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AU2000261101A1 - Methods for replication, replicated articles, and replication tools - Google Patents

Methods for replication, replicated articles, and replication tools

Info

Publication number
AU2000261101A1
AU2000261101A1 AU2000261101A AU6110100A AU2000261101A1 AU 2000261101 A1 AU2000261101 A1 AU 2000261101A1 AU 2000261101 A AU2000261101 A AU 2000261101A AU 6110100 A AU6110100 A AU 6110100A AU 2000261101 A1 AU2000261101 A1 AU 2000261101A1
Authority
AU
Australia
Prior art keywords
replication
methods
tools
replicated articles
replicated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2000261101A
Inventor
Gerald M. Benson
Haiyan Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of AU2000261101A1 publication Critical patent/AU2000261101A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005Separation of the coating from the substrate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/84Manufacture, treatment, or detection of nanostructure
    • Y10S977/89Deposition of materials, e.g. coating, cvd, or ald
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/84Manufacture, treatment, or detection of nanostructure
    • Y10S977/89Deposition of materials, e.g. coating, cvd, or ald
    • Y10S977/891Vapor phase deposition
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Chemical Vapour Deposition (AREA)
AU2000261101A 2000-03-10 2000-07-19 Methods for replication, replicated articles, and replication tools Abandoned AU2000261101A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/522,388 US6641767B2 (en) 2000-03-10 2000-03-10 Methods for replication, replicated articles, and replication tools
US09522388 2000-03-10
PCT/US2000/019634 WO2001068940A1 (en) 2000-03-10 2000-07-19 Methods for replication, replicated articles, and replication tools

Publications (1)

Publication Number Publication Date
AU2000261101A1 true AU2000261101A1 (en) 2001-09-24

Family

ID=24080660

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2000261101A Abandoned AU2000261101A1 (en) 2000-03-10 2000-07-19 Methods for replication, replicated articles, and replication tools

Country Status (6)

Country Link
US (1) US6641767B2 (en)
EP (1) EP1290240A1 (en)
JP (1) JP2003527263A (en)
KR (1) KR100700343B1 (en)
AU (1) AU2000261101A1 (en)
WO (1) WO2001068940A1 (en)

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US7785098B1 (en) 2001-06-05 2010-08-31 Mikro Systems, Inc. Systems for large area micro mechanical systems
CA2448736C (en) 2001-06-05 2010-08-10 Mikro Systems, Inc. Methods for manufacturing three-dimensional devices and devices created thereby
US6875695B2 (en) * 2002-04-05 2005-04-05 Mems Optical Inc. System and method for analog replication of microdevices having a desired surface contour
US7105809B2 (en) 2002-11-18 2006-09-12 3M Innovative Properties Company Microstructured polymeric substrate
US7357886B2 (en) * 2003-10-31 2008-04-15 Groth Lauren A Singular molded and co-molded electronic's packaging pre-forms
TWI286272B (en) * 2004-01-16 2007-09-01 Hon Hai Prec Ind Co Ltd Manufacturing method of a cavity
US20060087231A1 (en) * 2004-10-27 2006-04-27 Eastman Kodak Company Self-cleaning area illumination system
US20060105152A1 (en) * 2004-11-12 2006-05-18 Eastman Kodak Company Flexible sheet for resistive touch screen
US20060105148A1 (en) * 2004-11-12 2006-05-18 Eastman Kodak Company Article with patterned layer on surface
US7160583B2 (en) 2004-12-03 2007-01-09 3M Innovative Properties Company Microfabrication using patterned topography and self-assembled monolayers
US20060138694A1 (en) * 2004-12-23 2006-06-29 Biernath Rolf W Method of making a polymeric film having structured surfaces via replication
US20060204720A1 (en) * 2004-12-23 2006-09-14 Biernath Rolf W Uniaxially oriented birefringent article having a structured surface
US20060141219A1 (en) * 2004-12-23 2006-06-29 Benson Olester Jr Roll of a uniaxially oriented article having a structured surface
US20060141218A1 (en) * 2004-12-23 2006-06-29 Biernath Rolf W Uniaxially oriented articles having structured surface
US20060141220A1 (en) * 2004-12-23 2006-06-29 Merrill William W Uniaxially oriented article having a structured surface
US20060138702A1 (en) * 2004-12-23 2006-06-29 Biernath Rolf W Method of making uniaxially oriented articles having structured surfaces
US20060170808A1 (en) * 2005-02-02 2006-08-03 Biernath Rolf W Article having a birefringent surface for use as a blur filter
US20060170797A1 (en) * 2005-02-02 2006-08-03 Biernath Rolf W Article having a birefringent surface for use as a blur filter
US7651863B2 (en) * 2005-07-14 2010-01-26 3M Innovative Properties Company Surface-enhanced spectroscopic method, flexible structured substrate, and method of making the same
US20070014997A1 (en) * 2005-07-14 2007-01-18 3M Innovative Properties Company Tool and method of making and using the same
US7906057B2 (en) * 2005-07-14 2011-03-15 3M Innovative Properties Company Nanostructured article and method of making the same
US20070065636A1 (en) * 2005-08-04 2007-03-22 Merrill William W Article having a birefringent surface and microstructured features having a variable pitch or angles and process for making the article
US7418202B2 (en) * 2005-08-04 2008-08-26 3M Innovative Properties Company Article having a birefringent surface and microstructured features having a variable pitch or angles for use as a blur filter
WO2007075803A2 (en) * 2005-12-21 2007-07-05 3M Innovative Properties Company Highly water repellent fluoropolymer coating
US8354160B2 (en) 2006-06-23 2013-01-15 3M Innovative Properties Company Articles having durable hydrophobic surfaces
US9134471B2 (en) 2006-06-28 2015-09-15 3M Innovative Properties Company Oriented polymeric articles and method
IL178239A (en) * 2006-09-21 2012-02-29 Eduard Bormashenko Method of manufacturing superhydrophobic nanotextured polymer or metal surfaces
CA2567936C (en) 2006-11-14 2016-01-05 Atomic Energy Of Canada Limited Device and method for surface replication
US20100034335A1 (en) * 2006-12-19 2010-02-11 General Electric Company Articles having enhanced wettability
US20080178436A1 (en) * 2007-01-25 2008-07-31 3M Innovative Properties Company Fastener webs with microstructured particles and methods of making same
WO2008123996A1 (en) * 2007-04-02 2008-10-16 The Trustees Of The University Of Pennsylvania Randomly collapsed nanostructures and uses thereof
US20090114618A1 (en) * 2007-06-21 2009-05-07 3M Innovative Properties Company Method of making hierarchical articles
US20080315459A1 (en) * 2007-06-21 2008-12-25 3M Innovative Properties Company Articles and methods for replication of microstructures and nanofeatures
US20090041986A1 (en) * 2007-06-21 2009-02-12 3M Innovative Properties Company Method of making hierarchical articles
KR100898124B1 (en) * 2007-08-01 2009-05-18 포항공과대학교 산학협력단 Fabricating Method of 3D Shape Structure Having Hydrophobic Inner Surface
US7891636B2 (en) 2007-08-27 2011-02-22 3M Innovative Properties Company Silicone mold and use thereof
DE102008035866A1 (en) * 2008-06-13 2009-12-17 Rheinische Friedrich-Wilhelms-Universität Bonn Method of making a replica of a functional surface
EP2559535A3 (en) 2008-09-26 2016-09-07 Mikro Systems Inc. Systems, devices, and/or methods for manufacturing castings
EP2563848B1 (en) 2010-04-28 2020-08-26 3M Innovative Properties Company Silicone-based material
EP2563865B1 (en) 2010-04-28 2016-06-01 3M Innovative Properties Company Articles including nanosilica-based primers for polymer coatings and methods
EP2404739A1 (en) 2010-07-09 2012-01-11 3M Innovative Properties Co. Durable hyrophobic structured surface
US9285584B2 (en) 2010-10-06 2016-03-15 3M Innovative Properties Company Anti-reflective articles with nanosilica-based coatings and barrier layer
EP2500009A1 (en) 2011-03-17 2012-09-19 3M Innovative Properties Company Dental ceramic article, process of production and use thereof
DE102011114832A1 (en) * 2011-10-05 2013-04-11 Eads Deutschland Gmbh RIBBON FILM AND METHOD FOR THE PRODUCTION THEREOF
US8813824B2 (en) 2011-12-06 2014-08-26 Mikro Systems, Inc. Systems, devices, and/or methods for producing holes
CN103464686B (en) * 2013-09-27 2016-04-27 无锡市众鑫机械制造有限公司 A kind of mould

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US5280084A (en) 1988-04-12 1994-01-18 Pp Polymer Ab Process for improving the hydrophilic properties on polymer surfaces
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US5223350A (en) * 1988-07-15 1993-06-29 Toshiba Tungaloy Co., Ltd. Mold material for molding of an optical part and process for producing the same
US4997678A (en) * 1989-10-23 1991-03-05 Cvd Incorporated Chemical vapor deposition process to replicate the finish and figure of preshaped structures
US5077870A (en) 1990-09-21 1992-01-07 Minnesota Mining And Manufacturing Company Mushroom-type hook strip for a mechanical fastener
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CA2059733C (en) 1991-01-23 1999-10-05 Kazufumi Ogawa Water- and oil-repelling film and method of manufacturing the same
US5728446A (en) 1993-08-22 1998-03-17 Johnston; Raymond P. Liquid management film for absorbent articles
JP3774904B2 (en) 1994-01-27 2006-05-17 住友電気工業株式会社 Method for synthesizing flat diamond film, diamond free-standing film, and polishing method for diamond film
JPH07316546A (en) 1994-05-23 1995-12-05 Matsushita Electric Ind Co Ltd Water-repellent surface structure and method for forming the same
US5518780A (en) 1994-06-16 1996-05-21 Ford Motor Company Method of making hard, transparent amorphous hydrogenated boron nitride films
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US5674592A (en) 1995-05-04 1997-10-07 Minnesota Mining And Manufacturing Company Functionalized nanostructured films
EP0748775A3 (en) 1995-05-30 1998-11-25 Central Glass Company, Limited Water-repellent glass plate having minutely roughed metal-oxide base film
US5759230A (en) 1995-11-30 1998-06-02 The United States Of America As Represented By The Secretary Of The Navy Nanostructured metallic powders and films via an alcoholic solvent process
CA2244922A1 (en) 1996-02-20 1997-08-28 Minnesota Mining And Manufacturing Company Dew-resistant retroreflective traffic sign having a textured glass surface
US5766784A (en) 1996-04-08 1998-06-16 Battelle Memorial Institute Thin films and uses
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US5976686A (en) 1997-10-24 1999-11-02 3M Innovative Properties Company Diffuse reflective articles
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US6042758A (en) * 1998-05-05 2000-03-28 Cvd, Inc. Precision replication by chemical vapor deposition
US6136243A (en) * 1998-06-04 2000-10-24 Case Western Reserve University Method for molding high precision components
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US6385997B1 (en) * 2000-05-12 2002-05-14 Eastman Kodak Company Method for forming a tool for molding microlens arrays

Also Published As

Publication number Publication date
KR100700343B1 (en) 2007-03-29
WO2001068940A1 (en) 2001-09-20
EP1290240A1 (en) 2003-03-12
JP2003527263A (en) 2003-09-16
KR20020092379A (en) 2002-12-11
US20030157347A1 (en) 2003-08-21
US6641767B2 (en) 2003-11-04

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