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ATE58801T1 - METHOD OF MAKING A THICK DIELECTRIC ON THE BOTTOM SIDE OF A PIT FOR INTEGRATED CIRCUITS. - Google Patents

METHOD OF MAKING A THICK DIELECTRIC ON THE BOTTOM SIDE OF A PIT FOR INTEGRATED CIRCUITS.

Info

Publication number
ATE58801T1
ATE58801T1 AT86904672T AT86904672T ATE58801T1 AT E58801 T1 ATE58801 T1 AT E58801T1 AT 86904672 T AT86904672 T AT 86904672T AT 86904672 T AT86904672 T AT 86904672T AT E58801 T1 ATE58801 T1 AT E58801T1
Authority
AT
Austria
Prior art keywords
pit
making
integrated circuits
bottom side
thick dielectric
Prior art date
Application number
AT86904672T
Other languages
German (de)
Inventor
William Thomas Lynch
Thomas Edward Seidel
Original Assignee
American Telephone & Telegraph
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/758,797 external-priority patent/US4643804A/en
Application filed by American Telephone & Telegraph filed Critical American Telephone & Telegraph
Application granted granted Critical
Publication of ATE58801T1 publication Critical patent/ATE58801T1/en

Links

AT86904672T 1985-07-25 1986-07-09 METHOD OF MAKING A THICK DIELECTRIC ON THE BOTTOM SIDE OF A PIT FOR INTEGRATED CIRCUITS. ATE58801T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US06/758,797 US4643804A (en) 1985-07-25 1985-07-25 Forming thick dielectric at the bottoms of trenches utilized in integrated-circuit devices
EP86904672A EP0231274B1 (en) 1985-07-25 1986-07-09 Forming thick dielectric at the bottoms of trenches utilized in integrated-circuit devices
PCT/US1986/001472 WO1987000684A1 (en) 1985-07-25 1986-07-09 Forming thick dielectric at the bottoms of trenches utilized in integrated-circuit devices

Publications (1)

Publication Number Publication Date
ATE58801T1 true ATE58801T1 (en) 1990-12-15

Family

ID=27229810

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86904672T ATE58801T1 (en) 1985-07-25 1986-07-09 METHOD OF MAKING A THICK DIELECTRIC ON THE BOTTOM SIDE OF A PIT FOR INTEGRATED CIRCUITS.

Country Status (1)

Country Link
AT (1) ATE58801T1 (en)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee