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ATE56537T1 - LENGTH MEASURING DEVICE ACCORDING TO THE TWO-BEAM LASER INTERFEROMETER PRINCIPLE. - Google Patents

LENGTH MEASURING DEVICE ACCORDING TO THE TWO-BEAM LASER INTERFEROMETER PRINCIPLE.

Info

Publication number
ATE56537T1
ATE56537T1 AT84108100T AT84108100T ATE56537T1 AT E56537 T1 ATE56537 T1 AT E56537T1 AT 84108100 T AT84108100 T AT 84108100T AT 84108100 T AT84108100 T AT 84108100T AT E56537 T1 ATE56537 T1 AT E56537T1
Authority
AT
Austria
Prior art keywords
length
light beam
laser
measuring
length measuring
Prior art date
Application number
AT84108100T
Other languages
German (de)
Inventor
Rudolf Manfred Roeth
Claus Werckmeister
Original Assignee
Dimetec Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6204048&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE56537(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Dimetec Gmbh & Co Kg filed Critical Dimetec Gmbh & Co Kg
Application granted granted Critical
Publication of ATE56537T1 publication Critical patent/ATE56537T1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Length measuring apparatus with position sensor (12), in accordance with the dual beam laser interferometer principle, having a laser light source (16) supplied by a power source (48), a beam splitter (18) disposed in its optical axis for dividing the light beam into a measuring light beam and a reference light beam aligned at an angle thereto, a movable mirror (19) joined to the position sensor and reflecting the measuring light beam parallel to the optical axis with a transverse offset, and an at least partially reflecting additional optical element (20). This optical element (20) can be either in the form of a second mirror or in the form of a second beam splitter. In the area of interference of the beam paths lies at least one photodetector (21) whose output or outputs are connected to an evaluating circuit (37) which has a counting system for counting the light/dark sequences including a detection of direction of movement, and to a digital display system (3). In accordance with the invention, the laser light source is a laser diode (16 ) for the production of laser light which is essentially monomodal both laterally, transversely and longitudinally and has a coherence length that corresponds at least to the length to be measured. The evaluation circuit (37) also has at least one system for eliminating the influences of operational and environmental parameters of the length measuring apparatus. The apparatus is extraordinarily compact, and easy to learn to operate as regards signal processing and regulation. It is consequently suitable both for manual measuring devices (gauges) and for machine devices.
AT84108100T 1983-07-15 1984-07-11 LENGTH MEASURING DEVICE ACCORDING TO THE TWO-BEAM LASER INTERFEROMETER PRINCIPLE. ATE56537T1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3325549 1983-07-15
EP84108100A EP0135000B1 (en) 1983-07-15 1984-07-11 Device for measuring length according to the double-gap laser interferometer principle

Publications (1)

Publication Number Publication Date
ATE56537T1 true ATE56537T1 (en) 1990-09-15

Family

ID=6204048

Family Applications (1)

Application Number Title Priority Date Filing Date
AT84108100T ATE56537T1 (en) 1983-07-15 1984-07-11 LENGTH MEASURING DEVICE ACCORDING TO THE TWO-BEAM LASER INTERFEROMETER PRINCIPLE.

Country Status (5)

Country Link
US (1) US4643577A (en)
EP (1) EP0135000B1 (en)
JP (1) JPS6085302A (en)
AT (1) ATE56537T1 (en)
DE (1) DE3483191D1 (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816744A (en) * 1987-05-18 1989-03-28 Laser Metric Systems, Inc. Method and device for measuring inside diameters using a laser interferometer and capacitance measurements
JPH0198902A (en) * 1987-10-12 1989-04-17 Res Dev Corp Of Japan Light wave interference length measuring instrument
AT390325B (en) * 1988-03-11 1990-04-25 Tabarelli Werner INTERFEROMETRIC DEVICE FOR MEASURING CHANGES IN POSITION OF A MOVING COMPONENT
US4924477A (en) * 1989-01-24 1990-05-08 Eastman Kodak Company Assembly and method for determining the coefficient of thermal expansion of a workpiece
DE3911473A1 (en) * 1989-04-08 1990-10-11 Kerner Anna WAVELENGTH STABILIZATION
JPH0749923B2 (en) * 1989-05-31 1995-05-31 大日本スクリーン製造株式会社 Unit converter for laser length measuring equipment
DE3920716C1 (en) * 1989-06-24 1990-11-29 Wild Leitz Gmbh, 6330 Wetzlar, De
JP2851306B2 (en) * 1989-07-20 1999-01-27 旭光学工業株式会社 Table transfer system
GB8920448D0 (en) * 1989-09-09 1989-10-25 Renishaw Plc Apparatus for adjusting the alignment of a light beam
US5287166A (en) * 1990-07-20 1994-02-15 Konica Corporation Displacement meter with stared displacement values
DE9011381U1 (en) * 1990-08-03 1990-11-29 Mesacon Gesellschaft für Meßtechnik mbH, 4600 Dortmund Optical device, in particular for measuring the speed of a moving surface by means of a laser measuring light beam
DE4033253A1 (en) * 1990-10-19 1992-04-23 Hommelwerke Gmbh Optical interferometer with DC laser diode - has current supply varied to maintain constant output strip frequency
NL9100215A (en) * 1991-02-07 1992-09-01 Asm Lithography Bv Apparatus for the repetitive imaging of a mask pattern on a substrate.
JPH0513297A (en) * 1991-07-09 1993-01-22 Nikon Corp Aligning apparatus
DE4209260C2 (en) * 1992-03-21 1995-04-06 Hommelwerke Gmbh Device for measuring length
US5469260A (en) * 1992-04-01 1995-11-21 Nikon Corporation Stage-position measuring apparatus
US5940180A (en) * 1994-10-11 1999-08-17 Giddings & Lewis Laser interferometer measurement system for use with machine tools
US5552888A (en) * 1994-12-02 1996-09-03 Nikon Precision, Inc. Apparatus for measuring position of an X-Y stage
US5920392A (en) * 1996-01-17 1999-07-06 Excel Precision, Inc. Environmental parameter measurement device and method for laser interferometry
US6111643A (en) * 1997-10-28 2000-08-29 Reliance Electric Industrial Company Apparatus, system and method for determining wear of an article
US7551288B1 (en) 1997-10-28 2009-06-23 Rockwell Automation Technologies, Inc. System for monitoring bearing wear
US6687013B2 (en) * 2000-03-28 2004-02-03 Hitachi, Ltd. Laser interferometer displacement measuring system, exposure apparatus, and electron beam lithography apparatus
US6842286B2 (en) * 2002-09-03 2005-01-11 Agilent Technologies, Inc. Optical system and methods that compensate for changes in atmospheric conditions
DE102005000060A1 (en) * 2005-05-12 2006-11-16 Hilti Ag Manageable surface coordinate measuring device
US20070103550A1 (en) * 2005-11-09 2007-05-10 Frank Michael L Method and system for detecting relative motion using one or more motion sensors
EP2037214A1 (en) * 2007-09-14 2009-03-18 Leica Geosystems AG Method and measuring device for measuring surfaces
US20130265583A1 (en) * 2012-04-06 2013-10-10 Teledyne Scientific & Imaging, Llc Fiber optic position sensing system
DE102014105154A1 (en) * 2014-04-11 2015-10-15 Mhwirth Gmbh Method for detecting the position and / or movement of a piston in a cylinder and cylinder arrangement

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1773346A1 (en) * 1968-05-03 1973-02-01 Optomechanisms Inc DEVICE FOR CORRECTING CHANGES IN THE ENVIRONMENTAL CONDITIONS OF AN OPTICAL INTERFEROMETER
US3588254A (en) * 1968-09-13 1971-06-28 Gen Electric Frequency control for tunable laser utilized in a position control system
US3661463A (en) * 1970-03-05 1972-05-09 Kearney & Trecker Corp Single interferometer multiple axis laser measuring system
DE2234146C2 (en) * 1972-07-12 1984-03-29 Hommelwerke GmbH, 7730 Villingen-Schwenningen Electrical length measurement device with temp. compensation - has auxiliary length, temp. sensors and standard length for additional compensation
FR2198636A5 (en) * 1972-09-06 1974-03-29 France Etat
US4215938A (en) * 1978-09-28 1980-08-05 Farrand Industries, Inc. Method and apparatus for correcting the error of a position measuring interferometer
US4311390A (en) * 1979-02-27 1982-01-19 Optimetrix Corporation Interferometrically controlled stage with precisely orthogonal axes of motion
JPS5660306A (en) * 1979-10-23 1981-05-25 Mitsutoyo Mfg Co Ltd Laser interferometer and its measuring method
JPS5743485A (en) * 1980-08-13 1982-03-11 Agency Of Ind Science & Technol Semiconductor ring laser device
DE3069083D1 (en) * 1980-12-02 1984-10-04 Heidenhain Gmbh Dr Johannes Process for incrementally measuring geometrical dimensions, and devices to perform the process
DE3124357C2 (en) * 1981-06-20 1983-07-07 Daimler-Benz Ag, 7000 Stuttgart Length measuring device

Also Published As

Publication number Publication date
EP0135000B1 (en) 1990-09-12
US4643577A (en) 1987-02-17
DE3483191D1 (en) 1990-10-18
EP0135000A3 (en) 1986-12-30
JPS6085302A (en) 1985-05-14
EP0135000A2 (en) 1985-03-27

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee
RZN Patent revoked