US20030000919A1/en
Application filed by Lightcross Inc filed Critical Lightcross Inc
Publication of AU2001296420A1 publication Critical patent/AU2001296420A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Surface Treatment Of Glass (AREA)
AU2001296420A 2000-11-28 2001-09-27 Formation of a smooth surface on an optical component Abandoned AU2001296420A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US72417700A 2000-11-28 2000-11-28
US09/724,177 2000-11-28
US09/896,127 2001-06-29
US09/896,127 US20030000919A1 (en) 2001-06-29 2001-06-29 Formation of a smooth surface on an optical component
PCT/US2001/030565 WO2002044763A2 (en) 2000-11-28 2001-09-27 Formation of a smooth surface on an optical component

Publications (1)

Publication Number Publication Date
AU2001296420A1 true AU2001296420A1 (en) 2002-06-11

Family

ID=27110938

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001296420A Abandoned AU2001296420A1 (en) 2000-11-28 2001-09-27 Formation of a smooth surface on an optical component

Country Status (2)

Country Link
AU (1) AU2001296420A1 (en)
WO (1) WO2002044763A2 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0658907B2 (en) * 1985-06-16 1994-08-03 日本電気株式会社 Vapor phase etching method for gallium arsenide crystal
JPH01212441A (en) * 1988-02-19 1989-08-25 Fujitsu Ltd Removal of silicone resin film
JPH06196459A (en) * 1992-12-22 1994-07-15 Sumitomo Sitix Corp Manufacture of semiconductor silicon wafer
JP3292101B2 (en) * 1997-07-18 2002-06-17 信越半導体株式会社 Method for smoothing silicon single crystal substrate surface
KR100271769B1 (en) * 1998-06-25 2001-02-01 윤종용 Method for manufacturing semiconductor device, etchant composition and semiconductor device for manufacturing semiconductor device therefor
TW392284B (en) * 1998-08-28 2000-06-01 Mosel Vitelic Inc Method for removing polysilicon barrier using wet etching

Also Published As

Publication number Publication date
WO2002044763A2 (en) 2002-06-06
WO2002044763A3 (en) 2003-04-17

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