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AU2001282095A1 - Rotation speed sensor and rotation speed sensor system - Google Patents

Rotation speed sensor and rotation speed sensor system

Info

Publication number
AU2001282095A1
AU2001282095A1 AU2001282095A AU8209501A AU2001282095A1 AU 2001282095 A1 AU2001282095 A1 AU 2001282095A1 AU 2001282095 A AU2001282095 A AU 2001282095A AU 8209501 A AU8209501 A AU 8209501A AU 2001282095 A1 AU2001282095 A1 AU 2001282095A1
Authority
AU
Australia
Prior art keywords
rotation speed
speed sensor
sensor system
rotation
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001282095A
Inventor
Wolfram Geiger
Walter Lang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Original Assignee
Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV filed Critical Hann-Schickard-Gesellschaft fuer Angewandte Forschung eV
Publication of AU2001282095A1 publication Critical patent/AU2001282095A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733Structural details or topology
    • G01C19/5755Structural details or topology the devices having a single sensing mass
    • G01C19/5762Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733Structural details or topology
    • G01C19/574Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
AU2001282095A 2000-08-18 2001-08-14 Rotation speed sensor and rotation speed sensor system Abandoned AU2001282095A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10040418 2000-08-18
DE2000140418 DE10040418A1 (en) 2000-08-18 2000-08-18 Yaw rate sensor and yaw rate sensor system
PCT/EP2001/009400 WO2002016871A1 (en) 2000-08-18 2001-08-14 Rotation speed sensor and rotation speed sensor system

Publications (1)

Publication Number Publication Date
AU2001282095A1 true AU2001282095A1 (en) 2002-03-04

Family

ID=7652879

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001282095A Abandoned AU2001282095A1 (en) 2000-08-18 2001-08-14 Rotation speed sensor and rotation speed sensor system

Country Status (4)

Country Link
EP (1) EP1309834B1 (en)
AU (1) AU2001282095A1 (en)
DE (2) DE10040418A1 (en)
WO (1) WO2002016871A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10108197A1 (en) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Yaw rate sensor
JP2002296039A (en) 2001-03-30 2002-10-09 Murata Mfg Co Ltd Gyro device and electronic device using the same
US6722197B2 (en) * 2001-06-19 2004-04-20 Honeywell International Inc. Coupled micromachined structure
JP3870895B2 (en) * 2002-01-10 2007-01-24 株式会社村田製作所 Angular velocity sensor
DE10360963B4 (en) * 2003-12-23 2007-05-16 Litef Gmbh Method for measuring rotation rates / accelerations using a yaw rate Coriolis gyro and suitable Coriolis gyro
CN1948906B (en) * 2006-11-10 2011-03-23 北京大学 Capacitive type complete decoupling horizontal axis miniature mechanical gyro
DE102007017209B4 (en) 2007-04-05 2014-02-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical inertial sensor for measuring rotation rates
DE102007030120B4 (en) 2007-06-29 2010-04-08 Litef Gmbh Yaw rate sensor
DE102009061797B3 (en) * 2009-02-27 2020-12-10 Hanking Electronics, Ltd. MEMS gyroscope for determining rotational movements around an x, y or z axis
DE102009026511A1 (en) * 2009-05-27 2010-12-02 Sensordynamics Ag Micro-gyroscope for determining rotational movements about at least one of three mutually perpendicular spatial axes
JP4968298B2 (en) 2009-09-04 2012-07-04 株式会社デンソー Vibration type angular velocity sensor
US10551191B2 (en) 2017-02-17 2020-02-04 Invensense, Inc. Deformation rejection mechanism for offset minimization of out-of-plane sensing MEMS device
EP3583386B1 (en) 2017-02-17 2021-03-24 InvenSense, Inc. Anchoring structure for a sensor insensitive to anchor movement
WO2019209659A1 (en) * 2018-04-26 2019-10-31 Invensense, Inc. Deformation rejection mechanism for offset minimization of out-of-plane sensing mems device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4414237A1 (en) * 1994-04-23 1995-10-26 Bosch Gmbh Robert Micromechanical vibrator of an oscillation gyrometer
DE4428405A1 (en) * 1994-08-11 1996-02-15 Karlsruhe Forschzent Yaw rate sensor
DE19641284C1 (en) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Rotation rate sensor with decoupled orthogonal primary and secondary vibrations
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
WO2000029855A1 (en) * 1998-10-14 2000-05-25 Irvine Sensors Corporation Multi-element micro-gyro

Also Published As

Publication number Publication date
EP1309834B1 (en) 2007-04-18
WO2002016871A1 (en) 2002-02-28
DE10040418A1 (en) 2002-03-07
EP1309834A1 (en) 2003-05-14
DE50112380D1 (en) 2007-05-31

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