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AU2001290930A1 - Scanner apparatus having optical elements coupled to mems acuators - Google Patents

Scanner apparatus having optical elements coupled to mems acuators

Info

Publication number
AU2001290930A1
AU2001290930A1 AU2001290930A AU9093001A AU2001290930A1 AU 2001290930 A1 AU2001290930 A1 AU 2001290930A1 AU 2001290930 A AU2001290930 A AU 2001290930A AU 9093001 A AU9093001 A AU 9093001A AU 2001290930 A1 AU2001290930 A1 AU 2001290930A1
Authority
AU
Australia
Prior art keywords
acuators
mems
optical elements
elements coupled
scanner apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001290930A
Inventor
Stephen M Bobbio
Kenneth L. Gentry
Stephen W. Smith
Jason Zara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Duke University
Original Assignee
Duke University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Duke University filed Critical Duke University
Publication of AU2001290930A1 publication Critical patent/AU2001290930A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
    • A61B18/20—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser
    • A61B2018/2035—Beam shaping or redirecting; Optical components therefor
    • A61B2018/20351—Scanning mechanisms
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
    • A61B18/20—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser
    • A61B2018/2035—Beam shaping or redirecting; Optical components therefor
    • A61B2018/20351—Scanning mechanisms
    • A61B2018/20355—Special scanning path or conditions, e.g. spiral, raster or providing spot overlap

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
AU2001290930A 2000-09-18 2001-09-14 Scanner apparatus having optical elements coupled to mems acuators Abandoned AU2001290930A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US23326200P 2000-09-18 2000-09-18
US60/233,262 2000-09-18
PCT/US2001/028765 WO2002023251A2 (en) 2000-09-18 2001-09-14 Scanner apparatus having optical elements coupled to mems acuators

Publications (1)

Publication Number Publication Date
AU2001290930A1 true AU2001290930A1 (en) 2002-03-26

Family

ID=22876557

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001290930A Abandoned AU2001290930A1 (en) 2000-09-18 2001-09-14 Scanner apparatus having optical elements coupled to mems acuators

Country Status (3)

Country Link
US (4) US7420724B2 (en)
AU (1) AU2001290930A1 (en)
WO (1) WO2002023251A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7573627B2 (en) * 2004-07-27 2009-08-11 The George Washington University Amplified bimorph scanning mirror, optical system and method of scanning
US7999945B2 (en) * 2007-07-18 2011-08-16 The George Washington University Optical coherence tomography / acoustic radiation force imaging probe
US8643937B2 (en) * 2010-11-16 2014-02-04 Imec Diffractive optical nano-electro-mechanical device with reduced driving voltage
CN112190797B (en) * 2020-10-31 2022-07-01 河南省中医院（河南中医药大学第二附属医院） Department of anesthesia uses narcotic drug atomizer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2175705B (en) 1985-05-24 1989-04-19 Stc Plc Dirigible reflector and mounting made of crystal material
DE3844669A1 (en) * 1988-12-09 1990-06-13 Fraunhofer Ges Forschung Micromechanical device
US5206557A (en) * 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
EP0581871B2 (en) * 1991-04-29 2009-08-12 Massachusetts Institute Of Technology Apparatus for optical imaging and measurement
WO1993021553A1 (en) 1992-04-09 1993-10-28 Deutsche Aerospace Ag Laser system with mirrors moved by micro-engineering techniques
JP3076465B2 (en) 1992-11-20 2000-08-14 キヤノン株式会社 Micro actuator and optical deflector
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
FR2734065B1 (en) 1995-05-12 1997-06-06 Commissariat Energie Atomique MICROOPTIC COMPONENTS AND OPTOMECHANICAL MICRODEFLECTORS WITH MICROLENTILLAL DISPLACEMENT
US5945898A (en) * 1996-05-31 1999-08-31 The Regents Of The University Of California Magnetic microactuator
US5781333A (en) * 1996-08-20 1998-07-14 Lanzillotta; John Piezoelectric light shutter
JP2001525972A (en) 1996-08-27 2001-12-11 クインタ・コーポレイション Optical head using micromachining
US5909078A (en) * 1996-12-16 1999-06-01 Mcnc Thermal arched beam microelectromechanical actuators
US5867297A (en) * 1997-02-07 1999-02-02 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
US6140979A (en) * 1998-08-05 2000-10-31 Microvision, Inc. Scanned display with pinch, timing, and distortion correction

Also Published As

Publication number Publication date
US20130063801A1 (en) 2013-03-14
WO2002023251A2 (en) 2002-03-21
US20080266636A1 (en) 2008-10-30
WO2002023251A3 (en) 2003-02-06
US7420724B2 (en) 2008-09-02
US20100238532A1 (en) 2010-09-23
US7706039B2 (en) 2010-04-27
WO2002023251A9 (en) 2002-06-06
US8400697B2 (en) 2013-03-19
US20040218244A1 (en) 2004-11-04

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