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AU2001263285A1 - Methods of sampling specimens for microanalysis - Google Patents

Methods of sampling specimens for microanalysis

Info

Publication number
AU2001263285A1
AU2001263285A1 AU2001263285A AU6328501A AU2001263285A1 AU 2001263285 A1 AU2001263285 A1 AU 2001263285A1 AU 2001263285 A AU2001263285 A AU 2001263285A AU 6328501 A AU6328501 A AU 6328501A AU 2001263285 A1 AU2001263285 A1 AU 2001263285A1
Authority
AU
Australia
Prior art keywords
microanalysis
methods
sampling specimens
specimens
sampling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001263285A
Inventor
Steven L. Goodman
Thomas F. Kelly
Richard L. Martens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Imago Scientific Instruments Corp
Original Assignee
Imago Scientific Instruments Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imago Scientific Instruments Corp filed Critical Imago Scientific Instruments Corp
Publication of AU2001263285A1 publication Critical patent/AU2001263285A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
AU2001263285A 2000-05-19 2001-05-18 Methods of sampling specimens for microanalysis Abandoned AU2001263285A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US20545600P 2000-05-19 2000-05-19
US60205456 2000-05-19
PCT/US2001/016185 WO2001090761A2 (en) 2000-05-19 2001-05-18 Methods of sampling specimens for microanalysis

Publications (1)

Publication Number Publication Date
AU2001263285A1 true AU2001263285A1 (en) 2001-12-03

Family

ID=22762259

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001263285A Abandoned AU2001263285A1 (en) 2000-05-19 2001-05-18 Methods of sampling specimens for microanalysis

Country Status (3)

Country Link
US (2) US6576900B2 (en)
AU (1) AU2001263285A1 (en)
WO (1) WO2001090761A2 (en)

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AU2001263285A1 (en) * 2000-05-19 2001-12-03 Imago Scientific Instruments Methods of sampling specimens for microanalysis
DE10027120A1 (en) * 2000-05-23 2001-12-06 Epigenomics Ag Sample holder for mass spectrometer
WO2002086476A2 (en) * 2001-04-19 2002-10-31 Fei Company High spatial resolution x-ray microanalysis
US6891170B1 (en) * 2002-06-17 2005-05-10 Zyvex Corporation Modular manipulation system for manipulating a sample under study with a microscope
US7098454B2 (en) * 2002-08-05 2006-08-29 California Institute Of Technology Method of sample preparation for atom probes and source of specimens
US6762415B1 (en) * 2003-04-18 2004-07-13 Imago Scientific Instruments Corporation Vacuum chamber with recessed viewing tube and imaging device situated therein
JP2004325136A (en) * 2003-04-22 2004-11-18 Sii Nanotechnology Inc Tem sample with identification function, tem sample-processing focused ion beam device and transmission electron microscope
TW578250B (en) * 2003-06-05 2004-03-01 Univ Tsinghua Testing method of flip-chip junction
EP1654299A2 (en) * 2003-08-06 2006-05-10 Imago Scientific Instruments Corporation Method to determine 3-d elemental composition and structure of biological and organic materials via atom probe microscopy
DE10362116B4 (en) * 2003-09-17 2008-08-28 Carl Zeiss Nts Gmbh Method for preparing a sample for electron microscopic examinations, and gripper used thereby
WO2005031789A2 (en) * 2003-09-23 2005-04-07 Zyvex Corporation Method, system and device for microscopic examination employing fib-prepared sample grasping element
US6956210B2 (en) * 2003-10-15 2005-10-18 Micron Tchnology, Inc. Methods for preparing samples for atom probe analysis
TW200531420A (en) 2004-02-20 2005-09-16 Zyvex Corp Positioning device for microscopic motion
US7319336B2 (en) * 2004-02-23 2008-01-15 Zyvex Instruments, Llc Charged particle beam device probe operation
US7326293B2 (en) 2004-03-26 2008-02-05 Zyvex Labs, Llc Patterned atomic layer epitaxy
US7009188B2 (en) * 2004-05-04 2006-03-07 Micron Technology, Inc. Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same
CN1977350B (en) * 2004-06-03 2010-10-06 埃美格科学仪器公司 Laser atom probe methods
US8723144B2 (en) * 2004-07-14 2014-05-13 Applied Materials Israel, Ltd. Apparatus for sample formation and microanalysis in a vacuum chamber
US7180061B2 (en) * 2004-09-29 2007-02-20 International Business Machines Corporation Method for electron beam-initiated coating for application of transmission electron microscopy
US7196338B2 (en) * 2005-03-31 2007-03-27 Texas Instruments Incorporated Ultra-thin sample preparation for transmission electron microscopy
US20100152052A1 (en) * 2005-07-28 2010-06-17 Goodman Steven L Specimens for microanalysis processes
GB2438241A (en) * 2006-05-16 2007-11-21 Secretary Trade Ind Brit Machining of microstructures
US20080078745A1 (en) * 2006-09-29 2008-04-03 Zyvex Corporation RF Coil Plasma Generation
US20080078506A1 (en) * 2006-09-29 2008-04-03 Zyvex Corporation RF Coil Plasma Generation
US8357913B2 (en) 2006-10-20 2013-01-22 Fei Company Method and apparatus for sample extraction and handling
JP5959139B2 (en) 2006-10-20 2016-08-02 エフ・イ−・アイ・カンパニー Method for analyzing S / TEM samples
US8288740B2 (en) * 2008-06-27 2012-10-16 Omniprobe, Inc. Method for preparing specimens for atom probe analysis and specimen assemblies made thereby
US8740209B2 (en) * 2012-02-22 2014-06-03 Expresslo Llc Method and apparatus for ex-situ lift-out specimen preparation
US9201112B2 (en) 2013-12-09 2015-12-01 International Business Machines Corporation Atom probe tomography sample preparation for three-dimensional (3D) semiconductor devices
US10614995B2 (en) 2016-06-27 2020-04-07 Cameca Instruments, Inc. Atom probe with vacuum differential
WO2022016502A1 (en) * 2020-07-24 2022-01-27 Yangtze Memory Technologies Co., Ltd. Method of preparing and analyzing thin films
US11808679B2 (en) 2022-01-27 2023-11-07 Expresslo Llc Method and apparatus for cryogenic and environmental controlled specimen handling

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US4060440A (en) 1975-10-28 1977-11-29 R. Jung Ag Fabrik Fur Prazisionsapparate Method of specimen preparation
US4128765A (en) 1976-10-29 1978-12-05 Joseph Franks Ion beam machining techniques and apparatus
US4340815A (en) 1977-11-07 1982-07-20 Ion Tech Limited Preparation of material for examination by transmission electron microscopy techniques
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US5009743A (en) * 1989-11-06 1991-04-23 Gatan Incorporated Chemically-assisted ion beam milling system for the preparation of transmission electron microscope specimens
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US5061850A (en) * 1990-07-30 1991-10-29 Wisconsin Alumni Research Foundation High-repetition rate position sensitive atom probe
JP2774884B2 (en) 1991-08-22 1998-07-09 株式会社日立製作所 Method for separating sample and method for analyzing separated sample obtained by this separation method
US5504366A (en) * 1992-07-17 1996-04-02 Biotechnology Research And Development Corp. System for analyzing surfaces of samples
JP3266995B2 (en) 1993-07-30 2002-03-18 株式会社日立製作所 Method and apparatus for observing and measuring conductive members
BE1007675A3 (en) 1993-10-28 1995-09-12 Philips Electronics Nv Process for the production of preparations intended for an electron microscope.
JP3221797B2 (en) 1994-06-14 2001-10-22 株式会社日立製作所 Sample preparation method and apparatus
US5440124A (en) * 1994-07-08 1995-08-08 Wisconsin Alumni Research Foundation High mass resolution local-electrode atom probe
US5621211A (en) * 1994-09-01 1997-04-15 Spence; John C. H. Scanning tunneling atom-probe microscope
DE29507225U1 (en) 1995-04-29 1995-07-13 Grünewald, Wolfgang, Dr.rer.nat., 09122 Chemnitz Ion beam preparation device for electron microscopy
JP3485707B2 (en) 1996-01-09 2004-01-13 沖電気工業株式会社 Method for preparing flat sample for transmission electron microscope and method for measuring defects by transmission electron microscope
US5788853A (en) 1996-02-29 1998-08-04 International Business Machines Corporation Substrate and method for microscopical observation of amorphous specimens
US5764409A (en) 1996-04-26 1998-06-09 Alpha Innotech Corp Elimination of vibration by vibration coupling in microscopy applications
JP3266814B2 (en) 1996-11-26 2002-03-18 シャープ株式会社 Micro part analyzer
US5922179A (en) 1996-12-20 1999-07-13 Gatan, Inc. Apparatus for etching and coating sample specimens for microscopic analysis
US6188068B1 (en) * 1997-06-16 2001-02-13 Frederick F. Shaapur Methods of examining a specimen and of preparing a specimen for transmission microscopic examination
US5990478A (en) 1997-07-10 1999-11-23 Taiwan Semiconductor Manufacturing Co. Ltd. Method for preparing thin specimens consisting of domains of different materials
TW400554B (en) 1997-07-25 2000-08-01 United Microelectronics Corp The removing method for the thin film layer involved in the semiconductor device
US6042736A (en) 1997-11-17 2000-03-28 Taiwan Semiconductor Manufacturing Co., Ltd. Method for preparing samples for microscopic examination
TW367573B (en) 1998-03-25 1999-08-21 United Microelectronics Corp Preparation method for cutting fixed-location test sheet
US5935870A (en) 1998-05-15 1999-08-10 Taiwan Semiconductor Manufacturing Company, Ltd. Top view TEM sample preparation method
TW430871B (en) 1998-06-18 2001-04-21 United Microelectronics Corp Method for milling test piece of transmission electron microscope
US6194720B1 (en) 1998-06-24 2001-02-27 Micron Technology, Inc. Preparation of transmission electron microscope samples
US6140652A (en) 1998-09-09 2000-10-31 Intersil Corporation Device containing sample preparation sites for transmission electron microscopic analysis and processes of formation and use
US6140603A (en) 1999-03-31 2000-10-31 Taiwan Semiconductor Manufacturing Co., Ltd Micro-cleavage method for specimen preparation
US6188072B1 (en) 1999-06-08 2001-02-13 Mosel Vitelic Inc. Apparatus for extracting TEM specimens of semiconductor devices
JP4323655B2 (en) * 2000-01-25 2009-09-02 新日本製鐵株式会社 Method for preparing needle-shaped sample for field ion microscope observation
AU2001263285A1 (en) * 2000-05-19 2001-12-03 Imago Scientific Instruments Methods of sampling specimens for microanalysis

Also Published As

Publication number Publication date
WO2001090761A2 (en) 2001-11-29
WO2001090761A3 (en) 2002-05-30
US20010044156A1 (en) 2001-11-22
US6700121B1 (en) 2004-03-02
US6576900B2 (en) 2003-06-10

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